CN217606800U

CN217606800U - Position correction device for silicon wafer

Info

Publication number: CN217606800U
Application number: CN202221530400.XU
Authority: CN
Inventors: 黄赛琴; 黄福仁; 陈轮兴
Original assignee: Fujian Angstrem Microelectronics Co ltd
Current assignee: Fujian Angstrem Microelectronics Co ltd
Priority date: 2022-06-17
Filing date: 2022-06-17
Publication date: 2022-10-18
Anticipated expiration: 2032-06-17

Abstract

The utility model provides a position correction device of a silicon wafer, which comprises a supporting base, a swing frame rotationally arranged on the supporting base, a correction shaft rotationally arranged on the swing frame and a jacking block rotationally arranged on the supporting base; the jacking block is positioned below the swing frame, and the jacking block is rotated to drive the correcting shaft and the swing frame to lift together; the top of the supporting base is arranged on two sides of the swing frame, quartz boat placing grooves used for placing quartz boats are formed in the two sides of the swing frame, and the silicon wafers in the quartz boats are corrected by rotating the correcting shaft. The utility model has the advantages of: can conveniently carry out the position correction to the silicon chip in the quartz boat for the horizontal part of silicon chip all faces the top position in the quartz boat, thereby can conveniently press from both sides the operation of getting to the silicon chip, avoids causing the damage to the silicon chip at the in-process of getting.

Description

Position correction device for silicon wafer

[ technical field ] A method for producing a semiconductor device

The utility model relates to a silicon chip production facility technical field, in particular to position orthotic devices of silicon chip.

[ background of the invention ]

Silicon wafers are important components for the manufacture of solar panels. In the process of silicon wafer production, the silicon wafers need to be arranged in a quartz boat, and the silicon wafers are clamped one by one when needed. The edge of every silicon chip all is formed with a horizontal part now, needs to press from both sides from the horizontal part position and gets when pressing from both sides the silicon chip to avoid causing the damage to the silicon chip. When the silicon wafer is placed on the quartz boat, the horizontal part of the silicon wafer cannot be guaranteed to be just above the quartz boat, so that great inconvenience is brought to actual clamping operation. In view of the above problems, the present inventors have conducted extensive studies and have made the present invention. In view of the above problems, the present inventors have conducted extensive studies and have made the present invention.

[ Utility model ] content

The to-be-solved technical problem of the utility model lies in providing a climbing mechanism of silicon chip correction axle, when solving current silicon chip and placing the quartz boat on, the horizontal part of unable assurance silicon chip just in time is located the top position, leads to getting the operation for the clamp of reality and brings very big inconvenient problem.

The utility model discloses a realize like this: a position correction device for a silicon wafer comprises a supporting base, a swing frame rotatably arranged on the supporting base, a correction shaft rotatably arranged on the swing frame and a jacking block rotatably arranged on the supporting base; the jacking block is positioned below the swing frame, and the jacking block is rotated to drive the correcting shaft and the swing frame to lift together; the top of the supporting base is arranged on two sides of the swing frame, quartz boat placing grooves used for placing quartz boats are formed in the two sides of the swing frame, and the silicon wafers in the quartz boats are corrected by rotating the correcting shaft.

Furthermore, a swinging frame mounting slot hole is formed in the middle of the supporting base, and one side of the swinging frame is hinged to the lower part of the swinging frame mounting slot hole through a hinged part; and a stopping part is fixedly arranged at the upper part of the installation slotted hole of the swinging frame at a position corresponding to the hinged part, and a gap for the swinging frame to ascend is reserved between the stopping part and the swinging frame.

Furthermore, the jacking block is rotatably connected with the supporting base through a rotating shaft; one end of the rotating shaft is provided with a rotating operation rod.

Furthermore, a jacking block abdicating notch is formed on the groove wall of the installation groove hole of the swing frame, and the jacking block is rotatably arranged in the jacking block abdicating notch.

Furthermore, a correcting shaft abdicating groove is formed on the swing frame, and the correcting shaft is rotatably arranged in the correcting shaft abdicating groove.

Further, mounting shaft parts are fixedly arranged at two ends of the correcting shaft, and shaft seats are fixedly arranged on the swing frame corresponding to each mounting shaft part; the mounting shaft part is rotatably connected with the shaft seat.

