CN217549381U - Venturi device and system for preparing nano powder by gas phase method - Google Patents

Venturi device and system for preparing nano powder by gas phase method Download PDF

Info

Publication number
CN217549381U
CN217549381U CN202221183141.8U CN202221183141U CN217549381U CN 217549381 U CN217549381 U CN 217549381U CN 202221183141 U CN202221183141 U CN 202221183141U CN 217549381 U CN217549381 U CN 217549381U
Authority
CN
China
Prior art keywords
port
venturi
gas
venturi nozzle
pipeline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221183141.8U
Other languages
Chinese (zh)
Inventor
许明海
明燕荣
杨涛
冯国平
徐济生
牛丹
谢宇晨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xinjiang Jingshuo New Material Co ltd
Xinte Energy Co Ltd
Original Assignee
Xinjiang Jingshuo New Material Co ltd
Xinte Energy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xinjiang Jingshuo New Material Co ltd, Xinte Energy Co Ltd filed Critical Xinjiang Jingshuo New Material Co ltd
Priority to CN202221183141.8U priority Critical patent/CN217549381U/en
Application granted granted Critical
Publication of CN217549381U publication Critical patent/CN217549381U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Cyclones (AREA)

Abstract

The utility model discloses a venturi device, it includes casing, venturi nozzle, be equipped with first port, second port and third port on the casing, and be equipped with inside lining ceramic layer on the inner wall of casing, first port is the material import, the second port is the material export, the third port is the air inlet, its pass through the flange with venturi nozzle's entry end sealing connection, just the outside of flange and venturi nozzle's outside all are equipped with outer lining ceramic layer, and venturi nozzle's exit end stretches into in the casing, and with first port is relative to admit air in to the casing through venturi nozzle, and the material that produces when admitting air through venturi nozzle is carried to the second port and is discharged with the material that first port lets in. The utility model discloses still disclose a system that is used for the gas phase legal system nanometer powder of adopting above-mentioned venturi device. The utility model discloses can wear-resisting, corrosion-resistant and high temperature resistant, can avoid corrosive wear.

