CN111645212A - Crystal bar fixed angle bonding machine and fixed angle bonding method thereof - Google Patents
Crystal bar fixed angle bonding machine and fixed angle bonding method thereof Download PDFInfo
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- CN111645212A CN111645212A CN202010602894.7A CN202010602894A CN111645212A CN 111645212 A CN111645212 A CN 111645212A CN 202010602894 A CN202010602894 A CN 202010602894A CN 111645212 A CN111645212 A CN 111645212A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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Abstract
The invention provides a crystal bar fixed angle bonding machine and a fixed angle bonding method thereof, and belongs to the technical field of semiconductor equipment. The problems that the angle fixing and the bonding precision of an existing crystal bar and a material plate are not high are solved. The crystal bar fixed-angle bonding machine comprises a workbench, an emitting and receiving mechanism of an X-ray light path and a scanning frame, wherein a correction reference vertical plate is arranged on the scanning frame, a flexible sucking disc is arranged on the correction reference vertical plate, and a pressing block is arranged on the scanning frame. The method comprises the following steps: A. fixing a material plate on a scanning frame and placing crystal bars on the material plate; B. the flexible sucker adsorbs and clings the crystal bar to the correcting reference vertical plate, the pressing block presses the crystal bar tightly, the scanning frame is rotated, signals received by the transmitting and receiving mechanism of the X-ray light path are processed and compared with a preset value to obtain a compensation angle, the pressing block moves upwards, the correcting reference vertical plate rotates and drives the crystal bar to cling to the upper surface of the material plate to rotate by the compensation angle, and angle fixing is completed; and (5) bonding the crystal bar with the material plate by using glue.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and relates to a crystal bar fixed angle bonding machine and a fixed angle bonding method thereof.
Background
The crystal oscillator is an essential element of the digital circuit and provides a clock reference for the digital circuit. The quartz crystal wafer inside the crystal oscillator is made by cutting a crystal bar. A very important fixed-angle bonding process is carried out before the crystal bar is cut, the specific process is that the angle between the external processing surface and the oriented atomic surface of the crystal bar is measured through X-ray diffraction, and then the crystal bar is bonded on a material plate in a correct angle posture. The purpose of the fixed-angle bonding process is to make the included angle between the cut surface of the cut wafer and the oriented atomic plane (referred to as the wafer angle for short) within a specified angle interval. The temperature-frequency characteristics of the crystal oscillator are determined by the different angles of the wafers with different frequencies and the errors of the angles.
In the prior art, like a crystal bar fixed angle splicing machine disclosed in reference 201620999397.4, in this machine, be equipped with sizing platform, X-ray emitter and X-ray receiver on the workstation, be located the sizing platform top and be equipped with the motor mount pad, the motor mount pad passes through the servo motor and drives and can reciprocate, is equipped with the rotating electrical machines on the motor mount pad, is connected with anchor clamps on the rotating electrical machines. The specific working process is as follows: the material plate is clamped and fixed on the material bonding platform, the crystal bar is placed under the clamp and clamped by the clamp, the X-ray emitter and the X-ray receiver start to work and send detected information to the control center, the control center controls the rotary motor to drive the clamp to rotate and correct the angle of the crystal bar relative to the material plate until the X-ray receiver receives a diffraction signal to complete angle fixing, and the servo motor drives the whole motor mounting seat to move downwards together with the rotary motor and the clamp until the crystal bar is contacted with the material plate, so that material bonding is completed.
This prior art has the following drawbacks: the machine is an open-loop system from angle measurement to final bonding and positioning, a crystal bar is clamped in the air by a clamp in the angle fixing process, the upper side surface of the crystal bar is attached to the clamp after the crystal bar is clamped by the clamp, namely, the upper side surface of the crystal bar is abutted to a reference surface on the clamp, but absolute parallelism is difficult to guarantee due to the fact that the upper side surface and the lower side surface of the crystal bar are connected, and the upper surface of a material plate is used as the reference surface when the crystal bar is bonded, so that after the clamp moves downwards to drive the crystal bar to descend, the lower side surface of the crystal bar is difficult to be attached to the upper surface of the material plate, the clamp needs to manually press and hold the crystal bar after releasing the crystal bar, the crystal bar and the material plate are bonded together through glue, and glue is finally cured for a certain time, so that the angle between the final crystal bar and the material plate is deviated from. Meanwhile, due to the limitation of the precision of the device, the position of the crystal bar may deviate to a certain extent in the downward moving process after the angle is fixed, the precision of the angle between the crystal bar and the material plate needs to reach the order of angular seconds, the precision requirement is very high, and then the precision of the subsequent cutting process is seriously influenced. In summary, since the angle-fixing bonding machine is an open-loop system, the precision of the attitude angle between the crystal bar and the material plate cannot be guaranteed due to errors of various factors in the process, so that the precision of the angle of the cut wafer is poor.
In order to improve the precision of angle fixing and bonding, the conventional method is as follows: the equipment precision of the driving device for driving the clamp to move up and down is improved, a large amount of research and development cost is required to be invested, and the whole driving device is composed of a servo motor and a screw rod and nut mechanism, so that the whole driving device is almost impossible to be made to be high in precision due to the limitation of the prior art.
Disclosure of Invention
The invention aims to provide a crystal bar fixed angle bonding machine and a fixed angle bonding method thereof aiming at the problems in the prior art, and aims to solve the problems that the existing crystal bar and a material plate are low in fixed angle and bonding precision.
The purpose of the invention can be realized by the following technical scheme: a crystal bar fixed-angle bonding machine comprises a workbench, an emitting and receiving mechanism of an X-ray light path and a scanning frame used for enabling a material plate to be horizontally placed and positioned, wherein the scanning frame is arranged on the workbench and is characterized in that the scanning frame can rotate relative to the workbench, a correction reference vertical plate is arranged on the scanning frame and can rotate relative to the scanning frame, a flexible sucking disc is arranged on the correction reference vertical plate and can adsorb crystal bars placed on the material plate and enable the crystal bars to be attached to a vertical reference surface of the correction reference vertical plate, and a pressing block is arranged on the scanning frame and can tightly press the crystal bars on the material plate.
The transmitting and receiving mechanism of the X-ray light path of the crystal bar fixed angle bonding machine comprises an X-ray box, a monochromator and a counting tube, and is of an existing structure. The preset value of the standard angle between the material plate and the crystal bar is preset on the crystal bar fixed-angle splicing machine, the scanning frame is provided with a clamp, the material plate is clamped and fixed on the clamp, the crystal bar is placed on the material plate and is close to the correction reference vertical plate, the flexible sucker can adsorb the crystal bar along the horizontal direction and enables the side face of the crystal bar to be attached to the vertical reference face of the correction reference vertical plate, and the pressing block presses the crystal bar downwards to enable the bottom face of the crystal bar to be abutted to the upper surface of the material plate and take the bottom face as the final reference. The X-ray tube in the X-ray box generates X-rays, first-order diffraction occurs through a monochromatic piece in the monochromator, the scanning frame rotates to drive the crystal bar and the material plate to rotate together until the X-rays generate second-order diffraction in the crystal bar, the counting tube receives a second-order diffraction signal and then processes the second-order diffraction signal, and the current rotation angle displacement of the material plate and the crystal bar is compared with a preset value to obtain a compensation angle. In the whole scanning process, the whole scanning frame drives the crystal bar to rotate together with the material plate, the crystal bar is attached to the upper surface of the material plate all the time, and relative displacement does not exist between the crystal bar and the material plate. After the compensation angle is obtained, the pressing block moves upwards, the correction reference vertical plate rotates relative to the scanning frame, and the crystal bars are driven to rotate along with the upper surface of the material plate by the correction reference vertical plate to realize correction and angle fixation. In conclusion, in the process of scanning or angle fixing, the upper surface of the flitch is used as a reference surface, no deviation is generated, the angle of the bonding completion is ensured to be the target angle, and the precision of angle fixing and bonding is improved.
Because processing and assembly error exist, the vertical datum plane of the correction datum riser that the crystal bar is leaned on is not absolutely perpendicular from the microcosmic aspect with flitch upper surface, and this makes the crystal bar can only lean on in the perpendicular datum plane to adsorb the positioning process, and can produce little contained angle for flitch upper surface. Can realize correcting through the briquetting pushing down for the crystal bar bottom surface compresses tightly the laminating with the flitch upper surface, and this in-process, the sucking disc can take place micro deformation or has slight clearance between the side of sucking disc and crystal bar. The flexible sucker is broken to release the crystal bar after clinging to the upper surface of the material plate on the bottom surface of the crystal bar, the micro deformation of the flexible sucker is recovered, the flexible sucker adsorbs the side surface of the crystal bar again in a natural state, the pressing block is pressed down again after moving upwards, and the steps are repeated for one time or a plurality of times, so that the final flexible sucker can adsorb the crystal bar in a natural state and reduce or eliminate fine gaps between the flexible sucker and the crystal bar, meanwhile, the bottom surface of the crystal bar is attached to the upper surface of the material plate and serves as a final reference, so that subsequent scanning is carried out by taking the upper surface as the reference, the angle of finishing bonding is ensured to be a target angle, the influence of other factors is avoided, and the precision of final bonding is improved.
Meanwhile, the crystal bar fixed angle bonding machine can rotate the scanning frame again for scanning verification after correcting the fixed angle through the structural design, judge whether the crystal bar is fixed in position according to the verified structure, repeat the steps if the fixed angle is not in position, and bond the crystal bar with the material plate if the fixed angle is in position. Therefore, the crystal bar fixed angle bonding machine can form a closed loop type cyclic correction fixed angle process through scanning, correction, verification and fixed angle bonding, and further improves the precision of fixed angle and bonding. Preferably, the press block is driven by a vertical cylinder.
In the crystal bar fixed angle bonding machine, the flexible sucker is fixed on the correction reference vertical plate, and the flexible sucker is an organ-shaped sucker and can stretch and retract along the direction perpendicular to the plate surface of the correction reference vertical plate. The effect through inertia can contract backward after organ shape sucking disc holds the crystal bar, has a action of drawing backward to the crystal bar in other words organ shape sucking disc for the crystal bar can paste with the perpendicular reference surface of correcting the benchmark riser and lean on mutually, cooperates the pushing down of briquetting, makes the bottom surface of crystal bar paste the upper surface of pasting at the flitch. The piano-shaped sucker is disconnected with gas to release the crystal bar, the crystal bar is adsorbed to the side face of the crystal bar again in a natural state, the pressing block is pressed down again after moving upwards, and the operation is repeated for one time or a plurality of times, so that the final organ-shaped sucker can adsorb the crystal bar in the natural state, the bottom surface of the crystal bar is attached to the upper surface of the material plate and serves as a final reference, subsequent scanning and correction are both based on the surface, the angle of bonding completion is guaranteed to be a target angle, the bonding completion angle is not influenced by other factors, and the final bonding precision is improved.
In the crystal bar fixed angle bonding machine, the correction reference vertical plate is connected with a positioning frame which can slide along the direction perpendicular to the plate surface of the correction reference vertical plate, the flexible sucker is connected to the positioning frame, and when the flexible sucker adsorbs the crystal bar, the positioning frame can retract and enable the crystal bar to be attached to the perpendicular reference surface of the correction reference vertical plate. After the crystal bar is sucked by the flexible sucker, the crystal bar slides through the positioning frame, the crystal bar is pulled backwards, the crystal bar can be attached to the vertical reference surface of the correction reference vertical plate, the pressing of the pressing block is matched, the bottom surface of the crystal bar is attached to the upper surface of the material plate, the flexible sucker is air-off to release the crystal bar, the positioning frame stretches out again after shrinkage, the flexible sucker adsorbs the side surface of the crystal bar again in a natural state, the pressing block is pressed downwards after moving upwards again, the process is repeated for one time or a plurality of times, the crystal bar can be adsorbed by the final flexible sucker in a natural state, meanwhile, the bottom surface of the crystal bar is attached to the upper surface of the material plate, the surface serves as a final reference, subsequent scanning and correction are both based on the reference, the bonding finished angle is guaranteed to be the target angle, the bonding is not influenced by other factors, and the final bonding precision is improved.
The purpose of the invention can be realized by the following technical scheme: a crystal bar fixed-angle bonding method is characterized by comprising the following steps:
A. feeding: horizontally clamping and fixing a material plate on a scanning frame of a crystal bar fixed-angle bonding machine, and then placing the crystal bar on the material plate;
B. correcting and fixing the angle:
b1a flexible sucker on the crystal bar fixed angle bonding machine adsorbs the crystal bar placed on the material plate and enables the crystal bar to be attached to the vertical reference surface of the correction reference vertical plate, a pressing block on the crystal bar fixed angle bonding machine presses the crystal bar down to tightly press the crystal bar on the material plate,
b2rotating the scanning frame to drive the material plate and the crystal bar to rotate together, processing the signals received by the transmitting and receiving mechanism of the X-ray light path, comparing the processed signals with a preset value to obtain a compensation angle,
b3moving the pressing block upwards, correcting the rotation of the reference vertical plate and driving the crystal bar to rotate by the compensation angle along the upper surface of the material plate to complete angle fixing;
C. bonding: and (5) bonding the crystal bar with the material plate by using glue.
The transmitting and receiving mechanism of the X-ray light path comprises an X-ray box, a monochromator and a counting tube, and is of an existing structure. The preset standard position for representing the standard angle between the material plate and the crystal bar is preset on the crystal bar fixed angle bonding machine. According to the method, after a flitch is clamped and fixed on a clamp of a scanning frame, a crystal bar is placed on the flitch, a flexible sucker can adsorb the crystal bar along the horizontal direction, the side face of the crystal bar is attached to the vertical reference face of a correction reference vertical plate, a pressing block is pressed downwards to press the crystal bar, the bottom face of the crystal bar is attached to the upper surface of the flitch and serves as a final reference, and subsequent scanning is also based on the top face. The X-ray tube in the X-ray box generates X-rays, first-order diffraction occurs through a monochromatic piece in the monochromator, the scanning frame rotates to drive the crystal bar and the material plate to rotate together until the X-rays generate second-order diffraction in the crystal bar, the counting tube receives a second-order diffraction signal and then processes the second-order diffraction signal, and the current rotation angle displacement of the material plate and the crystal bar is compared with a preset value to obtain a compensation angle. After the compensation angle is obtained, the pressing block moves upwards, the correction reference vertical plate rotates relative to the scanning frame, and the crystal bars are driven to rotate along with the upper side face of the material plate by the correction reference vertical plate to realize correction and angle fixation. In the method, the scanning process and the correcting process are carried out separately, in the whole scanning process, the whole scanning frame is connected with the crystal bar and the material plate to rotate together, the bottom surface of the crystal bar is always attached to the upper surface of the material plate, and relative displacement does not exist between the bottom surface of the crystal bar and the upper surface of the material plate; in the whole angle fixing correction process, the crystal bar is attached to the upper surface of the flitch and rotates to complete angle fixing, and the crystal bar and the flitch do not have relative displacement. In conclusion, no matter in the scanning or angle fixing process, the bottom surface of the crystal bar and the upper surface of the material plate do not generate relative displacement, the angle fixing cannot generate deviation, and the angle fixing and bonding precision is improved.
Preferably, in the above method for bonding a boule at a constant angle, in step a, the boule is placed on the material plate, and then the side surface of the boule is brought into close contact with the flexible chuck on the leveling reference vertical plate. The side face of the crystal bar is attached to the flexible sucker, and the flexible sucker is enabled to adsorb the crystal bar and lean against the vertical reference face of the vertical correcting vertical plate.
Preferably, in the above method for bonding an ingot at a constant angle, B is the same as that in the step B1The specific operation steps are as follows: the flexible sucker on the correction reference vertical plate generates vacuum suction to suck the crystal bar and pulls the crystal bar along the horizontal direction to enable the crystal bar to be attached to the vertical reference surface of the correction reference vertical plate; meanwhile, a displacement sensor on the correction reference vertical plate detects whether the crystal bar is adsorbed in place, and after the adsorption is detected in place, a pressing block on the scanning frame moves downwards to press the crystal bar on the upper surface of the material plate; after the gas of the flexible sucker is cut off, the flexible sucker operates again to generate vacuum suction to adsorb the crystal bar, and then the pressing block moves upwards; the flexible sucker continuously keeps a vacuum adsorption state, and the pressing block presses down the crystal bar on the material plate again.
Because processing and assembly error exist, the vertical datum plane of the correction datum riser that the crystal bar is leaned on is not absolutely perpendicular from the microcosmic aspect with flitch upper surface, and this makes the crystal bar can only lean on in the perpendicular datum plane to adsorb the positioning process, and can produce little contained angle for flitch upper surface. Can realize correcting through the briquetting pushing down for the crystal bar bottom surface compresses tightly the laminating with the flitch upper surface, and this in-process, the sucking disc can take place micro deformation or has slight clearance between the side of sucking disc and crystal bar. The flexible sucker is broken to release the crystal bar after clinging to the upper surface of the material plate on the bottom surface of the crystal bar, the micro deformation of the flexible sucker is recovered, the flexible sucker adsorbs the side surface of the crystal bar again in a natural state, the pressing block is pressed down again after moving upwards, and the steps are repeated for one time or a plurality of times, so that the final flexible sucker can adsorb the crystal bar in a natural state and reduce or eliminate fine gaps between the flexible sucker and the crystal bar, meanwhile, the bottom surface of the crystal bar is attached to the upper surface of the material plate and serves as a final reference, so that subsequent scanning is carried out by taking the upper surface as the reference, the angle of finishing bonding is ensured to be a target angle, the influence of other factors is avoided, and the precision of final bonding is improved.
In the above-mentioned method for bonding the ingot at a fixed angle,in the step B, the step B is repeated1～b3And repeating the steps until the angle of the crystal bar relative to the material plate reaches the set allowable deviation range. The precision of the angle between the crystal bar and the material plate needs to reach the order of arc seconds, and the precision requirement is very high, so the step b can be selected to be repeated according to the actual fixed angle condition1～b3And a multi-time circulating closed-loop angle fixing mode is formed, so that the angle of the crystal bar relative to the material plate after the angle fixing can be further kept within an allowable deviation range, and the angle fixing and bonding precision is further improved.
Preferably, in the above method for bonding an ingot at a constant angle, in the step C, the position of the ingot at which the angle is fixed in the step B is verified, and the specific verification process includes: and C, pressing the pressing block down again, rotating the scanning rack to perform scanning verification, processing the signals received by the transmitting and receiving mechanism of the X-ray light path, comparing the signals with a preset value, repeating the step B if the signals exceed a set allowable deviation range, and bonding the crystal bar and the material plate by using glue if the signals exceed the set allowable deviation range.
In the method, after the scanning and the angle fixing of the crystal bar are finished in the step B, the scanning frame is rotated again for scanning verification, whether the crystal bar is in place at the angle fixing is further judged according to the verified structure, if the angle fixing is not in place, the step B is repeated, and if the angle fixing is in place, the crystal bar is bonded with the flitch. The method forms a closed loop type circular correction angle fixing process through scanning, correction, verification and angle fixing bonding, and further improves the precision of angle fixing and bonding.
