CN217648158U

CN217648158U - Electrorheological polishing electrode and polishing device

Info

Publication number: CN217648158U
Application number: CN202123138115.1U
Authority: CN
Inventors: 邱昭晖; 熊小敏; 江波
Original assignee: Sun Yat Sen University
Current assignee: Sun Yat Sen University
Priority date: 2021-12-13
Filing date: 2021-12-13
Publication date: 2022-10-25
Anticipated expiration: 2031-12-13

Abstract

The utility model relates to a machine-building technical field, more specifically relates to an electrorheological polishing is with electrode and burnishing device. The utility model provides an electrorheological polishing uses electrode, includes the electrode body, the electrode body is type U type structure, the medial surface of electrode body is equipped with glossy first curved surface or/and the lateral surface of electrode body is equipped with glossy second curved surface. The utility model discloses in, when the curved surface of treating the polishing piece carries out polishing treatment, external drive arrangement drive electrode body is close to the curved surface that needs the polishing to it removes to drive the electrode body and paste the curved surface, and then treats the curved surface of polishing piece and polish. The design that the electrode body is similar to U type structure can make first curved surface or second curved surface on the electrode body better with wait to laminate mutually of the curved surface of polishing the piece, and then can make the polishing area of electrode body bigger, polishing efficiency is higher.

Description

Electrorheological polishing electrode and polishing device

Technical Field

The utility model relates to a machine-building technical field, more specifically relates to an electrorheological polishing is with electrode and burnishing device.

Background

With the development of microelectronic technology, higher requirements are put on the surface quality of semiconductor materials, such as roughness, surface type precision and the like, and therefore, ultra-precise polishing of the material surface is required. The existing polishing technology capable of realizing large-size planarization is chemical mechanical polishing, but the technology cannot accurately control stress, micro scratches, defects and residual stress are left, and a high-quality surface is difficult to obtain; the electro-rheological polishing or the magneto-rheological polishing is performed by using a flexible polishing head formed by a field effect, has the advantages of adjustable hardness, is not easy to leave scratches and residual stress, and can obtain a high-quality surface. However, in the magnetorheological polishing device, the magnetic field generating device needs the electromagnet, when the large-size curved surface is precisely polished, the polishing head has large volume and weight, and a complex water cooling system needs to be integrated, so that the problems of high complexity of the device, difficult maintenance, unstable polishing effect and the like exist. Meanwhile, the current electrorheological polishing device mainly uses single-point polishing, and has low processing efficiency on large-size curved surfaces, so that a polishing device which can realize large-size planarization, can ensure that the surface of a workpiece does not generate micro scratches and defects and can reduce residual stress is urgently needed, and the requirements of the microelectronic field on semiconductor materials are met. The prior art discloses five-axis electrorheological polishing equipment with an integrated electrode tool, which consists of an equipment support, a Z-axis motion unit, an X-axis motion unit, a Y-axis motion unit, a rotary worktable and the integrated electrode tool, wherein the Z-axis motion unit is arranged on the equipment support, the rotary worktable is arranged on the Z-axis worktable of the Z-axis motion unit, the integrated electrode tool is arranged on the rotary worktable, and the rotary worktable is arranged on the X-axis worktable of the X-axis motion unit; the utility model discloses a mainly realize the free-form surface part electrorheological polishing processing to conductor or non-conductor material by X axle motion unit, Y axle motion unit, Z axle motion unit, two rotary worktable and integrated electrode instrument. The technical scheme disclosed by the invention can realize the polishing of conductor workpieces and can also realize the polishing of non-conductor workpieces. The disclosed solution is still very inefficient in the machining of large-sized curved surfaces.

SUMMERY OF THE UTILITY MODEL

The utility model provides an overcome above-mentioned prior art to the lower problem of machining efficiency of jumbo size curved surface, provide an electrorheological polishing is with electrode and burnishing device.

In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides an electrorheological polishing uses electrode, includes the electrode body, the electrode body is type U type structure, the medial surface of electrode body is equipped with glossy first curved surface or/and the lateral surface of electrode body is equipped with glossy second curved surface.

In the technical scheme, when the curved surface of the piece to be polished is polished, the external driving device drives the electrode body to be close to the curved surface to be polished and drives the electrode body to move along the curved surface, so that the curved surface of the piece to be polished is polished. The design that the electrode body is similar to U type structure can make first curved surface or second curved surface on the electrode body better with wait to laminate mutually of the curved surface of polishing the piece, and then can make the polishing area of electrode body bigger, polishing efficiency is higher.

The utility model also provides an electrorheological burnishing device, polishing subassembly including the backup pad and be equipped with the electrode body, the electrode body can with wait to throw the optical element and laminate mutually, polishing subassembly installs in the backup pad and rather than sliding connection, be equipped with in the backup pad and be used for the drive polishing subassembly is in be reciprocating motion's drive arrangement in the backup pad, drive arrangement with polishing subassembly links to each other. In this technical scheme, drive arrangement drive polishing subassembly is close to and treats polishing piece and drive polishing subassembly and treat polishing piece and polish, and electrode body can make electrode body's polishing area bigger with treating that the setting that polishing piece closely laminated, gets rid of evenly, has effectively increased polishing subassembly's polishing efficiency.

Preferably, the polishing assembly comprises a connecting plate and a polishing head provided with the electrode body, one side of the connecting plate is mounted on the supporting plate and is in sliding connection with the supporting plate, the driving device is connected with the connecting plate, and the polishing head is mounted on one side of the connecting plate, which is far away from the supporting plate. In the technical scheme, a sliding rail is arranged on the supporting plate, a sliding groove corresponding to the sliding rail is arranged on the connecting plate, and the sliding rail is arranged in the sliding groove, so that the driving device drives the connecting plate to slide on the supporting plate in a reciprocating mode.

Preferably, the polishing head comprises a first driving motor arranged on the connecting plate and an electrode clamping piece arranged on an output shaft of the first driving motor, and the electrode body is arranged at one end, far away from the first driving motor, of the electrode clamping piece. In this technical scheme, electrode body demountable installation is on the electrode holder, for example, the one end that first driving motor was kept away from to the electrode holder is equipped with a plurality of draw-in grooves corresponding with the electrode body, and the electrode body is installed in the draw-in groove, and the electrode body is installed and to be polished the piece of treating of different thickness in the draw-in groove of difference, and the electrode body of different shapes can polish the piece of treating of corresponding not isostructure simultaneously.

Preferably, the electrode clamping member includes a clamp and a conductive ring connected to an external current, one end of the clamp is mounted on the output shaft of the first driving motor, the electrode body is mounted at one end of the clamp away from the first driving motor, the conductive ring is mounted in the clamp, and the conductive ring is electrically connected to the electrode body. In the technical scheme, clamping grooves corresponding to the conducting rings are formed in the clamp, the conducting rings are installed in the clamping grooves and can be copper rings or metal made of other materials, and the electrode body and the guide rings can be electrically connected through carbon brushes.

Preferably, the supporting plate is provided with a limiting member for limiting the position of the connecting plate, and the limiting member abuts against the connecting plate. In this technical scheme, the both ends of slide rail all are provided with the locating part in the backup pad, and then prevent that the connecting plate from following the slide rail roll-off.

Preferably, the driving device comprises a driven wheel, a second driving motor and a driving wheel mounted on an output shaft of the second driving motor, the driving wheel is connected with the driven wheel through a belt, a fixed seat is arranged on the belt, and the polishing assembly is mounted on the fixed seat. In this technical scheme, second driving motor installs in one side of backup pad, and action wheel, belt and follow the opposite side of driving wheel installation in the backup pad, can effectively utilize the spatial position of backup pad like this, can make the connecting plate have bigger sliding space.

Preferably, the supporting plate is provided with a supporting seat for supporting the connecting plate, and the connecting plate is positioned on the supporting seat and is in sliding connection with the supporting seat. In this technical scheme, the supporting seat is located the backup pad and is close to the one end of polishing subassembly, can make polishing subassembly more stable slide in the backup pad like this.

Preferably, the X-Y moving module is arranged on the base, and the X-Y moving module is arranged on the base.

Preferably, drive arrangement includes linear electric motor and ball screw, linear electric motor's output shaft pass through the shaft coupling with ball screw links to each other, the cover is equipped with the fixing base on the ball screw, the fixing base with ball screw threaded connection, polishing subassembly is installed on the fixing base and with backup pad sliding connection. In the technical scheme, the linear motor rotates to push the fixed seat to do linear motion through the ball screw, so that the polishing component arranged on the fixed seat does reciprocating linear motion on the supporting plate.

Compared with the prior art, the utility model discloses the beneficial effect who produces is:

the utility model discloses in, drive arrangement drive polishing subassembly is close to and treats polishing piece and drive polishing subassembly and treat the curved surface of polishing piece and polish, and the design that the electrode body is type U type structure can make first curved surface or second curved surface on the electrode body better and treat that the curved surface of polishing piece laminates mutually, and then can make the polishing area of electrode body bigger, gets rid of evenly, has effectively increased polishing subassembly's polishing efficiency.

Drawings

FIG. 1 is a schematic view of the whole electro-rheological polishing device of the present invention;

FIG. 2 is a schematic view of the connection relationship between the driving device and the supporting plate in the electro-rheological polishing device of the present invention;

FIG. 3 is a schematic view of the electrode holder of the electrorheological polishing apparatus of the present invention;

FIG. 4 is a schematic view of the connection relationship between the electrode body and the workpiece to be polished in the electrorheological polishing device of the present invention;

fig. 5 is a schematic view of another connection relationship between the electrode body and the polishing object in the electrorheological polishing device of the present invention.

In the drawings: 1. a support plate; 2. an electrode body; 3. a polishing component; 4. a drive device; 5. a member to be polished; 6. a limiting member; 7. a supporting seat; 8. a slide rail; 31. a connecting plate; 32. a first drive motor; 33. an electrode holder; 41. a second drive motor; 42. a driving wheel; 43. a driven wheel; 44. a fixed seat; 45. a belt; 61. a limiting block; 62. an L-shaped snap tab; 331. a clamp; 332. positioning a groove; 333. a clamping groove.

Detailed Description

The drawings are for illustrative purposes only and are not to be construed as limiting the patent; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the present patent.

The same or similar reference numbers in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if there are the terms "upper", "lower", "left", "right", "long", "short", etc. indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, it is only for convenience of description and simplification of description, but it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore the terms describing the positional relationship in the drawings are only for illustrative purposes and are not to be construed as limiting the present patent, and those skilled in the art will understand the specific meaning of the terms according to their specific circumstances.

The technical solution of the present invention is further described in detail by the following specific embodiments in combination with the accompanying drawings:

example 1

As shown in fig. 1, an electrode for electrorheological polishing comprises an electrode body 2, wherein the electrode body 2 is of a U-shaped structure, a smooth first curved surface is arranged on the inner side surface of the electrode body 2 or/and a smooth second curved surface is arranged on the outer side surface of the electrode body 2. In this embodiment, the external driving device drives the electrode body 2 to approach the curved surface to be polished, and drives the electrode body 2 to move along the curved surface, so as to polish the curved surface of the workpiece 5 to be polished. Electrode body 2 is the design of type U type structure can make the first curved surface or the second curved surface on electrode body 2 better with wait to polish curved surface of 5 and laminate mutually, and then can make electrode body 2's polishing area bigger, polishing efficiency is higher.

In this embodiment, as shown in fig. 4, when the polishing surface of the workpiece 5 to be polished is a curved surface of a U-shaped hole, the driving device drives the electrode body 2 to be inserted into the U-shaped hole, and drives the electrode body 2 to rotate in the U-shaped hole, so as to polish the curved surface of the U-shaped hole; as shown in fig. 5, the member to be polished 5 is a bell-shaped structure, the member to be polished is placed in the two sets of electrode bodies 2, and the polishing device drives the electrode bodies 2 to rotate around the central axis of the member to be polished 5 for one circle, so as to finish polishing the inner wall surface or the outer wall surface of the member to be polished 5.

Example 2

As shown in fig. 1 to 5, an electrorheological polishing device comprises a support plate 1 and a polishing component 3 provided with an electrode body 2, wherein the electrode body 2 can be attached to a member 5 to be polished, the polishing component 3 is installed on the support plate 1 and is in sliding connection with the support plate, a driving device 4 for driving the polishing component 3 to reciprocate on the support plate 1 is arranged on the support plate 1, and the driving device 4 is connected with the polishing component 3. In this embodiment, drive arrangement 4 drive polishing subassembly 3 is close to and treats polishing 5 and drive polishing subassembly 3 and treat polishing 5 and polish, and electrode body 2 can make electrode body 2's polishing area bigger with the setting up of treating that polishing 5 closely laminated, gets rid of evenly, has effectively increased polishing subassembly 3's polishing efficiency.

Wherein, polishing subassembly 3 includes connecting plate 31 and the polishing head that is equipped with electrode body 2, and one side of connecting plate 31 is installed on backup pad 1 and rather than sliding connection, and drive arrangement 4 links to each other with connecting plate 31, and the polishing head is installed in the one side of connecting plate 31 keeping away from backup pad 1. In this embodiment, the supporting plate 1 is provided with a sliding rail 8, the connecting plate 31 is provided with a sliding slot corresponding to the sliding rail 8, and the sliding rail 8 is installed in the sliding slot, so that the driving device 4 drives the connecting plate 31 to slide on the supporting plate 1 in a reciprocating manner.

In addition, the polishing head comprises a first driving motor 32 arranged on the connecting plate 31 and an electrode clamping piece 33 arranged on an output shaft of the first driving motor 32, and the electrode body 2 is arranged at one end of the electrode clamping piece 33 far away from the first driving motor 32. In this embodiment, the electrode body 2 is detachably mounted on the electrode holder 33, for example, one end of the electrode holder 33 away from the first driving motor 32 is provided with a plurality of positioning grooves 332 corresponding to the electrode body 2, the electrode body 2 is mounted in the positioning grooves 332, the electrode body 2 is mounted in different positioning grooves 332 to polish the to-be-polished workpiece 5 with different thicknesses, and meanwhile, the electrode bodies 2 with different shapes can polish the to-be-polished workpiece 5 with different structures.

The electrode clamping member 33 includes a clamp 331 and a conductive ring connected to an external current, one end of the clamp 331 is mounted on an output shaft of the first driving motor 32, the electrode body 2 is mounted on one end of the clamp 331 far away from the first driving motor 32, the conductive ring is mounted in the clamp 331, and the conductive ring is electrically connected to the electrode body 2. In this embodiment, the clamp 331 has a slot 333 corresponding to the conductive ring, the conductive ring is installed in the slot 333, the conductive ring may be a copper ring or some other metal, and the electrode body 2 and the conductive ring may be electrically connected through a carbon brush.

In addition, the support plate 1 is provided with a stopper 6 for limiting the position of the connection plate 31, and the stopper 6 abuts against the connection plate 31. In this embodiment, the two ends of the slide rail 8 on the supporting plate are both provided with the limiting members 6, so as to prevent the connecting plate 31 from sliding out of the slide rail 8. In this embodiment, set up L shape joint piece 62 and the stopper 61 that is equipped with the joint groove on the connecting plate 31, stopper 61 is installed in backup pad 1, and L type joint piece 62 joint is in the joint groove, and locating part 6 still includes spacing bolt in addition, and spacing bolt is installed in backup pad 1, and spacing bolt and connecting plate 31 or fixing base 44 looks butt.

In addition, the driving device 4 comprises a driven wheel 43, a second driving motor 41 and a driving wheel 42 mounted on an output shaft of the second driving motor 41, the driving wheel 42 is connected with the driven wheel 43 through a belt 45, a fixed seat 44 is arranged on the belt 45, and the polishing assembly 3 is mounted on the fixed seat 44. In this embodiment, the second driving motor 41 is installed at one side of the support plate 1, and the driving pulley 42, the belt 45 and the driven pulley 43 are installed at the other side of the support plate 1, so that the spatial position of the support plate 1 can be effectively utilized, and the connection plate 31 can have a larger sliding space.

Wherein, the supporting plate 1 is provided with a supporting seat 7 for supporting a connecting plate 31, and the connecting plate 31 is positioned on the supporting seat 7 and is connected with the supporting seat in a sliding way. In this embodiment, the supporting seat 7 is disposed at an end of the supporting plate 1 close to the polishing assembly 3, so that the polishing assembly 3 can slide on the supporting plate 1 more stably.

In addition, the number of the electrode bodies 2 is at least 1. In this embodiment, when the to-be-polished piece 5 is a conductor, the number of the electrode bodies 2 may be 1, the electrode body 2 serves as a negative electrode, and the to-be-polished piece 5 serves as a positive electrode; when the piece 5 to be polished is a non-conductor, the number of the electrode bodies 2 is multiple, and the piece 5 to be polished is polished in a positive-negative staggered mode.

Example 3

As shown in fig. 1, in the present embodiment, an XY moving module is further included, the XY moving module being movable in the X-axis direction and the Y-axis direction, and the support plate 1 is mounted on the XY moving module and constitutes an XYZ moving module therewith. In this embodiment, the XY moving module includes an X-axis moving unit and a Y-axis moving unit, the X-axis moving unit includes a first support, a first servo motor, a first roller screw, and a first worktable, the first servo motor drives the first roller screw, and the rotation is converted into the sliding of the first worktable by the first screw, so as to realize the linear motion of the first worktable in the X-axis direction; the Y-axis motion unit comprises a second support, a second servo motor, a second roller lead screw and a second workbench, the second servo motor drives the second roller lead screw, the second lead screw converts rotation into sliding of the second workbench, and linear motion of the second workbench in the Y-axis direction is achieved, the Y-axis motion unit is installed on the first workbench, the supporting plate 1 is installed on the second workbench, and movement of the electrode body 2 on the polishing head in the XYZ three-axis direction can be achieved. During polishing, the XY moving module drives the electrode body 2 to move to the position above the part 5 to be polished, then the electrode body 2 is driven to move in the Z-axis direction, the gap between the electrode body 2 and the part 5 to be polished is adjusted to 0.2-1mm, and finally the X-axis moving unit and the Y-axis moving unit are used for driving the electrode body 2 to reciprocate, so that the uniform polishing of the working surface of the part 5 to be polished is realized.

Example 4

In this embodiment, the driving device 4 includes a linear motor and a ball screw, an output shaft of the linear motor is connected with the ball screw through a coupler, a fixing seat 44 is sleeved on the ball screw, the fixing seat 44 is in threaded connection with the ball screw, and the polishing assembly 3 is installed on the fixing seat 44 and is in sliding connection with the supporting plate 1. In this embodiment, the linear motor rotates to push the fixing base 44 to move linearly through the ball screw, so that the polishing assembly 3 mounted on the fixing base 44 moves linearly back and forth on the support plate 1.

It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not limitations to the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. An electrorheological polishing electrode, characterized in that: including electrode body (2), electrode body (2) are type U structure, the medial surface of electrode body (2) is equipped with glossy first curved surface or/and the lateral surface of electrode body (2) is equipped with glossy second curved surface.

2. An electrorheological polishing device according to claim 1, wherein: including backup pad (1) and be equipped with polishing subassembly (3) of electrode body (2), electrode body (2) can laminate mutually with treating polishing piece (5), install polishing subassembly (3) backup pad (1) is gone up and rather than sliding connection, be equipped with on backup pad (1) and be used for the drive polishing subassembly (3) are in reciprocating motion's drive arrangement (4) are done in backup pad (1), drive arrangement (4) with polishing subassembly (3) link to each other.

3. Electrorheological polishing device according to claim 2, characterized in that: the polishing assembly (3) comprises a connecting plate (31) and a polishing head provided with the electrode body (2), one side of the connecting plate (31) is installed on the supporting plate (1) and is in sliding connection with the supporting plate, the driving device (4) is connected with the connecting plate (31), and the polishing head is installed on one side, far away from the supporting plate (1), of the connecting plate (31).

4. Electro-rheological polishing device according to claim 3, characterized in that: the polishing head comprises a first driving motor (32) arranged on the connecting plate (31) and an electrode clamping piece (33) arranged on an output shaft of the first driving motor (32), and the electrode body (2) is arranged at one end, far away from the first driving motor (32), of the electrode clamping piece (33).

5. Electro-rheological polishing device according to claim 4, characterized in that: the electrode clamping piece (33) comprises a clamp (331) and a conducting ring connected with external current, one end of the clamp (331) is installed on an output shaft of the first driving motor (32), the electrode body (2) is installed at one end, far away from the first driving motor (32), of the clamp (331), the conducting ring is installed in the clamp (331), and the conducting ring is electrically connected with the electrode body (2).

6. Electrorheological polishing device according to claim 3, characterized in that: the supporting plate (1) is provided with a limiting piece (6) used for limiting the position of the connecting plate (31), and the limiting piece (6) is abutted to the connecting plate (31).

7. Electro-rheological polishing device according to claim 3, characterized in that: drive arrangement (4) are including following driving wheel (43), second driving motor (41) and installing action wheel (42) on second driving motor (41) output shaft, action wheel (42) with follow driving wheel (43) and pass through belt (45) and connect, be equipped with fixing base (44) on belt (45), install polishing subassembly (3) on fixing base (44).

8. Electro-rheological polishing device according to claim 7, characterized in that: the supporting plate (1) is provided with a supporting seat (7) for supporting the connecting plate (31), and the connecting plate (31) is positioned on the supporting seat (7) and is in sliding connection with the supporting seat.

9. Electrorheological polishing device according to claim 2, characterized in that: the X-Y moving device further comprises an XY moving module which can move along the X-axis direction and the Y-axis direction, and the supporting plate (1) is installed on the XY moving module and forms an XYZ moving module together with the XY moving module.

10. Electrorheological polishing device according to claim 2, characterized in that: drive arrangement (4) include linear electric motor and ball screw, linear electric motor's output shaft pass through the shaft coupling with ball screw links to each other, the last cover of ball screw is equipped with fixing base (44), fixing base (44) with ball screw threaded connection, install polishing subassembly (3) on fixing base (44) and with backup pad sliding connection.