CN217478114U - Airtight cabinet and warehousing system - Google Patents

Airtight cabinet and warehousing system Download PDF

Info

Publication number
CN217478114U
CN217478114U CN202221075541.7U CN202221075541U CN217478114U CN 217478114 U CN217478114 U CN 217478114U CN 202221075541 U CN202221075541 U CN 202221075541U CN 217478114 U CN217478114 U CN 217478114U
Authority
CN
China
Prior art keywords
airtight cabinet
airtight
opening
cabinet body
power sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221075541.7U
Other languages
Chinese (zh)
Inventor
吴守满
陈柏任
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SCHMID AUTOMATION ASIA CO Ltd
Original Assignee
SCHMID AUTOMATION ASIA CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCHMID AUTOMATION ASIA CO Ltd filed Critical SCHMID AUTOMATION ASIA CO Ltd
Priority to CN202221075541.7U priority Critical patent/CN217478114U/en
Application granted granted Critical
Publication of CN217478114U publication Critical patent/CN217478114U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The present disclosure relates to an airtight cabinet and a warehousing system, wherein the airtight cabinet includes: the airtight cabinet body is provided with an opening, and the opening is positioned on one side of the airtight cabinet body; the electric flexible gate is arranged on the airtight cabinet body; a pressure plate; the pressing plate is connected with the power sources, and the power sources can push the pressing plate to move towards the direction close to or far away from the airtight cabinet body; when the airtight cabinet is in an airtight state, the curtain body can be put down, the pressing plate is pushed by the power sources to move towards the direction close to the airtight cabinet body, the pressing plate is pressed against the curtain body, and therefore the curtain body abuts against one side, provided with the opening, of the airtight cabinet body to seal the opening. Therefore, the air-tight cabinet can provide good air tightness, reduce the height space occupied by the air-tight cabinet when being opened and meet the requirement of automation.