In the step C, after the bonding is completed, according to setting and requirements, if a next crystal bar needs to be bonded to the material plate, the next crystal bar is placed on the material plate, the steps a to C are repeated until all the crystal bars are bonded to the material plate, the material plate is detached from the fixture, and then glue is uniformly applied to the edge of the contact surface between each crystal bar and the material plate so that the glue penetrates into the contact surface between the crystal bar and the material plate, thereby completing the bonding. Through foretell design, can bond many crystal bars on a flitch according to settlement and demand, avoid repeated dismouting flitch, improve the efficiency of work.
Compared with the prior art, the crystal bar fixed angle bonding machine and the fixed angle bonding method thereof have the following advantages:
1. a closed loop type circular correction angle fixing process is formed through multiple times of scanning, correction and verification, so that the precise angle fixing of the crystal bar can be guaranteed, and the precision of angle fixing and bonding is improved.
2. In the whole scanning process, the whole scanning frame is connected with the crystal bar and rotates together with the flitch, the crystal bar is attached to the flitch upper surface all the time, and in the whole angle fixing process of correcting, the crystal bar is attached to the upper surface of the flitch and is rotated to fix the angle, that is to say, no matter in the scanning or the in-process of fixing the angle, the upper surface of the flitch is the reference surface, the deviation can not be produced, the angle of guaranteeing to bond and accomplish is exactly the target angle, and the precision of fixing the angle and bonding is improved.
3. Flexible sucking disc adsorbs, the briquetting pushes down, adsorb again after the flexible sucking disc releases, the process of pushing down again after the briquetting releases can be repeated once or several times as required, guarantee that final flexible sucking disc can adsorb the crystal bar with the state of nature and reduce or eliminate the clearance between flexible sucking disc and the crystal bar, the bottom surface of crystal bar pastes the upper surface of pasting at the flitch and regards this as final benchmark simultaneously, it also uses this as the benchmark to make follow-up scan, the angle of accomplishing in order to guarantee to bond is exactly the target angle, and do not receive other factor influences, and then improve the precision of final bonding.
Drawings
Fig. 1 is a schematic perspective view of a crystal bar fixed angle bonding machine according to a first embodiment.
Fig. 2 is a schematic perspective view of the crystal bar fixed angle bonding machine according to the first embodiment, with the worktable omitted.
Fig. 3 is a schematic perspective view of a first viewing angle at the correction reference riser according to an embodiment.
FIG. 4 is a front view of the structure at the position of the straightening reference riser of the first embodiment.
FIG. 5 is a schematic perspective view of a second viewing angle at the correction reference riser according to an embodiment.
Fig. 6 is a partial sectional view of the structure at a-a in fig. 4.
Fig. 7 is a partial structural cross-sectional view at B-B in fig. 4.
FIG. 8 is a schematic perspective view of a third viewing angle at the correction reference riser according to an embodiment.
Fig. 9 is a cross-sectional view of the structure at C-C in fig. 4.
Fig. 10 is a perspective view of the second embodiment of the present invention.
FIG. 11 is a sectional view of the second embodiment at the position of the straightening reference riser.
In the figure, 1, a direct drive motor is scanned; 2. a scanning gantry; 2a, a turntable; 2b, side plates; 2c, a top plate; 3. a direct drive motor is corrected; 3a, a rotary table; 4. a movable frame; 4a, a clamp; 4a1, a fixed splint; 4a2, moving splint; 5. correcting the reference vertical plate; 5a, a reference convex part; 5b, an abdication gap; 5c, avoiding the notch; 5d, a notch; 5e, a displacement sensor; 6. a positioning frame; 6a, moving the plate; 6a1, mounting holes; 6a2, guide sleeve; 6b, a buffer plate; 6b1, guide post; 6b2, buffer spring; 6b3 and a limiting sheet; 6c, positioning blocks; 6c1, air vents; 6d, connecting blocks; 6e, a connecting plate; 6e1, rear limiting block; 6e2, front limit post; 6f, a horizontal cylinder; 6f1, front limiting block; 7. a flexible suction cup; 7a, an air suction hole; 8. a guide seat; 8a, an installation part; 8a1, rear limit post; 9. a vertical cylinder; 9a, a lifting plate; 9b, pressing blocks; 9c, pressing a plate; 10. a material plate; 11. a work table; 12. an X-ray box; 13. a monochromator; 14. a counting tube; 15. a touch screen.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
Example one
As shown in fig. 1, the crystal bar fixed angle bonding machine comprises a workbench 11, a touch screen 15, an emitting and receiving mechanism of an X-ray optical path, a correcting reference vertical plate 5 and a scanning frame 2 for horizontally placing and positioning a material plate 10, wherein the touch screen 15 is arranged on the workbench 11, and a preset value for indicating a standard angle between the material plate 10 and a crystal bar and an allowable deviation range after angle fixing are preset on the touch screen 15. The emitting and receiving mechanism of the X-ray light path comprises an X-ray box 12, a monochromator 13 and a counting tube 14, wherein the X-ray box 12, the monochromator 13 and the counting tube 14 are all arranged on the workbench 11. The scanning direct drive motor 1 is fixed on the workbench 11, the scanning frame 2 is positioned above the workbench 11 and connected with a rotating shaft of the scanning direct drive motor 1, and the scanning direct drive motor 1 can drive the scanning frame 2 to rotate relative to the workbench 11.
