CN214445518U

CN214445518U - Magnetorheological polishing device

Info

Publication number: CN214445518U
Application number: CN202022694637.9U
Authority: CN
Inventors: 单明星; 卢明明; 庄绪龙; 林洁琼; 夏岩岩; 李锦艳
Original assignee: Changchun Boxin Optoelectronic Co ltd
Current assignee: Changchun Boxin Optoelectronic Co ltd
Priority date: 2020-11-19
Filing date: 2020-11-19
Publication date: 2021-10-22
Anticipated expiration: 2030-11-19

Abstract

The utility model relates to an ultra-precision machining technical field specifically discloses a magnetic current becomes burnishing device, and magnetic current becomes burnishing device includes workstation, position control subassembly, polishing subassembly, magnetic current becomes liquid circulation mechanism and horizontal spacing subassembly, and the work piece of waiting to process through position control subassembly drive centre gripping rotates, and magnetic current becomes liquid and forms large tracts of land and even polishing pad under the magnetic field effect, can carry out the magnetic current to become the polishing with the work piece of waiting to process when polishing dish rotates; the polishing disc can rotate and perform reciprocating linear motion through the horizontal limiting assembly, so that the contact time of a workpiece to be processed and magnetorheological fluid is prolonged, the complexity of a polishing track is increased, the material removal in the polishing process is more uniform, the surface roughness of the workpiece is smaller, the surface shape precision is higher, and the problem that the polishing disc can not synchronously swing in a self-rotating mode in the existing magnetorheological polishing device is solved.

Description

Magnetorheological polishing device

Technical Field

The utility model relates to an ultra-precision machining technical field specifically is a magnetic current becomes burnishing device.

Background

With the social development of information electronization, optical elements such as lenses and reflectors are used as one of the core elements of optical devices, so as to achieve good optical performance, the surface precision of the optical elements needs to achieve an ultra-smooth degree, the surface shape precision also has higher requirements, and the optical elements are free of damage and defects. Both optical planar elements and semiconductor substrates need to be planarized, and the conventional processes mainly include high-efficiency grinding, ultra-precision polishing, chemical mechanical polishing and magnetorheological polishing, so that the manufacturing of semiconductor materials increasingly depends on grinding and polishing technologies to meet the production requirements.

In the processing of semiconductor materials, the magneto-rheological polishing (MRF) technology is a novel optical surface processing method which is proposed by KORDONSKI and collaborators thereof in 90 s of 20 th century by combining electromagnetism, fluid dynamics, analytical chemistry, processing technology and the like, and has the advantages of good polishing effect, no secondary surface damage, suitability for complex surface processing and the like which are not possessed by traditional polishing. However, the above technical solutions have the following disadvantages in practical use: the existing magnetorheological polishing device belongs to a flexible processing technology, and has the problem that the polishing disk cannot synchronously swing linearly while rotating, and the processing efficiency is not high.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of the utility model is to provide a magnetic current becomes burnishing device to there is unable polishing dish that makes to realize sharp wobbling problem in step in the rotation in the current magnetic current that proposes in solving above-mentioned background art becomes burnishing device.

The embodiment of the utility model provides a realize like this, a magnetic current becomes burnishing device, be in including workstation and setting position control assembly on the workstation, position control assembly is used for the centre gripping and adjusts the position and the drive of waiting to process the work piece and wait to process the work piece and rotate, magnetic current becomes burnishing device still includes:

the polishing assembly is arranged at the axis of the workbench and comprises a base and a polishing disc for carrying out magnetorheological polishing on a workpiece to be processed, at least one fifth driving mechanism for driving the polishing disc to rotate is arranged on the outer side of the base, and one side of the polishing disc, facing the workbench, extends out of an opening formed in the workbench so as to drive the polishing disc to rotate under the driving of the fifth driving mechanism;

the magnetorheological fluid circulating mechanism is arranged on the workbench and used for conveying the magnetorheological fluid to the polishing disc, an excitation mechanism used for providing a working magnetic field is arranged in the polishing disc, and the excitation mechanism is used for enabling the magnetorheological fluid to form a uniform polishing pad under the action of the magnetic field so as to carry out magnetorheological polishing on a workpiece to be processed when the polishing disc rotates; and

and the horizontal limiting component is arranged between the polishing disc and the base and used for enabling the polishing disc to perform reciprocating linear motion while the polishing disc rotates so as to improve the contact time of the workpiece to be processed and the magnetorheological fluid.

In another embodiment of the present invention, there is provided a polishing method, which uses the above mentioned magnetorheological polishing apparatus, the polishing method specifically includes the following steps: the magnetorheological polishing device comprises a position adjusting assembly, a workpiece to be machined, a magnetorheological fluid circulating mechanism, a polishing disc, a magnetic field exciting mechanism, a fifth driving mechanism, a workpiece clamp, a workpiece to be machined, a position adjusting assembly, a workpiece clamp and a workpiece to be machined, wherein the workpiece to be machined is arranged on the position adjusting assembly, the lower surface of the workpiece to be machined is parallel to the upper surface of the polishing disc, the position of the workpiece to be machined is adjusted through the position adjusting assembly, the magnetorheological fluid is added onto the polishing disc through the magnetorheological fluid circulating mechanism so as to form an even polishing pad under the action of the magnetic field provided by the exciting mechanism, the polishing disc is driven to rotate through the fifth driving mechanism, meanwhile, the polishing disc synchronously carries out reciprocating linear motion under the action of the horizontal limiting assembly, and then the workpiece clamp and the workpiece to be machined are driven to rotate through starting a machine tool spindle motor so as to finish magnetorheological polishing.

In another embodiment of the present invention, there is also provided a use of the polishing method as described above in surface processing of a metallic material and/or a non-metallic material.

Compared with the prior art, the beneficial effects of the utility model are that:

the embodiment of the utility model provides a magnetic current becomes burnishing device, including workstation, position control subassembly, polishing subassembly, magnetic current becomes liquid circulation mechanism and horizontal spacing subassembly, will wait to process the work piece and carry out the centre gripping and adjust the processing position through the position control subassembly, then carry magnetic current becomes liquid circulation mechanism with magnetic current and becomes liquid to the polishing dish, make magnetic current become liquid and form even polishing pad under the effect in magnetic field, wait to process the work piece through the drive of position control subassembly and rotate to will wait to process the work piece and carry out the magnetic current and become the polishing when the polishing dish rotates; moreover, due to the arrangement of the horizontal limiting assembly, the polishing disc can rotate and simultaneously carry out reciprocating linear motion, so that the contact time between a workpiece to be processed and magnetorheological fluid is prolonged, the complexity of a polishing track is increased, materials are removed more uniformly in the polishing process, the surface roughness of the workpiece is smaller, the surface shape precision is higher, the polishing efficiency is improved, the problem that the existing magnetorheological polishing device cannot enable the polishing disc to synchronously realize linear swing while rotating is solved, and the magnetorheological polishing device has a wide market prospect.

Drawings

Fig. 1 is an assembly perspective view of a magnetorheological finishing device according to an embodiment of the present invention.

Fig. 2 is an assembled side view of a magnetorheological finishing device according to an embodiment of the present invention.

Fig. 3 is an assembled cross-sectional view of a polishing assembly in a magnetorheological polishing apparatus according to an embodiment of the present invention.

Fig. 4 is a front view of a polishing assembly of a magnetorheological polishing apparatus according to an embodiment of the present invention.

Fig. 5 is a bottom view of the polishing assembly of the magnetorheological polishing apparatus according to another embodiment of the present invention.

Fig. 6 is a schematic structural diagram of an excitation mechanism in a magnetorheological finishing device according to another embodiment of the present invention.

In the figure: 1-a polishing assembly; 2-a workbench; 3-a lead screw; 4-a first drive mechanism; 5-a peristaltic pump; 6-magnetorheological cooling stirring box; 7-a second drive mechanism; 8-a control panel; 9-a recovery tank; 10-a machine tool spindle motor; 11-a third drive mechanism; 12-a position adjustment assembly; 13-a fourth drive mechanism; 14-a workpiece holder; 15-a fifth drive mechanism; 16-magnetorheological fluid nozzles; 101-a polishing disc; 102-an excitation mechanism; 103-a first connection; 104-a base; 105-a first sleeve; 106-a first bearing; 107-a second connector; 108-a first mounting frame; 109-a camshaft; 110-a first pulley; 111-a second bearing; 112-a second sleeve; 113-a second mounting frame; 114-a third connector; 115-a first end cap; 116-a fourth connection; 117-second end cap; 118-a spring; 119-a first horizontal linear guide; 120-a second horizontal linear guide; 121-a second pulley; 122-a first belt; 123-a second belt; 1021-a permanent magnet; 1022-magnet mounting plate.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that various changes and modifications can be made by one skilled in the art without departing from the spirit of the invention. These all belong to the protection scope of the present invention. In order to make the technical solution of the present invention clearer, the process steps and device structures well known in the art are omitted here.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

The following detailed description is provided for the specific embodiments of the present invention.

