CN217637156U - Horizontal correction jig - Google Patents

Abstract

The invention provides a horizontal correction jig which comprises a base, wherein a sliding part penetrates through the upper part of the base, and a thimble post limiting sleeve is arranged at the center of the lower part of the base; and each horizontal tester is arranged on the sliding part, and can respectively move the same distance left and right along the sliding part by taking the thimble post limiting sleeve as a symmetrical reference. By adopting the horizontal correction jig disclosed by the invention, the horizontal angle of the thimble column can be corrected by comparing the indication difference of the horizontal testers at two sides, the horizontal correction jig is objective and accurate, and the working efficiency and the product yield are greatly improved.

Description

Horizontal correction jig

Technical Field

The present disclosure relates generally to the field of semiconductor manufacturing technologies, and more particularly to a horizontal correction jig.

Background

The wafer is cut to form a plurality of IC dies, and when the die is sucked by the die pick-up machine shown in FIG. 1, a vacuum suction nozzle is arranged above the dies to suck the dies, and meanwhile, the lower part of the adhesive film is pushed by the thimble rod to push the dies out of the adhesive film, and then the dies are placed on the die seat through mechanical action. The process needs to ensure that the thimble column and the film expanding ring are coplanar, otherwise, the abnormal situation shown in fig. 2 can occur, and the phenomena of poor crystal taking, back collapse and the like can be caused.

At present, in the related art, a steel ruler is placed on a film expanding ring for plane confirmation, but the steel ruler is not completely horizontal and has warpage, so that the correction precision is poor, and the steel ruler is easily misjudged by subjectivity of a measuring person.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned defects or shortcomings in the related art, it is desirable to provide a horizontal calibration jig, which can perform calibration objectively and accurately, and improve the work efficiency and the product yield.

The present disclosure provides a horizontal correction jig, the jig includes:

the device comprises a base, a sliding part is arranged above the base in a penetrating manner, and a thimble post limiting sleeve is arranged at the center below the base;

and each horizontal tester is arranged on the sliding part, and can move left and right along the sliding part by the same distance by taking the thimble post limiting sleeve as a symmetrical reference.

Optionally, in some embodiments of the present disclosure, the sliding portion includes a sliding groove and two fixing seats located on the sliding groove, and the fixing seats are provided with through holes; and each horizontal tester is respectively arranged on the fixed seat and can detect the surface to be detected through the through hole.

Optionally, in some embodiments of the present disclosure, the bottom of the fixing base and the sliding groove are in snap-fit connection.

Optionally, in some embodiments of the present disclosure, the sliding portion further includes a guide rail, two ends of the guide rail are fixed to two ends of the sliding groove, and the two fixing bases are slidably connected to the guide rail.

Optionally, in some embodiments of the present disclosure, the sliding portion includes a first sliding portion and a second sliding portion, and the first sliding portion and the second sliding portion are respectively located at two sides of the symmetry reference and are not connected.

Optionally, in some embodiments of the present disclosure, the length of the base is 420 mm, and the width of the base is 50 mm.

Optionally, in some embodiments of the present disclosure, the distance between the two level testers is less than 350 mm.

Optionally, in some embodiments of the present disclosure, a scale is further disposed on an edge of the sliding portion.

Optionally, in some embodiments of the present disclosure, the level tester comprises a pointer tester or a digital tester.

Optionally, in some embodiments of the present disclosure, the pointer-type tester includes any one of a dial indicator and a dial indicator.

According to the technical scheme, the embodiment of the disclosure has the following advantages:

the embodiment of the disclosure provides a horizontal correction jig, the jig comprises a base and two horizontal testers, wherein a sliding part is arranged above the base in a penetrating mode, a thimble column limiting sleeve is arranged at the center of the lower side of the base, the horizontal testers are all installed on the sliding part, the thimble column limiting sleeve can be used as a symmetrical reference, the thimble column limiting sleeve and the sliding part can move the same distance leftwards and rightwards respectively, and therefore the horizontal angle of the thimble column can be corrected through comparing the indication difference of the horizontal testers on two sides during actual use, the horizontal correction jig is objective and accurate, and the working efficiency and the product yield are greatly improved.

Drawings

Other features, objects and advantages of the present disclosure will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:

fig. 1 is a schematic diagram of a normal case of crystal taking provided by an embodiment of the present disclosure;

fig. 2 is a schematic diagram of a crystal taking process under an abnormal condition according to an embodiment of the disclosure;

fig. 3 is a schematic structural diagram of a horizontal calibration fixture according to an embodiment of the disclosure;

fig. 4 is a schematic structural diagram of a sliding portion according to an embodiment of the present disclosure;

fig. 5 is a schematic structural view of another sliding portion provided in the embodiment of the present disclosure;

fig. 6 is a top view of a horizontal calibration fixture according to an embodiment of the disclosure;

fig. 7 is a front view of a horizontal calibration jig according to an embodiment of the disclosure;

fig. 8 is a bottom view of a horizontal calibration fixture according to an embodiment of the disclosure.

Reference numerals:

10-horizontal correction jig, 11-base, 111-sliding part, 1111-sliding groove, 1112-fixing seat, 1113-guide rail, 1114-first sliding part, 1115-second sliding part, 1116-scale, 112-thimble column limiting sleeve and 12-horizontal tester.

Detailed Description

In order to make the technical solutions of the present disclosure better understood by those skilled in the art, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the embodiments described are only a part of the embodiments of the present disclosure, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.

The terms "first," "second," "third," "fourth," and the like in the description and claims of this disclosure and in the above-described drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the disclosure described are capable of operation in sequences other than those illustrated or described herein.

Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or modules is not necessarily limited to those steps or modules explicitly listed, but may include other steps or modules not expressly listed or inherent to such process, method, article, or apparatus.

For convenience of understanding and explanation, the horizontal correction jig provided by the embodiment of the present disclosure is explained in detail below by using fig. 3 to 8.

Please refer to fig. 3, which is a schematic structural diagram of a horizontal calibration fixture according to an embodiment of the disclosure. The horizontal calibration jig 10 includes a base 11 and two horizontal testers 12, wherein a sliding portion 111 is disposed above the base 11 in a penetrating manner, a thimble rod position-limiting sleeve 112 is disposed at the center below the base 11, and each horizontal tester 12 is mounted on the sliding portion 111 and can move left and right along the sliding portion 111 by the same distance with the thimble rod position-limiting sleeve 112 as a symmetrical reference. In practical use, the embodiment of the present disclosure may place the horizontal calibration jig 10 on the tray of the wafer picking machine, and calibrate the horizontal angle of the thimble rod by comparing the difference between readings of the horizontal testers 12 at two sides, for example, when the difference between the readings at two sides is greater than a standard value (which may be 0.2 mm), the horizontal of the thimble rod and the film expanding ring is adjusted, which is objective and accurate.

Optionally, in the embodiment of the present disclosure, the sliding portion 111 may include a sliding groove 1111 and two fixing bases 1112 located on the sliding groove 1111, wherein the fixing bases 1112 are provided with through holes, and each of the level testers 12 is respectively installed on the fixing bases 1112, and can detect the surface to be tested through the through holes, that is, each level tester 12 corresponds to one fixing base 1112.

It should be noted that, in the embodiment of the present disclosure, the connection manner of the sliding groove 1111 and the fixing seat 1112 may include, but is not limited to, two manners, namely, the bottom of the fixing seat 1112 is connected with the sliding groove 1111 in a snap-fit manner, or as shown in fig. 4, the sliding part 111 further includes a guide rail 1113, two ends of the guide rail 1113 are fixed with two ends of the sliding groove 1111, and the two fixing seats 1112 are connected to the guide rail 1113 in a sliding manner.

For example, as shown in fig. 5, in some embodiments of the present disclosure, the sliding part 111 may further include a first sliding part 1114 and a second sliding part 1115, where the first sliding part 1114 and the second sliding part 1115 are located at two sides of the symmetry reference, respectively, and are not connected. It can be understood that the first sliding portion 1114 and the second sliding portion 1115 can be similar to the sliding portion 111 shown in fig. 3, that is, both the first sliding portion 1114 and the second sliding portion 1115 can include a sliding groove 1111 and a fixing base 1112, and the connection manner of the sliding groove 1111 and the fixing base 1112 can be a snap connection, or a rail connection as shown in fig. 4, which is not described again.

Alternatively, as shown in fig. 6-8, in some embodiments of the present disclosure, the length of the base 11 may be 420 mm, the width of the base 11 may be 50 mm, and the distance between two level testers 12 is less than 350 mm. For example, in some embodiments of the present disclosure, the horizontal calibration jig 10 uses a PP head for limiting, and the aperture of the thimble stud limiting sleeve 112 may be 35.2 mm. For another example, in some embodiments of the present disclosure, the edge of the sliding portion 111 may further be provided with a scale 1116, and the position adjustment resolution of the fixing base 1112 may be 1 mm, so that the advantage of this arrangement is that it is convenient to adjust accurately, clear at a glance, and greatly improves the processing efficiency. For another example, in some embodiments of the present disclosure, the horizontal tester 12 may include a pointer tester or a digital tester, the pointer tester includes any one of a dial indicator and a dial indicator, for example, a measurement range of a gauge head may be 0 to 10 mm, a resolution is 0.1 mm, a measurement head of the dial indicator or the dial indicator contacts with a surface to be tested through a through hole of the fixing base 1112 to perform detection in actual use, and the digital tester emits a laser pulse through the through hole of the fixing base 1112 to perform detection on the surface to be tested, which may directly display a digital test result, and is more intelligent.

The horizontal correction tool that this tool provided by the embodiment of this disclosure includes base and two horizontal tester, wherein the top of base is run through and is provided with the sliding part, the below center of base is provided with thimble post stop collar, and each horizontal tester all installs on the sliding part, and can thimble post stop collar be the symmetry benchmark, remove the same distance about the sliding part respectively, consequently can be through the registration difference of comparing the horizontal tester in both sides during the in-service use, rectify the horizontal angle of thimble post, objectively accurate, work efficiency and product yield have been improved by a wide margin.

It should be noted that, the above embodiments are only used for illustrating the technical solutions of the present disclosure, and not for limiting the same; although the present disclosure has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present disclosure.

Claims (10)

1. The utility model provides a horizontal correction tool which characterized in that, the tool includes:

the device comprises a base, a sliding part, a thimble post limiting sleeve and a positioning part, wherein the sliding part penetrates through the upper part of the base;

and each horizontal tester is arranged on the sliding part, and can move left and right along the sliding part by the same distance by taking the thimble post limiting sleeve as a symmetrical reference.

2. The horizontal correction jig according to claim 1, wherein the sliding portion includes a sliding groove and two fixing seats located on the sliding groove, and the fixing seats are provided with through holes; and each horizontal tester is respectively arranged on the fixed seat and can detect the surface to be detected through the through hole.

3. The horizontal correction jig of claim 2, wherein the bottom of the fixing base is engaged with the sliding groove.

4. The horizontal correction jig according to claim 2, wherein the sliding portion further comprises a guide rail, both ends of the guide rail are fixed to both ends of the sliding groove, and the two fixing bases are slidably connected to the guide rail.

5. The horizontal correction jig according to any one of claims 1 to 4, wherein the sliding portion includes a first sliding portion and a second sliding portion, and the first sliding portion and the second sliding portion are located on both sides of the symmetry reference, respectively, and are not communicated.

6. The horizontal correction jig of claim 5, wherein the length of the base is 420 mm, and the width of the base is 50 mm.

7. The horizontal calibration jig of claim 6, wherein the distance between the two horizontal testers is less than 350 mm.

8. The horizontal correction jig according to claim 5, wherein a scale is further provided on an edge of the sliding portion.

9. The horizontal correction jig of claim 5, wherein the horizontal tester comprises a pointer tester or a digital tester.

10. The horizontal correction jig according to claim 9, wherein the pointer type tester includes any one of a dial indicator and a dial indicator.

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