Description

Airtight cabinet and warehousing system
Technical Field
The present invention relates to an airtight cabinet and a storage system, and more particularly to an airtight cabinet and a storage system capable of storing stored objects and maintaining good airtightness during the storage process.
Background
In the process of transporting the plate, the requirements of humidity and cleanliness are very important, so the plate needs to be stored in the airtight cabinet to keep the airtight cabinet in good airtightness, so as to maintain the predetermined humidity and cleanliness. However, the conventional airtight cabinet occupies more height space when the door panel is opened, and is difficult to meet the requirement of automation.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that not enough to prior art provides an airtight cabinet and warehouse system, and it can provide good gas tightness and reduce the high space that airtight cabinet occupy when opening to can reach automatic demand.
In order to solve the technical problem, the utility model provides an airtight cabinet, airtight cabinet includes: the airtight cabinet body is provided with an accommodating space, the accommodating space is positioned in the airtight cabinet body, the airtight cabinet body is provided with an opening, the opening is positioned on one side of the airtight cabinet body, and the opening is communicated with the accommodating space; the electric flexible gate is arranged on the airtight cabinet body and is provided with a curtain body and an electric motor, the curtain body is connected with the electric motor, and the electric motor can drive the curtain body to roll and release; the pressing plate is provided with a frame body, and an inlet and an outlet are formed in the frame body; the plurality of power sources are arranged on the airtight cabinet body, the pressing plate is connected with the plurality of power sources, and the plurality of power sources can push the pressing plate to move towards a direction close to or far away from the airtight cabinet body; when the airtight cabinet is in an airtight state, the curtain body can be put down, the pressing plates are pushed by the power sources to move towards the direction close to the airtight cabinet body, and the pressing plates are pressed against the curtain body, so that the curtain body abuts against one side, provided with the opening, of the airtight cabinet body to close the opening.
Preferably, a plurality of support frames are arranged in the accommodating space, the support frames are close to two sides of the airtight cabinet body, the support frames can be used for supporting a stored object, and positioning pieces are respectively arranged on the support frames and used for blocking and positioning the edge of the stored object.
Preferably, the area of the curtain is larger than the area of the opening.
Preferably, one side of the airtight cabinet body, which is provided with the opening, is provided with at least one airtight rubber strip, the airtight rubber strip surrounds the periphery of the opening, and when the pressing plate is pressed against the curtain body, the curtain body can be pressed against the airtight rubber strip so as to increase airtightness.
Preferably, the other side of the airtight cabinet body is provided with a temperature and humidity sensor, and the temperature and humidity sensor extends into the accommodating space and can be used for measuring the temperature and humidity in the airtight cabinet body.
Preferably, the other side of the airtight cabinet body is provided with an air inlet connector which can be used for inputting air into the airtight cabinet body.
Preferably, the plurality of power sources are respectively disposed at two sides of the airtight cabinet body, the plurality of power sources are respectively close to the top and the bottom of the airtight cabinet body, and two sides of the pressing plate are respectively connected to the plurality of power sources.
Preferably, the plurality of power sources are respectively connected to two sides of the pressure plate near the top and the bottom.
Preferably, the frame body of the pressing plate is vertically arranged, and the frame body of the pressing plate is parallel to one side of the airtight cabinet body, on which the opening is arranged.
In order to solve the technical problem, the utility model also provides a warehousing system, the warehousing system includes: the rack body is provided with a plurality of material racks which are arranged into a plurality of layers, each material rack is a storage position with independent coordinates, the rack body is also provided with at least one feeding and discharging platform, and the storage positions and the feeding and discharging platforms can be used for placing the airtight cabinet according to the preamble; and the carrying device is arranged in the frame body, can carry the airtight cabinet placed on the feeding and discharging platform and move the airtight cabinet to any storage position for storage, and can also carry the airtight cabinet placed on any storage position and move the airtight cabinet to the feeding and discharging platform for temporary placement.
The beneficial effects of the utility model reside in that, in the airtight cabinet and warehouse system that provide, this airtight cabinet includes an airtight cabinet body, an electronic flexible gate, a clamp plate and a plurality of power supplies. The electric flexible gate is arranged on the airtight cabinet body and is provided with a curtain body and an electric motor, and the electric motor can drive the curtain body to roll and release. The power sources are arranged on the airtight cabinet body, the pressing plate is connected with the power sources, and the power sources can push the pressing plate to move towards the direction close to or far away from the airtight cabinet body. When the airtight cabinet is in an airtight state, the curtain body can be put down, the power sources push the pressing plate to move towards the direction close to the airtight cabinet body, so that the pressing plate is pressed against the curtain body, and the curtain body is pressed against one side of the airtight cabinet body, which is provided with the opening, so as to close the opening. The utility model discloses can provide good gas tightness and when airtight cabinet will be opened, only need to make the clamp plate leave the curtain body and with the curtain body roll-up, can not take up high space, just the utility model discloses an electronic flexible gate and clamp plate need not be with manual operation to can operate with automatic control mode, can reach automatic demand.