Description

Venturi device and system for preparing nano powder by gas phase method
Technical Field
The utility model particularly relates to a venturi device and including this venturi device be used for the system of gaseous phase legal system nanometer powder.
Background
The gas phase method for preparing the nano powder adopts oxyhydrogen flame high-temperature hydrolysis, and the raw materials are mostly SiCl 4 、CH 3 SiCl 3 、TiCl 4 、AlCl 3 And the prepared oxide nano powder has the advantages of small primary particle size, large specific surface area, small stacking density and the like, and also has excellent performances of electrification, reinforcement, thickening, wear resistance and the like, so that the oxide nano powder is widely applied to various fields of rubber, cosmetics, coatings, agriculture and the like.
The preparation of the nano powder by the gas phase method generally comprises the following six process flows: raw material vaporization, hydrolytic combustion, cyclone separation, deacidification, cloth bag dust removal and tail gas absorption. In which hydrolytic combustion (i.e. SiCl) 4 +2H 2 O→SiO 2 +4 HCl) can be adsorbed on the surface of the powder in various forms, which causes the pH value of the nano powder product to be lower and influences the quality and performance of the product, therefore, the deacidification process is an important link for determining the quality of the product.
At present, deacidification process often adopts vertical deacidification stove to deacidify, its principle is to utilize steam will adsorb the HCl molecule on powder surface and take away, however, because some steam can condense into the liquid drop after meeting the cold, and combine with powder granule and form the scaling layer that contains the hydrochloric acid composition, this hydrochloric acid scaling layer if attach to the titanium equipment and the pipeline of low temperature region and no heating region for a long time (for example, the venturi conveyer of sack cleaner and cyclone's bottom exit, material conveying pipeline), can corrode titanium equipment and pipeline, lead to titanium equipment and pipeline attenuation, perforate even, not only can increase manufacturing cost, still can lead to the system parking, influence production, in addition, the corruption can also produce impurity, influence product quality.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is not enough more than to prior art exists, provides a venturi device and contains the system that is used for the gaseous phase legal system nanometer powder of venturi device, the device have excellent wear-resisting, corrosion-resistant and high temperature resistance can prevent to cause corrosive wear.
The utility model provides a technical scheme of above-mentioned technical problem is:
according to the utility model discloses an aspect provides a venturi device, and it includes casing, venturi nozzle, wherein: be equipped with first port, second port and third port on the casing, and be equipped with inside lining ceramic layer on the inner wall of casing, first port is the material import, the second port is the material export, the third port is the air inlet, its through the flange with the entry end sealing connection of venturi nozzle, just the outside of flange and the outside of venturi nozzle all are equipped with outer lining ceramic layer, and the exit end of venturi nozzle stretches into in the casing, and with first port is relative to admit air to the casing through the venturi nozzle, and the material that produces when admitting air through the venturi nozzle was carried to the second port and is discharged with the material that first port lets in.
Preferably, the device further comprises a heater connected to the inlet end of the venturi nozzle through an inlet duct for heating the inlet gas.
Preferably, the device further comprises a purging pipeline, the shell is provided with a purging port, and the purging pipeline is communicated with the purging port and used for introducing purging gas into the shell so as to purge the shell.
Preferably, the purge port is located proximate to the inlet end of the venturi nozzle.
Preferably, the purge line is communicated with the gas inlet pipeline and is used for introducing gas heated by the heater as the purge gas.
Preferably, a second control valve is arranged on the purge pipeline and used for controlling the on-off of the purge pipeline so as to adjust the flow of the purge gas; and the air inlet pipeline is provided with a first control valve, and the first control valve is positioned at the downstream of the communication part of the purging pipeline and the air inlet pipeline and is used for controlling the on-off of the air inlet pipeline so as to adjust the flow of the air inlet gas.
Preferably, the outer ceramic lining layer outside the flange has a thickness of 100 to 120mm.
Preferably, the inner lining ceramic layer and the outer lining ceramic layer are both made of aluminum oxide or silicon carbide.
According to an aspect of the present invention, there is provided a system for preparing nanopowder by gas phase process, comprising
The utility model provides a system for gas phase method nanometer powder, includes cyclone, deacidification equipment, sack cleaner and locates a plurality of venturi conveyors on the material pipeline between cyclone, deacidification equipment and the sack cleaner respectively, just venturi conveyor adopts above the venturi device, first port in the venturi device with upstream pipeline in the material pipeline is linked together, second port in the venturi device with downstream pipeline in the material pipeline is linked together.
Preferably, the inner wall of the material conveying pipeline is provided with the lining ceramic layer.
Has the advantages that:
the utility model discloses a venturi device has excellent corrosion-resistant, stand wear and tear and high temperature resistance, can prevent corrosive wear to, through setting up the heater, can promote the temperature of venturi device itself, avoid a small amount of steam to take place to condense and form the scale deposit with the powder and cause the corruption, sweep the pipeline through the setting, can prevent that the material from depositing in the casing, avoid long-pending material to corrode.
