CN217606804U

CN217606804U - Jacking mechanism of silicon chip correction shaft

Info

Publication number: CN217606804U
Application number: CN202221529784.3U
Authority: CN
Inventors: 黄赛琴; 黄福仁; 陈轮兴
Original assignee: Fujian Angstrem Microelectronics Co ltd
Current assignee: Fujian Angstrem Microelectronics Co ltd
Priority date: 2022-06-17
Filing date: 2022-06-17
Publication date: 2022-10-18
Anticipated expiration: 2032-06-17

Abstract

The utility model provides a jacking mechanism of a silicon wafer correcting shaft, which comprises a swing frame arranged in a rotating way, a rotating shaft arranged on one side of the swing frame in a rotating way, a jacking block fixedly arranged on the rotating shaft and a correcting shaft arranged on the swing frame in a rotating way; the jacking block is positioned below the swing frame, and the rotating shaft drives the jacking block to drive the correcting shaft and the swing frame to lift together when rotating. The utility model has the advantages that: through adopting the utility model discloses a climbing mechanism can realize carrying out lift adjustment to the position of correcting the axle well to make the correction axle can drive the silicon chip and rotate the realization position and correct.

Description

Jacking mechanism of silicon chip correction shaft

[ technical field ] A method for producing a semiconductor device

The utility model relates to a silicon chip production facility technical field, in particular to climbing mechanism of silicon chip correction axle.

[ background of the invention ]

Silicon wafers are important components for the manufacture of solar panels. In the process of silicon wafer production, the silicon wafers are required to be arranged in a quartz boat and are clamped one by one when required. The edge of each existing silicon wafer is provided with a horizontal part, and when the silicon wafer is clamped, the silicon wafer needs to be clamped from the horizontal part, so that the silicon wafer is prevented from being damaged.

When the silicon chip was on placing the quartz boat, the horizontal part of unable assurance silicon chip just in time was located the top position, leads to getting the operation for reality and brings very big inconvenience. In order to correct the positions of the silicon wafers placed on the quartz boat so that the horizontal parts of the silicon wafers can be located at the upper positions, the inventor researches and develops a position correcting device for the silicon wafers, and the silicon wafers on the quartz boat can be driven to rotate and be corrected by the rotation of a correcting shaft; because the silicon wafer has a height difference in the process of rotating due to the existence of the horizontal part, the lifting problem of the correcting shaft needs to be solved in order to ensure that the correcting shaft can correct the silicon wafer. In view of the above problems, the present inventors have conducted extensive studies and have made the present invention.

[ Utility model ] content

The to-be-solved technical problem of the utility model lies in providing a climbing mechanism of silicon chip correction axle, solves the problem of correcting the axle lift to make the correction axle can drive the silicon chip and rotate the realization position and correct.

The utility model discloses a realize like this: a jacking mechanism of a silicon wafer correcting shaft comprises a swing frame which is rotatably arranged, a rotating shaft which is rotatably arranged on one side of the swing frame, a jacking block which is fixedly arranged on the rotating shaft and a correcting shaft which is rotatably arranged on the swing frame; the jacking block is positioned below the swing frame, and the rotating shaft drives the jacking block to drive the correcting shaft and the swing frame to lift together when rotating.

Further, the jacking block is arranged below the middle position of the correcting shaft.

Furthermore, the swing frame is close to one side of jacking piece is provided with the correction axle groove of stepping down, the correction axle is installed the correction axle is stepped down the inslot.

Further, one end of the rotating shaft is provided with a rotating operation rod.

Furthermore, two ends of the correcting shaft extend outwards to form mounting shaft parts; the radius of the installation shaft part is smaller than that of the correction shaft, and the installation shaft part is arranged in the middle of the end face of the correction shaft.

Furthermore, a shaft seat is fixedly arranged on the swing frame at a position corresponding to the mounting shaft part, the mounting shaft part is rotatably connected with the shaft seat, and the top of the correcting shaft is higher than the upper end of the shaft seat.

Furthermore, the both ends of swing span one side have set firmly and have rotated connecting portion, two it forms the centre gripping notch to rotate between the connecting portion, just it is located and keeps away from to rotate connecting portion one side of jacking piece.