For a further understanding of the nature and technical content of the present invention, reference should be made to the following detailed description of the invention and accompanying drawings, which are provided for reference and illustration purposes only and are not intended to limit the invention.
Drawings
Fig. 1 is a perspective view of the airtight cabinet of the present invention.
Fig. 2 is a front view of the airtight cabinet of the present invention.
Fig. 3 is a side view of the airtight cabinet of the present invention.
Fig. 4 is a sectional view taken along line iv-iv of fig. 1.
Fig. 5 is an exploded perspective view of the airtight cabinet of the present invention.
Fig. 6 is a perspective exploded view of the airtight cabinet of the present invention (ii).
Fig. 7 is a front view schematically illustrating the usage status of the airtight cabinet of the present invention.
Fig. 8 is a schematic top view of the airtight cabinet of the present invention in use.
Detailed Description
[ examples ]
Referring to fig. 1 to 4, the present invention provides an airtight cabinet for storing objects 100 (such as substrates, wafers or masks) therein, the airtight cabinet including an airtight cabinet body 1, an electrically-operated flexible gate 2, a pressing plate 3 and a plurality of power sources 4.
The airtight cabinet body 1 can be a square box, the shape of the airtight cabinet body 1 is not limited, the airtight cabinet body 1 has an accommodating space 11, the accommodating space 11 is located in the airtight cabinet body 1, the airtight cabinet body 1 has an opening 12, the opening 12 is located at one side (front side) of the airtight cabinet body 1, the opening 12 is communicated with the accommodating space 11, and the stored object 100 can be placed in the accommodating space 11 or moved out through the opening 12. Preferably, a plurality of supporting frames 13 (as shown in fig. 5 and 6) may be disposed in the accommodating space 11, the supporting frames 13 are close to two sides (left side and right side) of the airtight cabinet body 1, and the supporting frames 13 can be used for supporting the stored object 100, so that the stored object 100 is placed at a proper height position in the airtight cabinet body 1. The supporting frames 13 are respectively provided with a plurality of positioning members 14, the positioning members 14 are protruded on the supporting frames 13, and the positioning members 14 can be used for stopping and positioning the edge of the stored object 100, so as to prevent the stored object 100 from sliding and deviating, so that the stored object 100 can be stably placed.
The electric flexible gate 2 is disposed on the airtight cabinet body 1, the electric flexible gate 2 is disposed at the opening 12, and the electric flexible gate 2 can be electrically driven to close and open the opening 12. The electric flexible gate 2 has a curtain body 21 and an electric motor 22, the curtain body 21 is made of flexible material, preferably, the curtain body 21 is made of air-tight material, and the material of the curtain body 21 can be PVC, for example. The width and length of the curtain body 21 are larger than those of the opening 12, so that the area of the curtain body 21 is larger than that of the opening 12, and the curtain body 21 can ensure that the opening 12 is shielded, thereby having better airtight effect. The curtain body 21 is connected to an electric motor 22, and the electric motor 22 can drive the curtain body 21 to perform a rolling and unrolling operation. When the curtain 21 is put down, the curtain 21 shields the opening 12 to close the opening 12, and when the curtain 21 is put down, the lower end of the curtain 21 is preferably lower than the bottom of the airtight cabinet body 1, so that the curtain 21 can ensure to shield the opening 12, thereby having better airtight effect. When the curtain body 21 is rolled up, the curtain body 21 is rolled up and positioned above the opening 12 to open the opening 12.
The pressing plate 3 is disposed at the opening 12 of the airtight cabinet main body 1, the pressing plate 3 has a frame 31, the frame 31 may be square corresponding to the side of the airtight cabinet main body 1 where the opening 12 is disposed, the frame 31 is vertically disposed, the frame 31 may be parallel to the side of the airtight cabinet main body 1 where the opening 12 is disposed, and the frame 31 may be pressed against the side of the airtight cabinet main body 1 where the opening 12 is disposed. An access opening 32 is formed inside the frame 31, so that the stored object 100 can be placed in or removed from the accommodating space 11 through the access opening 32. Preferably, the access opening 32 is square.
The power sources 4 may be cylinders, etc., and the power sources 4 are disposed on the airtight cabinet body 1, preferably, the power sources 4 are disposed on two sides (left and right sides) of the airtight cabinet body 1, respectively, and the power sources 4 are disposed near the top and bottom of the airtight cabinet body 1, respectively, so that the power sources 4 are preferably disposed. The pressing plate 3 is connected to the power sources 4, and the power sources 4 can push the pressing plate 3 to move towards a direction close to or away from the airtight cabinet body 1, so as to achieve the effect of automatic closing and opening. Preferably, two power sources 4 are respectively disposed on two sides of the airtight cabinet body 1, and two sides of the pressing plate 3 are connected to the power sources 4, so that the pressing plate 3 is stressed more evenly. Preferably, the power sources 4 are respectively connected to both sides of the pressing plate 3 near the top and bottom, so that the power sources 4 can more stably push the pressing plate 3.
When the airtight cabinet is to be in an airtight state, the curtain body 21 is put down, and then the power sources 4 push the pressing plate 3 to move towards the direction close to the airtight cabinet body 1, so that the pressing plate 3 is pressed against the curtain body 21, the curtain body 21 is clamped between the pressing plate 3 and the airtight cabinet body 1, the curtain body 21 can be abutted against one side (front side) of the airtight cabinet body 1 provided with the opening 12 to seal the opening 12, and the inside of the airtight cabinet body 1 can be kept airtight.
When the airtight cabinet is to be opened, the power sources 4 push the pressing plate 3 to move in a direction away from the airtight cabinet body 1, so that the pressing plate 3 leaves the curtain body 21, the curtain body 21 is free between the pressing plate 3 and the airtight cabinet body 1, and at this time, the curtain body 21 is rolled up, so that the curtain body 21 is rolled up above the opening 12 to open the opening 12, and the stored object 100 can be moved out or placed in the accommodating space 11 through the inlet/outlet 32 and the opening 12.
In addition, in this embodiment, at least one airtight rubber strip 5 may be further disposed on the side of the airtight cabinet body 1 having the opening 12, and the airtight rubber strip 5 surrounds the periphery of the opening 12. When the pressing plate 3 is pressed against the curtain body 21, the curtain body 21 can abut against the airtight rubber strip 5, thereby increasing the airtightness, ensuring that the opening 12 is sealed by the curtain body 21, and maintaining the inside of the airtight cabinet body 1 with good airtightness.
In addition, in this embodiment, a temperature and humidity sensor 6 may be further disposed on the other side (the rear side) of the airtight cabinet body 1, the temperature and humidity sensor 6 extends into the accommodating space 11, and the temperature and humidity sensor 6 can be used to measure the temperature and humidity inside the airtight cabinet body 1, so as to control the temperature and humidity. In addition, in this embodiment, the other side (rear side) of the airtight cabinet body 1 may be further provided with an air inlet connector 7, which can input air (such as dry air or nitrogen gas) into the airtight cabinet body 1 according to the requirement.
In addition, referring to fig. 7 and 8, the present invention further provides a storage system, which includes a frame 200 and a carrying device 300. The rack body 200 is provided with a plurality of material racks 201, the material racks 201 are arranged into a plurality of layers, each layer is provided with at least one material rack 201, each material rack 201 is a storage position 202 with independent coordinates, and the rack body 200 is further provided with at least one feeding and discharging platform 203. This handling device 300 sets up in support body 200, and this handling device 300 can move the device for various current transports, can carry out the transport of directions such as X axle, Y axle and Z axle and move the action of carrying, because this handling device 300 is known structure, just the utility model discloses do not restrict the structure of handling device 300, the repeated description is no longer given.
The carrying device 300 can carry the airtight cabinet placed on the feeding and discharging platform 203 to move the airtight cabinet to any storage position 202 for storage, and can also carry the airtight cabinet placed on any storage position 202 to move the airtight cabinet to the feeding and discharging platform 203 for temporary placement so as to facilitate discharging. Since the storage locations 202 formed by each rack 201 have independent coordinates, the transporting device 300 can be driven by the control system, and can be accurately moved to any storage location 202 for taking and placing the airtight cabinet, thereby performing the operation of loading and unloading the airtight cabinet and the stored objects.
[ advantageous effects of the embodiments ]
The beneficial effects of the utility model reside in that, in the airtight cabinet and warehouse system that provide, this airtight cabinet includes an airtight cabinet body, an electronic flexible gate, a clamp plate and a plurality of power supplies. The electric flexible gate is arranged on the airtight cabinet body and is provided with a curtain body and an electric motor, and the electric motor can drive the curtain body to roll and release. The power sources are arranged on the airtight cabinet body, the pressing plate is connected to the power sources, and the power sources can push the pressing plate to move towards the direction close to or far away from the airtight cabinet body. When the airtight cabinet is in an airtight state, the curtain body can be put down, and the power sources push the pressing plate to move towards the direction close to the airtight cabinet body, so that the pressing plate is pressed against the curtain body, and the curtain body is pressed against one side of the airtight cabinet body, which is provided with the opening, so as to seal the opening. The utility model discloses can provide good gas tightness, and when airtight cabinet will be opened, only need to make the clamp plate leave the curtain and with the curtain roll-up, can not occupy the high space, just the utility model discloses an electronic flexible gate and clamp plate need not be with manual operation, and can operate with the automatic control mode, can reach automatic demand.
Because the above description is only the preferred embodiment of the present invention, and the scope of the patent protection of the present invention is not limited thereto, all the equivalent changes of the contents of the description and the drawings of the present invention are included in the scope of the right protection of the present invention.

Claims (10)

1. An airtight cabinet, comprising:
the airtight cabinet body is provided with an accommodating space, the accommodating space is positioned in the airtight cabinet body, the airtight cabinet body is provided with an opening, the opening is positioned on one side of the airtight cabinet body, and the opening is communicated with the accommodating space;
the electric flexible gate is arranged on the airtight cabinet body and is provided with a curtain body and an electric motor, the curtain body is connected with the electric motor, and the electric motor can drive the curtain body to roll and release;
the pressing plate is provided with a frame body, and an inlet and an outlet are formed in the frame body; and
the plurality of power sources are arranged on the airtight cabinet body, the pressing plate is connected with the plurality of power sources, and the plurality of power sources can push the pressing plate to move towards a direction close to or far away from the airtight cabinet body;
when the airtight cabinet is in an airtight state, the curtain body can be put down, the pressing plate is pushed by the power sources to move towards the direction close to the airtight cabinet body, the pressing plate is pressed against the curtain body, and the curtain body is pressed against one side, provided with the opening, of the airtight cabinet body so as to close the opening.
2. The airtight cabinet of claim 1, wherein a plurality of supporting frames are disposed in the accommodating space, the supporting frames are disposed near two sides of the airtight cabinet body, the supporting frames can be used for supporting a stored object, and positioning members are disposed on the supporting frames respectively for stopping and positioning edges of the stored object.
3. The airtight cabinet of claim 1, wherein the area of said curtain is larger than the area of said opening.
4. The airtight cabinet according to claim 1, wherein at least one airtight rubber strip is disposed on one side of the airtight cabinet body where the opening is disposed, the airtight rubber strip surrounds the periphery of the opening, and when the pressing plate presses against the curtain body, the curtain body can abut against the airtight rubber strip to increase airtightness.
5. The airtight cabinet according to claim 1, wherein a temperature and humidity sensor is disposed on the other side of the airtight cabinet body, and the temperature and humidity sensor extends into the accommodating space and is capable of measuring the temperature and humidity inside the airtight cabinet body.
6. The hermetic container according to claim 1, wherein the other side of the hermetic container body is provided with an inlet connector for inputting gas into the hermetic container body.
7. The airtight cabinet according to claim 1, wherein said plurality of power sources are respectively disposed at two sides of said airtight cabinet body, said plurality of power sources are respectively close to the top and bottom of said airtight cabinet body, and two sides of said pressing plate are respectively connected to said plurality of power sources.
8. The hermetic cabinet according to claim 1, wherein the plurality of power sources are connected to both sides of the pressure plate near the top and bottom, respectively.
9. The airtight cabinet according to claim 1, wherein said frame body of said pressure plate is provided upright, and said frame body of said pressure plate is parallel to a side of said airtight cabinet body where said opening is provided.
10. A warehousing system, comprising:
a rack body, wherein the rack body is provided with a plurality of material racks, the plurality of material racks are arranged into a plurality of layers, each material rack is a storage position with independent coordinates, the rack body is also provided with at least one feeding and discharging platform, and the storage positions and the feeding and discharging platforms can be used for placing the airtight cabinet according to any one of claims 1 to 9; and
the carrying device is arranged in the frame body, can carry the airtight cabinet placed on the feeding and discharging platform and move the airtight cabinet to any storage position for storage, and can also carry the airtight cabinet placed on any storage position and move the airtight cabinet to the feeding and discharging platform for temporary storage.
CN202221075541.7U 2022-05-07 2022-05-07 Airtight cabinet and warehousing system Active CN217478114U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221075541.7U CN217478114U (en) 2022-05-07 2022-05-07 Airtight cabinet and warehousing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221075541.7U CN217478114U (en) 2022-05-07 2022-05-07 Airtight cabinet and warehousing system

Publications (1)

Publication Number Publication Date
CN217478114U true CN217478114U (en) 2022-09-23

Family

ID=83309778

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221075541.7U Active CN217478114U (en) 2022-05-07 2022-05-07 Airtight cabinet and warehousing system

Country Status (1)

Country Link
CN (1) CN217478114U (en)

Similar Documents

Publication Publication Date Title
US5772386A (en) Loading and unloading station for semiconductor processing installations
US10501219B2 (en) Combination chamber and external suction vacuum packaging machine
KR20190122161A (en) Exhaust nozzle unit, load port, and efem
CN217478114U (en) Airtight cabinet and warehousing system
TW509654B (en) Apparatus for manipulating substrates inside and outside a superclean workroom
CN108886012B (en) load port
US20090016862A1 (en) Method and apparatus for providing flat panel display environmental isolation
WO2020224209A1 (en) Automatic picking and placing device for battery cell component container
CN111830401B (en) Semiconductor test equipment
CN117049033A (en) Airtight cabinet and warehouse system
CN117246669A (en) Automatic storage and retrieval integrated cabinet for wafer storage box storage
CN211392612U (en) Access system
TWI814359B (en) Air-tight cabinets and storage systems
CN212558382U (en) Aging bin
TWM629525U (en) Carrier for substrate cartridge and miniature warehousing system having the same
KR100823430B1 (en) Method of and system for conveying a cassette
JP3816929B2 (en) Semiconductor processing equipment
CN218478032U (en) Fully-enclosed automatic sample storage system
KR20070021733A (en) Cassette for loading plates
CN113044453A (en) Access system
US20200035531A1 (en) Foup purge shield
CN218893049U (en) Assembly packaging production line of detection test paper box
CN217050084U (en) High-efficient intelligent storage equipment
CN116946605A (en) Intelligent storage equipment based on multi-size packaging humidity-sensitive materials
TWI805266B (en) Carrier of substrate cassette and micro storage system

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant