TWM629525U - Carrier for substrate cartridge and miniature warehousing system having the same - Google Patents

Abstract

A carrier of a substrate cassette includes a box body and a base. The box body has an accommodating space and an opening, the accommodating space is located in the box body, and the opening is located on the bottom side of the box body. At least one cassette can be placed on the base, the cassette can be used to store the substrate (copper foil substrate), and a guide portion is arranged on the base to guide the cassette to be placed on the base. The box body can be placed on the base, and the base can be used to close the opening to keep the inside of the box body airtight, and there are stoppers on both sides of the inside of the box body, which can be used to position the substrate in the cassette to prevent the substrate from sliding. .

Description

Carrier for substrate cassette and micro storage system including same

The present invention relates to a carrier for a substrate cassette, especially a cassette capable of accommodating and storing substrates, so as to facilitate the transfer of the substrate and the cassette, and has a carrier with better air tightness and a carrier including the carrier. Micro storage system.

The manufacturing process of copper foil substrates (substrates) is complicated, so automated transportation is used, and the carriers used for transportation between processes are called cassettes. However, most of the existing cassettes are in an open state, and the air tightness is poor, which is easy to cause dust pollution, and it is difficult to maintain cleanliness.

The technical problem to be solved by this creation is to provide a carrier for a substrate cassette and a micro storage system including the carrier in view of the deficiencies of the prior art. The cassette and the substrate can be sealed in the carrier without causing dust pollution. Better cleanliness can be maintained.

In order to solve the above-mentioned technical problems, the present invention provides a carrier for a substrate cassette, the carrier can be used to accommodate at least one cassette, the cassette is a substrate cassette, and the carrier includes: a case body, the case The body has a body part, the interior of the body part forms an accommodating space, an opening is formed on one side of the body part, the opening communicates with the accommodating space, and the other side of the body part is provided with a hanging part, The hanging portion is located on the side of the body portion away from the opening; and a base, the base has a seat, and one side of the seat forms at least one placement area on which the cassette can be placed, the seat The body is provided with at least one guide portion, which can be used to guide the cassette to be placed on the placement area, and the box body can be covered is placed on the base, and the opening is closed with the base.

Preferably, the placement area is in a square shape corresponding to the cassette, and a plurality of the guiding portions are respectively provided on the outer side of the placement area, the guiding portions are protruding structures, and the guiding portions are L-shaped, Each of the guide portions is respectively abutted against the adjacent two sides of the cassette, so that the four corners of the cassette are respectively abutted against the guide portions.

Preferably, there are stoppers on both sides of the inside of the box, and the two stoppers can be placed on both ends of the cassette, respectively.

Preferably, the base is provided with at least one air suction port and at least one inflation port, the air suction port and the inflation port pass through the base body, the air suction port and the inflation port are communicated with the accommodating space, and can pass through the accommodating space. The inside of the box body is pumped and inflated respectively through the air suction port and the air inlet port.

In order to solve the above-mentioned technical problems, the present invention also provides a micro storage system, comprising: a rack body, a plurality of material racks are arranged in the rack body, the material racks are arranged in multiple layers, and each of the material racks has an independent For the storage position of the coordinates, the frame body is also provided with at least one loading and unloading platform; a carrier, both the storage position and the loading and unloading platform can be used to place the carrier; and a transport device, the transport device Set in the rack body, the handling device can carry the carrier placed on the in-feed and out-feed platform to move it to any storage location for storage, and the handling device can also carry the carrier placed in any storage location to move it to the in-out The material platform is temporarily placed.

The beneficial effect of the present invention is that the carrier of the substrate cassette and the micro storage system including the carrier provided by the present invention can be used for accommodating the cassette, and the cassette is a substrate cassette, and the carrier includes A box body and a seat body are provided. The box body has a main body portion, an accommodating space is formed inside the main body portion, and an opening is formed on one side of the main body portion. The base has a seat, one side of the seat forms a placement area, the cartridge can be placed on the placement area, the seat is provided with a guide portion, which can be used to guide the cartridge to be placed on the placement area, and the box body can be placed on the base , and close the opening with a base. This creation can keep the inside of the carrier airtight, and can provide an independent and airtight space in the carrier, so that the cassette and the substrate can be sealed in the carrier, It will not cause dust pollution and maintain better cleanliness.

Furthermore, the placement area is square corresponding to the cassette, and each outer side of the placement area is provided with a plurality of guiding parts, the guiding parts are protruding structures, the guiding parts are L-shaped, and each guiding part is Abutting on the adjacent two sides of the cassette, the four corners of the cassette respectively abut against the guiding portions, which can provide better guiding and limiting effects of the cassette, so that the cassette can be accurately and stably placed on the base. The inner two sides of the box body are provided with stoppers, the two stoppers can be respectively covered on the two ends of the cassette, and can be used to stop and locate the substrate in the cassette, so that the substrate has a better positioning effect. The base is provided with an air suction port and an inflatable port, and the inside of the box body can be pumped and inflated respectively through the air suction port and the air inflation port, so as to maintain better cleanliness.

In order to further understand the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation, however, the provided drawings are only for reference and description, and are not intended to limit this creation.

1: Box

11: Main body

12: Accommodating space

13: Opening

14: Hanging Department

15: Socket

151: Top Wall

152: Sidewall

16: Stopper

161: Connector

2: base

21: seat body

22: Guidance Department

23: Placement area

24: exhaust port

25: Inflatable port

26: Positioning slot

27: Locking mechanism

271: Controls

272: Lock firmware

3: Airtight components

100: cassette

200: Undertaking

201: Extraction Nozzle

202: Intake nozzle

203: Positioning post

300: Frame

301: Rack

302: Storage

303: In and out platform

400: Handling device

401: Robotic Arm

FIG. 1 is an exploded perspective view of a carrier for creating a substrate cassette.

FIG. 2 is an exploded perspective view of a carrier for creating a substrate cassette from another angle.

FIG. 3 is an exploded perspective view of another state of the carrier for creating the substrate cassette.

FIG. 4 is a perspective view of a carrier for creating a substrate cassette.

FIG. 5 is a perspective view of a carrier for creating a substrate cassette from another angle.

FIG. 6 is a cross-sectional view of a carrier for creating a substrate cassette.

FIG. 7 is a schematic diagram of a circuit for creating a receptacle.

FIG. 8 is a schematic diagram of the creation locking mechanism.

Figure 9 is a front view of the creative micro storage system.

Figure 10 is a top view of the creative micro storage system.

The following are specific specific embodiments to illustrate the related embodiments disclosed in the present creation, and those skilled in the art can understand the advantages and effects of the present creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings in this creation are only for simple schematic illustration, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present creation in detail, but the disclosed contents are not intended to limit the protection scope of the present creation. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.

[Example]

Please refer to FIG. 1 to FIG. 3 , the present invention provides a carrier for a substrate cassette, which can be used to accommodate a cassette 100 , the cassette 100 is a substrate cassette, and the cassette 100 can be used to accommodate a plurality of substrates (copper Foil substrate), the cassette 100 is a conventional item, and the present invention does not limit the structure of the cassette 100, so the cassette 100 is only represented by a schematic diagram.

The carrier includes a box body 1 and a base 2. The box body 1 and the base 2 can be made of plastic, and the materials thereof are not limited. The box body 1 has a main body portion 11 , preferably, the main body portion 11 can be a square hollow body, an accommodating space 12 is formed inside the main body portion 11 , and one side (bottom side) of the main body portion 11 is formed An opening 13 communicates with the accommodating space 12 . The other side of the main body part 1 can be provided with a hanging part 14. The hanging part 14 can be located on the side of the main body part 11 away from the opening 13. vehicle.

The base 2 has a base 21, the base 21 can be a square plate body, and at least one cassette 100 can be placed on the base 21. In this embodiment, two cassettes 100 are placed on the base 21, so as to Increase the number of substrates to accommodate. The base body 21 is provided with at least one guide portion 22 for guiding the cassette 100 placed on base 2. One surface of the base body 21 forms at least one placement area 23 . In this embodiment, the placement area 23 is square corresponding to the cassette 100 , and the cassette 100 can be placed on the corresponding placement area 23 .

The outer side of the placement area 23 is provided with a plurality of guide portions 22, the guide portions 22 are protruding structures, the guide portions 22 can be L-shaped, and the guide portions 22 can be used to guide the placement of the cassette 100 On the placement area 23 , each guide portion 22 can abut against two adjacent sides of the cassette 100 respectively, and the four corners of the cassette 100 abut against the guide portions 22 respectively, which can provide a better guide for the cassette 100 . The guiding and limiting effect enables the cassette 100 to be accurately and stably placed on the base 2 , and the cassette 100 does not slip on the base 2 .

As shown in FIG. 4 to FIG. 6 , the box body 1 can be placed on the base 2 , and the opening 13 is closed by the base 2 , so that the interior of the box body 1 can be kept airtight, so that the carrier can be independent and airtight. Space. The two inner sides of the box body 1 can also be provided with stoppers 16 , which can be used to stop and locate the substrate in the cassette 100 to prevent the substrate from sliding, so that the substrate has a better positioning effect. In this embodiment, the stopper 16 is an upright plate body, the stopper 16 corresponds to the shape of the two ends of the cassette 100 , and the stopper 16 on both sides of the inside of the box body 1 is arranged opposite and parallel to each other, so that The two blocking members 16 can be respectively placed on both ends of the cassette 100 to stop and position the substrate in the cassette 100 . Preferably, each of the blocking members 16 is connected to the body portion 11 by at least one connecting portion 161 , so that the blocking members 16 can be as close to the cassette 100 as possible.

In this embodiment, a socket portion 15 can be formed on the body portion 11 by extending outward at the outer side of the opening 13 . The diameter of the socket portion 15 is larger than the diameter of the body portion 11 , and the socket portion 15 can be socketed. Outside the base 2, the box body 1 and the base 2 have better air tightness. Preferably, the socket portion 15 includes a top wall 151 and a side wall 152 , the top wall 151 is connected to one side (bottom side) of the main body portion 11 , and the top wall 151 extends horizontally and surrounds the main body portion 11 . The side wall 152 is connected to the side of the top wall 151 away from the main body 11, and the side wall 152 extends downward vertically, so that the part of the base 2 close to the edge can be reliably placed on the top wall 151 and the side wall 152, the top wall 151 and the The side walls 152 are formed in a turning shape, and are respectively placed against two adjacent sides (top side and outer side) of the base 2 , which can have better positioning and airtight effects.

In this embodiment, the base 2 is further provided with at least one air outlet 24 and at least one charging port 24 . The air port 25 , the air suction port 24 and the inflation port 25 penetrate through the seat body 21 , and the air suction port 24 and the inflation port 25 communicate with the accommodating space 12 . Preferably, at least two air suction ports 24 and air inlets 25 are provided, and the air suction ports 24 and the air charge ports 25 can be used to pump and inflate the interior of the box 1 respectively, for example, nitrogen can be filled. Preferably, the air suction port 24 and the inflation port 25 are located outside the placing area 23 (as shown in FIG. 3 ), and the air suction port 24 and the air filling port 25 are close to the placing area 23 to provide the cassette 100 placed on the placing area 23 . Better pumping and inflation effect. In this embodiment, the air extraction port 24 and the inflation port 25 are respectively close to both ends of the cassette 100 , and the air extraction port 24 and the air inflation port 25 may correspond to the middle of the cassette 100 , which can have better air extraction and inflation effects . The air extraction port 24 and the inflation port 25 are respectively disposed on the base 2 near opposite sides, so that the air extraction port 24 and the inflation port 25 are far away from each other, and also have better air extraction and inflation effects.

In addition, an airtight element 3 can also be arranged between the box body 1 and the base 2 . The airtight element 3 can be an airtight strip or the like. The airtight element 3 is in the shape of a frame, and the airtight element 3 is arranged on the box body 1 And the junction of the base 2 to increase the air tightness. A humidity sensor (not shown in the figure) can also be arranged in the box body 1, or a humidity sensor (not shown in the figure) can be connected to the air suction port 24 to detect the humidity inside the box body 1, so that the inside of the carrier can be controlled proper humidity.

An appropriate number of trays 200 (as shown in FIG. 7 ) can be set in the storage system. The tray 200 is provided with at least one suction nozzle 201 and at least one intake nozzle 202 , and the suction nozzle 201 and the intake nozzle 202 Corresponding to the suction port 24 and the inflation port 25 respectively. When the carrier is placed on the support plate 200, the air suction port 24 and the air filling port 25 are respectively engaged with the air suction nozzle 201 and the air inlet nozzle 202, so as to perform the air suction and inflation operation for the inside of the box 1, and keep the Better cleanliness.

In this embodiment, the base 2 is further provided with a plurality of positioning grooves 26 . The positioning grooves 26 are recessed on the bottom side of the base body 21 (as shown in FIG. 2 ), and are protruded on the support plate 200 . A plurality of positioning pillars 203 (as shown in FIG. 7 ), the positioning pillars 203 correspond to the positioning grooves 26 respectively. When the carrier is placed on the tray 200 , the positioning posts 203 are respectively matched with the positioning grooves 26 , so that the carrier can be stably placed on the tray 200 .

In addition, as shown in FIG. 8 , a locking mechanism 27 can also be provided on the base 2, which can be used to lock the box body 1 and the base 2. The locking mechanism 27 is arranged on the base 21. The locking mechanism 27 It may include a control member 271 and two locking members 272, the control member 271 is rotatably disposed on the base body 21, the two locking members 272 are movably disposed on the base body 21, and the two locking members 272 can be close to each other or mutually Move away (translation). When the control member 271 is rotated, the two locking members 272 can be linked to approach or move away from each other. When the two locking members 272 are far away from each other, one end of the two locking members 272 can extend out of the edge of the base body 21 and be locked on the box body 1. Used to lock the box 1 and the base 2. When the two locking members 272 are close to each other, one end of the two locking members 272 can be retracted into the edge of the base body 21 to release the box body 1 and the base 2, so that the box body 1 and the base 2 can be separated.

Please refer to FIG. 9 and FIG. 10 , the present invention further provides a micro storage system, including a rack 300 and a transport device 400 . The rack body 300 is provided with a plurality of material racks 301. The material racks 301 are arranged in multiple layers, and each layer is provided with at least one material rack 301. Each material rack 301 is a storage position 302 with independent coordinates. 300 is also provided with at least one in-out material platform 303, and the in-out material platform 303 can be used for temporarily placing the vehicles to be put in and out of the warehouse. The carrying device 400 is disposed in the frame body 300 , and the carrying device 400 has a mechanical arm 401 , and the mechanical arm 401 may be a multi-axis drive mechanism. The handling device 400 (the robotic arm 401 ) can carry the carrier placed on the in-feed and out-feed platform 303 and move it to any storage position 302 for storage, and can also carry the carrier placed in any storage position 302 and move it to the in-feed and out-feed platform 303 Temporarily put away for the convenience of discharging. Since the storage positions 302 formed by each material rack 301 have independent coordinates, the control system can be used to drive the conveying device 400, and it can be accurately moved to any storage position 302 for picking and placing the carrier, so as to carry out the carrier And substrate in and out operations.

[Advantageous effects of the embodiment]

The beneficial effect of the present invention is that the carrier of the substrate cassette and the micro storage system including the carrier provided by the present invention can be used for accommodating the cassette, and the cassette is a substrate cassette, and the carrier includes A box body and a seat body are provided. The box body has a main body portion, an accommodating space is formed inside the main body portion, and an opening is formed on one side of the main body portion. The base has a seat, and one side of the seat forms a placement area. A cassette can be placed on the placement area, a guide portion is arranged on the base body, which can be used to guide the cassette to be placed on the placement area, the box body can be placed on the base, and the opening is closed with the base. This creation can keep the inside of the carrier airtight, and an independent and airtight space can be provided in the carrier, so that the cassette and the substrate can be sealed in the carrier, without causing dust pollution, and maintaining better cleanliness .

Preferably, the placement area is square corresponding to the cassette, and each outer side of the placement area is provided with a plurality of guiding parts, the guiding parts are in a protruding structure, the guiding parts are L-shaped, and each guiding part is Do not interfere with the adjacent two sides of the cassette, the four corners of the cassette are in contact with the guiding parts, which can provide better guiding and limiting effects of the cassette, so that the cassette can be accurately and stably placed on the base . The inner two sides of the box body are provided with stoppers, the two stoppers can be respectively covered on the two ends of the cassette, and can be used to stop and locate the substrate in the cassette, so that the substrate has a better positioning effect. The base is provided with an air suction port and an inflatable port, and the inside of the box body can be pumped and inflated respectively through the air suction port and the air inflation port, so as to maintain better cleanliness.

The content disclosed above is only the preferred and feasible embodiment of this creation, and is not intended to limit the scope of the patent application of this creation. Therefore, any equivalent technical changes made by using the description and drawings of this creation are included in the application for this creation. within the scope of the patent.

1: Box

11: Main body

14: Hanging Department

15: Socket

151: Top Wall

152: Sidewall

2: base

21: seat body

22: Guidance Department

25: Inflatable port

100: cassette

Claims (10)

A carrier for a substrate cassette, the carrier can be used for accommodating at least one cassette, the cassette is a substrate cassette, the carrier comprises: a box body, the box body has a main body part, the main body part has a An accommodating space is formed inside, an opening is formed on one side of the main body, the opening is communicated with the accommodating space, and the other side of the main body is provided with a hanging part, and the hanging part is located on the main part away from One side of the opening; and a base, the base has a seat, and one side of the seat forms at least one placing area on which the cassette can be placed, and at least one guiding portion is provided on the seat, The box can be used to guide the cassette to be placed on the placement area, the box body can be placed on the base, and the opening can be closed with the base. The carrier for a substrate cassette according to claim 1, wherein the placement area is square corresponding to the cassette, and a plurality of the guide portions are respectively provided on the outer side of the placement area, and the guide portions are protruding In the structure, the guide portions are L-shaped, and each of the guide portions is in contact with the adjacent two sides of the cassette, so that the four corners of the cassette are in contact with the guide portions. The carrier of the substrate cassette according to claim 1, wherein the two inner sides of the box body are provided with stoppers, and the two stoppers can be respectively covered and placed on both ends of the cassette. The carrier for a substrate cassette according to claim 3, wherein the stopper is an upright plate body, the stopper corresponds to the shape of both ends of the cassette, and the inner two sides of the box The blocking pieces are arranged opposite to each other and are parallel to each other, and each of the blocking pieces is connected to the body portion by at least one connecting portion. The substrate cassette carrier according to claim 1, wherein a socket portion is formed on the body portion extending outward from the outer side of the opening, the socket portion can be socketed outside the base, and the socket portion Including a top wall and a side wall, the top wall is connected to one side of the body portion, the top wall extends horizontally and surrounds the body portion, the side wall is connected to the side of the top wall away from the body portion , the side wall is vertical Extending downward, the top wall and the side wall form a turning shape, and are respectively placed against two adjacent sides of the base. The substrate cassette carrier according to claim 1, wherein at least one air outlet and at least one air inlet are provided on the base, the air outlet and the air inlet penetrate through the base, and the air outlet and the air inlet are connected to the base. The accommodating space is communicated, and the inside of the box body can be pumped and inflated respectively through the air suction port and the inflation port. The substrate cassette carrier of claim 6, wherein the air extraction port and the inflation port are located outside the placement area, and the air extraction port and the inflation port are close to the placement area, and the air extraction port and the inflation port are close to the placement area. At both ends of the cassette, the air suction opening and the air filling opening correspond to the middle of the cassette. The carrier of the substrate cassette according to claim 6, wherein the carrier can be placed on a tray, and the tray is provided with at least one air suction nozzle and at least one air intake nozzle, the air suction nozzle and The air intake nozzle is respectively engaged with the air suction port and the air charge port. The carrier of the substrate cassette according to claim 1, wherein two placement areas are formed on one side of the base, and a cassette is placed on each of the two placement areas, so that the carrier can be used to accommodate two the cassette. A miniature storage system, comprising: a rack body, the rack body is provided with a plurality of material racks, the material racks are arranged in multiple layers, each of the material racks is a storage position with independent coordinates, the rack body is also provided with At least one loading and unloading platform; as the carrier according to any one of claims 1 to 9, the storage position and the loading and unloading platform can be used to place the carrier; and a handling device, the The handling device is arranged in the frame body, and the handling device can carry the carrier placed on the in-out material platform and move it to any storage position for storage, and the handling device can also carry the carrier placed in any storage position and move it to the storage position. The loading and unloading platform is temporarily placed.

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