As shown in fig. 1-4, the scanning frame 2 includes a turntable 2a, two side plates 2b and a top plate 2c, the turntable 2a is horizontally disposed and connected to a rotating shaft of the scanning direct drive motor 1, the two side plates 2b are in a strip shape and vertically fixed at edges of two sides of the turntable 2a, and the top plate 2c is fixed at tops of the two side plates 2b, so that the scanning frame 2 is in a rectangular frame shape as a whole, and the scanning direct drive motor 1 can be controlled to operate by the touch screen 15. Be equipped with anchor clamps 4a on scanning frame 2, anchor clamps 4a include along the removal frame 4 of horizontal direction sliding connection on carousel 2a, specifically be the cooperation structural connection through guide rail and slider, this removal frame 4 can carry out the position adjustment through linear motion module drives such as screw-nut subassembly, one side of removal frame 4 is fixed with decides splint 4a1, the opposite side has movable clamp plate 4a2 through bolted connection, can make movable clamp plate 4a2 and decide splint 4a1 press from both sides flitch 10 of putting on removing frame 4 of tight level through bolt adjustment. Be fixed with the correction of inversion on roof 2c and directly drive motor 3, the correction directly drives motor 3 and can pass through the control operation of touch-sensitive screen 15, the output that directly drives motor 3 is being corrected is connected with revolving stage 3a, be fixed with the mount pad on revolving stage 3a, correct 5 vertical settings of benchmark riser and fix on the mount pad, make when removing frame 4 and remove flitch 10 can pass from correcting 5 below of benchmark riser, correct benchmark riser 5 can adopt split type, if including the installation of preceding plate body and the concatenation formation of back plate body laminating mutually, be convenient for processing and other spare parts. There is a locating rack 6 along horizontal direction sliding connection on correcting benchmark riser 5, the moving direction of this locating rack 6 is perpendicular with the face of correcting benchmark riser 5, be connected with a plurality of flexible suction cups 7 at the front end of locating rack 6, a plurality of flexible suction cups 7 can bulge the preceding face of correcting benchmark riser 5 and adsorb the crystal bar, locating rack 6 can withdraw and make the crystal bar press on the perpendicular reference plane of correcting benchmark riser 5 when flexible suction cups 7 adsorb the crystal bar, still there is briquetting 9b along vertical direction sliding connection on correcting benchmark riser 5, briquetting 9b can descend and compress tightly the crystal bar on flitch 10 when flexible suction cups 7 adsorb on the crystal bar and the crystal bar presses on correcting benchmark riser 5.
Specifically, as shown in fig. 5 and 6, the positioning frame 6 includes a moving plate 6a, a buffer plate 6b and two positioning blocks 6c, a horizontal cylinder 6f is horizontally fixed on the rear side surface of the correction reference vertical plate 5, the horizontal cylinder 6f can be controlled by a touch screen 15 to operate, a piston rod of the horizontal cylinder 6f is arranged backward, the moving plate 6a and the buffer plate 6b are both in the shape of a strip plate and are arranged horizontally and in a direction parallel to the correction reference vertical plate 5, the moving plate 6a is positioned on the rear side surface of the correction reference vertical plate 5, a connecting block 6d is fixed on the rear side surface of the moving plate 6a, a connecting plate 6e is fixed on the connecting block 6d, the connecting plate 6e is in the shape of an L, one end of the connecting plate 6e is forward fixed with the side of the connecting block 6d, and the other end extends to the rear side of the horizontal cylinder 6f and is fixed with the, the buffer plate 6b is positioned at the front side of the moving plate 6a, guide posts 6b1 are vertically fixed on the rear side surfaces of both ends of the buffer plate 6b, mounting holes 6a1 are respectively arranged on two sides of the moving plate 6a, guide sleeves 6a2 are fixedly screwed in the mounting holes 6a1, the axial direction of the guide sleeves 6a2 is arranged along the front-back direction, two guide posts 6b1 of the buffer plate 6b are respectively inserted into the two guide sleeves 6a2 of the moving plate 6a in a sliding manner, disc-shaped limiting pieces 6b3 are respectively fixed at the rear ends of the two guide posts 6b1, buffer springs 6b2 are further sleeved on the guide posts 6b1, the rear end of the buffer spring 6b2 extends into the mounting hole 6a1 and abuts against the front end of the guide bush 6a2, the front end of the buffer spring 6b2 abuts against the rear side of the buffer plate 6b, the stopper piece 6b3 abuts against the rear end face of the guide bush 6a2 under the action of the buffer spring 6b2, so that a gap is formed between the buffer plate 6b and the moving plate 6 a. Two positioning blocks 6c are respectively fixed on the front side surfaces of two ends of a buffer plate 6b, rectangular avoidance notches 5c are respectively formed in two ends of the lower edge of a correction reference vertical plate 5, the two positioning blocks 6c respectively penetrate through the two avoidance notches 5c, the flexible suckers 7 are divided into two groups, the two groups of flexible suckers 7 are respectively fixed on the front side surfaces of the two positioning blocks 6c, two groups of reference convex parts 5a protruding forwards are arranged on the lower portion of the front plate surface of the correction reference vertical plate 5, the two groups of reference convex parts 5a are respectively close to the two positioning blocks 6c, the reference convex parts 5a are columnar, the front end surface is a reference surface, and the reference surfaces of the two groups of reference convex parts 5a are coplanar and vertically arranged to form. Referring to fig. 6, the flexible suction cup 7 is horn-shaped and made of rubber material, the positioning block 6c is provided with an air guide hole 6c1 communicated with the air pump, the center of the flexible suction cup 7 is provided with an air suction hole 7a, and the air suction hole 7a is communicated with an air guide hole 6c 1.
As shown in fig. 8, a guide seat 8 is further fixed to the rear side surface of the correction reference vertical plate 5, the guide seat 8 is in a strip plate shape and is disposed rearward along the horizontal direction, the guide seat 8 is located below the horizontal cylinder 6f, the lower edge of the connecting plate 6e abuts against the upper side surface of the guide seat 8, the rear end portion of the guide seat 8 has a mounting portion 8a protruding upward, the connecting plate 6e is located between the horizontal cylinder 6f and the mounting portion 8a, a rear stopper 6e1 is fixed to the connecting plate 6e, a rear stopper 8a1 is screwed to the mounting portion 8a, the rear stopper 8a1 is disposed forward and is opposite to the rear side surface of the rear stopper 6e1, and the rear stopper 6e1 can abut against the rear stopper 8a1 to form a stopper when the positioning frame 6 retracts rearward and the crystal rod abuts against the reference protrusion 5 a. A front limit block 6f1 is fixed on the side of the horizontal cylinder 6f, a front limit post 6e2 is screwed on the rear limit block 6e1, the front limit post 6e2 is arranged forward and is opposite to the rear side of the front limit block 6f1, and when the positioning frame 6 extends forwards for a set distance, the front limit post 6e2 can abut against the front limit block 6f1 to form limit.
As shown in fig. 9, a pressing block 9b is disposed on the scanning frame 2, and the pressing block 9b can press the ingot onto the material plate 10, where the definition of the arrangement is that the arrangement may be a direct connection or an indirect connection, and in this embodiment, the definition is an indirect connection, specifically: still be fixed with the vertical cylinder 9 that sets up down on the mount pad, vertical cylinder 9 is located the rear side of correcting benchmark riser 5, vertical cylinder 9 can pass through the operation of 15 controls of touch-sensitive screen, breach 5b of stepping down has been seted up at the middle part of correcting benchmark riser 5, there is lifter plate 9a along vertical direction sliding connection in the breach 5b of stepping down, vertical cylinder 9's piston rod links firmly with the rear end of lifter plate 9a, briquetting 9b wholly is T shape and is located the front side of correcting benchmark riser 5, briquetting 9 b's upper end links firmly with the front end of lifter plate 9a, the both ends of briquetting 9b downside all are fixed with the pressure disk 9c that sets up down. A displacement sensor 5e is further fixed on the correction reference vertical plate 5, a notch 5d is formed in the middle of the lower edge of the correction reference vertical plate 5, the notch 5d is located below the abdicating notch 5b, and the displacement sensor 5e is arranged forwards and extends into the notch 5 d.
The crystal bar fixed angle bonding method is completed by adopting the crystal bar fixed angle bonding machine, and comprises the following steps:
A. feeding: the flitch 10 is horizontally placed on the clamp 4a of the scanning frame 2 and the bolts on the clamp 4a are tightened so that the flitch 10 is fixed on the clamp 4a, then the crystal bar is placed on the flitch 10, and the side surface of the crystal bar is as close as possible to the flexible sucker 7 on the correction reference vertical plate 5.
B. Correcting and fixing the angle: and clicking an operation button on the touch screen 15 to automatically operate the crystal bar fixed angle bonding machine.
b1The flexible sucker 7 on the correction reference vertical plate 5 generates vacuum suction to suck the crystal bar, and the horizontal cylinder 6f drives the positioning frame 6 to retract backwards, so that the crystal bar is attached to the reference convex parts 5a of the correction reference vertical plate 5, namely, the side surfaces of the crystal bar are attached to the vertical reference surfaces formed by the end surfaces of the reference convex parts 5 a. At the moment, a displacement sensor 5e on the correction reference vertical plate 5 detects whether the crystal bar is adsorbed in place, and after the adsorption is detected in place, a vertical cylinder 9 drives a pressing block 9b to press downwards to press the crystal bar to be tightly attached to the upper surface of the material plate 10; then the flexible sucker 7 is cut off, the positioning frame 6 stretches out again after being contracted, so that the flexible sucker 7 is abutted against the side face of the crystal bar again, the flexible sucker 7 operates again to generate vacuum suction to absorb the crystal bar, and then the pressing block 9b moves upwards; the flexible sucker 7 continuously keeps a vacuum adsorption state, the pressing block 9b presses down the crystal bar again to press the crystal bar on the material plate 10, and the process is repeated for a plurality of times.
b2An X-ray tube in an X-ray box 12 generates X-rays, primary diffraction occurs through a monochromatic sheet in a monochromator 13, a scanning direct drive motor 1 drives all parts on a scanning rack 2 to rotate relative to a workbench 11 until the X-rays generate secondary diffraction in a crystal bar, and a counting tube 14 receives secondary diffraction signals and then passes through a data processing meterAnd calculating the rotation angle of the crystal bar in the current state, and comparing the rotation angle with a preset value to obtain a compensation angle.
b3And the pressing block 9b moves upwards, the correction direct drive motor 3 operates to drive the correction reference vertical plate 5 to rotate relative to the scanning frame 2 and drive the crystal bars attached to the upper surface of the material plate 10 to rotate to the compensation angle. The step b can be selected and repeated according to actual requirements1～b3And (4) repeatedly until the angle of the crystal bar relative to the material plate 10 reaches the set allowable deviation range, and finishing angle fixing.
C. Verifying and bonding:
c1clicking a verification button on the touch screen 15, driving the press block 9B to be pressed down again by the vertical cylinder 9, generating X rays by an X-ray tube in the X-ray box 12, generating first-order diffraction by a monochromator 13, driving all parts on the scanning rack 2 to rotate relative to the workbench 11 by the scanning direct drive motor 1 until the X rays generate second-order diffraction in the crystal bar, calculating a rotation angle of the crystal bar in the current state by the counting tube 14 after receiving a second-order diffraction signal through data processing, comparing the calculated angle with a preset angle value by the touch screen 15, repeating the step B if the difference value between the calculated angle and the preset value exceeds a set allowable deviation range, and bonding the crystal bar with the contact surface of the material plate 10 by glue if the difference value between the obtained angle and the preset value is within the set allowable deviation range.
c2If the next ingot needs to be bonded to the material plate 10 according to the setting and the requirement, the next ingot is placed on the material plate 10, and the step A, B, c is repeated1And after all crystal bars are bonded on the material plate 10, detaching the material plate 10 from the clamp 4a to complete bonding.
The method forms a closed loop type circular correction angle fixing process through multiple times of scanning, correction and verification, can ensure that the crystal bar is accurately fixed in angle, and improves the precision of angle fixing and bonding.
Example two
The structure of the present embodiment is substantially the same as that of the first embodiment, except that: as shown in fig. 10 to 11, the flexible suction cup 7 is fixed on the correction reference vertical plate 5, the flexible suction cup 7 is an organ-shaped suction cup and can extend and retract along a direction perpendicular to the plate surface of the correction reference vertical plate 5, and the vertical cylinder 9 is located at the front side of the correction reference vertical plate 5 and is connected with the pressing block 9 b. The organ-shaped sucker sucks the crystal bar and then contracts backwards under the action of inertia, so that the organ-shaped sucker has a backward pulling action on the crystal bar, the crystal bar can be attached to the vertical reference surface of the correction reference vertical plate 5, and the pressing block 9b is pressed downwards to attach the bottom surface of the crystal bar to the upper surface of the flitch 10. The piano-shaped sucker is broken to release the crystal bar, the crystal bar is adsorbed to the side face of the crystal bar again in a natural state, the pressing block 9b is pressed down again after moving upwards, and the operation is repeated for one time or a plurality of times, so that the final organ-shaped sucker can adsorb the crystal bar in the natural state, the bottom surface of the crystal bar is attached to the upper surface of the material plate 10 and serves as a final reference, subsequent scanning and correction are both based on the surface, the angle of bonding completion is guaranteed to be a target angle, the bonding completion angle is not influenced by other factors, and the final bonding precision is improved.
In this embodiment, the crystal bar fixed angle bonding method is completed by using the crystal bar fixed angle bonding machine, and includes the following steps:
A. feeding: placing the flitch 10 on the clamp 4a of the scanning frame 2 along the horizontal direction and tightening the bolts on the clamp 4a to fix the flitch 10 on the clamp 4a, then placing the crystal bar on the flitch 10 and making the side of the crystal bar close to the flexible sucker 7 on the correcting reference vertical plate 5 as much as possible.