The utility model discloses a system for be used for gas phase method nano powder, owing to adopted above the venturi device, have excellent corrosion-resistant, stand wear and tear, and high temperature resistance, compare in the conventional venturi conveyer in the conventional art, can prevent corrosive wear, and, because set up the heater in the venturi device and sweep the pipeline, not only can promote the temperature of venturi device itself, can also compensate each material pipeline and the heat loss that external heat transfer made to a certain extent, play certain heat preservation or intensification effect, can effectively avoid steam and powder condensation scale deposit in material pipeline to cause the corruption in process of production, avoid introducing impurity such as metal because of the corruption, ensure the product quality, in addition, through setting up the inside lining ceramic layer at each material pipeline, can further prevent corrosive wear, improve high temperature resistance.
Drawings
Fig. 1 is a schematic structural diagram of a venturi device in an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a system for preparing nano-powder by a gas phase method in an embodiment of the present invention.
In the figure: 1-a first port; 2-a second port; 3-lining a ceramic layer; 4-a shell; 5-a venturi nozzle; 6-external lining ceramic layer; 7-a flange; 8-a heater; 9-a first control valve; 10-a second control valve; 11-an air intake duct; 12-a purge line; 13-a purge port; 14-a negative pressure cavity; 15-a venturi device; 16-a cyclone separator; 17-deacidifying equipment; 18-bag dust collector; 19-a first material conveying pipeline; 20-a second material conveying pipeline; 21-a third material conveying pipeline; 22-a fourth material conveying pipeline; 23-hydrolysis combustion device.
Detailed Description
In order to make the technical solution of the present invention better understood, the following description of the present invention with reference to the accompanying drawings will be made for clear and complete description of the technical solution of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the indication of orientation or positional relationship such as "up" is based on the orientation or positional relationship shown in the drawings, and is only for convenience and simplicity of description, and does not indicate or imply that the indicated device or element must be provided with a specific orientation, constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected," "disposed," "mounted," "fixed," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; either directly or indirectly through intervening media, or through the interconnection of two elements. The specific meaning of the above terms in the present invention can be understood in specific cases for those skilled in the art.
Example 1
As shown in fig. 1, the present embodiment discloses a venturi device, which includes a housing 4, a venturi nozzle 5, a first port 1, a second port 2, and a third port are provided on the housing 4, the first port 1 is a material inlet, the second port 2 is a material outlet, the third port is an air inlet, the third port is hermetically connected to the inlet end of the venturi nozzle 5 through a flange 7, the outlet end of the venturi nozzle 5 extends into the housing 4, and is preferably opposite to the first port 1, so as to allow air to enter into the housing through the venturi nozzle, and the material introduced from the first port 1 is conveyed to the second port 2 by an adsorption effect generated when the venturi nozzle enters air and is discharged. And, be equipped with inside lining ceramic layer 3 on the inner wall of casing 4, the outside of flange 7 and the outside of venturi nozzle 6 all are equipped with outer lining ceramic layer 6.
Specifically, as shown in fig. 1, the first port 1 is preferably arranged in a vertical direction, the second port 2 and the third port are preferably arranged in a horizontal direction, and the outlet end of the venturi nozzle 5 is located directly below the first port 1, and when the intake air is rapidly injected through the venturi nozzle 5, a negative pressure chamber 14 is created at the root position of the venturi nozzle 5, thereby causing the surrounding adsorption. The flange 7 is fixed on the third port through bolts, and the venturi nozzle 5 is arranged on the flange 7 in a penetrating way.
The lining ceramic layer 3 and the outer lining ceramic layer 6 are made of materials with corrosion resistance, abrasion resistance, high temperature resistance and the like, which are prepared by an auto-propagating high-temperature synthesis technology, for example, the materials can be aluminum oxide or silicon carbide. Through setting up inside lining ceramic layer and outer lining ceramic layer, can prevent that casing and venturi nozzle from being by erosive wear, avoid introducing impurity.
The outer ceramic lining layer 6 outside the flange 7 should have a certain thickness and length, in this embodiment, to function as a support for the venturi nozzle, and the outer ceramic lining layer 6 outside the flange 7 closely adheres to the ceramic lining layer 3 on the inner wall of the housing 4 to ensure the sealing property. In this embodiment, the outer ceramic lining layer 6 outside the flange 7 preferably has a thickness of 100 to 120mm.
In some embodiments, the device further comprises a heater 8, the heater 8 is connected with the inlet end of the venturi nozzle 5 through an inlet pipe 11, and is used for heating the inlet gas, so as to raise the temperature of the venturi nozzle and the housing through the hot inlet gas, and avoid the formation of a scaling layer on the venturi nozzle and the housing, and further prevent the housing and the venturi nozzle from being corroded and worn.
In some embodiments, the device further comprises a purging line 12, a purging port 13 is arranged on the housing 4, and the purging line 12 is communicated with the purging port 13 and used for introducing a purging gas into the housing to purge the housing, so as to prevent the material from accumulating in the housing and causing material accumulation corrosion.
In some embodiments, the purge port 13 is preferably disposed near the inlet end of the venturi nozzle 5, i.e. the purge port 13 is disposed at the root of the venturi nozzle 15, so as to perform a circumferential purge on the root of the venturi nozzle and discharge the material which is not easily absorbed in the negative pressure chamber inside the housing.
In some embodiments, the purge line 12 is connected to the gas inlet pipe 11 for introducing the gas heated by the heater as the purge gas, that is, the same gas source can be used for the gas inlet and the purge gas, which can simplify the whole device structure and reduce the cost and the device volume to some extent.
In some embodiments, a second control valve 10 is disposed on the purge line 12 for controlling the on-off of the purge line to adjust the flow rate of the purge gas; the first control valve 9 is arranged on the air inlet pipeline 11, and the first control valve 9 is located at the downstream of the communication position of the purging pipeline 12 and the air inlet pipeline 11 and used for controlling the on-off of the air inlet pipeline so as to adjust the flow rate of the inlet gas. In this embodiment, the flow rate of the intake gas should be much larger than the flow rate of the purge gas.