As shown in fig. 1-4, for the structure diagram of a magnetorheological polishing apparatus provided by an embodiment of the present invention, the magnetorheological polishing apparatus includes a worktable 2 and a position adjusting assembly 12 (specifically, an existing gantry machine tool can be adopted) disposed on the worktable 2 for clamping and adjusting the position of a workpiece to be processed and driving the workpiece to be processed to rotate, the magnetorheological polishing apparatus further includes:

the polishing assembly 1 is arranged at the axis of the workbench 2, the polishing assembly 1 comprises a base 104 and a polishing disc 101 for performing magnetorheological polishing on a workpiece to be processed, at least one fifth driving mechanism 15 for driving the polishing disc 101 to rotate is arranged on the outer side of the base 104, and one side, facing the workbench 2, of the polishing disc 101 extends out of an opening formed in the workbench 2 so as to drive the polishing disc 101 to rotate under the driving of the fifth driving mechanism 15;

the magnetorheological fluid circulating mechanism is arranged on the workbench 2 and used for conveying magnetorheological fluid to the polishing disk 101, an excitation mechanism 102 used for providing a working magnetic field is arranged in the polishing disk 101, and the excitation mechanism 102 is used for enabling the magnetorheological fluid to form a large-area and uniform polishing pad under the action of the magnetic field so as to carry out magnetorheological polishing on a workpiece to be processed when the polishing disk 101 rotates; and

and the horizontal limiting assembly is arranged between the polishing disc 101 and the base 104 and used for enabling the polishing disc 101 to perform reciprocating linear motion while the polishing disc 101 rotates so as to improve the contact time between the workpiece to be processed and the magnetorheological fluid.

In the embodiment of the present invention, specifically, the workpiece to be processed is clamped and the processing position is adjusted by the position adjusting assembly 12, then magnetorheological fluid is conveyed to the polishing disk 101 by the magnetorheological fluid circulating mechanism, the polishing disk 101 is driven to rotate by the fifth driving mechanism 15, and meanwhile, the excitation mechanism 102 provides a working magnetic field to make the magnetorheological fluid form an even polishing pad under the action of the magnetic field, and the workpiece to be processed is driven to rotate by the position adjusting assembly 12, so that the workpiece to be processed is subjected to magnetorheological polishing when the polishing disk 101 rotates; moreover, because the horizontal limiting component is arranged, the polishing disc 101 can rotate and simultaneously carry out reciprocating linear motion, so that the contact time between a workpiece to be processed and magnetorheological fluid is prolonged, the linear swing of the polishing disc 101 can be synchronously realized by rotating the polishing disc 101, and compared with the polishing disc 101, the linear motion can only be carried out in the X direction and the Y direction, the complexity of a polishing track is increased, the material removal in the polishing process is more uniform, the surface roughness of the workpiece is smaller, the surface shape precision is higher, the polishing efficiency is improved, and the problem that the linear swing of the polishing disc can not be synchronously realized by the existing magnetorheological polishing device when the polishing disc rotates is solved.

Further, as a preferred embodiment of the present invention, the horizontal position-limiting component includes a setting where the polishing platen 101 faces the first horizontal linear guide 119 on one side of the base 104, the base 104 faces the corresponding second horizontal linear guide 120 for matching with the first horizontal linear guide 119, a rotatable camshaft 109 is disposed at the inner axis of the base 104, the camshaft 109 is connected to the output end of the fifth driving mechanism 15, a plurality of sets of springs 118 are further disposed on the inner side of the base 104, the other end of the spring 118 is connected to one side of the excitation mechanism 102 facing the base 104, so as to drive the rotation of the camshaft 109 under the driving of the fifth driving mechanism 15, and further push the excitation mechanism 102 to compress and stretch the spring 118, so as to drive the reciprocating excitation mechanism 102 under the limiting action of the first horizontal linear guide 119 and the second horizontal linear guide 120 And (4) swinging linearly.

In the embodiment of the present invention, the fifth driving mechanism 15 is provided with two driving mechanisms, the camshaft 109 is driven to rotate by one of the fifth driving mechanisms 15, the polishing plate 101 is driven to rotate by the other fifth driving mechanism 15, the polishing plate 101 synchronously performs reciprocating linear motion under the action of the horizontal limiting assembly, the polishing assembly 1 and the excitation mechanism 102 therein are driven to rotate, and then the workpiece to be processed is clamped and the processing position is adjusted by the position adjusting assembly 12, and then the magnetorheological fluid is conveyed to the polishing plate 101 by the magnetorheological fluid circulating mechanism, and a working magnetic field is provided by the excitation mechanism 102, so that the magnetorheological fluid forms an even polishing pad under the action of the magnetic field, so as to perform magnetorheological polishing on the workpiece to be processed when the polishing plate 101 rotates; meanwhile, under the driving of the fifth driving mechanism 15, the camshaft 109 is driven to rotate, and then the excitation mechanism 102 is pushed to compress and stretch the spring 118, so that the reciprocating linear oscillation of the excitation mechanism 102 is driven under the limiting action of the first horizontal linear guide rail 119 and the second horizontal linear guide rail 120, and further the contact time between the workpiece to be processed and the magnetorheological fluid is improved.

Further, as a preferred embodiment of the present invention, the magnetorheological fluid circulation mechanism includes a magnetorheological cooling stirring box 6, a peristaltic pump 5, a second driving mechanism 7 and a magnetorheological fluid nozzle 16, the magnetorheological cooling stirring box 6 is disposed on the workbench 2 for storing magnetorheological fluid, the second driving mechanism 7 is disposed on the magnetorheological cooling stirring box 6, and an output end of the second driving mechanism 7 is connected to a stirring blade (not shown in the drawings, and may be an existing product, which is not described herein) disposed on the magnetorheological cooling stirring box 6 for driving the stirring blade to rotate, so as to stir the stored magnetorheological fluid, the peristaltic pump 5 is disposed on the workbench 2, an input end of the peristaltic pump 5 is communicated with the magnetorheological cooling stirring box 6, an output end of the peristaltic pump 5 is communicated with the magnetorheological fluid nozzle 16, so as to pump out the stored magnetorheological fluid and spray the magnetorheological fluid to the polishing disk 101 for magnetorheological polishing.

In this embodiment, in order to improve the cooling effect of the magnetorheological fluid and prevent the magnetorheological fluid from precipitating, the magnetorheological fluid circulation mechanism continuously stirs the magnetorheological fluid in the circulation process through the peristaltic pump 5 and the second driving mechanism 7, so that the magnetorheological fluid is not easy to precipitate.

Further, as the utility model discloses a preferred embodiment, still be provided with the accumulator 9 that is used for retrieving magnetorheological suspensions on the workstation 2, install the pipeline on the accumulator 9 and let in among the magnetorheological cooling agitator tank 6, peristaltic pump 5 pass through the pipeline with magnetorheological cooling agitator tank 6 links to each other.

Further, as a preferred embodiment of the present invention, the polishing platen 101, the work table 2, the recovery tank 9, and the main body portion of the polishing assembly 1 are made of diamagnetic materials.

In the embodiment of the present invention, it is concrete, in order to avoid the magnetization of the component material as far as possible, influence the motion precision, the main part of polishing dish 101, workstation 2, accumulator 9 and polishing subassembly 1 make by diamagnetic material, preferably, diamagnetic material is stainless steel, and the aim at prevents to be magnetized and influence the magnetic field distribution.

Furthermore, as a preferred embodiment of the present invention, the end face of the polishing disc 101 is provided with a V-shaped groove, and the height of the V-shaped groove is 0.5-2mm, for increasing the hydrodynamic pressure during the polishing process.

In an example of the utility model, it is preferred, the height in V type groove is about 1mm, and is concrete, for improving polishing efficiency, improves the even degree of polishing, polishing disc 101's surface is equipped with a plurality of V type groove along the circumferencial direction, just V type groove height is 1mm, can evenly just polish fast and get rid of the material of waiting to process workpiece surface, realizes high-efficient quick polishing.

Further, as shown in fig. 3 to 6, as a preferred embodiment of the present invention, one end of the cam shaft 109 far away from the polishing plate 101 is provided with a first pulley 110, one end of the base 104 far away from the polishing plate 101 is internally provided with a second pulley 121, the second pulley 121 is connected to the output end of the fifth driving mechanism 15, and the second pulley 121 is further connected to the first pulley 110 through a first belt 122 to drive the cam shaft 109 to rotate under the driving of the fifth driving mechanism 15.

Further, as a preferred embodiment of the present invention, the excitation mechanism 102 includes a magnet mounting plate 1022, the magnet mounting plate 1022 is surface-mounted with a plurality of regular hexagonal permanent magnets 1021, and the magnetic field intensity generated by the end face of the permanent magnet 1021 is greater than 2000 Gs.

The utility model discloses an in the example, in order to obtain better surface degree of consistency and polishing efficiency, inlay regular hexagon's permanent magnet 1021 and arrange into big regular hexagon according to the rule, provide stable and even magnetic field for magnetic current becomes the polishing, the permanent magnet has simple structure, magnetic field stability does not need extra auxiliary device, take up the advantage that space is little, the magnetic field intensity of permanent magnet 1021 terminal surface is greater than 2000Gs, the benefit of design like this lies in adopting a plurality of permanent magnets 1021 of regular hexagon to arrange to form electromagnet group, the magnetic field intensity of production is more even.

Further, as the utility model discloses a preferred embodiment, position control subassembly 12 (specifically can be gantry machine tool) is including setting up the lathe main shaft on workstation 2 and setting up the lathe spindle motor 10 on the lathe main shaft, be provided with on the lathe spindle motor 10 and be used for the centre gripping to treat the work piece work holder 14 of processing, lathe spindle motor 10 is used for driving 14 centre gripping of work piece work holder and fixes the work piece of processing.

Further, as the utility model discloses a preferred embodiment, the 2 outsides of workstation still are provided with first actuating mechanism 4, the output of first actuating mechanism 4 passes through lead screw 3 and links to each other with the fourth actuating mechanism 13 that sets up at position control assembly 12 tip, still be provided with third actuating mechanism 11 on the position control assembly 12.

The embodiment of the present invention provides a position adjusting assembly 12 specifically can be a gantry machine tool, which is provided with a machine spindle motor 10, a third driving mechanism 11, and a fourth driving mechanism 13, and at the same time, the first driving mechanism 4 and the lead screw 3 are cooperated to realize the three-coordinate movement of the gantry machine tool, so as to drive the workpiece to be processed of the clamping to move (specifically, move along the side line direction of the working table 2), and further to realize the position adjustment of the workpiece to be processed.

The utility model discloses an in the example, drive lead screw 3 through first actuating mechanism 4 and rotate, and then can drive fourth actuating mechanism 13 and position control assembly 12 and carry out linear motion along lead screw 3, and simultaneously, can drive position control assembly 12 through fourth actuating mechanism 13 and rotate, and then can realize waiting to process the rotation of work piece, can also drive lathe spindle motor 10 and work piece holder 14 through third actuating mechanism 11 and remove along the direction perpendicular with lead screw 3, and then can realize waiting to process the position control of work piece.

In another example of the present invention, a control panel 8 is further disposed on the working platform 2, the control panel 8 can adopt an existing electronic control device, such as a computer, a single chip, a touch screen, etc., and the control panel 8 is used for electrically connecting with all the electric devices (such as the second driving mechanism 7, the third driving mechanism 11, the fourth driving mechanism 13, the peristaltic pump 5, etc.) in the magnetorheological polishing apparatus to control the work of all the electric devices.

In another example of the present invention, the first driving mechanism 4, the second driving mechanism 7, the machine tool spindle motor 10, the third driving mechanism 11, the fourth driving mechanism 13, and the fifth driving mechanism 15 may all adopt the existing servo motors, and the specific model is selected according to the requirement, and is not limited here as long as the normal rotation can be realized.

Further, as a preferred embodiment of the present invention, the polishing assembly 1 further includes a second mounting frame 113 and a first mounting frame 108 respectively located at the upper and lower portions of the inner space of the base 104, the first mounting frame 108 is installed on the inner wall of the base 104, the second mounting frame 113 and the first mounting frame 108 are detachably connected by a plurality of second connecting pieces 107, the first horizontal linear guide 119 is installed on the second mounting frame 113, the second horizontal linear guide 120 is installed below the magnet mounting disc 1022, the first horizontal linear guide 119 is matched with the second horizontal linear guide 120, and the first mounting frame 108 can drive the rotation of the first mounting frame 108, the second mounting frame 113 and the magnet mounting disc 1022 under the driving of the fifth driving mechanism 15.

In one example of the present invention, the second mounting bracket 113 and the first mounting bracket 108 are mounted on the base 104 through the first bearing 106 (large bearing), the fifth driving mechanism 15 and the second pulley 121 (small pulley) are mounted on the base 104, the fifth driving mechanism 15 drives the first mounting rack 108 to rotate through a second belt 123 (a big belt), the first mounting bracket 108 is fixedly connected with the second mounting bracket 113 through the second connecting member 107, the fifth driving mechanism 15 rotates the camshaft 109 by a first belt 122 (small belt), the camshaft 109 is mounted on the first mounting bracket 108 through the second bearing 111 (small bearing), the first horizontal linear guide 119 is fixed on the magnet mounting disc 1022, and the second horizontal linear guide 120 is fixed on the second mounting bracket 113, so that the magnet mounting disc 1022 can reciprocate under the action of the spring and rotate with the second mounting bracket 113 under the action of the linear guide.

In yet another embodiment of the present invention, the polishing platen 101 is detachably connected to the excitation mechanism 102 by a plurality of first connecting members 103, the first sleeve 105 is sleeved in the inner space of the base 104 outside the second mounting frame 113, a second sleeve 112 sleeved outside the camshaft 109 is arranged in the space inside the second mounting frame 113, the second sleeve 112 is rotatable with respect to the first sleeve 105, the upper end of the second sleeve 112 is connected to a first end cap 115 by a plurality of third connectors 114, an opening for the rotation of the cam shaft 109 is arranged at the axle center of the first end cover 115, a second end cover 117 is arranged at the opening at the upper end of the base 104 through a plurality of fourth connecting pieces 116, the second end cap 117 is provided with an opening at the axial center for the cam shaft 109 to extend out and connect with the polishing disk 101 to drive the polishing disk 101 to rotate.

In another example of the present invention, the first connecting member 103, the second connecting member 107, the third connecting member 114, and the fourth connecting member 116 are all used to realize the detachable connection, and specifically can adopt the bolt, the nut, the bolt, the buckle, the screw rod, and the like, and in this example, it is preferable that the first connecting member 103, the second connecting member 107, the third connecting member 114, and the fourth connecting member 116 are all bolts.

Further, as a preferred embodiment of the present invention, the rotation of the cam shaft 109 pushes the magnet mounting disc 1022, so that the spring 18 is compressed and extended, and the magnet mounting disc 1022 is reciprocally swung under the action of the first horizontal linear guide 119 and the second horizontal linear guide 120.

In an example of the present invention, the springs 18 are two in total, and constitute a spring group, and are respectively connected to the second mounting frame 113 and the magnet mounting plate 1022, and the magnet mounting plate 1022 is pushed by the rotation of the cam shaft 109, so that the springs 18 are compressed and extended, and the reciprocating swing of the magnet mounting plate 1022 is realized under the action of the first horizontal linear guide 119 and the second horizontal linear guide 120.

Further, as a preferred embodiment of the present invention, in the magnetorheological polishing apparatus, the polishing disc 101 is fixed on the magnet mounting disc 1022, the magnet mounting disc 1022 is connected to the first horizontal linear guide 119, and the lower end is connected to the spring 118. The recycling tank 9 is installed outside the polishing disk 101 and fixed on the worktable 2. A first belt wheel 110 is fixed at the lower end of the first mounting frame 108, and is linked with a second belt wheel 121 on the fifth driving mechanism 15 through a belt, so that the first mounting frame 108 rotates. The camshaft 109 is fixedly connected with the first pulley 110 and rotates under the action of the second pulley 121 of the fifth driving mechanism 15, and the camshaft 109 pushes the magnet mounting disc 1022 to move in the rotating process, so that reciprocating motion is realized under the action of the spring set, the first horizontal linear guide rail 119 and the second horizontal linear guide rail 120, and the rotating motion is converted into linear motion.

Therefore, the magnetorheological polishing device is a polishing device with synchronous rotation and reciprocating linear motion, the gear set and the cylindrical cam mechanism are adopted to realize synchronous reciprocating linear motion of the polishing disc in the rotation process, and meanwhile, the permanent magnets are arranged in a cluster mode, so that a polishing film is more uniform, and the polishing area is larger. The magnetorheological fluid circulating mechanism can provide magnetorheological fluid, prevents the magnetorheological fluid from precipitating to influence the processing effect, can make the processing track more complicated, and can remove materials more uniformly, and the polishing pad has good uniformity, high polishing precision and high processing efficiency, and is suitable for high-efficiency ultra-smooth and uniform polishing processing of planes and curved surfaces of large-diameter optical elements.

An embodiment of the utility model provides a polishing processing method who still provides adopts foretell magneto rheological burnishing device, polishing processing method specifically includes following step:

a workpiece to be machined is mounted on the position adjusting assembly 12 (specifically, mounted on the workpiece fixture 14), the lower surface of the workpiece to be machined is parallel to the upper surface of the polishing disc 101, the position of the workpiece to be machined is adjusted by the position adjusting assembly 12 (specifically, a gap between the lower surface of the workpiece to be machined and the polishing disc 101 is adjusted by a machine tool spindle of a gantry machine tool), magnetorheological fluid is added to the polishing disc 101 through the magnetorheological fluid circulating mechanism to form a uniform polishing pad under the action of a magnetic field provided by the exciting mechanism 102 (specifically, the peristaltic pump 5 is started, the magnetorheological fluid is added to the polishing disc, the magnetic field can form a more uniform polishing pad, the magnetorheological fluid forms a uniform polishing pad under the action of the magnetic field), the polishing disc 101 is driven to rotate by starting the fifth driving mechanism 15, and the polishing disc 101 synchronously reciprocates linearly under the action of the horizontal limiting assembly (specifically, the linear motion of the polishing disc 101 is realized under the action of the spring group and the horizontal guiding rail mechanism Swinging), the workpiece fixture 14 and the workpiece to be processed are driven to rotate at high speed by starting the machine tool spindle motor 10, and high-efficiency magnetorheological polishing is realized.

Further, as a preferred embodiment of the present invention, according to the characteristics and processing requirements of the processed workpiece, the method for preparing the magnetorheological fluid is to add 5 wt% abrasive, 15 wt% micron-sized carbonyl iron powder (meeting the requirements of GB/T245258-containing 2009) and 3 wt% dispersant and 1 wt% antirust into deionized water, and vibrate for 5 to 30 minutes by fully stirring to form the magnetorheological fluid.

Further, as a preferred embodiment of the present invention, a polishing method as described above is applied to the processing of a flat surface and/or a curved surface of a metal material and/or a non-metal material.

Specifically, the polishing processing method can be particularly used for the planarization processing of electronic semiconductor planes and/or optical element planes, is a novel reciprocating magneto-rheological device and a processing method thereof, and can be widely applied to the final processing procedures of large-scale optical elements, semiconductor wafers, LED substrates, liquid crystal display panels and the like.

In the embodiment of the present invention, the polishing method relates to processing of flat and curved surfaces of various metal materials and non-metal materials, and more particularly to a flat surface planarization process for electronic semiconductors and optical elements.

It is required to explain, the utility model overcomes the deficiencies of the prior art of polishing, and provides a novel magneto-rheological polishing device with more complicated and even polishing track, better processing performance and high efficiency. By adopting the magnetorheological polishing technology, the flexible small grinding head with the visco-plastic behavior is formed by utilizing the characteristic that magnetorheological (polishing) liquid generates rheology in a gradient field and shows a solid-like property, and when the flexible small grinding head has quick relative motion with a workpiece, the surface of the workpiece is subjected to a large shearing force, so that the surface material of the workpiece is removed. The workpiece after the magnetorheological polishing can obtain good optical surface precision and is easy to control by a computer, so that the workpiece with a complex surface type is obtained; no tool wear during polishing; the material is removed without introducing subsurface damage, and nano-level polishing precision is realized. But magnetic current becomes polishing and belongs to flexible processing, and it is low that the point contact material clearance is generally low during the polishing, and magnetic current becomes polishing equipment with high costs, and the structure is complicated, the utility model discloses on the research basis before borrowing for reference, a rotatory and synchronous polishing subassembly of reciprocal straight line and polishing method have been proposed, make polishing dish can realize polishing dish's rectilinear oscillation in step when the rotation, compare in polishing dish can only be at X direction and Y direction linear motion, increased the complexity of polishing orbit, make that the material is got rid of more even among the polishing process, the roughness of work piece is littleer, and the shape of face precision is higher.

The above embodiment of the present invention provides a magnetorheological polishing device, including a workbench 2, a position adjusting assembly 12, a polishing assembly 1, a magnetorheological fluid circulating mechanism and a horizontal limiting assembly, the polishing assembly 1 is disposed at the axis of the workbench 2, the polishing assembly 1 includes a base 104 and a polishing disc 101 for performing magnetorheological polishing on a workpiece to be processed, at least one fifth driving mechanism 15 for driving the polishing disc 101 to rotate is disposed outside the base 104, the polishing disc 101 extends out of an opening formed in the workbench 2 towards one side of the workbench 2, so as to drive the polishing disc 101 to rotate under the driving of the fifth driving mechanism 15; the horizontal limiting assembly is arranged between the polishing disc 101 and the base 104 and used for enabling the polishing disc 101 to perform reciprocating linear motion while the polishing disc 101 rotates so as to improve the contact time between a workpiece to be processed and the magnetorheological fluid. And based on this magnetic current becomes burnishing device and provide the polishing processing method, compare with prior art, the utility model discloses still have following advantage:

(1) the utility model provides a magnetic current becomes burnishing device control is simple, through the spring assembly who uses, has the spring assembly that can realize reciprocal fast, the high advantage of reliability, realizes the sharp swing of polishing dish when rotatory through a actuating mechanism.

(2) The utility model provides a magnetic current becomes burnishing device's polishing dish can swing in step at rotatory in-process, can improve work piece orbit complexity greatly, improves the contact time of work piece and magnetic current becomes liquid.

(3) The utility model provides a polishing dish among the magnetic current becomes burnishing device has utilized fluid dynamic pressure, has improved the pressure of magnetic current becomes liquid, and then has strengthened the material and has got rid of efficiency.

The electric appliances presented in the article can be connected with an external main controller and 220V mains supply, and the main controller can be a conventional known device controlled by a computer and the like.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

Although the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. And are neither required nor exhaustive of all embodiments. And obvious changes and modifications may be made without departing from the scope of the present invention.

Claims

1. The magnetorheological polishing device comprises a workbench and a position adjusting assembly arranged on the workbench, wherein the position adjusting assembly is used for clamping and adjusting the position of a workpiece to be processed and driving the workpiece to be processed to rotate, and the magnetorheological polishing device is characterized by further comprising:

2. The magnetorheological polishing device of claim 1, wherein the horizontal limiting assembly comprises a first horizontal linear guide rail disposed on a side of the polishing disc facing the base, a second horizontal linear guide rail matched with the first horizontal linear guide rail is correspondingly arranged on one side of the base facing the polishing disk, a rotatable cam shaft is arranged at the axis inside the base and is connected with the output end of the fifth driving mechanism, a plurality of groups of springs are arranged on the inner side of the base, the other ends of the springs are connected with one side of the excitation mechanism facing the base so as to drive the cam shaft to rotate under the driving of the fifth driving mechanism, and then the excitation mechanism is pushed to compress and stretch the spring so as to drive the excitation mechanism to perform reciprocating linear swing under the limiting action of the first horizontal linear guide rail and the second horizontal linear guide rail.

3. The magnetorheological polishing device according to claim 1, wherein the magnetorheological fluid circulating mechanism comprises a magnetorheological cooling stirring tank, a peristaltic pump, a second driving mechanism and a magnetorheological fluid nozzle, the magnetorheological cooling stirring tank is arranged on the workbench, used for storing magneto-rheological fluid, the second driving mechanism is arranged on the magneto-rheological cooling stirring box, and the output end of the second driving mechanism is connected with a stirring blade arranged on the magnetorheological cooling stirring box, used for driving the stirring blade to rotate so as to stir the stored magnetorheological fluid, the peristaltic pump is arranged on the workbench, the input end of the peristaltic pump is communicated with the magnetorheological cooling stirring box, and the output end of the peristaltic pump is communicated with the magnetorheological fluid spray head so as to pump out the stored magnetorheological fluid and spray the magnetorheological fluid to a polishing disc for magnetorheological polishing.

4. The magnetorheological polishing device according to claim 2, wherein a V-shaped groove is formed in an end surface of the polishing disk, a first belt pulley is arranged at one end of the camshaft far away from the polishing disk, a second belt pulley is arranged inside one end of the base far away from the polishing disk, the second belt pulley is connected with an output end of the fifth driving mechanism, and the second belt pulley is further connected with the first belt pulley through a first belt so as to drive the camshaft to rotate under the driving of the fifth driving mechanism.

5. The magnetorheological finishing device of claim 2, wherein the excitation mechanism comprises a magnet mounting disk having a plurality of regular hexagonal permanent magnets mounted on a surface of the magnet mounting disk.

6. The magnetorheological polishing device according to claim 3, wherein the workbench is further provided with a recovery tank for recovering magnetorheological fluid, the recovery tank is provided with a pipeline so that the recovery tank is communicated with the magnetorheological cooling stirring tank, and the peristaltic pump is connected with the magnetorheological cooling stirring tank through the pipeline.

7. The magnetorheological polishing device according to claim 1, wherein the position adjusting assembly comprises a machine tool spindle arranged on the workbench and a machine tool spindle motor arranged on the machine tool spindle, a workpiece clamp for clamping a workpiece to be machined is arranged on the machine tool spindle motor, and the machine tool spindle motor is used for driving the workpiece clamp to clamp, fix and rotate the workpiece to be machined; the outer side of the workbench is further provided with a first driving mechanism, the output end of the first driving mechanism is connected with a fourth driving mechanism arranged at the end part of the position adjusting assembly through a lead screw, and the position adjusting assembly is further provided with a third driving mechanism.

8. The magnetorheological polishing device according to claim 5, wherein the polishing assembly further comprises a second mounting bracket and a first mounting bracket respectively located in the inner space of the base, the first mounting bracket is mounted on the inner wall of the base, the second mounting bracket and the first mounting bracket are detachably connected through a plurality of second connecting pieces, the first horizontal linear guide rail is mounted on the second mounting bracket, the second horizontal linear guide rail is mounted below the magnet mounting plate, and the first mounting bracket can drive the first mounting bracket, the second mounting bracket and the magnet mounting plate to rotate under the driving of a fifth driving mechanism.