B. Correcting and fixing the angle: and clicking an operation button on the touch screen 15 to automatically operate the crystal bar fixed angle bonding machine.
b1The flexible sucker 7 on the correction reference vertical plate 5 generates vacuum suction to suck the crystal bar, and after the crystal bar is sucked by the flexible sucker 7, the corrugated part can stretch and deform backwards under the action of inertia, so that the crystal bar is equivalently pulled backwards, the crystal bar is attached to the reference convex parts 5a of the correction reference vertical plate 5, and the side surfaces of the crystal bar are attached to the vertical reference surface formed by the end surfaces of the reference convex parts 5 a. At this time, the displacement sensor 5e on the correction reference vertical plate 5 detects whether the crystal bar is adsorbed in place, and after detecting that the crystal bar is adsorbed in place,the vertical cylinder 9 drives the pressing block 9b to press downwards to press the crystal bar to be tightly attached to the upper surface of the material plate 10; then the flexible sucker 7 operates again after the gas is cut off to generate vacuum suction to absorb the crystal bar, and then the pressing block 9b moves upwards; the flexible sucker 7 continuously keeps a vacuum adsorption state, the pressing block 9b presses down the crystal bar again to press the crystal bar on the material plate 10, and the process is repeated for a plurality of times.
b2An X-ray tube in an X-ray box 12 generates X-rays, primary diffraction occurs through a monochromatic sheet in a monochromator 13, a scanning direct drive motor 1 drives all parts on a scanning rack 2 to rotate relative to a workbench 11 until the X-rays generate secondary diffraction in a crystal bar, a counting tube 14 receives secondary diffraction signals and then processes the signals, and a compensation angle is obtained by comparing the current rotation angle displacement of a material plate 10 and the crystal bar with the displacement angle of the crystal bar and the material plate 10 rotating from the initial position to the preset value.
b3And the pressing block 9b moves upwards, the correction direct drive motor 3 operates to drive the correction reference vertical plate 5 to rotate relative to the scanning frame 2 and drive the crystal bars attached to the upper surface of the material plate 10 to rotate to the compensation angle. The step b can be selected and repeated according to actual requirements1～b3And (4) repeatedly until the angle of the crystal bar relative to the material plate 10 reaches the set allowable deviation range, and finishing angle fixing.
C. Verifying and bonding:
c1clicking a verification button on the touch screen 15, driving the pressing block 9B to be pressed down again by the vertical cylinder 9, generating X rays by an X-ray tube in the X-ray box 12, generating first-order diffraction by a monochromatic sheet in the monochromator 13, driving all parts on the scanning rack 2 to rotate relative to the workbench 11 by the scanning direct drive motor 1 until the X rays generate second-order diffraction in the crystal bar, processing the crystal bar after receiving a second-order diffraction signal by the counting tube 14, comparing the current rotation angle displacement of the material plate 10 and the crystal bar with the displacement angle of the crystal bar and the material plate 10 rotating from the initial position to the preset value, repeating the step B if the two displacement angles exceed the allowable deviation range, and bonding the contact surface of the crystal bar and the material plate 10 by glue if the two displacement angles are within the set allowable deviation range.
c2According to the setting and the requirement, if the next crystal bar needs to be adheredAfter the material plate 10 is connected, the next ingot is placed on the material plate 10, and the step A, B, c is repeated1And after all crystal bars are bonded on the material plate 10, detaching the material plate 10 from the clamp 4a to complete bonding.
The method forms a closed loop type circular correction angle fixing process through multiple times of scanning, correction and verification, can ensure that the crystal bar is accurately fixed in angle, and improves the precision of angle fixing and bonding.
EXAMPLE III
The crystal bar fixed angle bonding method is completed by adopting the crystal bar fixed angle bonding machine in the second embodiment, and comprises the following steps:
A. feeding: placing the flitch 10 on the clamp 4a of the scanning frame 2 along the horizontal direction and tightening the bolts on the clamp 4a to fix the flitch 10 on the clamp 4a, then placing the crystal bar on the flitch 10 and making the side of the crystal bar close to the flexible sucker 7 on the correcting reference vertical plate 5 as much as possible.
B. Correcting and fixing the angle: and clicking an operation button on the touch screen 15 to automatically operate the crystal bar fixed angle bonding machine.
b1The flexible sucker 7 on the correction reference vertical plate 5 generates vacuum suction to suck the crystal bar, and after the crystal bar is sucked by the flexible sucker 7, the corrugated part can stretch and deform backwards due to the action of inertia, so that the crystal bar is equivalently pulled backwards, the crystal bar is attached to the reference convex parts 5a of the correction reference vertical plate 5, and the side surfaces of the crystal bar are attached to the vertical reference surface formed by the end surfaces of the reference convex parts 5 a. At the moment, a displacement sensor 5e on the correction reference vertical plate 5 detects whether the crystal bar is adsorbed in place, and after the adsorption is detected in place, a vertical cylinder 9 drives a pressing block 9b to press downwards to press the crystal bar to be tightly attached to the upper surface of the material plate 10; then the flexible sucker 7 operates again after the gas is cut off to generate vacuum suction to absorb the crystal bar, and then the pressing block 9b moves upwards; the flexible sucker 7 continuously keeps a vacuum adsorption state, the pressing block 9b presses down the crystal bar again to press the crystal bar on the material plate 10, and the process is repeated for a plurality of times.
b2An X-ray tube in an X-ray box 12 generates X-rays, first-order diffraction is generated through a monochromatic sheet in a monochromator 13, and a scanning direct-drive motor 1 drivesAll parts on the scanning rack 2 rotate relative to the workbench 11 until X-rays generate secondary diffraction in the crystal bar, the counting tube 14 receives secondary diffraction signals and processes the signals, and a compensation angle is obtained by comparing the current rotation angle displacement of the flitch 10 and the crystal bar with the displacement angle of the crystal bar and the flitch 10 rotating from the initial position to the preset value.
b3And the pressing block 9b moves upwards, the correction direct drive motor 3 operates to drive the correction reference vertical plate 5 to rotate relative to the scanning frame 2 and drive the crystal bars attached to the upper surface of the material plate 10 to rotate to the compensation angle. The step b can be selected and repeated according to actual requirements1～b3And (4) repeatedly until the angle of the crystal bar relative to the material plate 10 reaches the set allowable deviation range, and finishing angle fixing.
C. Verifying and bonding:
c1clicking a verification button on the touch screen 15, driving the pressing block 9B to be pressed down again by the vertical cylinder 9, generating X rays by an X-ray tube in the X-ray box 12, generating first-order diffraction by a monochromatic sheet in the monochromator 13, driving all parts on the scanning rack 2 to rotate relative to the workbench 11 by the scanning direct drive motor 1 until the X rays generate second-order diffraction in the crystal bar, processing the crystal bar after receiving a second-order diffraction signal by the counting tube 14, comparing the current rotation angle displacement of the material plate 10 and the crystal bar with the displacement angle of the crystal bar and the material plate 10 rotating from the initial position to the preset value, repeating the step B if the two displacement angles exceed the set allowable deviation range, and bonding the contact surface of the crystal bar and the material plate 10 by glue if the two displacement angles are within the set allowable deviation range.
The method forms a closed loop type circular correction angle fixing process through multiple times of scanning, correction and verification, can ensure that the crystal bar is accurately fixed in angle, and improves the precision of angle fixing and bonding.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.
Claims (9)
1. A crystal bar fixed-angle bonding machine comprises a workbench (11), an emitting and receiving mechanism of an X-ray light path and a scanning frame (2) used for horizontally placing and positioning a material plate (10), wherein the scanning frame (2) is arranged on the workbench (11), it is characterized in that the scanning frame (2) can rotate relative to the workbench (11), a correction reference vertical plate (5) is arranged on the scanning frame (2), the correction reference vertical plate (5) can rotate relative to the scanning frame (2), the correcting reference vertical plate (5) is provided with a flexible sucker (7), the flexible sucker (7) can adsorb the crystal bar placed on the material plate (10) and make the crystal bar lean against the vertical reference surface of the correcting reference vertical plate (5), and a pressing block (9b) is arranged on the scanning frame (2), and the pressing block (9b) can press the crystal bar on the material plate (10).
2. The crystal bar fixed-angle bonding machine according to claim 1, wherein the correction reference vertical plate (5) is connected with a positioning frame (6) capable of sliding along a direction perpendicular to the plate surface of the correction reference vertical plate (5), the flexible sucker (7) is connected to the positioning frame (6), and when the flexible sucker (7) adsorbs the crystal bar, the positioning frame (6) can retract and enable the crystal bar to be attached to the perpendicular reference surface of the correction reference vertical plate (5).
3. The crystal bar fixed angle bonding machine according to claim 1, wherein the flexible sucker (7) is fixed on the correction reference vertical plate (5), and the flexible sucker (7) is an organ-shaped sucker and can stretch and retract along a direction perpendicular to the plate surface of the correction reference vertical plate (5).
4. A crystal bar fixed-angle bonding method is characterized by comprising the following steps:
A. feeding: horizontally clamping and fixing a material plate (10) on a scanning frame (2) of a crystal bar fixed-angle bonding machine, and then placing the crystal bar on the material plate (10);
B. correcting and fixing the angle:
b1a flexible sucker (7) on the crystal bar fixed angle bonding machine adsorbs the crystal bar placed on the material plate (10) and leads the crystal bar to be bondedWhich is attached to the vertical reference surface of the correcting reference vertical plate (5), a pressing block (9b) on the crystal bar fixed angle bonding machine presses down the crystal bar to press the crystal bar on a material plate (10),
b2the rotating scanning frame (2) drives the material plate (10) and the crystal bar to rotate together, processes the signals received by the transmitting and receiving mechanism of the X-ray light path and compares the processed signals with a preset value to obtain a compensation angle,
b3the pressing block (9b) moves upwards, the correction reference vertical plate (5) rotates and drives the crystal bar to rotate by the compensation angle along the upper surface of the material plate (10) to complete angle fixing;
C. bonding: and (3) bonding the crystal bar with the material plate (10) by using glue.
5. The method for bonding the crystal bar at a fixed angle according to claim 4, wherein in the step A, after the crystal bar is placed on the flitch (10), the side surface of the crystal bar is adjacent to the flexible sucking disc (7) on the correcting reference vertical plate (5).
6. The method according to claim 4, wherein in step B, B is1The specific operation steps are as follows: a flexible sucker (7) on the correction reference vertical plate (5) generates vacuum suction to suck the crystal bar and pulls the crystal bar along the horizontal direction to enable the crystal bar to be attached to the vertical reference surface of the correction reference vertical plate (5); meanwhile, a displacement sensor on the correction reference vertical plate (5) detects whether the crystal bar is adsorbed in place, and after the adsorption is detected in place, a pressing block (9b) on the scanning rack (2) moves downwards to press the crystal bar on the upper surface of the material plate (10); after the gas is cut off, the flexible sucker (7) operates again to generate vacuum suction to absorb the crystal bar, and then the pressing block (9b) moves upwards; the flexible sucker (7) keeps a vacuum adsorption state continuously, and the pressing block (9b) presses down again to press the crystal bar on the material plate (10).
7. The method according to claim 6, wherein in the step B, the step B is repeated1～b3And multiple times until the angle of the crystal bar relative to the material plate (10) reaches a set allowable deviation range.
8. The method according to claim 4, 5, 6 or 7, wherein in the step C, the position of the crystal bar subjected to angle fixing in the step B is verified, and the specific verification process comprises: and pressing the pressing block (9B) down again, rotating the scanning frame (2) to carry out scanning verification, processing the signals received by the transmitting and receiving mechanism of the X-ray optical path, comparing the signals with a preset value, repeating the step B if the comparison result exceeds a set allowable deviation range, and bonding the crystal bar and the material plate (10) by using glue if the comparison result is within the set allowable deviation range.
9. The method for bonding the crystal bars at fixed angles according to claim 8, characterized in that in the step C, after the bonding is completed, if a next crystal bar needs to be bonded on the material plate (10) according to setting and requirements, the next crystal bar is placed on the material plate (10), and the steps A-C are repeated until all the crystal bars are bonded on the material plate (10), and the material plate (10) is detached from the fixture to complete the bonding.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010602894.7A CN111645212A (en) | 2020-06-29 | 2020-06-29 | Crystal bar fixed angle bonding machine and fixed angle bonding method thereof |
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| CN202010602894.7A CN111645212A (en) | 2020-06-29 | 2020-06-29 | Crystal bar fixed angle bonding machine and fixed angle bonding method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113977785A (en) * | 2021-11-03 | 2022-01-28 | 丹东新东方晶体仪器有限公司 | Automatic crystal orientation measurement and polycrystalline rod bonding rechecking equipment |
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2020
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113977785A (en) * | 2021-11-03 | 2022-01-28 | 丹东新东方晶体仪器有限公司 | Automatic crystal orientation measurement and polycrystalline rod bonding rechecking equipment |
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