Furthermore, the top of supporting the base upwards extends all around and is provided with the baffle, both ends the baffle is corresponding to the axial region breach of stepping down has been seted up to the position of installation axial region, the installation axial region is located in the axial region breach of stepping down.

Furthermore, one end of the correcting shaft is fixedly connected with a rotating disc, the rotating disc is located on the outer side of the baffle, and an operating handle is arranged on the edge of the rotating disc along the axial direction outwards.

Further, the jacking block is arranged below the middle position of the correcting shaft.

Furthermore, supporting legs are fixedly arranged at four corners of the bottom of the supporting base.

Through adopting the technical scheme of the utility model, following beneficial effect has at least: through adopting the utility model discloses a position orthotic devices can conveniently carry out the position correction to the silicon chip in the quartz boat for the horizontal part of silicon chip all moves towards the top position in the quartz boat, thereby can conveniently press from both sides the operation of getting to the silicon chip, avoids causing the damage to the silicon chip at the in-process of pressing from both sides and getting.

[ description of the drawings ]

The present invention will be further described with reference to the following examples and drawings.

FIG. 1 is a top view of the position orthotic device of the present invention;

FIG. 2 is a bottom view of the position orthotic device of the present invention;

FIG. 3 is a side view of the jacking blocks and the swing frame of the present invention;

FIG. 4 is a structural diagram of a silicon wafer according to the present invention.

Description of reference numerals:

100-position correcting device, 200-silicon chip, 201-horizontal part, 1-supporting base, 11-quartz boat placing groove, 12-swinging frame installation groove hole, 121-stopping part, 122-jacking block abdicating notch, 13-baffle, 131-shaft part abdicating notch, 14-supporting foot, 2-swinging frame, 21-hinged part, 22-correcting shaft abdicating groove, 23-shaft seat, 3-correcting shaft, 31-installation shaft part, 32-rotating disc, 33-operating handle, 4-jacking block, 5-rotating shaft and 51-rotating operating rod.

[ detailed description ] A

For better understanding of the technical solutions of the present invention, the technical solutions of the present invention will be described in detail below with reference to the drawings and specific embodiments.

It should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are only for convenience in describing the embodiments and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be configured and operated in a specific orientation. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature.

Referring to fig. 1 to 4, in a preferred embodiment of a position correction device 100 for silicon wafers according to the present invention, the position correction device 100 includes a supporting base 1, a swing frame 2 rotatably disposed on the supporting base 1, a correction shaft 3 rotatably disposed on the swing frame 2, and a jacking block 4 rotatably disposed on the supporting base 1; the supporting base 1 is used for supporting a quartz boat; the swing frame 2 is used for driving the correcting shaft 3 to lift under the jacking of the jacking block 4; the correcting shaft 3 is used for driving the silicon wafers in the quartz boat to carry out rotary correction; the jacking block 4 is used for driving the swing frame 2 and the correcting shaft 3 to move up and down together.

The jacking block 4 is positioned below the swing frame 2, and the swing frame 2 and the correcting shaft 3 are driven to lift together by rotating the jacking block 4; the top of supporting base 1 is in the both sides of swinging arms 2 are equipped with the quartz boat standing groove 11 that is used for placing the quartz boat to conveniently place the quartz boat in quartz boat standing groove 11, and through rotating the silicon chip of correcting in the quartz boat is realized correcting to correcting axle 3.

