CN217541343U - Drying device for silicon wafer cleaning machine - Google Patents
Drying device for silicon wafer cleaning machine Download PDFInfo
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- CN217541343U CN217541343U CN202221442206.6U CN202221442206U CN217541343U CN 217541343 U CN217541343 U CN 217541343U CN 202221442206 U CN202221442206 U CN 202221442206U CN 217541343 U CN217541343 U CN 217541343U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a silicon chip is drying device for cleaning machine, including the drying cabinet, fixed surface installs the air exhauster in drying cabinet one side, air exhauster up end fixed mounting has the connecting pipe, drying cabinet up end movable mounting has sealed lid, sealed lid lower surface inlays to establish and installs the heating lamp, the inside movable mounting of drying cabinet has the silicon chip to store the basket, terminal surface fixed mounting has motor power under the drying cabinet, the inside fixed mounting of air exhauster has the dust screen. Can drive the rotation of convulsions blade through starting air draft motor, the rotation of convulsions blade can drive the air and flow to inside with the air suction connecting tube, start the heater strip and can heat the air that flows through, inside the air exit can blow in the drying cabinet with the air that heats, discharge from the wash port at last, when constantly air-dry the silicon chip, because the air current is from the top, can will hang and blow off at surperficial water droplet, reduce drying time.
Description
Technical Field
The utility model belongs to the technical field of the silicon chip washs, concretely relates to drying device for silicon chip cleaning machine.
Background
The silicon wafer refers to a single crystal of silicon, and is a crystal having a substantially complete lattice structure. The silicon wafer is required to be physically and chemically cleaned in the production process of the monocrystalline silicon wafer, the silicon wafer is sequentially placed in different solvents, and a drying device is required to dry reagents remained on the surface of the silicon wafer after cleaning.
The drying device for the silicon wafer cleaning machine is disclosed as CN208794860U, and belongs to the technical field of silicon wafer cleaning, and comprises a drying box body, wherein the left side and the right side of the bottom of the drying box body are respectively provided with a drain pipe, the drain pipes are provided with drain valves, the drain pipes are connected with a water outlet header pipe, a drying throwing disc is arranged between the drain pipes, the drying throwing disc is connected with a drying motor coupler, the drying motor coupler is connected with a drying motor, the side wall of the drying box body is provided with a humidity sensor and a temperature sensor, the bottom surface of the drying box body is provided with an air inlet pipe, the air inlet pipe is provided with a heating device and a fan, a silicon wafer hanging basket is placed on the drying throwing disc, the drying box body is further provided with an anti-collision ring, the top of the drying box body is provided with an air outlet, and the drying device for the silicon wafer cleaning machine is further provided with a PLC which is connected with the drain valves, the drying motor, the humidity sensor, the temperature sensor, the heating device and the fan. The utility model has the advantages of drying efficiency is high better and more energy-conserving, but it is in the use, and the silicon chip washs the rear surface that finishes and has remained the washing liquid, directly carries out dry washing liquid and can leave water stain on the silicon chip surface, influences the silicon chip quality, and the blowing pipe setting is at the drying cabinet lower extreme, gets into the pipeline easily at the moisture that the silicon chip spin-dries and stores, can be blown out again when air-drying, influences drying efficiency's problem.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a drying device for silicon chip cleaning machine to propose current drying device for silicon chip cleaning machine in solving above-mentioned background art in the use, because the silicon chip washs the rear surface that finishes and has remained the washing liquid, directly carry out dry washing liquid and can leave water stain on the silicon chip surface, influence the silicon chip quality, and the blowing pipe setting is at the drying cabinet lower extreme, the moisture that spin-dries at the silicon chip gets into the pipeline easily and stores, can be blown out again when air-drying, influence drying efficiency's problem.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a drying device for silicon chip cleaning machine, includes the drying cabinet, surface fixed mounting has the air exhauster on one side of the drying cabinet, air exhauster up end fixed mounting has the connecting pipe, drying cabinet up end movable mounting has sealed lid, sealed under-surface inlay of covering establishes and installs the heating lamp, the inside movable mounting of drying cabinet has the silicon chip to store the basket, terminal surface fixed mounting has motor power under the drying cabinet.
It is specific, store the silicon chip that the basket can store after the washing through the silicon chip that sets up, then place and get into inside the drying cabinet, it is rotatory that start-up motor power can drive the silicon chip and store the basket, the silicon chip is stored the basket and can be driven the silicon chip rotation, certain clear water can be stored to the drying cabinet inside, its remaining washing liquid in surface can be washed away when the silicon chip is rotatory, avoid dry back silicon chip to remain water stain, the air exhauster can be inside with external air heating back suction drying cabinet, thereby the quick air-dries the silicon chip, start-up heating lamp can heat the inside temperature of drying cabinet.
Preferably, the drying cabinet lower surface just is close to surface edge fixed mounting and has the supporting legs, the drying cabinet inner wall just is close to the up end and has seted up the air exit, air exit below just is located drying cabinet inner wall fixed mounting and has rubber protection edge, the air exit passes through the pipe connection with the connecting pipe other end, the wash port has been seted up to the drying cabinet lower surface, port department fixed mounting has the solenoid valve under the wash port, the positive fixed surface of drying cabinet installs the connecting pipe.
The drying oven can be fixed at a proper height through the supporting legs, the air outlet is communicated with the exhaust fan through the connecting pipe, air can be blown into the drying oven from the air outlet, accordingly, the air circulation speed inside the drying oven is accelerated, the silicon wafer is dried in an accelerated mode, the rubber protection edge can prevent the silicon wafer storage basket from violently impacting the inner wall of the drying oven, the water drain hole can discharge water inside the drying oven, and the electromagnetic valve controls the water drain hole to be closed and opened.
Preferably, the inside fixed mounting of air exhauster has the dust screen, the dust screen top just is located the inside fixed mounting of air exhauster and has the motor fixed column, fixed surface installs the convulsions motor under the motor fixed column, convulsions motor output end fixed mounting has the convulsions blade, motor fixed column top just is located the inside fixed mounting of air exhauster and has the heater strip.
Specifically, inside can preventing through the dust screen that external dust from getting into the air exhauster, start the convulsions motor and can drive the convulsions blade rotation, the convulsions blade rotation can drive the air flow to with the inside air suction connecting pipe, start the air that the heater strip can heat the flow through.
Preferably, a displacement handle is fixedly arranged on the upper surface of the sealing cover.
Concretely, can drive sealed lid through the displacement handle and remove, sealed lid can seal the drying cabinet is inside relatively, and water stain throws away to the external world when preventing the centrifugation.
Preferably, the silicon wafer storage basket is internally and fixedly provided with a rubber partition plate, and the outer surface of the silicon wafer storage basket is provided with a connecting through hole.
Specifically, can store the basket inside with the silicon chip through the rubber partition board and cut apart into a plurality of spaces, can prevent that the silicon chip from colliding with each other and damaging, connect the inside that the through-hole can make the water branch silicon chip store the basket.
Preferably, the output end of the power motor is fixedly provided with a bearing disc, and the upper surface of the bearing disc is provided with a connecting through hole.
Specifically, the bearing disc can be driven to rotate by starting the power motor, and the silicon wafer storage basket can be driven to rotate by the rotation of the bearing disc.
Compared with the prior art, the beneficial effects of the utility model are that:
1. mutually support with motor power through the drying cabinet that sets up, be connected with external water pipe through the solenoid valve, store silicon chip after will wasing inside the basket is stored to the silicon chip, close sealed lid, store the silicon chip again the basket place get into the inside back of drying cabinet, to the inside clear water that pours into of drying cabinet, it is rotatory to start motor power can drive and bear the weight of the dish, it is rotatory that the rotation of bearing the weight of the dish can drive the silicon chip and store the basket, the silicon chip is stored the basket and can be driven the silicon chip rotatory, its remaining washing liquid in surface can be washed away when the silicon chip is rotatory, avoid the washing liquid to remain on the silicon chip surface.
2. Through the drying cabinet and the air exhauster of setting mutually supporting, control power motor high power starts, power motor drives the silicon chip and stores the basket fast revolution, thereby can throw away power motor surface moisture, it is rotatory to start the convulsions motor and can drive the convulsions blade, the convulsions blade rotation can drive the air flow, thereby with the inside air suction connecting pipe, start the air that the heater strip can heat the flow through, the air exit can blow in the drying cabinet inside with the air that heats, discharge from the wash port at last, in the continuous air-dried silicon chip, because the air current is from the top down, can hang and blow off at surperficial water droplet, reduce drying time.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the overall structure of the other side of the present invention;
fig. 3 is a cross-sectional view of the present invention;
fig. 4 is the structural schematic diagram of the silicon wafer storage basket of the present invention.
In the figure: 1. a drying oven; 101. supporting legs; 102. an air outlet; 103. a rubber protective edge; 104. a drain hole; 105. an electromagnetic valve; 106. connecting a water pipe; 2. an exhaust fan; 201. a connecting pipe; 202. a dust screen; 203. a motor fixing column; 204. an air draft motor; 205. air draft blades; 206. heating wires; 3. a sealing cover; 301. a displacement handle; 302. a heating lamp; 4. a silicon wafer storage basket; 401. a rubber dividing plate; 402. a connecting through hole; 5. a power motor; 501. a carrier tray.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: the utility model provides a drying device for silicon chip cleaning machine, includes drying cabinet 1, and 1 one side of drying cabinet outer fixed surface installs air exhauster 2, and 2 up end fixed mounting of air exhauster have connecting pipe 201, and 1 up end movable mounting of drying cabinet has sealed lid 3, and 3 lower surfaces of sealed lid are inlayed and are established and install heating lamp 302, and 1 inside movable mounting of drying cabinet has the silicon chip to store basket 4, and terminal surface fixed mounting has motor power 5 under the drying cabinet 1.
In this embodiment, store basket 4 through the silicon chip that sets up and can store the silicon chip after the washing, then place and get into 1 insidely of drying cabinet, it is rotatory that start power motor 5 can drive silicon chip storage basket 4, the silicon chip is stored basket 4 and can is driven the silicon chip rotation, 1 insidely of drying cabinet can store certain clear water, its remaining washing liquid in surface can be washed away when the silicon chip is rotatory, avoid dry back silicon chip to remain there is water stain, air exhauster 2 can be with 1 insidely of external air heating back suction drying cabinet, thereby the quick air-dries the silicon chip.
Wherein, in order to realize the purpose of the remaining washing liquid of clearance, this device adopts following technical scheme to realize: supporting legs 101 are fixedly mounted on the lower surface of the drying box 1 and are close to the position of the edge of the outer surface, an air outlet 102 is formed in the inner wall of the drying box 1 and is close to the upper end face, a rubber protective edge 103 is fixedly mounted on the inner wall of the drying box 1 below the air outlet 102 and is located on the inner wall of the drying box 1, the air outlet 102 is connected with the other end of the connecting pipe 201 through a pipeline, a drain hole 104 is formed in the lower surface of the drying box 1, an electromagnetic valve 105 is fixedly mounted on the position of the lower end of the drain hole 104, a connecting water pipe 106 is fixedly mounted on the front surface of the drying box 1, a dust screen 202 is fixedly mounted inside the air exhauster 2, a motor fixing column 203 is fixedly mounted above the dust screen 202 and located inside the air exhauster 2, an air draft motor 204 is fixedly mounted on the lower surface of the motor fixing column 203, an air draft blade 205 is fixedly mounted at the output end of the air draft motor fixing column 203, and a heating wire 206 is fixedly mounted inside the air exhauster 2.
Can fix drying cabinet 1 at suitable height through supporting legs 101, air exit 102 communicates each other through connecting pipe 201 with air exhauster 2, air exit 102 can be to the inside air that blows in of drying cabinet 1, thereby 1 inside circulation of air speed of drying cabinet accelerates, dry silicon chip with higher speed, rubber protection edge 103 can prevent that silicon chip storage basket 4 from violently striking drying cabinet 1 inner wall, wash port 104 can be with the inside moisture discharge of drying cabinet 1, closing and opening of solenoid valve 105 control wash port 104, dust screen 202 can prevent that external dust from getting into inside air exhauster 2, it is rotatory that start-up air draft motor 204 can drive air draft blade 205, air draft blade 205 is rotatory can drive the air flow, thereby inside with air suction connecting pipe 201, start-up heater strip 206 can heat the air of flowing through.
Wherein, in order to realize the purpose of quick drying, this device adopts following technical scheme to realize: the fixed surface is installed with displacement handle 301 on the 3 upper surfaces of sealed lid, and the inside fixed mounting of silicon chip storage basket 4 has rubber partition plate 401, and the silicon chip stores 4 surfaces of basket and has seted up connect the via hole 402, and 5 output end fixed mounting of motor power have bear dish 501, bear the dish 501 upper surface and have seted up connect the via hole 402.
Can drive sealed lid 3 through displacement handle 301 and remove, sealed lid 3 can get up 1 inside relative seal of drying cabinet, water stain throws away to the external world when preventing the centrifugation, rubber partition plate 401 can store the silicon chip basket 4 inside and cut apart into a plurality of spaces, can prevent that the silicon chip from colliding with each other and damaging, connect through-hole 402 can make the moisture flow out the silicon chip store basket 4 inside, it is rotatory to start driving motor 5 and can drive and bear dish 501, it can drive the silicon chip and store basket 4 rotation to bear the dish 501 rotation.
The utility model discloses a theory of operation and use flow: when the silicon wafer drying device is used, the device is required to be placed at a proper position and is connected with an external water pipe through the electromagnetic valve 105, a cleaned silicon wafer is stored in the silicon wafer storage basket 4, the sealing cover 3 is closed, then the silicon wafer storage basket 4 is placed in the drying box 1, clean water is injected into the drying box 1, the power motor 5 is started to drive the bearing disc 501 to rotate, the bearing disc 501 rotates to drive the silicon wafer storage basket 4 to rotate, the silicon wafer storage basket 4 drives the silicon wafer to rotate, cleaning liquid remained on the surface of the silicon wafer can be washed away when the silicon wafer rotates, then the electromagnetic valve 105 is started to open the drain hole 104, clean water in the drying box 1 can be discharged, the power motor 5 is controlled to be started at high power, the power motor 5 drives the silicon wafer storage basket 4 to rotate rapidly, the air draft motor 204 can drive the air draft blade 205 to rotate, the air can drive the air to flow, so that the air is sucked into the connecting pipe 201, the air flowing through the air draft blade 206 is started, the heated air can be blown into the drying box 1 and is discharged from the drain hole 104, and air flow is blown into the drying box from the surface of the drying box from the drying box, and the surface of the silicon wafer, and the drying box, so that the air flow drops and the drying water can be dried.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a drying device for silicon chip cleaning machine, includes drying cabinet (1), its characterized in that: surface fixed mounting has air exhauster (2) in drying cabinet (1) one side, air exhauster (2) up end fixed mounting has connecting pipe (201), drying cabinet (1) up end movable mounting has sealed lid (3), sealed lid (3) lower surface inlays to establish and installs heating lamp (302), drying cabinet (1) inside movable mounting has the silicon chip to store basket (4), terminal surface fixed mounting has motor power (5) under drying cabinet (1).
2. The drying apparatus for a silicon wafer cleaning machine according to claim 1, characterized in that: drying cabinet (1) lower surface just is close to surface edge fixed mounting and has supporting legs (101), drying cabinet (1) inner wall just is close to the up end and has seted up air exit (102), air exit (102) below just is located drying cabinet (1) inner wall fixed mounting and has rubber protective edge (103), air exit (102) pass through the pipe connection with connecting pipe (201) other end, wash port (104) have been seted up to drying cabinet (1) lower surface, port department fixed mounting has solenoid valve (105) under wash port (104), the positive fixed surface of drying cabinet (1) installs connecting water pipe (106).
3. The drying apparatus for a silicon wafer cleaning machine according to claim 1, characterized in that: the utility model discloses a fan, including air exhauster (2), inside fixed mounting of air exhauster (2) has dust screen (202), dust screen (202) top and be located the inside fixed mounting of air exhauster (2) have motor fixed column (203), fixed surface installs air draft motor (204) under motor fixed column (203), air draft motor (204) output end fixed mounting has convulsions blade (205), motor fixed column (203) top just is located the inside fixed mounting of air exhauster (2) and has heater strip (206).
4. The drying device for a silicon wafer cleaning machine according to claim 1, characterized in that: and a displacement handle (301) is fixedly arranged on the upper surface of the sealing cover (3).
5. The drying apparatus for a silicon wafer cleaning machine according to claim 1, characterized in that: the silicon wafer storage basket (4) is internally and fixedly provided with a rubber partition plate (401), and the outer surface of the silicon wafer storage basket (4) is provided with a connecting through hole (402).
6. The drying apparatus for a silicon wafer cleaning machine according to claim 1, characterized in that: the output end of the power motor (5) is fixedly provided with a bearing disc (501), and the upper surface of the bearing disc (501) is provided with a connecting through hole (402).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221442206.6U CN217541343U (en) | 2022-06-08 | 2022-06-08 | Drying device for silicon wafer cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221442206.6U CN217541343U (en) | 2022-06-08 | 2022-06-08 | Drying device for silicon wafer cleaning machine |
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| Publication Number | Publication Date |
|---|---|
| CN217541343U true CN217541343U (en) | 2022-10-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221442206.6U Active CN217541343U (en) | 2022-06-08 | 2022-06-08 | Drying device for silicon wafer cleaning machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117855111A (en) * | 2024-03-08 | 2024-04-09 | 苏州智程半导体科技股份有限公司 | Semiconductor cleaning cavity and semiconductor device |
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2022
- 2022-06-08 CN CN202221442206.6U patent/CN217541343U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117855111A (en) * | 2024-03-08 | 2024-04-09 | 苏州智程半导体科技股份有限公司 | Semiconductor cleaning cavity and semiconductor device |
| CN117855111B (en) * | 2024-03-08 | 2024-05-07 | 苏州智程半导体科技股份有限公司 | Semiconductor cleaning cavity and semiconductor device |
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