CN217465305U - Plate type substrate edge blowing device - Google Patents

Abstract

The utility model provides a plate type substrate edge purging device, which comprises a supporting frame and two groups of purging components, wherein the two groups of purging components are connected with the supporting frame, and are arranged oppositely, and an operation space for the plate type substrate to pass through is formed between the two groups of purging components; wherein, the air outlet that one set of subassembly of sweeping in two sets of subassemblies sweeps the subassembly faces the first surface of plate type substrate, and the air outlet that another set of subassembly of sweeping in two sets of subassemblies sweeps the second surface that the subassembly faced the plate type substrate. The utility model provides an edge of the upper and lower surface of board type substrate among the prior art have the problem of water stain.

Description

Plate type substrate edge blowing device

Technical Field

The utility model relates to a substrate surface treatment technical field particularly, relates to a board-like substrate edge sweeps device.

Background

In a conventional pickling line, after the surface of the plate-shaped substrate is subjected to rust removal, a plurality of washing processes are required to neutralize hydrochloric acid/sulfuric acid remaining on the surface of the plate-shaped substrate and remove impurities such as salt possibly contained on the surface of the plate-shaped substrate. And residual working solution on the surface of the plate-type base material is squeezed away through the squeezing roller after each flushing process is finished, so that the working solution on each process is prevented from being carried to the next process, and the pollution to the subsequent processes is avoided. In addition, after the last squeezing process is finished, the surface of the plate-type base material is swept through the sweeping device, so that subsequent oiling or storage is facilitated, and the phenomenon that the plate-type base material rusts is avoided.

However, after the plate-type substrate passes through the wringing roller, because the plate-type substrate has a certain thickness and under the action of the capillary phenomenon of water, the water stains remained at the side edges of the plate-type substrate can be diffused to the edges of the upper surface and the lower surface of the plate-type substrate, and the existing purging device can not effectively purge the water stains at the edges of the plate-type substrate, even if the purging device is used for purging by a high-temperature means, obvious 'stripes' can still be left at the edges of the upper surface and the lower surface of the plate-type substrate, and the overall appearance of the plate-type substrate is seriously influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a board type substrate edge sweeps device to there is the problem of water stain in the edge of the upper and lower surface of the board type substrate of solving among the prior art.

In order to achieve the purpose, the utility model provides a plate type substrate edge purging device, which comprises a supporting frame and two groups of purging components, wherein the two groups of purging components are connected with the supporting frame, are arranged oppositely, and form an operation space for the plate type substrate to pass through between the two groups of purging components; wherein, the air outlet that one set of subassembly of sweeping in two sets of subassemblies sweeps the subassembly faces the first surface of plate type substrate, and the air outlet that another set of subassembly of sweeping in two sets of subassemblies sweeps the second surface that the subassembly faced the plate type substrate.

Further, the one set of purge modules includes two purge units, both of the purge units in the same set being directed to two opposite edges of the first surface of the plate-type substrate; or, both purge units in the same group are directed toward the center side of the first surface of the plate-type substrate; or, one of the two purge units in the same group is directed toward a center side of the first surface of the plate-type substrate and the other of the two purge units in the same group is directed toward an edge of the first surface of the plate-type substrate.

Further, both sets of the purging assemblies are movably disposed on the support frame along the width direction of the plate-type substrate.

Further, the group of purging assemblies comprises two purging units, the two purging units in the same group are movably arranged on the supporting frame along the width direction of the plate-type substrate, and the two purging units in the same group are provided with air outlets; wherein, two air outlets in the first group of purging assemblies in the two groups of purging assemblies respectively face to the two side edges of the first surface of the plate-type substrate in the width direction; two air outlets of the second group of purging assemblies of the two groups of purging assemblies respectively face to two side edges of the width direction of the second surface of the plate-type base material.

Further, the plate type substrate edge purging device further comprises a driving lead screw, the driving lead screw is rotatably arranged on the supporting frame, the two purging units in the same group are respectively arranged on the two driving sections of the driving lead screw, and the rotating directions of threads on the two driving sections are opposite, so that the two purging units in the same group are close to each other or separate from each other when moving.

Furthermore, the plate type substrate edge purging device further comprises a supporting guide rod, the supporting guide rod extends along the axial direction of the driving screw rod, one part of the purging unit is connected with the driving screw rod, and the other part of the purging unit is connected with the supporting guide rod.