Because the edge of each silicon wafer 200 is provided with the horizontal part 201, the silicon wafer 200 needs to be clamped from the horizontal part 201 when being clamped, so that the silicon wafer 200 can be prevented from being damaged; when the silicon wafer 200 is placed on the quartz boat, the horizontal portion 201 of the silicon wafer 200 cannot be located at the upper position, and the silicon wafer 200 is not convenient to clamp. Therefore, the utility model discloses a design position orthotic devices 100, this position orthotic devices 100 includes supporting base 1, the swing span 2 of rotation setting on supporting base 1, the correction axle 3 of rotation setting on swing span 2 and the jacking piece 4 of rotation setting on supporting base 1, and jacking piece 4 is located the below of correcting axle 3, make after placing the quartz boat that is equipped with the silicon chip in quartz boat standing groove 11, make jacking piece 4 be in the horizontality, at this moment, correction axle 3 and swing span 2 all are in the minimum position, silicon chip 200 in the quartz boat can be with the surface contact who corrects axle 3 except horizontal part 201; by rotating the correcting shaft 3, the correcting shaft 3 can drive the silicon wafers 200 in contact with the correcting shaft to rotate together, and when the silicon wafers 200 rotate until the horizontal part 201 faces downwards, the horizontal part 201 is not in surface contact with the correcting shaft 3, so that the silicon wafers 200 do not rotate together with the correcting shaft 3, and after the first rotation adjustment, the horizontal parts 201 of all the silicon wafers 200 in the quartz boat face downwards. Then it rises together to rotate jacking piece 4 and drive and correct axle 3 and swing span 2, correct axle 3 and can contact with the horizontal part 201 of silicon chip 200 after rising the take the altitude, 4 stall of jacking piece this moment, correct axle 3 through rotating, correct axle 3 and can drive all silicon chips 200 in the quartz boat and carry out synchronous rotation together, all silicon chips 200 all rotate to horizontal part 201 when towards the top in the quartz boat, stall is corrected axle 3, the correction to all silicon chips 200 in the quartz boat has just so far been accomplished, make the horizontal part 201 of all silicon chips 200 all towards the top, thereby the convenience is got silicon chip 200 clamp.

Through adopting the utility model discloses a position orthotic devices 100 can conveniently carry out the position correction to the silicon chip in the quartz boat for the horizontal part of silicon chip all moves towards the top position in the quartz boat, thereby can conveniently press from both sides the operation of getting to the silicon chip, avoids causing the damage to the silicon chip at the in-process of pressing from both sides and getting.

In the embodiment of the present invention, a swing frame mounting slot 12 is formed in the middle of the supporting base 1, and one side of the swing frame 2 is hinged to the lower portion of the swing frame mounting slot 12 through a hinge portion 21, so that the swing frame 2 can swing up and down; a stopping part 121 is fixedly arranged at the position corresponding to the hinge part 21 at the upper part of the installation slot 12 of the swing frame, a gap for the swing frame 2 to rise is reserved between the stopping part 121 and the swing frame 2, and after the swing frame 2 swings upwards to the right position, the stopping part 121 can limit the swing frame 2, so that the swing frame 2 cannot swing upwards continuously.

In the embodiment of the present invention, the jacking block 4 is rotatably connected to the supporting base 1 through a rotating shaft 5; one end of the rotary shaft 5 is provided with a rotary operation lever 51. When in use, an operator can operate the rotating shaft 5 to rotate through the rotating operation rod 51, and then drive the jacking block 4 to rotate through the rotating shaft 5, so that the jacking block 4 can drive the correcting shaft 3 and the swing frame 2 to perform lifting adjustment together.

The utility model discloses an in the embodiment, be formed with jacking piece breach 122 of stepping down on the cell wall of swing span installation slotted hole 12, jacking piece 4 rotates the setting and is in jacking piece breach 122 of stepping down, jacking piece breach 122 of stepping down can ensure on the one hand that jacking piece 4 can smoothly rotate, and on the other hand can play spacing effect to jacking piece 4, guarantees that jacking piece 4 can not the axial float.

In the embodiment of the present invention, the swing frame 2 is formed with a correction shaft receding groove 22, so as to facilitate the rotation of the correction shaft 3 on the swing frame 2; the correcting shaft 3 is rotatably disposed in the correcting shaft receding groove 22.

In the embodiment of the present invention, in order to rotatably support the correcting shaft 3, the two ends of the correcting shaft 3 are fixedly provided with the mounting shaft portions 31, and the shaft seat 23 is fixedly provided on the swing frame 2 corresponding to each mounting shaft portion 31; the mounting shaft 31 is rotatably connected to the shaft seat 23. The utility model discloses when concrete implementation, installation axial region 31 sets up the intermediate position of 3 tip of correction axle, just the radius of installation axial region 31 is less than the radius of correction axle 3.

In the embodiment of the present invention, the baffle 13 extends upwards from the top of the supporting base 1, and the baffle 13 can be used to limit the quartz boat placed on the quartz boat placing groove 11, so that the quartz boat will not generate an offset when the silicon wafers in the quartz boat are rotationally corrected; both ends baffle 13 is corresponding to the axial region breach of stepping down 131 has been seted up to installation axial region 31's position, installation axial region 31 is located in the axial region breach of stepping down 131, baffle 13 just can not influence the normal rotation of correcting axle 3 like this.

In the embodiment of the present invention, in order to facilitate the rotation operation of the correcting shaft 3, the one end of the correcting shaft 3 is fixedly connected with a rotating disc 32, the rotating disc 32 is located outside the baffle 13, and an operating handle 33 is provided outwards along the axial direction at the edge of the rotating disc 32. In operation, an operator holds the operating handle 33 by hand to rotate the rotating disc 32, and the rotating disc 32 drives the correcting shaft 3 to rotate, so that the silicon wafers on the quartz boat are adjusted by the rotation of the correcting shaft 3.

In the embodiment of the present invention, in order to make the jacking block 4 stably jack up the correcting shaft 3 and the swing frame 2 together, the jacking block 4 is disposed below the middle position of the correcting shaft 3.

In the embodiment of the present invention, the supporting legs 14 are fixed at four corners of the bottom of the supporting base 1. By arranging the supporting legs 14 at the four corners of the bottom of the supporting base 1, on one hand, the whole position correction device 100 can be stably supported, and on the other hand, the jacking blocks 4 can be conveniently jacked up together with the correcting shaft 3 and the swing frame 2 from the bottom of the supporting base 1.

Although specific embodiments of the invention have been described herein, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, as equivalent modifications and variations within the spirit of the invention are intended to be covered by the appended claims.

Claims

1. A position correcting device for a silicon wafer is characterized in that: the device comprises a supporting base, a swinging frame rotatably arranged on the supporting base, a correcting shaft rotatably arranged on the swinging frame and a jacking block rotatably arranged on the supporting base; the jacking block is positioned below the swing frame, and the jacking block is rotated to drive the correcting shaft and the swing frame to lift together; the top of the supporting base is arranged on two sides of the swing frame, quartz boat placing grooves used for placing quartz boats are formed in the two sides of the swing frame, and the silicon wafers in the quartz boats are corrected by rotating the correcting shaft.

2. The orthotic device of claim 1, wherein: a swinging frame mounting slot hole is formed in the middle of the supporting base, and one side of the swinging frame is hinged to the lower part of the swinging frame mounting slot hole through a hinged part; and a stopping part is fixedly arranged at the upper part of the installation slotted hole of the swinging frame at a position corresponding to the hinged part, and a gap for the swinging frame to ascend is reserved between the stopping part and the swinging frame.

3. The orthotic device of claim 2, wherein: the jacking block is rotatably connected with the supporting base through a rotating shaft; one end of the rotating shaft is provided with a rotating operation rod.

4. The orthotic device of claim 2, wherein: and a jacking block abdicating notch is formed on the groove wall of the swinging frame mounting groove hole, and the jacking block is rotatably arranged in the jacking block abdicating notch.

5. The orthotic device of claim 1, wherein: the swing frame is provided with a correction shaft abdicating groove, and the correction shaft is rotatably arranged in the correction shaft abdicating groove.

6. The orthotic device of claim 1, wherein: mounting shaft parts are fixedly arranged at two ends of the correcting shaft, and shaft seats are fixedly arranged on the swinging frame corresponding to each mounting shaft part; the mounting shaft part is rotatably connected with the shaft seat.

7. The orthotic device of claim 6, wherein: the top of supporting the base upwards extends all around and is provided with the baffle, both ends the baffle is corresponding to the position of installation axial region has been seted up the axial region and has been stepped down the breach, the installation axial region is located in the axial region notch of stepping down.

8. The orthotic device of claim 7, wherein: one end of the correcting shaft is fixedly connected with a rotating disc, the rotating disc is located on the outer side of the baffle, and an operating handle is arranged on the edge of the rotating disc outwards along the axial direction.

9. The orthotic device of claim 1, wherein: the jacking block is arranged below the middle position of the correcting shaft.

10. The orthotic device of claim 1, wherein: supporting legs are fixedly arranged at four corners of the bottom of the supporting base.