CN217569476U - Feeding system of spin coater - Google Patents

Feeding system of spin coater Download PDF

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Publication number
CN217569476U
CN217569476U CN202120885941.3U CN202120885941U CN217569476U CN 217569476 U CN217569476 U CN 217569476U CN 202120885941 U CN202120885941 U CN 202120885941U CN 217569476 U CN217569476 U CN 217569476U
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China
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spin
coating
tank
bottom plate
stainless steel
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CN202120885941.3U
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方永增
李品秧
程龙
单李玺
杨德新
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Zhejiang Weixing Optics Co.,Ltd.
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Zhejiang Weixing Optical Co ltd
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Abstract

The utility model relates to a feeding system of a spin coater, which comprises a spin coating tank, a circulating pump, a bag filter, a spin coating liquid storage tank, a solvent storage tank and a stainless steel structural member; a blanking hole is arranged at the position, close to the edge, of the bottom plate of the spin-coating tank, and the blanking hole is connected to the inlet of the circulating pump through a hose below the bottom plate of the spin-coating tank; the outlet of the circulating pump is connected with the inlet of the bag type filter through a hose; the spin coating liquid storage tank is arranged on the vertical thin plate of the stainless steel structural member through a bracket or a fixing ring; the solvent reservoir is mounted on the horizontal sheet of the stainless steel structural member by a bracket or a fixing ring. The method can keep the liquid level and the viscosity in the spin-coating tank stable, and does not need to stop to supplement spin-coating liquid or adjust the viscosity of the spin-coating liquid; the spin-coating liquid and the solvent are continuously and slowly added into the spin-coating tank, can be used immediately, and do not need to wait for defoaming; the whole feeding system is fast switched to meet the requirements of various productions. The utility model discloses the quality and the equipment operating efficiency of coating have been guaranteed effectively.

Description

Feeding system of spin coater
Technical Field
The utility model belongs to the technical field of the spin coater technique and specifically relates to a spin coater feeding system.
Background
The coating of photochromic coating lens generally sets up to two-layerly, and the bottom is the resin layer that discolours, and the surface course is the protective layer, evenly coats the lens with spin coating liquid through the spin coating technology on. The spin coating process comprises the steps of firstly spraying spin coating liquid on the surface of a lens, then rotating the lens at a high speed, throwing the coating liquid on the surface of the lens to the periphery, and uniformly distributing the coating liquid on the surface of the whole lens. This spin coating process is done on a spin coater. The spin coating liquid thrown off from the lens returns to the spin coating tank and is sent to the nozzle through the circulating pump again to be sprayed out.
In order to improve efficiency, a spin coater is generally required to be highly automated, which can continuously and continuously spin lenses, and a spin coating liquid supply system is required to ensure stable supply of materials. The spin-coating liquid is continuously consumed in the spin-coating process and must be replenished periodically, but the spin-coating liquid cannot be used immediately after being added into a spin-coating tank, and the spin-coating liquid needs to be circulated in a circulating system for about one hour so as to eliminate bubbles brought in the liquid adding process, which also has great influence on the production efficiency of a spin-coating machine. On the other hand, since the spin-coating liquid contains an organic solvent, the liquid is volatilized at the time of use, and the viscosity of the liquid is increased. The method has a serious influence on the apparent quality of the coating, and quality defects such as stripes, central points, craters and the like are very easy to occur, so that the spin coater has to be suspended after the lens is spin-coated for a certain time, and the lens coating can be continuously manufactured after the viscosity of the spin-coating liquid is adjusted to a required range, thereby seriously influencing the production efficiency of the spin coater.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art not enough, provide a spin coater feeding system.
The purpose of the utility model is realized through the following technical scheme:
a feeding system of a spin coater comprises a spin coating tank, a circulating pump, a bag filter, a spin coating liquid storage tank, a solvent storage tank and a stainless steel structural member;
a blanking hole is arranged at the position, close to the edge, of the bottom plate of the spin-coating tank, and the blanking hole is connected to the inlet of the circulating pump through a hose below the bottom plate of the spin-coating tank;
the outlet of the circulating pump is connected with the inlet of the bag filter through a hose;
the spin coating liquid storage tank is arranged on the vertical thin plate of the stainless steel structural part through a bracket or a fixing ring;
the solvent reservoir is mounted on the horizontal sheet of the stainless steel structural member by a bracket or a fixing ring.
The stainless steel structural member is formed by two stainless steel sheets which are mutually vertical, the intersection parts of the sheets are connected together by welding, four round holes with the diameter of 0.8-1.0 cm are arranged at four corners of the horizontal sheet, and the diameter is shown in the attached figure 2-1 and the attached figure 2-2.
Four stainless steel cylinders with the diameter of 1.1cm are correspondingly arranged on the bottom plate of the spin coater. After the feeding system prepares materials, the round hole of the horizontal thin plate is aligned to the cylinder of the bottom plate, and the whole body is quickly installed on the spin coater, so that the aim of quickly switching modules of the feeding system is fulfilled, and the requirements of various production of the automatic spin coater are met.
The spin coating tank is cylindrical, the diameter is 20-25 cm, the height is 25-30 cm, the thickness of the bottom plate is 1.0-1.5 cm, and the top is provided with a cover.
The center of the cover is provided with a round hole with the diameter of 8.5cm, and a feeding hole is arranged close to the edge.
The spin-coating tank is made of one of nylon, polytetrafluoroethylene and polyformaldehyde.
The circulating pump is a magnetic gear pump, and the aperture of the bag type filter is 5-10 microns.
The spin-coating tank, the circulating pump and the bag type filter are respectively provided with a bracket, and the bracket is fixed on a horizontal bottom plate of a stainless steel structural member by screws.
The center of the bottom plate of the spin coating tank is provided with a feeding hole, and the upper side of the bottom plate is provided with a nozzle connected with the feeding hole. The outlet of the bag filter is connected to the centre of the floor below the floor by a hose, see figure 1.
The spin coating liquid storage tank and the solvent storage tank are cylindrical, the outer diameter is 6.0-6.5 cm, the wall thickness is 1.0-2.0 mm, the thickness of the bottom plate is 1.0-1.5 cm, and the height is 10.0-12.0 cm. The middle of the bottom is provided with a discharging hole, and the top is provided with a cover. The upper part and the lower part of the tank body are provided with fixing rings which are fixed on a vertical thin plate of a stainless steel structural member by screws, and the bottom of the liquid storage tank is 2.0-4.0 cm higher than the cover of the spin coating tank. The blanking holes of the two liquid storage tanks are connected with the feeding hole of the cover of the spin coating tank through hoses, and the hoses are provided with flow regulating valves for controlling the adding speeds of the spin coating liquid and the solvent, matching the consumption speed of the spin coating liquid in the tank and the volatilization speed of the solvent, and keeping the liquid level in the tank unchanged and the viscosity of the liquid stable. When the spin coater operates, only the materials in the liquid storage tank need to be supplemented frequently, and the problem that the spin coater is suspended due to the supplement of the spin coating liquid and the adjustment of the viscosity of the spin coating liquid is solved. The spin-coating liquid and the solvent are slowly and continuously added into the spin-coating tank through the hose, so that a lot of bubbles brought by adding a large amount of spin-coating liquid at one time are avoided, and the problem of bubbles brought by supplementing new liquid is solved.
The spin coating tank, the spin coating liquid storage tank and the solvent storage tank are all made of one of nylon, polytetrafluoroethylene and polyformaldehyde, and the hose is made of a polytetrafluoroethylene material, so that the hose is good in corrosion resistance and strong in solvent resistance and can adapt to most organic solvents.
The circulating pump adopts a magnetic gear pump, the flow is stable, the liquid flow change is small, the shape and the height of a liquid column sprayed out by a nozzle in the spin-coating tank are stable, the apparent quality of the coating is ensured, and the quality defects of stripes, central points and the like of the coating are avoided.
The bag filter can filter out microparticles in liquid and has small filtration loss.
Compared with the prior art, the utility model has the positive effects that:
(1) The spin-coating liquid and the solvent are replenished on line, the liquid level in the spin-coating tank is kept stable, the viscosity is kept in a required range, and the spin-coating liquid is replenished or the viscosity of the spin-coating liquid is adjusted without stopping the machine;
(2) The spin-coating liquid and the solvent are continuously and slowly added into the spin-coating tank, can be used immediately, and do not need to wait for defoaming;
(3) The whole feeding system is fast switched to meet the requirements of various productions.
Drawings
FIG. 1 is a schematic view of a feed system of a spin coater;
FIG. 2-1 illustrates a first stainless steel structural member ready-assembled;
2-2 fast assembly of stainless steel structural members;
the labels in the figures are: the spin coating device comprises a spin coating tank 1, a circulating pump 2, a bag filter 3, a spin coating liquid storage tank 4, a solvent storage tank 5, a flow regulating device 6, a vertical thin plate 71 of a stainless steel structural member, a horizontal thin plate 72 of the stainless steel structural member, a fixing circular hole 73, a spin coating machine bottom plate 8 and a fixing circular strip 81.
Detailed Description
The following provides a specific embodiment of a feeding system of a spin coater.
Example 1
As shown in fig. 1, the spin coating tank 1, the circulation pump 2, the circulation pump 3, the filter 4, the spin coating solution reservoir 4, and the solvent reservoir 5 are mounted on a vertical thin plate 71 and a horizontal thin plate 72 of the stainless steel structural member 7 by means of a bracket or a fixing ring, respectively. And a quick-screwing stainless steel joint is arranged at a blanking hole at the bottom of the two liquid storage tanks, a polytetrafluoroethylene hose is connected, a screw cap is screwed, and the other end of the quick-screwing stainless steel joint is connected with a flow regulating device. The flow regulating device can be one of a ball valve, a flow valve and a perforated valve, and can regulate the flow of the fluid. The outlet of the flow regulating device is connected with the feed hole of the cover of the spin coating tank 1 through a polytetrafluoroethylene tube. The bottom of the liquid storage tank is higher than the cover of the spin coating tank.
The bottom of the spin-coating tank 1 is provided with a quick-screwing joint which is connected with a hose and connected to the inlet of the circulating pump 2, and the outlet of the pump is connected with a hose and connected to the inlet of the bag-type filter 3. The outlet of the filter 3 is connected to a feeding hole at the center of the bottom of the spin coating tank 1 and is provided with a quick screwing joint, so that the connection and installation of a feeding system are completed.
When in actual use, firstly, spin-coating liquid is added into the spin-coating tank 1, and the liquid level does not exceed the top end of the nozzle; and adding the spin-coating liquid and the solvent into the two liquid storage tanks. And (3) starting the circulating pump 2, enabling the spin-coating liquid in the spin-coating tank 1 to flow into the pipeline, enabling the spin-coating liquid to flow to the bag-type filter 3 through the circulating pump 2, then spraying out from a nozzle in the center of the bottom of the tank, and returning to the spin-coating tank 1, so that the liquid is kept circulating for 1 hour, and air in the pipeline and the filter is fully eliminated. As shown in fig. 2-1 and 2-2, the circular hole of the horizontal plate of the feeding system is aligned with the fixed round bar 81 of the bottom plate 8 of the spin coater, so that the installation and positioning of the feeding system are completed quickly, and the preparation work of spin coating and feeding is completed.
The replenishment rates ml/min of the spin coating solution and the solvent required for maintaining the liquid level and the viscosity in the spin coating tank 1 were measured in advance.
When the lens starts spin coating, the flow regulating devices of the spin coating liquid and the solvent are opened to the opening corresponding to the measured replenishing speed, and the spin coating machine starts spin coating the lens.
In the lens spin-coating process, the spin-coating liquid is continuously consumed, the solvent of the spin-coating liquid in the tank is continuously volatilized, but the liquid level and the viscosity of the liquid in the spin-coating tank 1 are kept in a required range due to continuous supplement of the spin-coating liquid and the solvent in the liquid storage tank, the change is very small, and the product quality and the production yield of the coated lens are ensured.
When changing lens production variety, prepare another set of this kind of spin coater feeding system off-line, add spin-on liquid and solvent in spin-on groove, the reservoir, spin-on groove liquid circulation 1 hour defoaming prepares the feeding system module in advance. When the production varieties are switched, the feeding system module on the automatic spin coater is taken out quickly, the prepared feeding system module bottom plate fixing circular hole 73 is aligned to the fixing circular strip of the spin coater bottom plate, the feeding system module bottom plate fixing circular hole is installed in place quickly, new variety lenses can be produced immediately, and the purpose of quickly switching the production varieties is achieved.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the concept of the present invention, and these improvements and decorations should also be considered as within the protection scope of the present invention.

Claims (10)

1. A feeding system of a spin coater is characterized by comprising a spin coating tank, a circulating pump, a bag filter, a spin coating liquid storage tank, a solvent storage tank and a stainless steel structural member;
a blanking hole is arranged at the position, close to the edge, of the bottom plate of the spin-coating tank, and the blanking hole is connected to the inlet of the circulating pump through a hose below the bottom plate of the spin-coating tank;
the outlet of the circulating pump is connected with the inlet of the bag type filter through a hose;
the spin coating liquid storage tank is arranged on the vertical thin plate of the stainless steel structural member through a bracket or a fixing ring;
the solvent reservoir is mounted on the horizontal sheet of the stainless steel structural member by a bracket or a fixing ring.
2. The feeding system of a spin coater according to claim 1, wherein the stainless steel structure is formed by two stainless steel sheets perpendicular to each other, the intersection of the two sheets are welded together, four round holes with a diameter of 0.8 to 1.0cm are formed at four corners of the horizontal sheet.
3. The feeding system of claim 1, wherein four stainless steel cylinders with a diameter of 1.1cm are correspondingly disposed on the base plate of the spin coater.
4. The feeding system of the spin coater according to claim 1, wherein the spin coating tank is cylindrical, the diameter is 20 to 25cm, the height is 25 to 30cm, the thickness of the bottom plate is 1.0 to 1.5cm, and the top of the spin coating tank is provided with a cover.
5. The feed system of claim 4, wherein the lid has a circular hole with a diameter of 8.5cm in the center and a feed hole near the edge.
6. The feed system of claim 1, wherein the spin-on bath material is one of nylon, teflon, and polyoxymethylene.
7. The feeding system of a spin coater according to claim 1, wherein the circulating pump is a magnetic gear pump, and the pore size of the bag filter is 5 to 10 μm.
8. The feeding system of a spin coater according to claim 1, wherein the spin coating tank, the circulating pump and the bag filter are respectively provided with a bracket, and the bracket is fixed on the horizontal bottom plate of the stainless steel structural member by screws.
9. The feed system of claim 1, wherein the spin-coating bath has a feed hole in the center of the bottom plate, a nozzle on the top of the bottom plate for connection to the feed hole, and the outlet of the bladder filter is connected to the center of the bottom plate by a hose under the bottom plate.
10. The feeding system of the spin coater according to claim 1, wherein the spin coating liquid storage tank and the solvent storage tank are cylindrical, the outer diameter is 6.0 to 6.5cm, the wall thickness is 1.0 to 2.0mm, the thickness of the bottom plate is 1.0 to 1.5cm, and the height is 10.0 to 12.0cm.
CN202120885941.3U 2021-04-27 2021-04-27 Feeding system of spin coater Active CN217569476U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120885941.3U CN217569476U (en) 2021-04-27 2021-04-27 Feeding system of spin coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120885941.3U CN217569476U (en) 2021-04-27 2021-04-27 Feeding system of spin coater

Publications (1)

Publication Number Publication Date
CN217569476U true CN217569476U (en) 2022-10-14

Family

ID=83525766

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120885941.3U Active CN217569476U (en) 2021-04-27 2021-04-27 Feeding system of spin coater

Country Status (1)

Country Link
CN (1) CN217569476U (en)

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Address after: South side of Railway Avenue, Shanxiatan Village, Shaojiadu Street, Linhai City, Taizhou City, Zhejiang Province, 317006

Patentee after: Zhejiang Weixing Optics Co.,Ltd.

Address before: 317300 south side of railway Avenue, shanxiatan village, shaojiadu street, Linhai City, Taizhou City, Zhejiang Province

Patentee before: ZHEJIANG WEIXING OPTICAL Co.,Ltd.