Furthermore, the purging unit comprises a supporting seat and a purging structure, wherein the supporting seat is provided with a threaded hole and a guide hole, the axis of the threaded hole is parallel to the axis of the guide hole, the driving screw rod penetrates through the threaded hole, and the supporting guide rod penetrates through the supporting guide rod; the blowing structure is connected with the supporting seat and is provided with an air outlet.

Furthermore, the purging structure comprises a first pipe section and a second pipe section, wherein the first pipe section is provided with an air inlet which is communicated with the vortex fan; the second pipe section is connected with the first pipe section, the angle of the second pipe section relative to the first pipe section can be adjusted, and an air outlet is formed in one end, far away from the first pipe section, of the second pipe section.

Furthermore, the purging structure also comprises a transition connecting piece and a sealing ring, wherein one part of the transition connecting piece is connected with the first pipe section, and the other part of the transition connecting piece is connected with the second pipe section; and a sealing ring is arranged between the transition connecting piece and the first pipe section, and/or a sealing ring is arranged between the transition connecting piece and the second pipe section.

Furthermore, the purging structure further comprises an air outlet structure, the air outlet structure is arranged at one end, far away from the first pipe section, of the second pipe section, the air outlet structure is provided with an air homogenizing cavity, the air homogenizing cavity is communicated with the second pipe section through an air outlet, and the air outlet structure is provided with an air outlet.

Further, the air outlet structure comprises an air outlet cylinder and an air guide structure, wherein the air outlet cylinder is communicated with the second pipe section, the axial direction of the air outlet cylinder is perpendicular to the axial direction of the second pipe section, the air outlet cylinder is provided with an avoiding through hole, and the avoiding through hole extends along the axial direction of the air outlet cylinder; the air guide structure is connected with the air outlet cylinder and arranged along the axial extension of the air outlet cylinder, the air guide structure is communicated with the air outlet cylinder by avoiding the via hole, and an air outlet is formed in one side, far away from the air outlet cylinder, of the air guide structure.

Furthermore, the air outlet structure also comprises an adjusting plate, the position of the adjusting plate is adjustably arranged at the air outlet so as to adjust the size of the air outlet, and the adjusting plate is arranged in an extending manner along the extending direction of the air outlet.

Further, the supporting frame comprises a base, a first sub-supporting frame and a second sub-supporting frame, wherein the first sub-supporting frame is arranged on the base in a position adjustable mode along the vertical direction, and the first purging assembly of the two purging assemblies is arranged on the first sub-supporting frame; the second sub-supporting frame is arranged on the first sub-supporting frame in a position adjustable mode along the vertical direction, and the second group of the two groups of the blowing assemblies are arranged on the second sub-supporting frame.

Further, the first sub-support frame has a support pallet located in the working space and located between the two purging assemblies to provide a supporting force for the plate-type substrate when the plate-type substrate passes through the working space.

By applying the technical scheme of the utility model, a plate type substrate edge purging device is provided, two groups of purging components are connected with a supporting frame, and two groups of purging components are arranged oppositely, and an operation space for a plate type substrate to pass through is formed between the two groups of purging components, meanwhile, the air outlet of one group of purging components in the two groups of purging components faces to the first surface of the plate type substrate, the air outlet of the other group of purging components faces to the second surface of the plate type substrate, thus, in the process that the plate type substrate passes through the operation space, the air outlet of one group of purging components in the two groups of purging components is used for purging water stains on the first surface of the plate type substrate, the air outlet of the other group of purging components in the two groups of purging components is used for purging water stains on the second surface of the plate type substrate, and the water stains at the edges of the first surface and the second surface of the plate type substrate can be effectively purged, thereby ensure that the plate type substrate can not carry water stain to enter the next procedure, and avoid polluting equipment in the next procedure.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 shows a schematic view of a panel-shaped substrate pressed by a squeeze roller according to an alternative embodiment of the present invention;

FIG. 2 illustrates a residual water stain of an edge due to a capillary phenomenon after the plate-type base material of FIG. 1 is pressed by a pressing roll;

FIG. 3 illustrates a schematic view of a plate type substrate edge purging device and a plate type substrate according to an alternative embodiment of the present invention;

FIG. 4 is a schematic structural view illustrating a front view of the plate-type substrate edge purging device and the plate-type substrate in FIG. 3;