Furthermore, the jacking block is a square block.

Through adopting the technical scheme of the utility model, following beneficial effect has at least: through adopting the utility model discloses a climbing mechanism can realize carrying out lift adjustment to the position of correcting the axle well to make the correction axle can drive the silicon chip and rotate the realization position and correct.

[ description of the drawings ]

The invention will be further described with reference to the following examples with reference to the accompanying drawings.

Fig. 1 is a top view of a jacking mechanism of a silicon wafer correcting shaft according to the present invention;

FIG. 2 is a side view of the jacking mechanism of the silicon wafer correcting shaft of the present invention;

FIG. 3 is a schematic diagram of a silicon wafer structure.

Description of reference numerals:

100-jacking mechanism, 200-silicon chip, 201-horizontal part, 1-swing frame, 11-correcting shaft abdicating groove, 12-shaft seat, 13-rotation connecting part, 131-articulated shaft, 14-clamping notch, 2-rotation shaft, 21-rotation operating rod, 3-jacking block, 4-correcting shaft and 41-installation shaft part.

[ detailed description ] embodiments

For better understanding of the technical solutions of the present invention, the technical solutions of the present invention will be described in detail below with reference to the drawings and specific embodiments.

It should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are only for convenience in describing the embodiments and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be configured and operated in a specific orientation. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature.

Referring to fig. 1 to 3, a jacking mechanism 100 for a silicon wafer correcting shaft of the present invention includes a swing frame 1 rotatably disposed, a rotating shaft 2 rotatably disposed at one side of the swing frame 1, a jacking block 3 fixedly disposed on the rotating shaft 2, and a correcting shaft 4 rotatably disposed on the swing frame 1; the swing frame 1 is used for driving the correcting shaft 4 to swing up and down so as to raise the position of the correcting shaft 4 or lower the position of the correcting shaft 4; the rotating shaft 2 is used for driving the jacking block 3 to rotate so as to drive the correcting shaft 4 and the swing frame 1 to lift together by utilizing the rotation of the jacking block 3; the correcting shaft 4 is of a cylindrical structure, and the correcting shaft 4 is mainly used for correcting the position of the silicon wafer.

Jacking piece 3 is located the below of swing span 1 to make things convenient for jacking piece 3 from the below with swing span 1 and correct the up jacking of axle 4, rotation axis 2 drives when rotating jacking piece 3 orders about correct axle 4 and swing span 1 and go up and down together.

The jacking mechanism 100 comprises a swing frame 1 which is arranged in a rotating way, a rotating shaft 2 which is arranged on one side of the swing frame 1 in a rotating way, a jacking block 3 which is fixedly arranged on the rotating shaft 2 and a correcting shaft 4 which is arranged on the swing frame 1 in a rotating way; when in specific use, when the position of the silicon wafer 200 needs to be adjusted so that the horizontal part 201 of the silicon wafer 200 faces downwards, the rotating shaft 2 is not rotated, the jacking block 3 is in a horizontal state at the moment, the correcting shaft 4 and the swinging frame 1 are both in the lowest point position, the outer edge of each silicon wafer 200 on the quartz boat can be in contact with the correcting shaft 4 except the horizontal part 201, and the horizontal part 201 of each silicon wafer 200 on the quartz boat can face downwards by rotating the correcting shaft 4; when the position of the silicon wafer 200 needs to be corrected, the jacking block 3 can be driven to rotate and swing by rotating the rotating shaft 2, the jacking block 3 can jack up the correcting shaft 4 and the swing frame 1 together in the rotating and swinging process, so that the correcting shaft 4 can be contacted with the horizontal part 201 of the silicon wafer 200, and the horizontal part 201 of each silicon wafer 200 on the quartz boat can be rotated to the upper position by rotating the correcting shaft 4; therefore, through adopting the utility model discloses a climbing mechanism 100 can realize carrying out lift adjustment to the position of correcting axle 4 well to make correcting axle 4 can drive silicon chip 200 and rotate the realization position and correct.

The utility model discloses an in the embodiment, jacking piece 3 sets up the below of correcting the intermediate position of axle 4, when utilizing jacking piece 3 to drive swing span 1 and correct axle 4 and go up and down the regulation like this, can guarantee to correct the both ends atress balance of axle 4 and swing span 1 to improve stability.

In the embodiment of the utility model, for the convenience install correction axle 4 on swing span 1 with rotating, swing span 1 is being close to one side of jacking piece 3 is provided with correction axle groove 11 of stepping down, correction axle 4 is installed in correction axle groove 11 of stepping down.

In the embodiment of the present invention, in order to operate the rotating shaft 2 to rotate, one end of the rotating shaft 2 is provided with a rotating operation rod 21.

In the embodiment of the present invention, the two ends of the correcting shaft 4 are extended outward to form the mounting shaft portions 41, so as to facilitate the rotational mounting of the correcting shaft 4 through the mounting shaft portions 41; the radius of the attachment shaft portion 41 is smaller than the radius of the correction shaft 4, and the attachment shaft portion 41 is provided at an intermediate position of the end surface of the correction shaft 4.

The utility model discloses an in the embodiment, on the swing span 1 corresponding the position of installation axial region 41 has set firmly axle bed 12, installation axial region 41 with axle bed 12 rotates to be connected, the top of correcting axle 4 is in and is higher than the upper end position of axle bed 12 has both realized the rotation installation of correcting axle 4 like this, makes axle bed 12 can not contact the silicon chip again, can avoid influencing the correction of correcting axle 4 to the silicon chip.

The utility model discloses an in the embodiment, for the swing installation of better realization swing span 1, the both ends of swing span 1 one side have set firmly rotation connecting portion 13, two form centre gripping notch 14 between the rotation connecting portion 13, just rotation connecting portion 13 is located and keeps away from one side of jacking piece 3. The utility model discloses when concrete implementation, it sets articulated shaft 131 on the connecting portion 13 to rotate the connection to utilize articulated shaft 131 to realize.

As a preferred embodiment of the present invention, the jacking block 3 is a square block, jacking before the correction shaft 4, the jacking block 3 contacts with the bottom of the swing frame 1 to utilize the jacking block 3 to support the swing frame 1.

The embodiment of the utility model provides an in, swing span 1 and jacking piece 3 all adopt rigid plastic to make and form, rotation axis 2 and correction axle 4 all adopt metal material to make and form.

Although specific embodiments of the invention have been described herein, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, as equivalent modifications and variations within the spirit of the invention are intended to be covered by the appended claims.

Claims

1. The utility model provides a climbing mechanism of silicon chip correction axle which characterized in that: the lifting device comprises a swing frame which is rotatably arranged, a rotating shaft which is rotatably arranged on one side of the swing frame, a jacking block which is fixedly arranged on the rotating shaft and a correcting shaft which is rotatably arranged on the swing frame; the jacking block is located below the swing frame, and the rotating shaft drives the jacking block to drive the correcting shaft and the swing frame to lift together when rotating.

2. The jacking mechanism of claim 1, wherein: the jacking block is arranged below the middle position of the correcting shaft.

3. The jacking mechanism of claim 1, wherein: the swing frame is close to one side of jacking piece is provided with the correction axle groove of stepping down, the correction axle is installed the correction axle is stepped down in the inslot.

4. The jacking mechanism of claim 1, wherein: one end of the rotating shaft is provided with a rotating operation rod.

5. The jacking mechanism of claim 1, wherein: mounting shaft parts extend outwards from two ends of the correcting shaft; the radius of the installation shaft part is smaller than that of the correction shaft, and the installation shaft part is arranged in the middle of the end face of the correction shaft.

6. The jacking mechanism of claim 5, wherein: and a shaft seat is fixedly arranged on the swinging frame at a position corresponding to the mounting shaft part, the mounting shaft part is rotatably connected with the shaft seat, and the top of the correcting shaft is higher than the upper end of the shaft seat.

7. The jacking mechanism of claim 1, wherein: the two ends of one side of the swing frame are fixedly provided with rotating connecting parts, a clamping notch is formed between the two rotating connecting parts, and the rotating connecting parts are located on one side far away from the jacking block.

8. The jacking mechanism of claim 1, wherein: the jacking block is a square block.