The venturi device of this embodiment has excellent corrosion-resistant, stand wear and tear and high temperature resistance, can prevent corrosive wear to, through setting up the heater, can promote the temperature of venturi device itself, avoid a small amount of steam to take place the condensation and form the scale deposit with the powder and cause the corruption, sweep the pipeline through the setting, can prevent that the material from depositing in the casing, avoid long-pending material to corrode.
Example 2
The embodiment discloses a system for preparing nano powder by a gas phase method, which comprises a hydrolysis combustion device 23, a cyclone separator 16, a deacidification device 17, a bag-type dust remover 18 and a plurality of venturi conveyors respectively arranged on material conveying pipelines among the cyclone separator 16, the deacidification device 17 and the bag-type dust remover 18, wherein the venturi conveyors are the venturi devices 15 in the embodiment 1, a first port 1 in the venturi device 15 is communicated with an upstream pipeline in the material conveying pipelines, and a second port 2 in the venturi device 15 is communicated with a downstream pipeline in the material conveying pipelines.
Specifically, as shown in fig. 2, the material conveying pipes include a first material conveying pipe 19, a second material conveying pipe 20, a third material conveying pipe 21, and a fourth material conveying pipe 22, and the cyclone separator 16 is provided with an inlet, a bottom outlet, and a top outlet, wherein: the inlet of the cyclone separator 16 is connected with the outlet of the hydrolysis combustion device 23 and is used for introducing a gas-solid mixture obtained in the hydrolysis combustion process and carrying out gas-solid separation on the gas-solid mixture; the bottom outlet of the cyclone separator 16 is connected with the inlet of the deacidification equipment 17 through a first material conveying pipeline 19, and is used for introducing solid-phase substances (HCl-containing powder) obtained by gas-solid separation into the deacidification equipment 17 for deacidification treatment; the outlet of the deacidification device 17 is connected with the inlet of the cyclone separator 16 through a second material conveying pipeline 20, and is used for conveying the obtained gas-solid mixture after deacidification treatment back to the cyclone separator 16 for gas-solid separation again; the top outlet of the cyclone separator 16 is connected with the inlet of the bag-type dust collector 18 through a third material conveying pipeline 21 for introducing gas-phase substances obtained by gas-solid separation into the bag-type dust collector 18 for dust removal, and the bottom outlet of the bag-type dust collector 18 is connected with the inlet of the cyclone separator 16 through a fourth connecting channel 22 for conveying solid-phase substances (dust) separated by the bag-type dust collector 18 back to the cyclone separator 16 for gas-solid separation again. The plurality of venturi devices 15 are respectively disposed on the first material conveying pipeline 19, the second material conveying pipeline 20, the third material conveying pipeline 21 and the fourth material conveying pipeline 22, the first port 1 of each venturi device 15 is respectively connected with an upstream pipeline of the corresponding first material conveying pipeline 19, the corresponding second material conveying pipeline 20, the corresponding third material conveying pipeline 21 and the corresponding fourth material conveying pipeline 22, and the second port 2 of each venturi device 15 is respectively connected with a downstream pipeline of the corresponding first material conveying pipeline 19, the corresponding second material conveying pipeline 20, the corresponding third material conveying pipeline 21 and the corresponding fourth material conveying pipeline 22.
In some embodiments, as shown in fig. 2, the venturi device on the first material conveying pipe 19 is preferably arranged at the bottom outlet of the cyclone separator 16, that is, the first port 1 of the venturi device 15 can be directly connected to the bottom outlet of the cyclone separator 16, and the second port 2 of the venturi device 16 is connected to the inlet end of the first material conveying pipe 19.
In some embodiments, the venturi device 15 on the fourth material conveying pipeline 22 is preferably arranged at the bottom outlet of the bag-type dust remover 18, that is, the first port 1 of the venturi device 15 can be directly connected with the bottom outlet of the bag-type dust remover 18, and the second port 2 of the venturi device 15 is connected with the inlet end of the fourth material conveying pipeline 22.
In some embodiments, the ceramic lining layer 3 is arranged on the inner wall of the material conveying pipeline. Specifically, the inner walls of the first material conveying pipeline 19, the second material conveying pipeline 20, the third material conveying pipeline 21 and the fourth material conveying pipeline 22 are all provided with the lining ceramic layer 3, so that the steam and the powder material can be prevented from being condensed in each material conveying pipeline to form a structural layer to cause corrosive wear to each material conveying pipeline.
The system for preparing nano powder by a gas phase method of the embodiment adopts the embodiment 1. The Venturi device has excellent corrosion resistance, wear resistance and high temperature resistance, and is compared with a conventional Venturi conveyor in the traditional technology, and can prevent corrosive wear, furthermore, because the Venturi device is provided with a heater and a purging pipeline, the temperature of the Venturi device can be increased, the heat loss caused by heat exchange between each material conveying pipeline and the outside can be compensated to a certain extent, a certain heat preservation or warming effect is realized, the corrosion caused by condensation and scaling of steam and powder in the material conveying pipeline can be effectively avoided, the introduction of impurities such as metal due to corrosion is avoided, the product quality is ensured, in addition, the lining ceramic layer is arranged in each material conveying pipeline, the corrosive wear can be further prevented, and the high temperature resistance is improved.
It is to be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principles of the present invention, and the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims (10)

1. A Venturi device is characterized by comprising a shell (4) and a Venturi nozzle (5),
the shell is provided with a first port (1), a second port (2) and a third port, the inner wall of the shell is provided with a lining ceramic layer (3),
the first port is a material inlet, the second port is a material outlet,
the third port is the air inlet, its through flange (7) with the entry end sealing connection of venturi nozzle, just the outside of flange and venturi nozzle's outside all are equipped with outer lining ceramic layer (6), and in the exit end of venturi nozzle stretched into the casing, and with first port is relative to admit air to the casing through the venturi nozzle, and the material that produces when admitting air through the venturi nozzle and let in first port is carried to the second port and is discharged.
2. The venturi device of claim 1, further comprising a heater (8),
the heater is connected with the inlet end of the Venturi nozzle through an air inlet pipeline (11) and used for heating inlet air.
3. The venturi device according to claim 2, further comprising a purge line (12), the housing having a purge port (13) disposed thereon,
and the purging pipeline is communicated with the purging port and is used for introducing purging gas into the shell so as to purge the shell.
4. The venturi device of claim 3, wherein the purge port is disposed proximate the inlet end of the venturi nozzle.
5. The venturi device of claim 3, wherein the purge line is in communication with the inlet conduit for passing gas heated by the heater as the purge gas.
6. The venturi device according to claim 5, wherein a second control valve (10) is disposed on the purge line for controlling the on/off of the purge line to adjust the flow rate of the purge gas;
and a first control valve (9) is arranged on the gas inlet pipeline, is positioned at the downstream of the communication position of the purging pipeline and the gas inlet pipeline and is used for controlling the on-off of the gas inlet pipeline so as to adjust the flow of the gas inlet.
7. The venturi device according to any one of claims 1-6, wherein the outer ceramic lining layer outside the flange has a thickness of 100-120 mm.
8. The venturi device according to any one of claims 1-6, wherein the inner and outer ceramic lining layers are both aluminum oxide or silicon carbide.
9. A system for preparing nano powder by a gas phase method comprises a cyclone separator (16), deacidification equipment (17), a bag-type dust remover (18) and a plurality of Venturi conveyors respectively arranged on material conveying pipelines among the cyclone separator, the deacidification equipment and the bag-type dust remover, and is characterized in that,
the venturi apparatus (15) as claimed in any one of claims 1 to 8, the first port of the venturi apparatus communicating with an upstream one of the material conveying conduits and the second port of the venturi apparatus communicating with a downstream one of the material conveying conduits.
10. The system for preparing nano powder by a gas-phase method according to claim 9, wherein the inner wall of the material conveying pipeline is provided with the lining ceramic layer (3).
CN202221183141.8U 2022-05-17 2022-05-17 Venturi device and system for preparing nano powder by gas phase method Active CN217549381U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221183141.8U CN217549381U (en) 2022-05-17 2022-05-17 Venturi device and system for preparing nano powder by gas phase method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221183141.8U CN217549381U (en) 2022-05-17 2022-05-17 Venturi device and system for preparing nano powder by gas phase method