FIG. 5 is a schematic diagram showing a side view of the plate-type substrate edge purging device and the plate-type substrate in FIG. 3;

FIG. 6 is a schematic view illustrating the structure of the first sub-support frame and the plate-type substrate of the plate-type substrate edge purging apparatus of FIG. 3;

FIG. 7 is a schematic view showing another view of the plate type substrate edge purging apparatus of FIG. 3;

FIG. 8 is a partial schematic structural view illustrating a purge unit of a purge module of the plate-type substrate edge purge apparatus of FIG. 3;

FIG. 9 is a schematic diagram of the second pipe section and the wind outlet structure of the purge unit in FIG. 8;

fig. 10 shows a schematic cross-sectional structure diagram of the second pipe section and the wind outlet structure in fig. 9.

Wherein the figures include the following reference numerals:

1. a plate-type substrate; 2. a first surface; 3. a second surface; 5. a squeeze roll; 6. water soaking;

10. a support frame; 11. a first sub-support frame; 111. a support pallet; 112. a first adjustment structure; 12. a second sub-support frame; 121. a second adjustment structure;

20. a purge assembly; 21. a purging unit; 211. a supporting seat; 212. a purging structure; 2121. a first tube section; 2121a and an air inlet; 2122. a second tube section; 2123. a transition piece; 2123a, connecting blocks; 2123b, pressing blocks; 2124. a seal ring; 2125. an air outlet structure; 2125a, a uniform air cavity; 2125b, an air outlet cylinder; 2125c, an air guide structure; 2125d, adjusting plate; 100. a working space; 300. an air outlet; 400. a waist-shaped hole; 500. a fastener;

30. driving a lead screw; 31. a drive section;

40. a support guide rod;

50. a drive section.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In order to solve the problem that water stain 6 exists in the edge of the upper and lower surface of the board type substrate among the prior art, the utility model provides a board type substrate edge sweeps device.

As shown in fig. 1 and 2, two squeeze rollers 5 perform surface squeezing operation on the first surface 2 and the second surface 3 of the plate-type substrate 1 to squeeze the water stains 6 on the first surface 2 and the second surface 3 of the plate-type substrate 1 to the side edges, however, because the plate-type substrate 1 has a certain thickness, under the action of the capillary phenomenon of water, the water stains 6 on the side edges can be diffused to the two side edges in the width direction of the first surface 2 and the two side edges in the width direction of the second surface 3, and the plate-type substrate edge purging device provided by the present application is used for purging the water stains 6 on the edges in the width direction of the first surface 2 and the second surface 3 in fig. 2.

As shown in fig. 3 to 10, the plate-type substrate edge purging device includes a support frame 10 and two sets of purging assemblies 20, wherein the two sets of purging assemblies 20 are connected to the support frame 10, the two sets of purging assemblies 20 are oppositely disposed, and a working space 100 for the plate-type substrate 1 to pass through is formed between the two sets of purging assemblies 20; wherein, the air outlet 300 of one of the two purging assemblies 20 faces the first surface 2 of the plate-type substrate 1, and the air outlet 300 of the other purging assembly 20 faces the second surface 3 of the plate-type substrate 1.

The application provides a plate-type substrate edge purging device, two groups of purging components 20 are connected with a supporting frame 10, the two groups of purging components 20 are arranged oppositely, a working space 100 for a plate-type substrate 1 to pass through is formed between the two groups of purging components 20, meanwhile, an air outlet 300 of one group of purging components 20 of the two groups of purging components 20 faces to a first surface 2 of the plate-type substrate 1, an air outlet 300 of the other group of purging components 20 faces to a second surface 3 of the plate-type substrate 1, thus, in the process that the plate-type substrate 1 passes through the working space 100, the air outlet 300 of one group of purging components 20 of the two groups of purging components 20 is used for purging water stains 6 on the first surface 2 of the plate-type substrate 1, the air outlet 300 of the other group of purging components 20 of the two groups of purging components 20 is used for purging the water stains 6 on the second surface 3 of the plate-type substrate 1, ensure that the water stain 6 on the first surface 2 and the second surface 3 of plate type substrate 1 can be effectively swept to ensure that plate type substrate 1 can not carry water stain 6 and get into one process next, avoid polluting the equipment in one process next.

