CN217628607U - Device for sweeping and blowing micro-particle residues in evaporation equipment and evaporation equipment - Google Patents
Device for sweeping and blowing micro-particle residues in evaporation equipment and evaporation equipment Download PDFInfo
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- CN217628607U CN217628607U CN202221371866.XU CN202221371866U CN217628607U CN 217628607 U CN217628607 U CN 217628607U CN 202221371866 U CN202221371866 U CN 202221371866U CN 217628607 U CN217628607 U CN 217628607U
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Abstract
The utility model relates to a sweep and blow remaining device of small particle and coating by vaporization equipment among coating by vaporization equipment. It has solved the defect such as prior art design is unreasonable. The device for sweeping and blowing residual micro particles in the evaporation equipment moves the bracket; the filter screen group is arranged on the movable bracket; at least one transverse sweeping blower; the transverse sweeping and blowing machine is arranged on any surface of the thickness direction of the filter screen group; the transverse air outlet is arranged on the movable bracket, and the filter screen group is positioned above or laterally above the transverse air outlet; and the transverse air outlet of the transverse air sweeping blower is filtered by the filter screen group, enters evaporation equipment and is discharged from the transverse air outlet. The application has the advantages that: the problem that tiny particles remain in a process chamber is solved by utilizing the movement of air flow in the chamber, so that the quality of a product is more reliable, the qualification rate of the product can be improved, and the production capacity can be obviously improved.
Description
Technical Field
The utility model belongs to the technical field of silica-based organic light emitting diode evaporation equipment maintains, especially, relate to a sweep and blow remaining device of tiny particle and evaporation equipment among the evaporation equipment.
Background
The evaporation process relates to the detaching and installing processes of the lining baffle plate, wherein the lining collides with the inner wall of the chamber to generate particles of evaporation organic materials, iron, fine sand and the like in the detaching process, the particles can float in the process chamber of the evaporation equipment, the particles with the diameter larger than 0.5 mu still reach 2000ea after the alcohol and dust-free cloth are manually cleaned, the suspended particles can be attached to the surface of a new lining after the new lining is installed, and a large amount of particles can be generated in the installing process. Cannot be cleaned in a manual cleaning mode.
For example, a chinese patent discloses an OLED mask plate evaporation detection cleaning device, patent No. CN201811523639.2, which comprises a machine body, a middle layer and a lower layer, wherein the machine body is divided into an upper layer, a middle layer and a lower layer, the upper layer is an air blowing chamber, the middle layer is a mask plate placing chamber, the lower layer is an air suction chamber, a blower is installed at the top of the air blowing chamber, and a filtering membrane is arranged at the bottom; a bracket is arranged at the top of the mask plate placing chamber, and a plurality of ultraviolet lamps are fixed on the bracket; the bottom of the mask plate placing chamber is a quadrangular frustum, the bottom of the quadrangular frustum is provided with an air exhaust hole, and the top of the quadrangular frustum is provided with a plurality of mask plate placing rods; an exhaust fan and an electric cabinet are arranged in the air suction chamber, and the electric cabinet is respectively connected with the blower, the exhaust fan and the ultraviolet lamp; the mask plate placing chamber is provided with a chamber door, and an observation window is arranged on the chamber door; the air suction chamber is provided with a chamber door which is a split door, and a control switch is arranged on the chamber door; the scheme has the advantages of simple structural design and good use effect, and can effectively clean the OLED mask plate and improve the product quality.
Although the above solution has the above advantages, the solution adopts a top-down sweeping manner, fine particles are easy to be retained in the lower triangular area of the quadrangular frustum, the sweeping is not thorough, and the added lower air suction device obviously hinders the emission of the particulate matters, and the cost is increased.
Secondly, the blower direct fixation mode, its commonality is poor and all need to install a fan on every equipment, leads to the cost higher.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the above-mentioned problem, provide a can solve the remaining device of small granule and coating by vaporization equipment among the coating by vaporization equipment of sweeping of above-mentioned technical problem.
In order to achieve the above purpose, the utility model adopts the following technical proposal:
the device for sweeping and blowing the residual micro particles in the evaporation equipment moves a bracket;
the filter screen group is arranged on the movable bracket;
at least one transverse sweeping blower;
the transverse sweeping and blowing machine is arranged on any surface of the thickness direction of the filter screen group;
the transverse air outlet is arranged on the movable bracket, and the filter screen group is positioned above or laterally above the transverse air outlet;
and the transverse air outlet of the transverse air sweeping blower is filtered by the filter screen group, enters evaporation equipment and is transversely discharged from the transverse air outlet.
