CN217603182U

CN217603182U - Embedded mixed type air bearing

Info

Publication number: CN217603182U
Application number: CN202221850424.3U
Authority: CN
Inventors: 朱干军; 王旭东; 黄磊; 李淑蓉; 寇欣
Original assignee: CETC Fenghua Information Equipment Co Ltd
Current assignee: CETC Fenghua Information Equipment Co Ltd
Priority date: 2022-07-18
Filing date: 2022-07-18
Publication date: 2022-10-18
Anticipated expiration: 2032-07-18

Abstract

The utility model discloses an embedded hybrid air bearing, which comprises a bearing cover plate, a bearing outer ring, a plurality of supporting columns and an air bearing body, wherein the top of the bearing outer ring is provided with an air inlet, a plurality of air suction holes which are uniformly distributed are formed in each supporting column, an air chamber is arranged between the bearing cover plate and the bearing outer ring, and the top surface of the bearing cover plate is provided with an air outlet communicated with the air chamber; the pressure gas is sent into the air bearing body from the air inlet, an air film is formed between the bottom surface and the motion plane of the air bearing body, the gas at the inner side of the air film is sucked into the air suction hole and then sent to the air outlet through the air chamber and discharged, and the thickness of the air film is controlled and adjusted and the balance state of the air film and the fluid smoothness and stability of the air film are maintained by controlling the air suction amount of the air suction hole and the air discharge amount of the air bearing body in combination with the plane geometric distribution of the air suction hole. The utility model discloses the advantage of porous material air supporting bearing and gas channel gas pocket type air supporting bearing has organically been combined, promotes air supporting bearing's functional diversity.

Description

Embedded mixed type air bearing

Technical Field

The utility model relates to a bearing technical field especially relates to an embedded type mixed type air supporting bearing.

Background

The manufacturing procedure and detection of semiconductor and material science are very precise, with the progress of technology and the requirement of process control, the requirements of stability, position accuracy and position repeatability in three-dimensional directions of the moving platforms of semiconductor and material manufacturing procedure equipment and semiconductor detection and measurement equipment are increasingly strict, and air bearings (air bearing) are widely applied to the fields of moving platforms and the like as important moving and supporting components.

At present, the main air bearing uses materials and processing methods, and the main air bearing comprises two types: the air bearing comprises a Porous material type air bearing (such as an air bearing based on Porous materials and a platform, with the main body channel made of Porous materials) with micro-nano air gap channels, and an air channel pore type air bearing (such as an air bearing, with the publication number of CN 105131778B) with air channels with the inner diameter of more than micron and with air holes on the surface of the air bearing opposite to a plane, which is processed on the materials, wherein the air bearing is made of Porous materials and the air channel pore type air bearing is provided with air holes on the surface of the air bearing opposite to the plane.

The air bearing of the two materials and the structure has the advantages and the disadvantages that:

(1) The porous material type air bearing has more uniform and stable air outlet, but the air gaps formed by chemical materials are different in size (parts can be particularly small), and the air gaps are communicated and bent inside. (2) The air passage air-hole type air-floating bearing has the advantages that the aperture of the air passage is much larger than that of particle and micro-dust in an application environment, and the air passage is regular and flat, so that the particle blockage problem of the porous material type air-floating bearing can not be caused. However, the air outlet uniformity and stability of the air-vent air-passage type exhaust are higher, the air-vent material type air-floating bearing is poor, the precision control operability of the air film thickness is poor, the integral movement and static balance capability is slightly poor, and the air-vent arrangement and control mode needs to be precisely designed to control the working performance of the air-vent type air-floating bearing. Meanwhile, because the air passage is positioned in the bearing body, the air hole is of a blind hole structure, the aperture of the air passage and the aperture of the air hole are small, the processing technology and the detection technology are complex, and the production and maintenance cost is increased.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that an inserted mixed type air supporting bearing is provided, the porous material in aperture and the air flue gas pocket structure in aperture are ventilated to the great yardstick of combining to receive the nanoscale, integrated the advantage of the two, promote the variety of air supporting bearing's function to add and realize new function, can realize air supporting bearing suspension or activity laminating or absorption on relative motion plane, and possess fine safeguard function to porous material.

In order to solve the technical problem, the utility model discloses a technical scheme be:

an embedded hybrid air bearing comprises a bearing cover plate, a bearing outer ring which is fixedly connected to the bottom of the bearing cover plate and is of a cylindrical structure with an opening at the bottom, a plurality of supporting cylinders which are fixedly arranged on the bottom surface of the bearing outer ring and are uniformly distributed, and an air bearing body which is tightly connected to the inner side of the bottom of the bearing outer ring and is nested on the outer side of the supporting cylinders, wherein the top of the bearing outer ring is provided with an air inlet which is positioned right above the air bearing body and is respectively communicated with the inner bottom side of the bearing outer ring and the top of the bearing cover plate;

the pressure gas is sent into the air bearing body from the air inlet, an air film is formed on the bottom surface of the air bearing body, the gas on the inner side of the air film is sucked into the air suction hole and then is sent to the air outlet through the air chamber and is discharged, the thickness of the air film is controlled and adjusted by controlling the air displacement of the air bearing body and the air suction volume of the air suction hole, and the balance state of the air film and the fluid smoothness and stability of the air film are maintained, so that the bearing capacity, the air floating rigidity and the dynamic and static stability required by a system are met.

Furthermore, a groove is formed in the top surface of the bearing outer ring and/or the bottom surface of the bearing cover plate, and the groove and the bottom surface of the bearing cover plate or the top surface of the bearing outer ring form the air chamber.

Furthermore, the outer diameter of the bearing cover plate is the same as that of the bearing outer ring, and the bearing cover plate is fixedly connected with the bearing outer ring through a plurality of screws.

Furthermore, a sealing gasket is arranged at the joint of the bearing cover plate and the bearing outer ring.

Furthermore, a butt joint groove is formed in the edge of the top surface of the bearing outer ring/the edge of the bottom surface of the bearing cover plate, and a butt joint protrusion matched with the butt joint groove is formed in the edge of the bottom surface of the bearing cover plate/the edge of the top surface of the bearing outer ring.

Furthermore, a stand column for opening an air inlet is integrally arranged at the center of the top surface of the bearing outer ring/the center of the bottom surface of the bearing cover plate, a through hole matched with the stand column is formed in the bottom surface of the bearing cover plate/the top surface of the bearing outer ring, and the side wall of the stand column is in sealing connection with the inner wall of the through hole.

Furthermore, a sealing ring is arranged between the upright post and the through hole.

Furthermore, a positioning block is arranged on the inner bottom surface of the bearing outer ring.

Furthermore, the horizontal plane of the bottom surface of the air-bearing body is located above the horizontal reference plane of the bottom surface of the bearing outer ring or the support column.

The utility model has the advantages as follows:

the utility model discloses a set up the bearing inner race that possesses the function of breathing in the outside of the air supporting bearing body that porous material made, organically combined the porous material air supporting bearing in the pore diameter of ventilating of receiving a little yardstick and the air flue gas pocket formula air supporting bearing's in the pore diameter of ventilating of great yardstick advantage, promoted air supporting bearing's functional diversity to add and realized new function:

1. the air floating bearing body made of porous materials realizes large-area dense air injection, so that an air film required by the air floating bearing to work is formed, the PID feedback compensation is performed on a balanced air film by controlling the air suction amount of a plurality of air passage air holes and the air displacement of the air floating bearing body in combination with the plane geometric distribution of the air suction holes, the thickness of the air film can be better dynamically controlled and adjusted, the balanced state of the air film and the fluid smoothness and stability of the air film are maintained, the bearing capacity, the air floating rigidity and the dynamic and static stability required by a system are met, and the stability of the working state of the air floating bearing is further improved;

2. the bearing capacity of an air film at the bottom of the air bearing can be adjusted by controlling the air suction amount of the air suction holes, and the air bearing body can be supplied with load pretightening force; the air-floating bearing can be firmly adsorbed on the relative motion plane by reducing the air displacement of the air-floating bearing body or simultaneously converting the air flow between the air-floating bearing body and the air suction hole into a negative pressure state, so that the motion of the air-floating bearing can be braked, or the device on which the relative motion plane is positioned can be restrained by the adsorption force to keep the relative position of the device fixed;

3. after bearing inner race and bearing cover plate fixed connection, form the air chamber with each suction hole intercommunication, the structure that adopts the fixed connection equipment replaces bearing inner race and bearing cover plate among the prior art to be the integrated into one piece structure, avoids adopting the production technology of the air flue that processes out and the suction hole intercommunication from the lateral wall of integrated into one piece structure for the production and processing technology of air bearing spare part is simpler, and equipment and maintenance are more convenient.

Drawings

Fig. 1 is one of the schematic three-dimensional structures of the present invention;

fig. 2 is a second schematic perspective view of the present invention;

FIG. 3 is a schematic cross-sectional view of the present invention;

FIG. 4 is a schematic perspective view of the outer ring of the bearing;

FIG. 5 is a second schematic perspective view of the bearing outer ring;

FIG. 6 is a schematic perspective view of the bearing cover plate;

fig. 7 is a second schematic perspective view of the bearing cover plate.

In the figure: the air bearing comprises a bearing outer ring 1, an air inlet 11, a positioning block 12, a butt joint groove 13, an air chamber 14, a stand column 15, an air bearing body 2, a bearing cover plate 3, an air outlet 31, a through hole 32, a butt joint bulge 33, a screw 4, a sealing gasket 5, a sealing ring 6, a support cylinder 7 and an air suction hole 71.

Detailed Description

The following description of the preferred embodiments of the present invention will be provided with reference to the accompanying drawings, so that the advantages and features of the present invention can be easily understood by those skilled in the art, and the scope of the present invention can be clearly and clearly defined.

Referring to fig. 1 to 7, an embedded hybrid air bearing includes a bearing cover plate 3, a bearing outer ring 1 fixedly connected to the bottom of the bearing cover plate 3 and having a cylindrical structure with an opening at the bottom, a plurality of supporting columns 7 fixedly disposed on the bottom surface of the bearing outer ring 1 and uniformly distributed, and an air bearing body 2 tightly attached to the inner side of the bottom of the bearing outer ring 1 and nested outside the supporting columns 7. The bearing outer ring 1 is used as a supporting and clamping structure of the air bearing and is made of stainless steel or aluminum alloy, ceramics (such as silicon carbide, silicon nitride and the like), engineering plastics, polymer composite materials and other materials with high specific stiffness, high strength and high surface smoothness, and the bearing outer ring is of a cylindrical structure in the embodiment. The air bearing body 2 is made of the existing porous material, the ventilation aperture of the porous material is 0.1-1 micron order, the ventilation performance, namely other performances, are the same as those of the existing porous material type air bearing, and the detailed description is not provided here. The outer diameter of the bearing cover plate 3 is the same as that of the bearing outer ring 1, the material is also the same as that of the bearing outer ring, and the bearing cover plate 3 and the bearing outer ring 1 can be connected through adhesive glue or conventional fixed connection modes such as welding or screw connection to form an integral structure. In this embodiment, bearing cover plate 3 and bearing inner race 1 are through 8 screws 4 fixed connection for be detachable connected mode between bearing cover plate 3 and the bearing inner race 1, the later stage of being convenient for is to the inside maintenance and the cleanness of air supporting bearing, and the change of spare part. The bearing cover plate 3 is connected with an external air intake and suction structure, and is fixedly connected with an external installation position, and the specific connection structure can be set according to the actual needs of the situation, and the description is omitted here.

Preferably, the joint of the bearing cover plate 3 and the bearing outer ring 1 is provided with a sealing gasket 5 made of rubber, so that the sealing property of the connection between the bearing cover plate and the bearing outer ring can be effectively ensured. Further preferably, the edge of the top surface of the bearing outer ring 1 is provided with a butt joint groove 13, the edge of the bottom surface of the bearing cover plate 3 is provided with a butt joint protrusion 33 matched with the butt joint groove 13, the butt joint protrusion 33 is matched with the butt joint groove 13, the positioning of the bearing cover plate 3 on the bearing outer ring 1 is facilitated, and meanwhile, the sealing effect of the sealing gasket 5 can be effectively enhanced through the extrusion of the sealing gasket 5.

Obviously, the edge of the bottom surface of the bearing cover plate 3 can also be provided with the butt-joint groove 13, and the edge of the top surface of the bearing outer ring 1 is provided with the butt-joint protrusion 33 matched with the butt-joint groove 13, so as to achieve the same technical effects as described above.

As shown in fig. 4 and 5, a cavity for accommodating and fixedly mounting the air bearing body 2 is opened at the center of the bottom surface of the bearing outer ring 1. In this embodiment, the air bearing body 2 is a cylindrical structure, and the cross-sectional profile of the cavity matches with the cross-sectional profile of the air bearing body 2, so that the air bearing body 2 can be completely embedded into the cavity, and the outer wall of the air bearing body 2 is in full contact with the inner wall of the cavity. The four supporting columns 7 are uniformly distributed in the cavity, and the axes of the supporting columns 7 are vertical to the bottom surface of the bearing outer ring 1. In this embodiment, the support column 7 is a cylinder and is integrally formed with the bearing outer ring 1. Obviously, the supporting column 7 can also be connected and fixed with the bearing outer ring 1 by welding, gluing, plugging, screwing and the like, and can be hermetically connected by filling a sealing glue, a rubber gasket and the like.

The inner side of the air bearing body 2 is provided with four jacks which correspond to the support column body 7 and are matched with the outline. After the air bearing body 2 is completely embedded into the cavity, the four supporting columns 7 are just inserted into the four insertion holes, so that the outer wall of the air bearing body 2 is fully attached and contacted with the inner wall of the cavity, the inner wall of the insertion holes is fully attached and contacted with the outer circular side wall of the supporting columns 7, and the air bearing body 2 is embedded in the bearing outer ring 1. The outer wall of the air bearing body 2 and the inner wall of the cavity are fixedly connected through adhesive glue, so that the air bearing body 2 is kept relatively fixed in the cavity, meanwhile, a certain distance is reserved between the top surface of the air bearing body 2 and the top surface of the cavity, namely, a certain gas buffer space is reserved at the top of the air bearing body 2, so that gas can be uniformly distributed at the top of the air bearing body 2, and further, the gas can uniformly pass through the air bearing body 2.

Preferably, a positioning block 12 is arranged on the inner bottom surface of the bearing outer ring 1. In this embodiment, the positioning block 12 is an annular step structure located outside the top of the supporting cylinder 7, and after the air-floating bearing body 2 is placed in the cavity of the bearing outer ring 1, the top surface of the air-floating bearing body 2 abuts against the bottom of the positioning block 12, so that the air-floating bearing body 2 is conveniently and quickly positioned in the cavity, and when mass production is performed, the size of the reserved air buffer space in the cavity is consistent. Since the positioning block 14 has a small volume, the influence on the gas flow in the gas buffer space is negligible.

The top of the bearing outer ring 1 is provided with an air inlet 11 which is positioned right above the air-bearing body 2 and is respectively communicated with the inner bottom side (the air buffer space above the air-bearing body 2) of the bearing outer ring 1 and the top of the bearing cover plate 3. External pressure gas is introduced into the gas inlet 11 through an external pipeline and a connecting piece and then enters the gas buffering space, and then is uniformly sprayed out through the bottom surface of the air bearing body 2, so that a gas film with a certain thickness is formed between the bottom of the air bearing body 2 and the opposite movement plane, and the air bearing and the load on the air bearing are supported. The working principle is the same as that of the existing porous material type air bearing.

A column 15 for opening the air inlet 11 is integrally arranged at the center of the top surface of the bearing outer ring 1, a through hole 32 (shown in fig. 6 and 7) matched with the column 15 is formed in the bottom surface of the bearing cover plate 3, and the side wall of the column 15 is connected with the inner wall of the through hole 32 in a sealing manner. Specifically, a sealant can be filled between the pillar 15 and the through hole 32 to ensure the sealing performance of the connection. Preferably, a rubber sealing ring 6 is arranged between the upright post 15 and the through hole 32, so that the upright post 15 and the through hole 32 are separated during maintenance or cleaning while the sealing performance of the joint is ensured.

Obviously, the pillar 15 for opening the air inlet 11 may also be integrally disposed in the center of the bottom surface of the bearing cover plate 3, the through hole 32 matching with the pillar 15 is disposed on the top surface of the bearing outer ring 1, and the sidewall of the pillar 15 is hermetically connected with the inner wall of the through hole 32, so as to achieve the aforementioned technical effects.

Each supporting column 7 is provided with a plurality of uniformly distributed air suction holes 71. In this embodiment, the number of the air suction holes 71 in each support column 7 is four, and the air suction holes 71 are uniformly distributed on the bottom surface of the support column 7, and 16 air suction holes 71 are distributed in two circular rings on the whole bottom of the bearing outer ring 1 (the specific inner diameter size, number and distribution position of the air holes, such as the number of the air hole rings, are appropriately set according to the size of the air bearing itself and the size of the air suction amount). The air suction holes 71 are vertically arranged in the support column body 7 and penetrate through the top surface of the bearing outer ring 1 and the bottom surface of the support column body 1, the air suction holes 71 are processed by a laser drilling process, or other suitable hole processing processes such as chemical corrosion and etching can be carried out, so that the specifications (namely the aperture, the depth, the surface roughness and the like) of each air suction hole 71 can be effectively guaranteed to be consistent, and the air suction holes are uniformly distributed on the bearing outer ring 12. In the present embodiment, the inner diameter of the suction hole 12 is in the order of hundreds of micrometers.

An air chamber 14 communicated with each air suction hole 71 is arranged between the bottom surface of the bearing cover plate 3 and the top surface of the bearing outer ring 1. Specifically, a groove is formed in the top surface of the bearing outer ring 1, and after the bearing cover plate 3 is hermetically connected with the bearing outer ring 1, the air chamber 14 is formed between the groove and the bottom surface of the bearing cover plate 3. Because the groove is positioned on the top surface of the bearing outer ring 1, the conventional processing technology can be adopted to realize the processing of the groove, such as casting molding, milling molding and the like, and compared with the existing laser drilling vertical and horizontal blind hole technology, the processing technology and the detection technology are simpler, and the production cost can be obviously reduced. Or casting a blind hole with a larger size of 100 microns in inner diameter on the top surface of the bearing outer ring 1 through a die, etching a small hole with a micron-sized inner diameter at the closed end close to the bottom surface through a chemical corrosion process, and opening the blind hole to communicate with the air suction hole 71.

Obviously, a groove can be formed on the bottom surface of the bearing cover plate 3, and the groove and the top surface of the bearing outer ring 1 form the air chamber; or grooves are simultaneously formed in the top surface of the bearing outer ring 1 and the bottom surface of the bearing cover plate 3, and the two grooves jointly form the air chamber.

The top surface of the bearing cover plate 3 is provided with an exhaust port 31 communicated with the air chamber 14. As shown in fig. 5, the exhaust port 31 is located at one side of the air inlet 11, an outer port of the exhaust port 31 is connected to a negative pressure device through an external pipeline and a connecting member, and a negative pressure value at the exhaust port 31 can be controlled and adjusted by the external negative pressure device, so as to adjust a flow rate of air sucked into the air passage chamber through the air suction hole 71, that is, correspondingly adjust a negative pressure state of the peripheral air at the bottom surface of the air bearing body 2, thereby affecting an air flow of an air film directly below the bottom surface of the air bearing body 2, and adjusting a balance state of the air film, which is specifically represented by adjusting a thickness, a rigidity, and a bearing capacity of the air film. Meanwhile, in the initial working state of the air bearing, the air suction amount in the air passage air hole is controlled, so that negative pressure adsorption force is generated between the bearing outer ring 1 and the relative motion plane, and the air bearing has certain load pretightening force on the relative motion plane, which is one of functions that the existing air bearing does not have.

In addition, the air suction holes 71 are formed in the periphery of the air bearing body 2 made of the porous material, so that particle and micro-dust in the peripheral environment of the air bearing body 2 can be adsorbed and removed, the middle porous material is protected from being blocked by the particle and micro-dust, and the working reliability and performance stability of the air bearing can be further ensured.

Preferably, the horizontal plane of the bottom surface of the air bearing body 2 is located above the horizontal reference plane of the bottom surface of the bearing outer ring 1 or the support column 7. In this embodiment, the bottom surface of the support column 7 and the bottom surface of the bearing outer ring 1 may be in the same plane, or may not be in the same plane, and the bottom surface of the air bearing body 2 is always disposed above the lower bottom surface of the support column 7 or the bearing outer ring 1. In this manner, when the bottom surface of the air bearing is in contact with the opposing plane of motion, the bottom surface of the air bearing body 2 is located above the opposing plane of motion and not in contact with the opposing plane of motion. In the use process of the existing porous material type air bearing, if an abnormal working state exists, such as sudden air cut-off or sudden pressure change, the bottom surface of the air bearing body 2 may be directly in frictional contact with a relative motion plane, and more particles are generated on the surface of the porous material to block, and even the surface of the porous material is subjected to frictional damage. Therefore, a height difference is introduced between the bottom surface of the air bearing body 2 made of the porous material and the bottom surface of the bearing outer ring 1 or the support column 7, so that the bottom surface of the air bearing body 2 is prevented from contacting with a relative motion plane, and the porous material type air bearing is further protected. On the premise of meeting the requirement of the thickness of an air film from the bottom surface horizontal plane to the motion plane of the air bearing body 2, the height difference is more than 1 micron; under the condition of ensuring abnormity, the height difference satisfies the condition that the horizontal plane of the bottom surface of the air bearing body 2 can not be in frictional contact with the motion plane. In this embodiment, the bottom surface of the support column 7 and the bottom surface of the outer ring bearing 1 are located in the same plane, and the bottom surface of the air bearing body 2 is a few micrometers, preferably 1-10 micrometers, higher than the bottom surface of the bearing outer ring 1.

In addition, the bottom surface of the air bearing body 2 is higher than the bottom surface of the bearing outer ring 1, so that the air bearing has a new function: by reducing or closing the air displacement of the air bearing body 2 or simultaneously converting the air flow between the air bearing body and the air suction hole into a negative pressure state, an adsorption negative pressure can be formed between the bearing outer ring 1 and the opposite motion plane, so that the air bearing is firmly adsorbed on the opposite motion plane, the motion of the air bearing is braked, or the device on which the opposite motion plane is located is restrained by adsorption force, so that the relative position between the device and the air bearing is kept fixed. Because the bottom surface of the bearing outer ring 1 and the bottom surface of the support column body 7 have certain smoothness, the porous material and the motion plane cannot be damaged when the air bearing is contacted with the opposite motion plane.

The working process of the air bearing is as follows: the pressure gas is sent into the air bearing body 2 from the air inlet 11, and forms an air film between the bottom surface of the air bearing body 2 and the opposite moving plane, the gas outside the air film is sucked into the air suction hole 71, and then is sent to the air outlet 31 through the air passage 13 and is discharged, the thickness of the air film is controlled and adjusted by controlling the air displacement of the air bearing body 2 and the air suction volume of the air suction hole 71, and the balance state of the air film and the fluid smoothness and stability of the air film are maintained, so as to meet the bearing capacity, air floating rigidity and dynamic and static stability required by the system, namely, the air bearing body of the porous material realizes dense air injection in large area, so as to form the air film required by the air bearing to work, the air pressure supporting force and the load of the air bearing bottom are balanced by controlling the air displacement of the porous material module and the air suction volume of the air passage, and the feedback compensation is performed for the air film balance (by sensing the size of the load, and further the whole pressure of the air film is adjusted by changing the air suction volume, so as to balance the air bearing bottom pressure supporting force and the load, which are not described in detail in the prior art), thereby the better dynamically controlling the balance state of the air film, and further improving the stability of the air bearing.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. The utility model provides an inserted mixed type air supporting bearing which characterized in that: the bearing comprises a bearing cover plate (3), a bearing outer ring (1) which is fixedly connected to the bottom of the bearing cover plate (3) and has a cylindrical structure with an opening at the bottom, a plurality of supporting cylinders (7) which are fixedly arranged on the bottom surface of the bearing outer ring (1) and are uniformly distributed, and an air-floating bearing body (2) which is tightly connected to the inner side of the bottom of the bearing outer ring (1) and is nested on the outer side of the supporting cylinders (7), wherein the top of the bearing outer ring (1) is provided with an air inlet (11) which is positioned right above the air-floating bearing body (2) and is respectively communicated with the inner bottom side of the bearing outer ring (1) and the top of the bearing cover plate (3), a plurality of air suction holes (71) which are uniformly distributed are formed in each supporting cylinder (7), an air chamber (14) which is communicated with each air suction hole (71) is formed between the bottom surface of the bearing cover plate (3) and the top surface of the bearing outer ring (1), and an air outlet (31) which is communicated with the air chamber (14) is formed in the top surface of the bearing cover plate (3);

the pressure gas is sent into the air-bearing body (2) from the air inlet (11), an air film is formed on the bottom surface of the air-bearing body (2), the gas on the inner side of the air film is sucked into the air suction holes (71), and then is sent to the air outlet (31) through the air chamber (14) and is discharged, the thickness of the air film is controlled and adjusted by controlling the air displacement of the air-bearing body (2) and the air suction of the air suction holes (71) and the fluid smoothness and stability of the air film are maintained by combining the plane geometric distribution of the air suction holes (71), so that the bearing capacity, the air-bearing rigidity and the dynamic and static stability required by a system are met.

2. The embedded hybrid air bearing according to claim 1, wherein: the top surface of the bearing outer ring (1) and/or the bottom surface of the bearing cover plate (3) are/is provided with a groove, and the groove and the bottom surface of the bearing cover plate (3) or the top surface of the bearing outer ring (1) form the air chamber (14).

3. The embedded hybrid type air bearing according to claim 1, wherein: the outer diameter of the bearing cover plate (3) is the same as that of the bearing outer ring (1), and the bearing cover plate (3) is fixedly connected with the bearing outer ring (1) through a plurality of screws (4).

4. The embedded hybrid air bearing according to claim 3, wherein: and a sealing gasket (5) is arranged at the joint of the bearing cover plate (3) and the bearing outer ring (1).

5. The embedded hybrid air bearing according to claim 3, wherein: the bearing cover plate is characterized in that a butt joint groove (13) is formed in the top surface edge of the bearing outer ring (1)/the bottom surface edge of the bearing cover plate (3), and a butt joint bulge (33) matched with the butt joint groove (13) is formed in the bottom surface edge of the bearing cover plate (3)/the top surface edge of the bearing outer ring (1).

6. The embedded hybrid type air bearing according to claim 1, wherein: the bearing outer ring structure is characterized in that a stand column (15) used for opening an air inlet (11) is integrally arranged at the center of the top surface of the bearing outer ring (1) or the center of the bottom surface of the bearing cover plate (3), a through hole (32) matched with the stand column (15) is formed in the bottom surface of the bearing cover plate (3) or the top surface of the bearing outer ring (1), and the side wall of the stand column (15) is connected with the inner wall of the through hole (32) in a sealing mode.

7. The embedded hybrid air bearing according to claim 6, wherein: and a sealing ring (6) is arranged between the upright post (15) and the through hole (32).

8. The embedded hybrid air bearing according to claim 1, wherein: and a positioning block (12) is arranged on the bottom surface of the inner side of the bearing outer ring (1).

9. The embedded hybrid type air bearing according to claim 1, wherein: the horizontal plane of the bottom surface of the air bearing body (2) is positioned above the horizontal reference plane of the bottom surface of the bearing outer ring (1) or the support column body (7).