Alternatively, both sets of purge modules 20 are movably disposed on the support frame 10 in the width direction of the plate-type substrate 1. Like this, be convenient for two sets of subassembly 20 that sweep can carry out real-time position control according to the remaining position of the water stain 6 of edge to ensure two sets of subassemblies 20 that sweep reliability.

Optionally, one set of purge modules 20 comprises two purge units 21, both purge units 21 of the same set being directed towards two opposite edges of the first surface 2 of the plate substrate 1.

Alternatively, one set of the purge modules 20 includes two purge units 21, and both of the purge units 21 in the same set face the central side of the first surface 2 of the plate-type substrate 1.

Alternatively, the one set of purge modules 20 includes two purge units 21, one of the two purge units 21 in the same set is directed toward the center side of the first surface 2 of the plate-type substrate 1, and the other of the two purge units 21 in the same set is directed toward the edge of the first surface 2 of the plate-type substrate 1.

As shown in fig. 3 to 10, the group of purge modules 20 includes two purge units 21, each of the two purge units 21 in the same group is movably disposed on the support frame 10 along the width direction of the plate-type substrate 1, and each of the two purge units 21 in the same group has an air outlet 300; wherein, the two air outlets 300 of the first purging assembly 20 of the two purging assemblies 20 respectively face the two side edges of the first surface 2 of the plate-shaped substrate 1 in the width direction; the two air outlets 300 of the second purging assembly 20 of the two purging assemblies 20 face the two side edges of the second surface 3 of the plate-shaped substrate 1 in the width direction. In this way, it is ensured that the two purge units 21 in the same group effectively purge the water stains 6 at both widthwise edges of the first surface 2 or both widthwise edges of the second surface 3 of the plate-type substrate 1, respectively.

As shown in fig. 3 to 7, the plate-type substrate edge purging device further includes a driving screw 30, the driving screw 30 is rotatably disposed on the support frame 10, the two purging units 21 in the same group are respectively disposed on the two driving sections 31 of the driving screw 30, and the rotation directions of the threads on the two driving sections 31 are opposite, so that the two purging units 21 in the same group move close to or away from each other. In this way, by setting the screw direction of the threads on the two drive sections 31 to be opposite, it is only necessary to rotate the drive screw 30 to achieve the movement of the two purge units 21 in the same group toward or away from each other.

As shown in fig. 3 to 7, the plate-type substrate edge purging device further includes a support guide rod 40, the support guide rod 40 extends along the axial direction of the driving screw 30, a portion of the purging unit 21 is connected to the driving screw 30, and another portion of the purging unit 21 is connected to the support guide rod 40. Thus, the support guide 40 functions to support and guide the purge unit 21.

As shown in fig. 3 to 7, the purging unit 21 includes a supporting base 211 and a purging structure 212, wherein the supporting base 211 has a threaded hole and a guide hole, wherein an axis of the threaded hole is parallel to an axis of the guide hole, the driving screw 30 is disposed through the threaded hole, and the support guide 40 is disposed through the support guide 40; the purging structure 212 is connected with the supporting base 211, and the purging structure 212 is provided with an air outlet 300. In this way, by providing the purge unit 21 in a configuration including the support base 211 and the purge structure 212, the reliability of connection of the purge unit 21 is ensured, and the reliability of movement of the purge unit 21 is also ensured.

As shown in fig. 8 to 10, the purging structure 212 includes a first pipe section 2121 and a second pipe section 2122, wherein the first pipe section 2121 has an air inlet 2121a, and the air inlet 2121a is communicated with the vortex fan; the second pipe section 2122 is connected to the first pipe section 2121, the second pipe section 2122 is angularly adjustable relative to the first pipe section 2121, and an end of the second pipe section 2122 remote from the first pipe section 2121 has an air outlet. In this way, the angle of the second pipe section 2122 relative to the first pipe section 2121 is adjusted according to the position of the water stain 6, that is, the position of the air outlet on the second pipe section 2122 is adjusted, and the blown air can be blown to the position of the water stain 6 as far as possible.

Optionally, the wind pressure of the vortex fan is P, wherein P is more than or equal to 0.3bar and less than or equal to 0.7bar, the wind volume of the vortex fan is Q, wherein Q is more than 500m ³ Of course, the above-mentioned wind pressure P and wind quantity Q can be specifically adjusted according to the moving speed of the plate-type substrate 1 and the amount of the residual water stains 6, thereby realizing the directional purging of the water stains 6 at the edges of the first surface 2 and the second surface 3 of the plate-type substrate 1.

