CN206695148U - Combustion-type waste gas treatment equipment - Google Patents
Combustion-type waste gas treatment equipment Download PDFInfo
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- CN206695148U CN206695148U CN201621179258.3U CN201621179258U CN206695148U CN 206695148 U CN206695148 U CN 206695148U CN 201621179258 U CN201621179258 U CN 201621179258U CN 206695148 U CN206695148 U CN 206695148U
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Abstract
The utility model discloses a kind of combustion-type waste gas treatment equipment, including：Inlet chamber, it is the tubular housing of axis vertical, upper end, which has, matches somebody with somebody pipe end-cap, and lower end has the bottom end cover with centre bore；Combustion chamber, it is the tubular housing of axis vertical, the lower end of inlet chamber is connected to by the centre bore；And pipe arrangement, it is coupled to and described matches somebody with somebody pipe end-cap；Liquid inlet is provided with the inside of the periphery of inlet chamber upper end, to import along the descending water of air inlet cavity wall, and flows into the inlet chamber.It is long according to processing equipment service life of the present utility model.
Description
Technical field
It the utility model is related to a kind of combustion-type waste gas treatment equipment.
Background technology
Mainly poisonous, the harmful or inflammable and explosive gas of the object of exhaust-gas treatment, such as in manufacture of semiconductor, example
Such as FET（Field Effect Transistor, field-effect transistor）、IC（Integrated Circuit, integrated circuit, port
Platform is referred to as IC）、Solar（Solar energy, refer to solar cell wafer）Processing procedure in can produce the gas of severe corrosive,
Such as Cl2、 HCl、HF、 F2、NH3Deng（Typically it is referred to collectively as semiconductor waste gas）.The processing mode of these severe corrosive gases
Usually use combustion-type handling process.
Combustion-type handling process uses natural gas, and as fuel, the treatment temperature for the treatment of region is at 1200 ~ 1400 degrees Celsius.This
Class handling process is found in Chinese patent literature CN102705816A, there is provided a combustion of natural gas room, makes to give up by wind deflector
Gas is uniformly distributed and forms whirlpool, and the flame that burner sprays makes waste gas obtain punishment burning.Generally such handling process relies on
In burning in itself, the treatment effeciency of waste gas is than relatively low, therefore, generally requires the mode that example forms whirlpool as the aforementioned, makes waste gas
It is sufficiently mixed with natural gas.
Relative to being sufficiently mixed and fully burning, in the processing procedure of reality, due to being usually contained in waste gas largely
Pernicious gas, such as hydrogen fluoride, combustion chamber（Also referred to as reaction chamber）Hermetic unit, and the service life and reliability of shell
It is to need to consider emphatically.Currently also shortcoming effectively avoids the effective way of combustion chamber ablation.
Therefore, either novel electric paddle waste gas treatment equipment（Reaction temperature is higher, beyond the fusing point of common metal）Also
It is the problem of combustion-type waste gas treatment equipment is required to consider equipment itself service life.
The content of the invention
In view of this, the purpose of this utility model is to provide a kind of service life long waste gas treatment equipment.
The technical solution adopted in the utility model is：
A kind of combustion-type waste gas treatment equipment, including：
Inlet chamber, it is the tubular housing of axis vertical, upper end, which has, matches somebody with somebody pipe end-cap, and lower end has the lower end with centre bore
Lid；
Combustion chamber, it is the tubular housing of axis vertical, the lower end of inlet chamber is connected to by the centre bore；And
Pipe arrangement, it is coupled to and described matches somebody with somebody pipe end-cap；
Liquid inlet is provided with the inside of the periphery of inlet chamber upper end, to import along the descending water of air inlet cavity wall, and is flowed into
The inlet chamber.
Above-mentioned combustion-type waste gas treatment equipment, alternatively, the inwall of inlet chamber, and the inwall of combustion chamber are respectively provided with anti-corrosion
Layer.
Alternatively, the anticorrosive coat is Teflon coating.
Alternatively, the liquid inlet is placed in the upper end periphery of inlet chamber, and liquid inlet is inwardly downward.
Alternatively, the combustion chamber is fitted with the water jacket for combustion chamber cooling.
Alternatively, the burner that combustion chamber is configured has multiple flame input elements, and the flame input element is arranged on
The side wall of combustion chamber, and flatly or obliquely sprayed to the inner chamber of combustion chamber.
Alternatively, the flame input element has three, and vertical plane where the axis of the shower nozzle of flame input element with
The angle that combustion chamber sectional elevation is crossed where shower nozzle center is 30 degree.
Alternatively, the lower end of the combustion chamber is provided with water tank, and side is provided with bypass, and the bypass forms outlet tube chamber,
Correspondingly, it is provided with spray piping in outlet tube chamber.
Alternatively, the outlet tube chamber includes the horizontal tube chamber for being connected to combustion chamber and lower end is connected to horizontal lumen exit port
Vertical tube chamber；
Wherein spray piping is provided with horizontal spout in horizontal tube chamber, and downward vertical spout is provided with vertical tube chamber.
Alternatively, the vertical tube chamber is two segment structure, and the section being located below is bigger than section caliber located above；
Wherein, spray piping is provided with the first vertical spout, the first vertical spout and the water in the section being located below
The source of flat spout connects the water tank by circulation；
Spray piping is furnished with the second vertical spout in section located above, and the second vertical spout connects exogenous water
Source.
According to the utility model, fluid is influenceed that vortex can be produced by earth's magnetic field, on the one hand may be used during defluent
To prevent soda acid from adhering to, acid base concentration is reduced；On the other hand, flowing water can take away heat, and the thing higher as thermal resistance
Matter, current can cover erosion of the heat to inlet chamber and combustion chamber.Thereby two aspect, can effectively improve exhaust-gas treatment and set
Standby service life.
In addition, the vortex based on current, can drive descending air-flow to produce vortex, be advantageous to be sufficiently mixed reaction gas.
Brief description of the drawings
Fig. 1 is the schematic diagram of combustion-type waste gas treatment equipment in the embodiment of the utility model one.
Fig. 2 is the structural representation of reaction unit part.
In figure：1.CDA import systems, 2. nitrogen inlet systems, 3. exhaust gas inlets, 4. exhaust outlets, 5. running water pipes, 6. is cold
But pipeline, 7. cooling-sedimentation chambers, 8. circulating pumps, 9. water tanks, 10. drainage pumps, 11. combustion chambers, 12. water jackets, 13. air inlets are settled
Chamber, 14. import cover, 15. vortex walls, 16. liquid inlets, 17. flame input elements, 18. shower nozzles.
Embodiment
To realize the purpose of the utility model, the utility model uses technological means and construction, in conjunction with Figure of description
And preferred embodiment is auspicious plus illustrates that its specific features and function are as follows.
It is the structure principle chart of the embodiment of the utility model one shown in Fig. 1, it can be seen that combustion-type exhaust-gas treatment is set
Standby basic composition includes：
Inlet chamber 13, it is the cone tubular housing of axis vertical, upper end, which has, matches somebody with somebody pipe end-cap, and lower end has with centre bore
Bottom end cover；
Combustion chamber 11, it is the tubular housing of axis vertical, the lower end of inlet chamber 13 is connected to by the centre bore；And
Pipe arrangement, it is coupled to and described matches somebody with somebody pipe end-cap；
Wherein, liquid inlet 16 is provided with the inside of the upper end periphery of inlet chamber 13, it is descending along the inwall of inlet chamber 13 to import
Water, and flow into the inlet chamber 13.
Structure in Fig. 2, generally vertical structure, visible it includes two parts in figure, one is it is superposed enter
Air cavity 13, another is that the caliber of combustion chamber 11 is less than inlet chamber, and axis is identical positioned at the combustion chamber 11 of bottom.
Comparatively, when there is fluid under the wall flow of inlet chamber 13, influenceed by magnetic field of the earth, vortex can be produced, such as
Shown in Fig. 2, the inner wall structure of inlet chamber 13 is vortex wall 15, the inwall of inlet chamber can be produced and washed away.
The less combustion chamber 11 of caliber is analogous to outlet conduit, is the one of the constituting portion point to form vortex.
Be vertical structure as illustrated in fig. 1 and 2 on the inlet chamber 13, its axis is in vertical state, and with burning
The axis of room 11 is identical, is vortexed in favor of being formed, more violent vortex can be especially produced in water flowing in combustion chamber 11.
So, the generation of vortex is, it is necessary to introduce water, as shown in Fig. 2 the liquid that beveling is provided with the upper end of vortex wall 15 is defeated
Entrance 16, in favor of current along vortex wall 15 and under.
Vortex wall 15 shown in figure is a conical surface vortex wall, it is to be understood that, cylinder cylinder wall can also form whirlpool
Stream.
It is visible in figure in order to reduce the interference to inlet air flow, the importing cover 14 of a taper is additionally provided with, to control as much as possible
Current processed are descending along vortex wall 15.
The position of inlet chamber 13 is matched, in the upper end of inlet chamber 13 formed with upper end cover, except being picked out for access for correlation
Outside the pipeline of related substances, inlet chamber 13 is airtight to be closed.The upper end periphery of inlet chamber 13, show as vortex wall 15 as shown in Figure 2
Liquid inlet 16 is provided with the inside of upper end, to import along the descending water of the inwall of inlet chamber 13, so as to pass through the lower end of inlet chamber 13
Outlet, i.e., centre bore on its bottom end cover flows into the combustion chamber 11.
Main pipeline is fitted in the upper end cover of inlet chamber, visible in figure, including：
Include nitrogen inlet system with tube portion, for importing nitrogen.
And CDA import systems 1, for importing compressed air.Wherein CDA is Clean Dry Air, i.e. clean dried pressure
Contracting air.
Dust in waste gas, and based on produced dust after mixture combustion, because being vortexed the presence of water, make the corruption such as soda acid
Corrosion medium will not be adhered to inlet chamber 13 and the internal face of combustion chamber 11, so as to be formed to inlet chamber 13 and combustion chamber 11
Effective protection of first aspect.
In addition, water is the bad conduction material of heat, heat exchange is realized mainly by convection current between water layer, capacity of heat transmission is very
Difference, under flowing water state, it on the one hand can stop erosion of the heat to inlet chamber 13 or combustion chamber 11, on the other hand, can also take away
Some heats, do not cause water body to overheat.
The presence of vortex water can effectively reduce the temperature of inlet chamber 13 and the outside wall surface of combustion chamber 11.Certainly, exist
In structure as shown in Figure 1, combustion chamber 11 is also provided with water jacket 12, for cooling to combustion chamber.
In addition, the presence of the water on being vortexed can also be produced the semiconductor waste gas of part, and burning process
Raw waste gas dissolving, such as the halogen family hydride such as HCl, its solubility in water are very high.
Although water can effectively wash away dust, after dissolved gas, corrosive solution can be formed, therefore, preferable
In embodiment, the inwall of the inlet chamber, and the inwall of combustion chamber 11 are respectively provided with anticorrosive coat.
The material of anticorrosive coat is that adaptation forms the property of solution and made.
In certain embodiments, the anticorrosive coat is Teflon coating.Teflon is its brand name（Because pronunciation is different,
Translated name is more, such as the rich dragon of Teflon, Teflon, iron, teflon etc.）, name of product is generalized for, its chemical name is poly- four
PVF（Polytetrafluoroethene）, english abbreviation PTFE.
The rich imperial not only high temperature resistant of iron（260 degrees Celsius can be used continuously）, chemical stability is good, so as to good resistance toization
Learn corrosivity.Erosion of the solution to equipment can effectively be stopped.
On the introducing of current, as shown in Fig. 2 the liquid inlet 16 is placed in inlet chamber upper end periphery, can be with shape
The liquid inlet annular into one, described annular is identical with the axis of inlet chamber, so as in the interior table of inlet chamber 13
Face forms uniform moisture film.
For comprehensive protection can be formed, it is necessary to current flow down along the vortex wall 15 in Fig. 2, therefore, the side of wall 15 1 is vortexed
Face can be provided with certain taper, and on the other hand, liquid inlet is inwardly downward, produce along leading, and make current along vortex wall
15 along under.
It is furnished with pressue device in the waterworks of the water jacket 12, there is provided higher water injection pressure, enable water to quick
Take away heat.
In Fig. 1 and Fig. 2, inlet chamber 13 and combustion chamber 11 are vertical structures, and the water of entrance flows directly into water tank 9, in water tank 9
Water and water temperature can gradually increase, on the one hand water tank 9 can be cooled by the heat-exchange system where drainage pump 10, separately
On the one hand, the water in water tank 9 can be as the source equipment of above-mentioned waterworks.
If the water of water tank 9 still can not form balance, and produce unnecessary water, it can send out and be discharged after being handled.
The water that liquid inlet 16 is entered mainly adaptedly makes inlet chamber 13 and the inwall of combustion chamber 11 form moisture film, with
Protection inlet chamber 13 and combustion chamber 11, partial reaction gas are dissolved into moisture film, form solution, partial reaction gas and dust still do not have
It is disposed off.In the construction shown in fig. 1, it is seen then that also comprising spray system, cooling-sedimentation chamber 7 as shown in Figure 1, lead to
Spray is crossed, reaction gas can be made to be passed through from water smoke, increases the contact area of reaction gas and water smoke, improves clean-up effect.
Here, first explain the rigging position of burner, in burning 11 at be to be arranged on flame input element 17
The side wall of combustion chamber 11, it is horizontal into combustion chamber 11 or spray obliquely, vortex can be produced accordingly, can be abundant with waste gas
Mixing.
Especially, when flame input element 17 is when having multiple, circumference of multiple flame input elements 17 in combustion chamber 11
It is uniformly arranged, the vortex formed can be sufficiently mixed with waste gas.
In a preferred embodiment, corresponding shower nozzle 18 has three to flame input element 17 in fig. 2, the axle of shower nozzle 18
The angle of sectional elevation of the vertical plane where line with crossing combustion chamber 11 where spout central is 30 degree, the venturi effect formed compared with
Good and required spout number is proper, sets difficulty relatively low.
Gas generation fuel gas and dust mixture after treatment, a part flow into water tank 9 with moisture film.Further,
As shown in figure 1, the lower end of the combustion chamber 11 is provided with water tank 9, moisture film current are directly along under, and gas is then from bypass right lateral, figure
A bypass, i.e., the cooling-sedimentation chamber 7 shown in figure, to form outlet tube chamber, and in escape pipe are provided with the bottom of combustion chamber 11
Chamber is provided with spray piping.
In Fig. 1, cooling-sedimentation pipeline 6 is used to pump water to spray piping by circulating pump 8, and good net in order to obtain
Change effect, the outlet tube chamber is including being connected to the horizontal tube chamber of combustion chamber 11, lower end is connected to the vertical of horizontal lumen exit port
Tube chamber；It is overall to form an approximately u-shaped structure with combustion chamber 11, be on the one hand advantageous to the water leaching removal and sedimentation of pollutant,
On the other hand, the discharge of gas is advantageous to, purified gas is discharged from the exhaust outlet 4 in Fig. 1.
So spray is divided into multistage, is that horizontal tube chamber is provided with horizontal spout first, from the left spray of dextrad in figure, and VERTICAL TUBE
Chamber is provided with downward vertical spout, is down sprayed from upper in figure.Specifically, the direction of spray is to meet the trend to gas, spray
Sprayed in the form of water smoke or droplet.
Shown in Fig. 1 is three-level spray structure, wherein, the vertical tube chamber is two segment structure, the section being located below
Section is bigger than section caliber located above；
Wherein, the section being located below is provided with the first vertical spout, and the first vertical spout and horizontal spout pass through source
Connect the circulation of the water tank；
Section located above is furnished with the second vertical spout, and the second vertical spout connects exogenous water source.
In addition, should also include the detection to the basic parameter of equipment in a preferred application, pressure as illustrated in the drawing
Table, exhaust ports are provided with one, to detect drain pressure, are provided with one at exhaust gas inlet 4, control air inflow.
In addition in certain embodiments, in addition to the detection to temperature, it is the detection of the water temperature in water tank 9 first, then
It is the detection for reacting cavity temperature, the besides temperature detection at cooling-sedimentation chamber 7.
Claims (10)
1. a kind of combustion-type waste gas treatment equipment, including：
Inlet chamber（13）, for the cone tubular housing of axis vertical, upper end, which has, matches somebody with somebody pipe end-cap, and lower end, which has, to be carried under centre bore
End cap；
Combustion chamber（11）, for the tubular housing of axis vertical, inlet chamber is connected to by the centre bore（13）Lower end；And
Pipe arrangement, it is coupled to and described matches somebody with somebody pipe end-cap；
Characterized in that, inlet chamber（13）Liquid inlet is provided with the inside of the periphery of upper end（16）, to import along inlet chamber（13）
The descending water of inwall, and flow into the inlet chamber（13）.
2. combustion-type waste gas treatment equipment according to claim 1, it is characterised in that inlet chamber（13）Inwall, and
Combustion chamber（11）Inwall be respectively provided with anticorrosive coat.
3. combustion-type waste gas treatment equipment according to claim 2, it is characterised in that the anticorrosive coat applies for Teflon
Layer.
4. according to any described combustion-type waste gas treatment equipments of claim 1-3, it is characterised in that the liquid inlet
（16）It is placed in inlet chamber（13）Upper end periphery, and liquid inlet（16）It is inwardly downward.
5. according to any described combustion-type waste gas treatment equipments of claim 1-3, it is characterised in that the combustion chamber（11）Match somebody with somebody
Equipped with for combustion chamber（11）The water jacket of cooling（12）.
6. according to any described combustion-type waste gas treatment equipments of claim 1-3, it is characterised in that combustion chamber（11）Configured
Burner there are multiple flame input elements（17）, the flame input element（17）It is arranged on combustion chamber（11）Side wall, and
To combustion chamber（11）Inner chamber flatly or obliquely spray.
7. combustion-type waste gas treatment equipment according to claim 6, it is characterised in that the flame input element（17）Have
Three, and flame input element（17）Shower nozzle（18）Axis where vertical plane and shower nozzle（18）Combustion chamber is crossed where center
（11）The angle of sectional elevation is 30 degree.
8. according to any described combustion-type waste gas treatment equipments of claim 1-3, it is characterised in that the combustion chamber（11）'s
Lower end is provided with water tank（9）, and side is provided with bypass, the bypass forms outlet tube chamber, correspondingly, spray is provided with outlet tube chamber
Pipeline.
9. combustion-type waste gas treatment equipment according to claim 8, it is characterised in that the outlet tube chamber includes being connected to
Combustion chamber（11）Horizontal tube chamber and lower end be connected to the vertical tube chamber of horizontal lumen exit port；
Wherein spray piping is provided with horizontal spout in horizontal tube chamber, and downward vertical spout is provided with vertical tube chamber.
10. combustion-type waste gas treatment equipment according to claim 9, it is characterised in that the vertical tube chamber is two segment
Structure, the section being located below are bigger than section caliber located above；
Wherein, spray piping is provided with the first vertical spout, the first vertical spout and the horizontal spray in the section being located below
The source of mouth connects the water tank by circulation；
Spray piping is furnished with the second vertical spout in section located above, and the second vertical spout connects exogenous water source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621179258.3U CN206695148U (en) | 2016-10-27 | 2016-10-27 | Combustion-type waste gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621179258.3U CN206695148U (en) | 2016-10-27 | 2016-10-27 | Combustion-type waste gas treatment equipment |
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| Publication Number | Publication Date |
|---|---|
| CN206695148U true CN206695148U (en) | 2017-12-01 |
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ID=60439985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621179258.3U Active CN206695148U (en) | 2016-10-27 | 2016-10-27 | Combustion-type waste gas treatment equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109028102A (en) * | 2018-06-27 | 2018-12-18 | 德淮半导体有限公司 | The burner and its application method of gas |
| CN111637473A (en) * | 2020-06-11 | 2020-09-08 | 安徽汇久管业有限公司 | Waste gas treatment device is used in processing of HDPE steel band bellows |
-
2016
- 2016-10-27 CN CN201621179258.3U patent/CN206695148U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109028102A (en) * | 2018-06-27 | 2018-12-18 | 德淮半导体有限公司 | The burner and its application method of gas |
| CN111637473A (en) * | 2020-06-11 | 2020-09-08 | 安徽汇久管业有限公司 | Waste gas treatment device is used in processing of HDPE steel band bellows |
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