CN217571662U - Suction unit and device for 100-level dust-free chamber top cover - Google Patents
Suction unit and device for 100-level dust-free chamber top cover Download PDFInfo
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- CN217571662U CN217571662U CN202221264389.7U CN202221264389U CN217571662U CN 217571662 U CN217571662 U CN 217571662U CN 202221264389 U CN202221264389 U CN 202221264389U CN 217571662 U CN217571662 U CN 217571662U
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- top cover
- plate
- suction unit
- floating plate
- top cap
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Abstract
The utility model is suitable for a top cap absorbs the field, provides a 100 grades of dust free chamber top caps absorb unit and device, it is fixed including being used for to absorb the unit the fixed plate absorbs the unit, sets up through linear bearing the floating plate of horizontal migration about just can in the fixed plate bottom, and set up the vacuum chuck who is used for absorbing the top cap on the floating plate both sides. When aiming at solving operator manual operation and snatching the top cap among the prior art, the finger can contact the top cap and bring the contaminated risk of product, and lead to the inboard sealing washer of top cap product damaged easily, the manual work is put into the product on anchor clamps, the uniformity of position can not be accomplished, can lead to the top cap all around with the inboard collision friction of anchor clamps, bring dust particle, and manual operation needs the manual work to judge that the top cap is new or reutilization, there is the technical problem of the risk of erroneous judgement here.
Description
Technical Field
The utility model belongs to the top cap field of absorbing especially relates to a 100 grade dust free chamber top cap absorb unit and device.
Background
The current mechanical hard disk top cap assembly mode is that the operator directly takes out the top cap product from the charging tray then adorns and produce the assembly on anchor clamps, and when operator manual operation snatched the top cap, the finger can contact the top cap and bring the contaminated risk of product, and lead to the inboard sealing washer of top cap product damaged easily, the manual work is put into the product on the anchor clamps, the uniformity of position can not be accomplished, can lead to the top cap all around with the inboard collision friction of anchor clamps, bring the dust granule, and manual operation needs the manual work to judge whether the top cap is new or reutilization, there is the risk of erroneous judgement here.
Disclosure of Invention
An object of the utility model is to provide a 100 grade dust free chamber top cap absorb unit and device, when aiming at solving among the prior art operator manual operation and snatching the top cap, the finger can contact the top cap and bring the contaminated risk of product, and lead to the inboard sealing washer of top cap product damaged easily, the manual work is put into the product on the anchor clamps, the uniformity of position can not be accomplished, can lead to the top cap all around with the inboard collision friction of anchor clamps, bring dust particle, and manual operation needs the manual work to judge that the top cap is new or reuse, there is the technical problem of the risk of erroneous judgement here.
The utility model discloses a realize like this, a 100 grades of dust free chamber top cap's absorption unit, it is including being used for fixing to absorb the unit the fixed plate, set up through linear bearing the floating plate of horizontal migration about just can in the fixed plate bottom, and set up the vacuum chuck who is used for absorbing the top cap on the floating plate both sides.
The utility model discloses a further technical scheme is: the sucking unit further comprises first high-precision distance induction sensors arranged on two sides of the floating plate and used for detecting whether the top cover is in a horizontal state or not.
The utility model discloses a further technical scheme is: the suction unit further comprises a photoelectric sensor arranged on one side of the fixed plate and used for detecting the upward compression distance of the floating plate.
The utility model discloses a further technical scheme is: the sucking unit further comprises a second high-precision distance induction sensor which is arranged at the bottom of the floating plate and used for detecting whether the top cover is correctly sucked and whether the top cover is in place in the Z direction.
The utility model discloses a further technical scheme is: the sucking unit further comprises a stop block which is arranged at the bottom of the floating plate and arranged on two sides of the second high-precision distance induction sensor and used for limiting the downward compression position of the floating plate.
The utility model discloses a further technical scheme is: the sucking unit also comprises a top cover limiting part which is arranged on the tail part of the floating plate and used for limiting the position of the sucking top cover.
The utility model discloses a further technical scheme is: the top cover limiting part comprises a guide rail, a pushing plate and a blocking block, the guide rail is arranged on the floating plate and provided with a sliding block, the pushing plate is arranged on the sliding block and can slide on the guide rail along with the sliding block, and the blocking block is arranged at the tail end of the guide rail, is used for limiting the movement position of the pushing plate and is provided with a spring.
The utility model discloses a further technical scheme is: the suction unit further comprises a laser sensor which is arranged on the fixing plate and used for detecting whether the top cover is new or old.
The utility model discloses a further technical scheme is: the vacuum chuck is three at least and every vacuum chuck all has the vacuum air pipe to connect, the push plate is "concave" font, linear bearing top is provided with the polyurethane gasket that prevents the pivot and the collision of fixed plate.
Another object of the utility model is to provide a suction means of 100 grades of dust free chamber top caps: suction means package PMKD sets up PMKD both sides are used for the Y direction motion and one side has brake motor's the electronic axle of Y direction and the supplementary electronic axle of Y direction, set up and be in the electronic axle of Y direction reaches the electronic epaxial X direction that is used for the X direction motion and has brake motor of the supplementary electronic axle of Y direction, and set up and be in the electronic epaxial Z direction that is used for the Z direction motion and has brake motor of X direction is electronic, the suction unit sets up the electronic epaxial Z direction that is in.
The beneficial effects of the utility model are that: the suction device of the top cover meets the requirements of a 100-grade dust-free room, has low dust emission amount, is suitable for wafers, semiconductors, storage and industries, adopts a clean XYZ three-axis structure, has a large working area range, can adapt to different products, is provided with two first high-precision distance induction sensors which can judge whether the products are horizontal before suction, is provided with a second high-precision distance induction sensor which can judge whether the top cover is in place in the Z direction after the top cover is sucked, is provided with a laser sensor for detecting a new top cover and an old top cover, avoids putting wrong materials into the laser sensor, adopts a linear floating design to avoid a vacuum chuck from crushing the products, meets the 100-grade dust-free grade requirements of materials and standard parts used by the whole suction device, and the moving part of the whole suction device is fixed by a guide rail and a bearing, is positioned by a roller follower, realizes high precision, low friction, is free of maintenance and has longer service life.
Drawings
Fig. 1 is a structural diagram of a suction device for a 100-stage dust free chamber top cover according to an embodiment of the present invention;
fig. 2 is a first structural diagram of a suction unit of a top cover of a 100-grade clean room according to an embodiment of the present invention;
fig. 3 is a second structural diagram of a suction unit of a top cover of a 100-grade clean room according to an embodiment of the present invention.
Detailed Description
Reference numerals are as follows: the device comprises a fixed plate 1, a fixed plate 2, a linear bearing 3, a floating plate 4, a top cover 5, a vacuum chuck 6, a first high-precision distance induction sensor 7, a photoelectric sensor 8, a second high-precision distance induction sensor 9, a stop block 10, a slide block 11, a guide rail 12, a pushing plate 13, a spring 14, a stop block 15, a laser sensor 16, a vacuum air pipe joint 17, a polyurethane gasket 18, a fixed bottom plate 19, a Y-direction electric shaft 20, a Y-direction auxiliary electric shaft 21, an X-direction electric shaft 22, a Z-direction electric shaft 23, an absorption unit 24 and a clean type supporting pipe.
Fig. 1 shows a pair of suction means of 100 grades of dust free chamber top caps, suction means package PMKD 18 sets up PMKD 18 both sides are used for Y direction motion and one side to have brake motor's the electronic axle 19 of Y direction and the supplementary electronic axle 20 of Y direction, set up the electronic axle 19 of Y direction reaches be used for X direction motion and have brake motor's the electronic axle 21 of X direction on the supplementary electronic axle 20 of Y direction, and set up and be used for Z direction motion and have brake motor's the electronic axle 22 of Z direction on the electronic axle 21 of X direction, suction unit 23 sets up on the electronic axle 22 of Z direction. The suction unit 23 is arranged on the Z-direction electric shaft 22, and when the device is used, the movement of the suction unit 23 in three directions of XYZ is realized by adjusting the Y-direction electric shaft 19, the X-direction electric shaft 21 and the Z-direction electric shaft 22, so that the device can be used more flexibly.
Fig. 2-3 show that the sucking unit 23 includes a fixed plate 1 for fixing the sucking unit 23, a floating plate 3 disposed at the bottom of the fixed plate 1 through a linear bearing 2 and capable of moving horizontally up and down, and vacuum chucks 5 disposed on both sides of the floating plate 3 for sucking a top cover 4; the number of the vacuum chucks 5 is at least three, each vacuum chuck 5 is provided with a vacuum pipe joint 16, the top of the linear bearing 2 is provided with a polyurethane gasket 17 for preventing a shaft pin from colliding with the fixing plate 1, and the technical scheme adopts four vacuum chucks 5 and three linear bearings 2.
The sucking unit 23 further comprises first high-precision distance induction sensors 6 arranged on both sides of the floating plate 3 and used for detecting whether the top cover 4 is in a horizontal state; the device also comprises a photoelectric sensor 7 which is arranged on one side of the fixed plate 1 and is used for detecting the upward compression distance of the floating plate 3; the second high-precision distance induction sensor 8 is arranged at the bottom of the floating plate 3 and used for detecting whether the top cover 4 is correctly sucked and whether the top cover is in place in the Z direction; the device also comprises a laser sensor 15 which is arranged on the fixing plate 1 and used for detecting whether the top cover 4 is new or old; the device also comprises a stop block 9 which is arranged at the bottom of the floating plate 3 and is arranged at two sides of the second high-precision distance induction sensor 8 and used for limiting the downward compression position of the floating plate 3.
The sucking unit 23 further comprises a top cover limiting part arranged on the tail part of the floating plate 3 and used for limiting the position of sucking the top cover 4. The top cover limiting part comprises a guide rail 11 which is arranged on the floating plate 3 and is provided with a slide block 10, a pushing plate 12 which is arranged on the slide block 10 and can slide on the guide rail 11 along with the slide block 10, and a blocking block 14 which is arranged at the tail end of the guide rail 11, is used for limiting the movement position of the pushing plate 12 and is provided with a spring 13; the pushing plate 12 is concave.
When the suction unit 23 is used, the top cover 4 is sucked by four vacuum chucks 5, the vacuum air pipe joints 16 of the vacuum chucks 5 are connected by air pipes and finally combined on one path of vacuum air pipe for air suction, the floating plate 3 is floated up and down by three linear bearings 2, and then the four vacuum chucks 5 float up and down along with the floating plate 3, so that when the floating plate 3 drives the vacuum chucks 5 to suck the top cover 4 down, the top cover 4 cannot be deformed due to overlarge downward pressing force, the linear bearings 2 are provided with polyurethane gaskets 17 for avoiding metal collision friction between the tops of the shaft pins and the fixed plate 1, when the floating plate 3 is compressed upwards, when the distance set by the photoelectric sensor 7 is exceeded, the photoelectric sensor 7 is triggered, and alarm prompt is abnormal after triggering, two first high-precision distance induction sensors 6 are arranged, the detection distance is six millimeters, when the vacuum chuck 5 sucks the top cover 4 to move downwards, only when two first high-precision distance induction sensors 6 simultaneously sense the top cover 4, the top cover 4 is in a horizontal state and is not inclined, the other second high-precision distance induction sensor 8 detects that the distance is one millimeter, after the top cover 4 is sucked by the vacuum chuck 5, the Z direction can be blocked by two stop blocks 9, at this time, if the top cover 4 is correctly sucked, the second high-precision distance induction sensor 8 can be triggered, meanwhile, if the top cover 4 falls off in the moving process of the whole sucking device, the second high-precision distance induction sensor 8 can also sense, the triggering device alarms, a laser sensor 15 is also arranged for detecting whether the top cover 4 is old or new, the detection distance is one hundred eighty five millimeters, the new top cover 4 is not provided with a filter, the reusable top cover 4 is provided with a filter, the laser sensor 15 can sense the existence of the filter so as to judge whether the top cover 4 is new or old, the top cover limiting part limits the position of sucking the top cover 4, the guide rail 11 is arranged on the floating plate 3, the pushing plate 12 is arranged on the slide block 10 of the guide rail 11, the stop block 14 with the spring 12 is arranged at the tail end of the guide rail 11, and before the vacuum chuck 5 sucks the top cover 4, the top cover 4 is pushed to a fixed position by the pushing plate 12 in the Y direction, so that the top cover 4 keeps position consistency before sucking each time.
The suction device drives the vacuum chuck 5 to move to the upper part of the top cover 4 through the Y-direction electric shaft 19, the X-direction electric shaft 21 and the Z-direction electric shaft 22, the first high-precision distance induction sensor 6 judges whether the top cover 4 is horizontal or not firstly, if the top cover 4 is horizontal, the vacuum chuck 5 continues to move downwards, the Y-direction electric shaft 20 moves a small distance, the pushing plate 12 pushes the top cover 4 to the bottom, the vacuum is opened to enable the vacuum chuck 5 to suck the top cover 4, the second high-precision distance induction sensor 8 detects whether the top cover 4 is completely sucked or not, then the laser sensor 15 judges whether the top cover 4 is new or recycled, if all the top cover 4 meet the set requirements, the top cover 4 is sucked and placed to the next station for assembly, and the whole device adopts a clean type trusteeship 24 routing mode, so that the friction dust overflow of cables is avoided.
The suction device of the top cover meets the requirements of a 100-grade dust-free room, has low dust emission amount, is suitable for wafers, semiconductors, storage and industries, adopts a clean XYZ three-axis structure, has a large working area range, can adapt to different products, is provided with two first high-precision distance induction sensors which can judge whether the products are horizontal before suction, is provided with a second high-precision distance induction sensor which can judge whether the top cover is in place in the Z direction after the top cover is sucked, is provided with a laser sensor for detecting a new top cover and an old top cover, avoids putting wrong materials into the laser sensor, adopts a linear floating design to avoid a vacuum chuck from crushing the products, meets the 100-grade dust-free grade requirements of materials and standard parts used by the whole suction device, and the moving part of the whole suction device is fixed by a guide rail and a bearing, is positioned by a roller follower, realizes high precision, low friction, is free of maintenance and has longer service life.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. The utility model provides a suction unit of 100 grades of dust free chamber top caps which characterized in that: the sucking unit comprises a fixed plate for fixing the sucking unit, a floating plate which is arranged at the bottom of the fixed plate through a linear bearing and can move up and down horizontally, and vacuum suckers which are arranged on two sides of the floating plate and used for sucking the top cover.
2. The suction unit as claimed in claim 1, further comprising first high-precision distance sensing sensors disposed on both sides of the floating plate for detecting whether the top cover is in a horizontal state.
3. The suction unit as claimed in claim 2, further comprising a photosensor provided at a side of the fixed plate for detecting an upward compression distance of the floating plate.
4. The suction unit as claimed in claim 3, further comprising a second high-precision distance sensing sensor provided at the bottom of the floating plate for detecting whether the top cover is properly sucked and is in place in the Z direction.
5. The suction unit as claimed in claim 4, further comprising stoppers provided at the bottom of the floating plate and disposed at both sides of the second high-precision distance sensing sensor for limiting a downward compression position of the floating plate.
6. The suction unit as claimed in claim 5, further comprising a top cover stopper provided on a rear portion of the floating plate for limiting a position of the suction top cover.
7. The suction unit as claimed in claim 6, wherein the top cover limiting part comprises a guide rail with a slider arranged on the floating plate, a pushing plate arranged on the slider and capable of sliding on the guide rail along with the slider, and a blocking block with a spring arranged at the tail end of the guide rail and used for limiting the movement position of the pushing plate.
8. The suction unit as claimed in claim 7, further comprising a laser sensor provided on the fixing plate for detecting whether the top cover is new or old.
9. The suction unit as claimed in claim 8, wherein there are at least three vacuum suction cups, each vacuum suction cup has a vacuum air pipe joint, the pushing plate has a concave shape, and a polyurethane gasket for preventing the shaft pin from colliding with the fixing plate is disposed on the top of the linear bearing.
10. The suction device of the suction unit according to any one of claims 1 to 9, wherein the suction device comprises a fixed base plate, a Y-direction electric shaft and a Y-direction auxiliary electric shaft provided on both sides of the fixed base plate for Y-direction movement and having a brake motor on one side, an X-direction electric shaft provided on the Y-direction electric shaft and the Y-direction auxiliary electric shaft for X-direction movement and having a brake motor, and a Z-direction electric shaft provided on the X-direction electric shaft for Z-direction movement and having a brake motor, and the suction unit is provided on the Z-direction electric shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221264389.7U CN217571662U (en) | 2022-05-24 | 2022-05-24 | Suction unit and device for 100-level dust-free chamber top cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221264389.7U CN217571662U (en) | 2022-05-24 | 2022-05-24 | Suction unit and device for 100-level dust-free chamber top cover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217571662U true CN217571662U (en) | 2022-10-14 |
Family
ID=83553912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221264389.7U Active CN217571662U (en) | 2022-05-24 | 2022-05-24 | Suction unit and device for 100-level dust-free chamber top cover |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217571662U (en) |
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2022
- 2022-05-24 CN CN202221264389.7U patent/CN217571662U/en active Active
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