It should be noted that, in the present application, the vortex fan and the two sets of purging assemblies 20 are combined to replace the existing high-temperature cleaning scheme, steam heating purging scheme and compressed air purging scheme, so as to save the manufacturing cost and the use cost of the equipment, and further improve the economy of the surface treatment of the plate-type substrate 1.

As shown in FIG. 8, the purge feature 212 further includes a transition piece 2123 and a seal 2124, wherein a portion of the transition piece 2123 is coupled to the first tube segment 2121 and another portion of the transition piece 2123 is coupled to the second tube segment 2122; a seal 2124 is disposed between the transition piece 2123 and the first tube segment 2121, and/or a seal 2124 is disposed between the transition piece 2123 and the second tube segment 2122. In this way, the reliability of the connection between the first pipe section 2121 and the second pipe section 2122 is ensured, the reliability of the seal therebetween is ensured, and the second pipe section 2122 can be relatively rotated with respect to the first pipe section 2121.

As shown in fig. 8, the transition piece 2123 includes a connecting block 2123a and two pressing blocks 2123b, one axial end of the connecting block 2123a is used for connecting with the first pipe section 2121, the other axial end of the connecting block 2123a is used for connecting with the second pipe section 2122, one pressing block 2123b is pressed at the connecting position of the connecting block 2123a and the first pipe section 2121, and the other pressing block 2123b is pressed at the connecting position of the connecting block 2123a and the second pipe section 2122, so that the connecting stability between the first pipe section 2121 and the second pipe section 2122 is ensured.

As shown in fig. 8 to 10, the purging structure 212 further includes an air outlet structure 2125, the air outlet structure 2125 is disposed at an end of the second tube section 2122 away from the first tube section 2121, the air outlet structure 2125 has an air uniforming cavity 2125a, the air uniforming cavity 2125a is communicated with the second tube section 2122 through an air outlet, and the air outlet structure 2125 has an air outlet 300. Thus, the air outlet structure 2125 is configured to effectively adjust the wind, so as to ensure that the wind blown out from the air outlet 300 can be blown to the position of the water stain 6 of the plate-shaped substrate 1 as much as possible.

As shown in fig. 8 to 10, the air outlet structure 2125 includes an air outlet barrel 2125b and an air guiding structure 2125c, wherein the air outlet barrel 2125b is communicated with the second pipe section 2122, an axial direction of the air outlet barrel 2125b is perpendicular to an axial direction of the second pipe section 2122, the air outlet barrel 2125b has an avoiding through hole, and the avoiding through hole extends along the axial direction of the air outlet barrel 2125 b; the air guiding structure 2125c is connected to the air outlet barrel 2125b and extends along the axial direction of the air outlet barrel 2125b, the air guiding structure 2125c is communicated with the air outlet barrel 2125b through an avoiding via hole, and an air outlet 300 is formed at a side of the air guiding structure 2125c away from the air outlet barrel 2125 b. Thus, the air outlet barrel 2125b serves as an air storage function, and the air guiding structure 2125c serves as an air guiding function.

As shown in fig. 9 and 10, the air outlet structure 2125 further includes an adjusting plate 2125d, the adjusting plate 2125d is adjustably disposed at the air outlet 300 to adjust the size of the air outlet 300, and the adjusting plate 2125d extends along the extending direction of the air outlet 300. Thus, the adjusting plate 2125d is arranged to adjust the size of the air outlet 300, so as to adjust the air volume or the air pressure.

As shown in fig. 9, a plurality of waist-shaped holes 400 are formed on the adjusting plate 2125d, an extending direction of each waist-shaped hole 400 extends along a moving direction of the adjusting plate 2125d, a plurality of fasteners 500 are disposed in one-to-one correspondence with the plurality of waist-shaped holes 400, and each waist-shaped hole 400 corresponding to each fastener 500 is connected to the air guiding structure 2125c, so that the adjusting plate 2125d moves along the extending direction of each waist-shaped hole 400 to adjust the air outlet 300.

As shown in fig. 4 and 7, the support frame 10 includes a base, a first sub-support frame 11 and a second sub-support frame 12, wherein the first sub-support frame 11 is vertically and position-adjustably disposed on the base, and the first purge module 20 of the two sets of purge modules 20 is disposed on the first sub-support frame 11; the second sub-support frame 12 is vertically and positionally adjustably provided on the first sub-support frame 11, and the second purge module 20 of the two purge modules 20 is provided on the second sub-support frame 12. In this way, by adjusting the position of the first sub-support frame 11 and/or by adjusting the position of the second sub-support frame 12, the adjustment of the working space 100 can be achieved, and also the distance in the height direction of the first group of purge modules 20 located on the first sub-support frame 11 with respect to the plate-type substrate 1 and the distance in the height direction of the second group of purge modules 20 located on the second sub-support frame 12 with respect to the plate-type substrate 1 can be achieved.

As shown in fig. 4, the first sub-support frame 11 is position-adjustably provided on the base by the first adjusting structure 112, and since the second sub-support frame 12 is provided on the first sub-support frame 11, the first adjusting structure 112 is used to adjust the overall height of the support frame 10 in fact; the second sub support frame 12 is position-adjustably provided on the first sub support frame 11 by a second adjusting structure 121, and the second adjusting structure 121 is capable of adjusting the position of the second sub support frame 12 in the height direction with respect to the first sub support frame 11.

As shown in fig. 4 and 7, the first sub-support frame 11 has a support blade 111, the support blade 111 is located within the work space 100, and the support blade 111 is located between two purge modules 20 to provide a supporting force to the plate-type substrate 1 when the plate-type substrate 1 passes through the work space 100. In this way, the support blade 111 serves to support the plate-type base material 1, and ensures that the plate-type base material 1 can smoothly pass through the work space 100.

In the present application, as shown in fig. 3, 4 and 7, the driving unit 50 is drivingly connected to the driving screw 30, the driving unit 50 is used for rotationally driving the driving screw 30, and the driving unit 50 may be a manual driving disk or may have another driving structure.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

Unless specifically stated otherwise, the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be discussed further in subsequent figures.

Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular is intended to include the plural unless the context clearly dictates otherwise, and it should be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of features, steps, operations, devices, components, and/or combinations thereof.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (14)

1. A plate-type substrate edge purging device, comprising:

a support frame (10);

two groups of purging assemblies (20), wherein the two groups of purging assemblies (20) are connected with the supporting frame (10), the two groups of purging assemblies (20) are arranged oppositely, and a working space (100) for the plate type substrate (1) to pass through is formed between the two groups of purging assemblies (20);

wherein, the air outlet (300) of one of the two groups of purging components (20) faces the first surface (2) of the plate-type substrate (1), and the air outlet (300) of the other group of purging components (20) faces the second surface (3) of the plate-type substrate (1).

2. The plate type substrate edge purging device according to claim 1,

-one set of said purging assemblies (20) comprises two purging units (21), the two purging units (21) of the same set being directed towards two opposite edges of the first surface (2) of the plate-type substrate (1); or the like, or, alternatively,

two of the purge units (21) of the same group are both directed towards the central side of the first surface (2) of the plate-shaped substrate (1); or the like, or, alternatively,

one of the two purge units (21) of the same group is directed towards the central side of the first surface (2) of the plate-type substrate (1), and the other of the two purge units (21) of the same group is directed towards the edge of the first surface (2) of the plate-type substrate (1).

3. The plate type substrate edge purging device according to claim 1,

two groups of the purging assemblies (20) are movably arranged on the supporting frame (10) along the width direction of the plate-type base material (1).

4. The plate type substrate edge purging device according to claim 1,

the group of the purging assemblies (20) comprises two purging units (21), the two purging units (21) in the same group are movably arranged on the supporting frame (10) along the width direction of the plate-type substrate (1), and the two purging units (21) in the same group are provided with the air outlet (300);

wherein, two air outlets (300) in the first group of the purging assemblies (20) in the two groups of the purging assemblies (20) respectively face to two side edges of the first surface (2) of the plate-type substrate (1) in the width direction;

the two air outlets (300) in the second group of the purging assemblies (20) in the two groups of the purging assemblies (20) respectively face to two side edges of the second surface (3) of the plate-shaped base material (1) in the width direction.

5. The plate type substrate edge purge apparatus of claim 4, further comprising:

the driving screw rod (30) is rotatably arranged on the supporting frame (10), the two purging units (21) in the same group are respectively arranged on two driving sections (31) of the driving screw rod (30), and the rotating directions of threads on the two driving sections (31) are opposite, so that the two purging units (21) in the same group are close to or away from each other when moving.

6. The plate type substrate edge purge apparatus of claim 5, further comprising:

the support guide rod (40) extends along the axial direction of the drive screw rod (30), one part of the purging unit (21) is connected with the drive screw rod (30), and the other part of the purging unit (21) is connected with the support guide rod (40).

7. Plate type substrate edge purge apparatus according to claim 6, wherein the purge unit (21) comprises:

the supporting seat (211) is provided with a threaded hole and a guide hole, wherein the axis of the threaded hole is parallel to the axis of the guide hole, the driving screw rod (30) penetrates through the threaded hole, and the supporting guide rod (40) penetrates through the supporting guide rod (40);

a purging structure (212), the purging structure (212) is connected with the supporting base (211), and the purging structure (212) is provided with the air outlet (300).

8. The plate type substrate edge purge apparatus according to claim 7, wherein the purge structure (212) comprises:

a first pipe section (2121), wherein the first pipe section (2121) is provided with an air inlet (2121a), and the air inlet (2121a) is communicated with the vortex fan;

the second pipe section (2122) is connected with the first pipe section (2121), the second pipe section (2122) is arranged in an angle-adjustable mode relative to the first pipe section (2121), and an air outlet is formed in one end, far away from the first pipe section (2121), of the second pipe section (2122).

9. The plate type substrate edge purge apparatus according to claim 8, wherein the purge structure (212) further comprises:

a transition piece (2123), a portion of the transition piece (2123) being connected to the first tube segment (2121) and another portion of the transition piece (2123) being connected to the second tube segment (2122);

a sealing ring (2124), a sealing ring (2124) is arranged between the transition piece (2123) and the first pipe section (2121), and/or a sealing ring (2124) is arranged between the transition piece (2123) and the second pipe section (2122).

10. The plate type substrate edge purging device of claim 8, wherein the purging structure (212) further comprises:

air-out structure (2125), air-out structure (2125) set up second pipe section (2122) are kept away from the one end of first pipe section (2121), air-out structure (2125) have even wind chamber (2125a), just even wind chamber (2125a) pass through the air exit with second pipe section (2122) intercommunication, air-out structure (2125) have air outlet (300).

11. The plate type substrate edge purging device of claim 10, wherein the air outlet structure (2125) comprises:

the air outlet barrel (2125b) is communicated with the second pipe section (2122), the axial direction of the air outlet barrel (2125b) is perpendicular to the axial direction of the second pipe section (2122), the air outlet barrel (2125b) is provided with an avoiding through hole, and the avoiding through hole extends along the axial direction of the air outlet barrel (2125 b);

air guide structure (2125c), air guide structure (2125c) with go out a dryer (2125b) and connect, and follow the axial extension of play dryer (2125b) sets up, air guide structure (2125c) pass through dodge the via hole with go out dryer (2125b) intercommunication, just air guide structure (2125c) are kept away from one side of going out dryer (2125b) has air outlet (300).

12. The plate type substrate edge purging device of claim 11, wherein the air outlet structure (2125) further comprises:

the adjusting plate (2125d) is adjustably arranged at the air outlet (300) in position to adjust the size of the air outlet (300), and the adjusting plate (2125d) extends along the extending direction of the air outlet (300).

13. The plate type substrate edge purging device according to claim 1, wherein the support frame (10) comprises:

a base;

a first sub-support frame (11), the first sub-support frame (11) being vertically position-adjustably disposed on the base, a first of the two sets of purge assemblies (20) being disposed on the first sub-support frame (11);

a second sub-supporting frame (12), wherein the second sub-supporting frame (12) is arranged on the first sub-supporting frame (11) in a position adjustable mode along the vertical direction, and the purging assemblies (20) in the second group of the two groups of purging assemblies (20) are arranged on the second sub-supporting frame (12).

14. The plate-type substrate edge purging device according to claim 13, wherein the first sub-support frame (11) has a support blade (111), the support blade (111) is located within the working space (100), and the support blade (111) is located between the two purging assemblies (20) to provide a supporting force to the plate-type substrate (1) when the plate-type substrate (1) passes through the working space (100).

Images