In the device for blowing the residual fine particles in the evaporation equipment, the transverse blowing machine is provided with one transverse blowing machine and is fixed in the middle area of any surface of the filter screen group in the thickness direction.
In the device for sweeping and blowing the residual micro-particles in the evaporation equipment, the filter screen group is fixed at the top of the movable bracket.
In the device for sweeping and blowing the residual micro-particles in the evaporation equipment, the top of the movable support is provided with a cantilever plate, and the filter screen group is fixed on the upper surface of the cantilever plate.
In the device for sweeping and blowing residual micro-particles in the evaporation equipment, the suspended end of the cantilever plate is provided with the vertical plate, the central area of the vertical plate is provided with the fan mounting hole, and the transverse sweeping blower is mounted in the fan mounting hole.
In the device for sweeping and blowing the residual micro-particles in the evaporation equipment, the bottom of the movable bracket is provided with a plurality of rollers.
The application still provides a configuration sweep the evaporation equipment that blows the remaining device of tiny particle among the evaporation equipment, evaporation equipment includes the equipment shell, and locates the uncovered of equipment shell outer peripheral face, and with the equipment shell is articulated and can with uncovered confined side is opened be equipped with in the equipment shell with the division board of equipment shell internal partitioning for last cavity and lower cavity be equipped with on the division board with go up the vertical through-hole of cavity and lower cavity intercommunication, sweep and blow the remaining device of tiny particle and be located in the evaporation equipment uncovered side, and filter screen group is just to last cavity, horizontal air outlet is just to lower cavity.
In the evaporation equipment, one vertical through hole is arranged in the central area of the separation plate.
As another scheme, in the evaporation apparatus, a plurality of vertical through holes are distributed in an array.
In the evaporation equipment, the wall of the transverse air outlet hole is flush with the wall of the lower chamber.
Compared with the prior art, the application has the advantages that:
horizontal air inlet, wind-force get into evaporation equipment and downflow, finally discharge from horizontal air outlet, have formed a U-shaped orbit of lying down in the whole process equivalently, and it can not be detained in evaporation equipment to sweep and blow more thoroughly, secondly, the hair-dryer is swept transversely to the design just can realize whole sweeping and blow, and is with low costs.
Adopt portable removal support to carry the filter screen group and transversely sweep the hair-dryer, can remove to pair corresponding evaporation plating equipment and accomplish and sweep and blow, can improve the commonality and reduce to the utmost and sweep and blow the cost.
The high-efficiency filtration solves the problem that tiny particles are remained in a process chamber by utilizing the air flow movement in the chamber in an air flow blowing mode, so that the product quality is more reliable, the qualification rate of the product can be improved, and the production capacity can be obviously improved.
Drawings
FIG. 1 is a schematic structural diagram of a device for sweeping and blowing residual fine particles in a vapor deposition apparatus.
Fig. 2 is a schematic side view of the device for sweeping and blowing the residual fine particles in the evaporation equipment provided by the present invention.
Fig. 3 is a schematic structural view of the evaporation equipment provided by the present invention.
In the figure, a movable support 1, a transverse air outlet 10, a cantilever plate 11, a vertical plate 12, a fan mounting hole 13, a roller 14, a filter screen group 2, a transverse air sweeping and blowing machine 3, an evaporation device 4, a device shell 40, an opening 41, a side opening door 42, a partition plate 43, a vertical through hole 44, an upper chamber a and a lower chamber b.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the accompanying drawings, but the present invention is not limited to these embodiments.
Example one
As shown in fig. 1-2, the device for blowing residual fine particles in a vapor deposition apparatus includes a moving frame 1, a filter screen set 2, a transverse blowing machine 3, and a transverse air outlet 10.
The mobile carriage 1 is made of a metal material, for example, stainless steel tubing welded end to form a rectangular structure. A plurality of rollers 14 are arranged at the bottom of the movable bracket 1. The rollers 14 are universal wheels.
A bottom plate is arranged at the bottom of the movable bracket 1, and rollers 14 are respectively arranged at four corners of the bottom plate.
The filter screen group 2 is detachably arranged on the movable bracket 1. Removable ways are for example: bolts, etc., since the filter screen assembly 2 is a consumable, it needs to be replaced regularly.
The number of the transverse air blowers 3 can be set to be a plurality, and the corresponding number can be determined according to the size of the actual evaporation equipment.
Preferably, the transverse blowing fan 3 of the present embodiment is installed on any one surface in the thickness direction of the filter net group 2. The thickness direction of the filter screen group 2 is the filtering passing direction.