Publications (1)

Publication Number Publication Date
CN217549381U true CN217549381U (en) 2022-10-11

Family

ID=83475100

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221183141.8U Active CN217549381U (en) 2022-05-17 2022-05-17 Venturi device and system for preparing nano powder by gas phase method

Country Status (1)

Country Link
CN (1) CN217549381U (en)

Similar Documents

Publication Publication Date Title
US8915775B2 (en) Exhaust system
JP5727362B2 (en) System and method for flowing gas through a chemical vapor deposition reactor
CN104925821B (en) Production system for producing fumed silica by utilizing silicon tetrachloride
CN217549381U (en) Venturi device and system for preparing nano powder by gas phase method
WO2006093037A1 (en) Semiconductor production system and semiconductor production method
CN201316679Y (en) Thermophoresis-type cyclone separator for superfine particles
CN1422805A (en) High-dispersion nano silicon dioxide preparation method
WO2011113364A1 (en) Tubular thin film evaporator
CN102530951B (en) Produce method and the device of granular polycrystalline silicon
US4416863A (en) Method for synthesizing amorphous silicon nitride
WO2024093271A1 (en) Heat exchanger and polysilicon production system using heat exchanger
CN207716837U (en) A kind of hard alloy vacuum sintering furnace
CN205556573U (en) Gas producer
CN207057626U (en) A kind of condenser for zinc powder production
CN205876832U (en) Environment -friendly vacuum unit
CN206695148U (en) Combustion-type waste gas treatment equipment
CN105779013B (en) A kind of cold slag system for pressurize gentle air flow bed or fluidized bed coal gasification process
CN106906887A (en) A kind of vacuum device for discharging dirt
CN107151788A (en) A kind of green clean manufacturing equipments of CVD SiC
CN208167095U (en) A kind of boron nitride crucible production system
CN220677285U (en) Exhaust gas treatment equipment for general semiconductor process
CN216855985U (en) Sack cleaner and equipment for packing
CN205796572U (en) The falling film evaporation device that a kind of film-formation result is good
CN212758529U (en) Microcapsule essence drying device
CN217459664U (en) Single crystal furnace equipment

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant