CN217605581U

CN217605581U - Device for preparing granular silicon check rod

Info

Publication number: CN217605581U
Application number: CN202123021832.6U
Authority: CN
Inventors: 马增
Original assignee: Individual
Current assignee: Individual
Priority date: 2021-12-04
Filing date: 2021-12-04
Publication date: 2022-10-18
Anticipated expiration: 2031-12-04

Abstract

The utility model provides a device of preparation granule silicon check rod, relates to the intraocular lens preparation field, the utility model discloses a set up cold crucible of electromagnetism (7) at heater (5) middle part, cup jointed insulating cover (3) on the outer fringe face of the cold crucible of electromagnetism, drop into on the upper portion of the cold crucible of electromagnetism middle part cavity and treat fused granule silicon (2), because the crucible wall of the cold crucible of electromagnetism is owing to be water-cooling structure, make the solution package cool off rapidly and form the column to with crucible wall contactless, along with the axle descends gradually down, form stable solid-liquid-solid conversion in the cold crucible of electromagnetism, finally draw into the column polycrystalline silicon check rod of fixed length, the utility model discloses the biggest advantage is that the energy consumption is low, and is pollution-free, and degree of automation is high, is fit for popularization and application on a large scale.

Description

Device for preparing granular silicon check rod

Technical Field

The utility model relates to an intraocular lens preparation field, concretely relates to device of preparation granule silicon check rod.

Background

It is known that with the rapid development of information technology and photovoltaic industry and the interest of the related policies, the global demand for poly/single crystal silicon is growing rapidly and the market is short-lived. Under the influence, the price of poly/monocrystalline silicon used as a main raw material of the solar cell rapidly rises, and a plurality of domestic enterprises are expanding production.

The existing methods for preparing the polycrystalline silicon mainly comprise a Siemens reduction method and a fluidized bed method, wherein the granular polycrystalline silicon prepared by the fluidized bed method is just or just a army bump, is greatly superior to the Siemens reduction method in the aspects of reducing energy consumption and preparing early-stage seed crystals, and is expected to occupy great market share in the future.

In the subsequent production process of the granular silicon, the quality of the granular silicon is the most critical step, the existing detection method is that the granular silicon is placed into a crucible of a czochralski furnace, the granular silicon in the crucible is melted by a heater, then a check rod is drawn, and the check rod drawn by the method is polluted by the crucible, so that the real component of the granular silicon cannot be detected, and the method is abandoned by the industry. In order to solve the technical problem, a person skilled in the art puts granular silicon into a quartz tube, then introduces gas from the bottom of the quartz tube, then sets a vibration mechanism at the lower part of the quartz tube to vibrate the quartz tube, sets a high-frequency coil at the upper part of the quartz tube, sets a telescopic mechanism capable of moving up and down above the quartz tube, sets seed crystals at the lower end of the telescopic mechanism, starts the telescopic mechanism to make the seed crystals descend, at the moment, the high-frequency coil heats the lower end heads of the seed crystals, after the lower end heads of the seed crystals are melted, the granular silicon close to the lower part of the high-frequency coil is gradually melted and is melted with the melting liquid at the lower end heads of the seed crystals into a whole, at the moment, the telescopic mechanism drives the seed crystals to slowly ascend, when the molten liquid is gradually crystallized along with the reduction of the temperature after leaving the drawing hole of the high-frequency coil, the formed new columnar crystal is the primary rod of the granular silicon inspection rod, more silicon nodules (namely, uneven surface) can be formed on the surface of the inspection rod drawn by the method, then the primary rod of the granular silicon inspection rod is placed into zone melting equipment (a phosphorus inspection furnace or a boron inspection furnace) for melting and drawing at least once to achieve the purpose of shaping, so that the outer surface of the granular silicon inspection rod is smooth, the next detection can be carried out, in the whole process, manual intervention is needed, the granular silicon preform rod is unstable in control and forming, the production efficiency of the granular silicon inspection rod is extremely low, the production cost of enterprises is greatly increased, and the like.

Disclosure of Invention

In order to overcome not enough among the background art, the utility model provides a device of preparation granule silicon check rod, the utility model discloses a set up the cold crucible of electromagnetism in the heater middle part, put granule silicon material in the cold crucible of electromagnetism, utilize the cold crucible technique of electromagnetism, preparation granule silicon check prefabricated stick, the biggest advantage is low for the energy consumption, and is pollution-free, and degree of automation is high.

In order to achieve the purpose, the utility model adopts the following technical scheme:

the device for preparing the granular silicon check rod comprises an insulating sleeve, a heater and an electromagnetic cold crucible, wherein the insulating sleeve is sleeved on the outer edge surface of the electromagnetic cold crucible, the heater is arranged on the periphery of the insulating sleeve, granular silicon to be melted is put into the upper part of a middle cavity of the electromagnetic cold crucible, seed crystals are arranged in the cavity of the electromagnetic cold crucible below the granular silicon, and the seed crystals are arranged on a seed crystal clamping seat to form the device for preparing the granular silicon check rod.

According to the device for preparing the granular silicon inspection rod, the electromagnetic cold crucible is of a circular structure, at least one isolation groove penetrating to the lower surface of the electromagnetic cold crucible is formed in the upper surface of the electromagnetic cold crucible, an insulating partition plate is arranged in each isolation groove, and a cooling channel is arranged in the electromagnetic cold crucible.

The device for preparing the granular silicon inspection rod is characterized in that five separation grooves are uniformly distributed on the electromagnetic cold crucible to divide the electromagnetic cold crucible into five arc-shaped blocks, an insulating partition plate is arranged between every two arc-shaped blocks, a group of cooling water channels are arranged in each arc-shaped block, one end of each cooling water channel is connected with a water inlet, and the other end of each cooling water channel is connected with a water outlet.

According to the device for preparing the granular silicon inspection rod, a group of cooling water channels are arranged on the arc-shaped blocks, the cooling water channels on each arc-shaped block are connected in series to form a group of cooling channels, one end of each cooling channel is connected with the water inlet, and the other end of each cooling channel is connected with the water outlet.

According to the device for preparing the granular silicon check rod, an automatic feeding mechanism is arranged above the electromagnetic cold crucible, and a discharge hole of the automatic feeding mechanism is communicated with an opening in the upper portion of the electromagnetic cold crucible.

In the device for preparing the granular silicon inspection rod, the turn-to-turn distances of the heaters are uniformly distributed from bottom to top.

In the device for preparing the granular silicon check rod, the periphery of the heater is sleeved with the closed furnace chamber.

In the device for preparing the granular silicon check rod, the heater is externally connected with a heating power supply.

In the device for preparing the granular silicon check rod, the heater is a medium-frequency induction heating coil.

According to the device for preparing the granular silicon inspection rod, the preheating rod which moves up and down and rotates is arranged above the electromagnetic cold crucible.

Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:

the utility model discloses a set up the cold crucible of electromagnetism at the heater middle part, cup jointed insulating cover on the outer fringe face of the cold crucible of electromagnetism, drop into on the upper portion of the cold crucible middle part cavity of electromagnetism and treat fused granular silicon, because the crucible wall of the cold crucible of electromagnetism is water-cooling structure, make the solution package cool off rapidly and form the column to with crucible wall contactless, along with the lower axle descends gradually, form stable solid-liquid-solid conversion in the cold crucible of electromagnetism, finally draw into the column polycrystalline silicon check rod of fixed length, the utility model discloses the biggest advantage is that the energy consumption is low, and is pollution-free, and degree of automation is high, is fit for popularization and application on a large scale.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2 is a schematic top view of the structure of FIG. 1;

in the figure: 1. an automatic feeding mechanism; 2. granular silicon; 3. an insulating sleeve; 4. melting silicon; 5. a heater; 6. seed crystal; 7. an electromagnetic cold crucible; 8. a water inlet; 9. a water outlet; 10. a cooling water channel; 11. an isolation trench; 12. an insulating spacer.

Detailed Description

The present invention will be explained in more detail by the following examples, and the object of the present invention is to protect all changes and modifications within the scope of the present invention, and the present invention is not limited to the following examples;

in the description of the present invention, it is to be understood that the terms "center", "lateral", "length", "width", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "side", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The device for preparing the granular silicon inspection rod comprises an insulating sleeve 3, a heater 5 and an electromagnetic cold crucible 7, wherein the electromagnetic cold crucible 7 is of a circular structure, at least one isolation groove 11 penetrating to the lower surface of the electromagnetic cold crucible 7 is arranged on the electromagnetic cold crucible 7, an insulating partition plate 12 is respectively arranged in each isolation groove 11, and a cooling channel is arranged in the electromagnetic cold crucible 7; further, in implementation, as shown in fig. 2, five separation grooves 11 are uniformly distributed on the electromagnetic cold crucible 7 to divide the electromagnetic cold crucible 7 into five arc-shaped blocks, an insulating partition plate 12 is respectively arranged between every two arc-shaped blocks, a group of cooling water channels 10 is respectively arranged in each arc-shaped block, one end of each cooling water channel 10 is connected with a water inlet 8, and the other end of each cooling water channel 10 is connected with a water outlet 9, that is, one path of cooling water is independently passed through each arc-shaped block for cooling; furthermore, a group of cooling water channels 10 can be arranged on the arc-shaped blocks, the cooling water channels 10 on each arc-shaped block are connected in series to form a group of cooling channels, one end of each cooling channel is connected with the water inlet 8, and the other end of each cooling channel is connected with the water outlet 9. The cooling channels on the five arc-shaped blocks share one path of cooling water, namely, the water outlet of the cooling water channel 10 on the first arc-shaped block is connected with the water inlet of the cooling water channel 10 on the second arc-shaped block, the water outlet of the cooling water channel 10 on the second arc-shaped block is connected with the water inlet of the cooling water channel 10 on the third arc-shaped block, and after the cooling water is sequentially connected in series, the cooling water finally flows out from the outlet of the cooling water channel 10 on the first arc-shaped block;

further, an automatic feeding mechanism 1 is arranged above the electromagnetic cold crucible 7, a discharge port of the automatic feeding mechanism 1 is communicated with an opening at the upper part of the electromagnetic cold crucible 7, and the automatic feeding mechanism 1 is not a key point for protection of the utility model, and meanwhile, the automatic feeding mechanism 1 can be directly purchased and obtained, so that the structure of the automatic feeding mechanism is not described in detail;

further, an insulating sleeve 3 is sleeved on the outer edge surface of the electromagnetic cold crucible 7, a heater 5 is arranged on the periphery of the insulating sleeve 3, the turn pitch of the heater 5 is uniformly distributed from bottom to top, then a closed furnace chamber is sleeved on the periphery of the heater 5, namely the insulating sleeve 3, the heater 5 and the electromagnetic cold crucible 7 are arranged in the closed furnace chamber, the heater 5 is externally connected with a heating power supply, and in the implementation, the heater 5 can be selected from a medium-frequency induction heating coil;

furthermore, a preheating rod which moves up and down and rotates is arranged above the electromagnetic cold crucible 7.

Further, granular silicon 2 to be melted is put into the upper part of the middle cavity of the electromagnetic cold crucible 7, a seed crystal 6 is arranged in the cavity of the electromagnetic cold crucible 7 below the granular silicon 2, and the seed crystal 6 is arranged on a seed crystal holder to form the device for preparing the granular silicon inspection rod.

The utility model discloses when concrete implementation, at first accomplish insulating cover 3 and

heater

5 and 7 equipment of electromagnetism cold crucible to be connected with outside water route and power and accomplish, adjusting device mounted position guarantees device and lower axle and automatic material conveying mechanism 1's concentricity, axiality, radial runout etc..

Further, loading the granular silicon 2 to be treated into an automatic feeding mechanism 1;

further, the treated seed crystal 6 is loaded into the lower shaft chucking mechanism, and the lower shaft is moved to the middle-lower section in the electromagnetic cold crucible 7.

Further, the preheating rod is moved into the electromagnetic cold crucible 7, taking note of the relative position relation with the seed crystal 6;

furthermore, a cooling water valve is opened, and the inspection device ensures that no leakage point exists.

Further, close the furnace chamber door, open vacuum ball valve and vacuum pump evacuation, lock the furnace chamber door step by step simultaneously.

Further, when the vacuum degree reaches a preset value, the electric ball valve and the vacuum pump are closed, protective gas is filled to a pressure value, and the gas inlet pressure and the gas exhaust opening degree are adjusted, so that the furnace pressure is stable all the time.

And further, turning on the intermediate frequency power supply, adjusting the power to a set value, and ensuring that the preheating device reaches the temperature.

Further, the preheating device pushes the seed crystal 6 out to the upper section of the electromagnetic cold crucible 7 after red is led out by the preheating device and rotates to the initial position.

Further, the power is increased gradually to make the seed crystal 6 reach a melting state, and continuous feeding is carried out according to a set feeding speed.

Further, the power is adjusted to enable the granular silicon 2 to be melted quickly after being put into the molten silicon 4, a hemispherical melting package can be formed due to the action of electromagnetic force, and the lower shaft is started to descend at a set speed at a constant speed.

Further, since the electromagnetic cold crucible 7 has a specific temperature gradient from top to bottom, the crucible wall of the electromagnetic cold crucible 7 is of a water cooling structure, so that the solution bag is rapidly cooled and formed into a column shape, and is not in contact with the crucible wall, stable solid-liquid-solid conversion is formed in the electromagnetic cold crucible 7 along with the gradual descending of the lower shaft, and finally the inspection rod is pulled into column-shaped polycrystalline silicon with a fixed length (a single crystal column rod can be formed when the seed crystal is a single crystal).

And further, after drawing is finished, slowly reducing the power to 0 position, closing a medium-frequency power switch, cooling, discharging argon, opening a furnace door, taking out a finished product, prefabricating, inspecting and inspecting.

The preparation of the prefabricated check rod in the furnace is completed, and the whole process is completed by automatic operation except for the disassembly and assembly furnace, so that the labor intensity is greatly reduced, the energy consumption and the production cost are reduced, and the like.

The details of the above are not described in detail since they are prior art.

The embodiments selected for the purpose of disclosing the present invention are presently considered to be suitable, however, it will be understood that the invention is intended to cover all variations and modifications of the embodiments which fall within the scope of the inventive concept and the scope of the appended claims.

Claims

1. The device for preparing the granular silicon check rod comprises an insulating sleeve (3), a heater (5) and an electromagnetic cold crucible (7), and is characterized in that: an insulating sleeve (3) is sleeved on the outer edge surface of the electromagnetic cold crucible (7), a heater (5) is arranged on the periphery of the insulating sleeve (3), granular silicon (2) to be melted is put into the upper portion of the middle cavity of the electromagnetic cold crucible (7), seed crystals (6) are arranged in the cavity of the electromagnetic cold crucible (7) below the granular silicon (2), and the seed crystals (6) are arranged on a seed crystal clamping seat to form the device for preparing the granular silicon inspection rod.

2. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: the electromagnetic cold crucible (7) is of a circular structure, at least one isolation groove (11) penetrating to the lower surface of the electromagnetic cold crucible (7) is arranged on the electromagnetic cold crucible (7), an insulating partition plate (12) is arranged in each isolation groove (11), and a cooling channel is arranged in the electromagnetic cold crucible (7).

3. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: the cold crucible of electromagnetism (7) is gone up the equipartition and is set up five separation grooves (11) and make cold crucible of electromagnetism (7) cut apart into five arc pieces, sets up an insulating barrier (12) respectively between per two arc pieces, is equipped with a set of cooling water course (10) in every arc piece respectively, water inlet (8) are connected to the one end of cooling water course (10), and delivery port (9) are connected to the other end of cooling water course (10).

4. The apparatus for manufacturing a granular silicon check rod according to claim 3, wherein: a set of cooling water channel (10) is arranged on each arc-shaped block, the cooling water channels (10) on each arc-shaped block are connected in series to form a set of cooling channel, one end of each cooling channel is connected with a water inlet (8), and the other end of each cooling channel is connected with a water outlet (9).

5. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: an automatic feeding mechanism (1) is arranged above the electromagnetic cold crucible (7), and a discharge hole of the automatic feeding mechanism (1) is communicated with an opening in the upper portion of the electromagnetic cold crucible (7).

6. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: the turn-to-turn distances of the heaters (5) are uniformly distributed from bottom to top.

7. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: and a closed furnace chamber is sleeved on the periphery of the heater (5).

8. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: the heater (5) is externally connected with a heating power supply.

9. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: the heater (5) is a medium-frequency induction heating coil.

10. The apparatus for manufacturing a granular silicon check rod according to claim 1, wherein: a preheating rod which moves up and down and rotates is arranged above the electromagnetic cold crucible (7).