As shown in fig. 1-3, the transverse air outlet 10 is disposed on the movable rack 1, and the filter screen assembly 2 is located above or laterally above the transverse air outlet 10. The transverse air outlet of the transverse air sweeping blower 3 is filtered by the filter screen group 2, enters the evaporation equipment 4 and is transversely discharged from the transverse air outlet 10.
This application is horizontal air inlet, and wind-force gets into evaporation equipment 4 and downflow, finally discharges from horizontal air outlet 10, has formed a U-shaped orbit of lying down in the whole process in other words, and it can not be detained in evaporation equipment 4 for small particulate matter to sweep and blow more thoroughly, secondly, the design transversely sweep hair-dryer 3 and just can realize whole sweeping and blow, with low costs.
Secondly, this application adopts portable movable support to carry the filter screen group and transversely sweep the hair-dryer, can remove to pair corresponding evaporation plating equipment 4 and accomplish to sweep and blow, can improve the commonality and reduce to the utmost and sweep and blow the cost.
Preferably, the transverse blowing fan 3 of the present embodiment has a central region fixed to either surface of the filter net assembly 2 in the thickness direction. The transverse sweeping blower 3 is connected with the mains supply through a line, and can be connected with a mobile power supply.
Preferably, the filter screen assembly 2 of the present embodiment is fixed on the top of the movable frame 1. Furthermore, a cantilever plate 11 is arranged on the top of the movable support 1, and the filter screen group 2 is fixed on the upper surface of the cantilever plate 11. Next, an upright plate 12 is provided at the suspended end of the cantilever plate 11, a fan mounting hole 13 is provided in the central region of the upright plate 12, and the horizontal blower 3 is mounted in the fan mounting hole 13.
The above-described structure ensures the stability of the fixing of the filter screen assembly 2 and the stability of the fixing of the lateral blowing fan 3.
Of course, a cylindrical cover can be designed on the cantilever plate 11 and is sleeved on the outer peripheral surface of the filter screen group 2 to play a role in dust prevention and protection. The transverse wind enters from one axial end of the cylindrical outer cover and is discharged from the other axial end.
Example two
As shown in fig. 1 to fig. 3, the present embodiment provides a vapor deposition device equipped with a device for sweeping and blowing residual fine particles in the vapor deposition device according to an embodiment, the vapor deposition device 4 includes a device housing 40, an opening 41 formed on an outer circumferential surface of the device housing 40, and a side door 42 hinged to the device housing 40 and capable of closing the opening 41, wherein after the side door 42 is opened, the device for sweeping and blowing residual fine particles in the vapor deposition device moves in the opening and fits into the opening.
A partition plate 43 for dividing the interior of the equipment shell 40 into an upper chamber a and a lower chamber b is arranged in the equipment shell 40, a vertical through hole 44 for communicating the upper chamber with the lower chamber is arranged on the partition plate 43, a device for sweeping and blowing micro-particles in the evaporation equipment is positioned on the side of the opening 41, the filter screen group 2 is opposite to the upper chamber, and the transverse air outlet 10 is opposite to the lower chamber.
The air is blown transversely into the upper chamber, then downwards into the vertical through hole 44 and the lower chamber, and finally discharged from the transverse air outlet 10, and the tiny particles can be prevented from remaining in the equipment shell 40 in the whole process.
Of course, the upper chamber is provided with an evaporation alignment mechanism, the lower chamber is provided with an evaporation source, the evaporation alignment mechanism and the evaporation source are commercially available pieces, and the structure of the embodiment is not further described.
The upper half part of the chamber is swept by the movable high-efficiency filter, so that the air flow in the chamber moves from top to bottom, and tiny particles are taken out of the chamber in the moving process, thereby solving the problem that the tiny particles are remained in the chamber.
An evaporation source at the lower part in the vacuum chamber, an alignment mechanism where the upper substrate is positioned and an inner liner on the inner wall of the chamber of the area covered by the evaporation source material; the lining has the function of preventing evaporation materials from being deposited on parts and inner walls in a cavity of the equipment, so that the lining of the cavity is maintained in PM along with the production period; the lining is removed in the lining maintenance process, and a new lining is installed;
the lining is made of stainless steel, and the surface is subjected to sand blasting treatment, so that new pollution particles can be generated in the process of maintenance during disassembly and assembly, larger particles can be wiped and cleaned by personnel, and suspended tiny particles cannot be wiped and cleaned by personnel. The problems that the micro particles are suspended in the cavity and settle on the alignment mechanism, the alignment mechanism can move up and down and rotate in production, the micro particles easily fall on the mask plate, the evaporation surface of the substrate is polluted, and black spots and packaging failure are caused before evaporation of the micro particles between film layers and thin film packaging are caused are solved.
The high-efficiency filter is movably designed through the actual size of a process chamber, the airflow direction in the chamber is customized, the upper part can generate clean airflow after being electrified, the middle part is a stainless steel support, and the bottom part is a movable roller, so that other chambers can be conveniently moved and cleaned.
The upper half part of the chamber is swept by the movable high-efficiency filter, so that the air flow in the chamber moves from top to bottom, and tiny particles are taken out of the chamber in the moving process, thereby solving the problem that the tiny particles are remained in the chamber.
The use method of the evaporation equipment in the maintenance process comprises the steps that after an inner liner is removed, large particles on the surfaces of the inner wall of a cavity, a positioning mechanism and the like are wiped, the upper half part of the cavity is swept for about 30 minutes by using the movable efficient filtering device of the embodiment, and small pollution particles generated by the old inner liner are swept completely; after a new inner liner is installed, the movable high-efficiency filtering device of the embodiment is used again to blow the upper half part of the chamber for about 20 minutes, so that the micro particles in the chamber can be removed completely, and the removal efficiency reaches 99.5% @ > 1 mu diameter.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.
Claims (10)
1. Sweep and blow remaining device of tiny particle in evaporation plating equipment, its characterized in that, the device includes:
a mobile support (1);
a filter screen group (2) mounted on the movable bracket (1);
at least one transverse sweeping blower (3);
the transverse sweeping blower (3) is arranged on any surface of the filter screen group (2) in the thickness direction;
the transverse air outlet (10) is arranged on the movable support (1), and the filter screen group (2) is positioned above or laterally above the transverse air outlet (10);
the transverse air outlet of the transverse air sweeping blower (3) is filtered by the filter screen group (2) and then enters the evaporation equipment (4) and is discharged from the transverse air outlet (10).
2. A device for sweeping the residual particles in evaporation equipment according to claim 1, wherein the transverse blower (3) has one and is fixed on the middle area of any surface of the filter screen set (2) in the thickness direction.
3. A device for sweeping vapor deposition equipment according to claim 1, wherein the filter screen set (2) is fixed on top of the movable frame (1).
4. A device for sweeping evaporation of fine particles in evaporation equipment according to claim 1 or 3, wherein the top of the moving bracket (1) is provided with a cantilever plate (11), and the filter screen set (2) is fixed on the upper surface of the cantilever plate (11).
5. A device for sweeping vapor deposition equipment according to claim 4, wherein the cantilever plate (11) has a vertical plate (12) at its free end, a fan mounting hole (13) is formed in the central area of the vertical plate (12), and the horizontal blower (3) is mounted in the fan mounting hole (13).
6. The device for sweeping and blowing the residual particles in the evaporation equipment according to claim 1, wherein the bottom of the moving bracket (1) is provided with a plurality of rollers (14).
7. A vapor deposition device equipped with the device for blowing residual fine particles in vapor deposition device according to any of claims 1 to 6, characterized in that the vapor deposition device comprises a device housing (40), an opening (41) formed in the outer peripheral surface of the device housing (40), and a side door (42) hinged to the device housing (40) and capable of closing the opening (41), a partition plate (43) for partitioning the inside of the device housing (40) into an upper chamber and a lower chamber is provided in the device housing (40), a vertical through hole (44) for communicating the upper chamber and the lower chamber is provided in the partition plate (43), the device for blowing residual fine particles in vapor deposition device is located on the side of the opening (41), the filter screen set (2) faces the upper chamber, and the transverse air outlet (10) faces the lower chamber.
8. A deposition apparatus according to claim 7, characterised in that the vertical through hole (44) is one and is located in the central area of the separation plate (43).
9. A deposition apparatus according to claim 7, wherein the vertical through holes (44) are arranged in a plurality and array.
10. The evaporation apparatus according to claim 7, wherein the wall of the lateral air outlet (10) is flush with the wall of the lower chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221371866.XU CN217628607U (en) | 2022-06-02 | 2022-06-02 | Device for sweeping and blowing micro-particle residues in evaporation equipment and evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221371866.XU CN217628607U (en) | 2022-06-02 | 2022-06-02 | Device for sweeping and blowing micro-particle residues in evaporation equipment and evaporation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217628607U true CN217628607U (en) | 2022-10-21 |
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ID=83622442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221371866.XU Active CN217628607U (en) | 2022-06-02 | 2022-06-02 | Device for sweeping and blowing micro-particle residues in evaporation equipment and evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217628607U (en) |
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2022
- 2022-06-02 CN CN202221371866.XU patent/CN217628607U/en active Active
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