CN217444345U - Wafer edge marking device - Google Patents
Wafer edge marking device Download PDFInfo
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- CN217444345U CN217444345U CN202221294613.7U CN202221294613U CN217444345U CN 217444345 U CN217444345 U CN 217444345U CN 202221294613 U CN202221294613 U CN 202221294613U CN 217444345 U CN217444345 U CN 217444345U
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Abstract
Wafer edge piece marking device. Belongs to the technical field of semiconductor production devices, and particularly relates to an improvement on a wafer edge marking device. The marking device comprises a rotating table and a marking pen, wherein a flexible bottom support is arranged on the rotating table and used for bearing a wafer; still include marker pen position control mechanism, marker pen position control mechanism includes: the self-locking device comprises vertical rods, transverse rods, a first self-locking sliding block and a second self-locking sliding block; the marking pen is detachably connected to the first self-locking sliding block, the first self-locking sliding block is arranged on the cross rod, the cross rod is detachably connected to the second self-locking sliding block, the second self-locking sliding block is arranged on the vertical rod, and the vertical rod is arranged on one side of the rotating table. The utility model discloses the reliability is high, and the operation is convenient, can effectively promote work efficiency, and the guarantee product yields shortens production cycle.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor production device, concretely relates to improvement to wafer side piece mark device.
Background
At present, in the field of semiconductor manufacturing, chips are cut from a wafer after photoetching, the chips are generally square, and the wafer is circular, so that a scrap with an incomplete structure is inevitably generated at the periphery of the wafer, or an edge chip with electric performance reduced after the edge is pickled is known as an edge chip in the industry. In order to avoid the edge pieces from being picked up and flowing to the next procedure, the yield of the subsequent packaged products is reduced, the cost of production materials is wasted, the edge pieces on the wafer need to be marked, and the edge pieces are removed according to the marks when the later-stage screening is convenient. At present, in a conventional method, the edge pieces at the edge position of the wafer are marked one by using a marking pen, so that a long time is needed, and the working efficiency is very low. Meanwhile, the final "click" type marking mode puts high demands on the relative motion mechanism between the wafer and the marking pen.
Patent No. CN201821996646.X in the prior art provides a wafer point edge wafer jig, draws a circle on a wafer by means of the jig, can quickly point and remove an edge piece, and improves the efficiency of point and remove the edge piece. The former marking mode of 'chicken pecking rice' is changed. However, the point removing pen (i.e. the marking pen) is fixed in the adjusting chute of the transverse bracket, and the working mode that the transverse bracket slides in the T-shaped groove of the jig has the following problems:
(1) the jig is annular, the structure is easy to deform, the transverse support is long, pressing is easy to deform when the jig is used, and due to the matched tolerance of the jig and the transverse support, the point-removing pen shakes when a line is drawn;
(2) the acting force of the pen point of the point removal pen is not easy to control, and the wafer is easy to deform and dislocate (the wafer is tilted) when being pressed downwards;
the above problems result in a chip in which the drawn line is not uniform and many false marks are generated.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides a to the side piece mark that not only can be quick, and can adjust the contact pressure at mark pen and wafer edge, avoid the wafer position wafer side piece marking device that the deviation appears.
The technical scheme of the utility model is that the marking device for the wafer edge slice comprises a rotary table and a marking pen, wherein the rotary table is provided with a flexible collet which is used for bearing the wafer slice;
still include marker pen position control mechanism, marker pen position control mechanism includes: the self-locking device comprises a vertical rod, a cross rod, a first self-locking sliding block and a second self-locking sliding block;
the marking pen is detachably connected to the first self-locking sliding block, the first self-locking sliding block is arranged on the cross rod, the cross rod is detachably connected to the second self-locking sliding block, the second self-locking sliding block is arranged on the vertical rod, and the vertical rod is arranged on one side of the rotating table.
Preferably, the upper part of the marking pen is provided with a height fine adjustment mechanism, the height fine adjustment mechanism comprises a sleeve, the sleeve is detachably fixed on the first self-locking sliding block, the top surface of the sleeve is provided with a rotating handle, the lower part of the rotating handle is provided with a first rotating shaft, the first rotating shaft is inserted into the sleeve, the bottom end of the first rotating shaft is provided with a first gear, the sleeve is internally provided with a circular clamping groove, a rotating block is arranged in the circular clamping groove, a second rotating shaft is arranged at the upper part of the rotating block, a second gear is arranged at the upper part of the second rotating shaft, the second gear is meshed with the first gear, the diameter of the second gear is larger than that of the first gear, a threaded rod is arranged at the lower part of the rotating block, a nut is arranged at the top of the marking pen, through the cooperation of threaded rod and nut for the marker pen cup joints in the sleeve, be equipped with a plurality of sliders on the sleeve inner wall, be equipped with the spout that corresponds with the slider on the marker pen outer wall.
Preferably, the contact surface of the flexible bottom support and the rotating platform is a rough surface.
Preferably, the bottom of the vertical rod is provided with a lifting motor for driving the second self-locking sliding block to vertically lift.
Preferably, be equipped with first quick-release clamp on the first auto-lock slider, the marker pen is located in the first quick-release clamp, be equipped with second quick-release clamp on the second auto-lock slider, the horizontal pole is located in the second quick-release clamp.
Preferably, the pen core of the marking pen is of a detachable structure.
The utility model discloses a device makes marker pen can be in a flexible way on the ground, down, and left and right removal to adapt to the wafer of different diameters, under marker pen position control mechanism's effect, can fix marker pen's position steadily, guarantee that the setting-out is even. The marking pen is additionally provided with a height fine adjustment mechanism which can adjust the contact pressure between a pen point of the pen core and the wafer, so that the thickness of the marking line can be flexibly controlled, and the number of mistaken drawings is reduced. The utility model discloses the reliability is high, and the operation is convenient, can effectively promote work efficiency, and the guarantee product yields shortens production cycle.
Drawings
Figure 1 is a schematic structural view of the present invention,
figure 2 is a schematic diagram of a marker height fine adjustment mechanism,
figure 3 is a schematic view of the marker after adjustment of the fine adjustment height,
FIG. 4 is a schematic view of a wafer structure,
FIG. 5 is an enlarged view of a portion of the wafer A after marking;
in the figure: 1 is a rotating table, 2 is a flexible bottom support, 3 is a wafer, 31 is a chip, 32 is a marking line, 33 is an edge sheet, 4 is a marking pen, 5 is a cross rod, 6 is a first self-locking sliding block, 7 is a second self-locking sliding block, 8 is a vertical rod, 9 is a sleeve, 91 is a rotating handle, 92 is a first rotating shaft, 93 is a first gear, 94 is a second gear, 95 is a second rotating shaft, 96 is a rotating block, 97 is a threaded rod, and 98 is a circular clamping groove;
the two-dot chain line in fig. 5 is a marker trace.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Fig. 1 to 3 show a high-efficiency wafer edge marking device, which includes a rotary table 1 and a marking pen 4, wherein a flexible bottom support 2 is disposed on the rotary table 1, and the flexible bottom support 2 is used for supporting a wafer 3;
still include marker pen position control mechanism, marker pen position control mechanism includes: the device comprises a vertical rod 8, a cross rod 5, a first self-locking sliding block 6 and a second self-locking sliding block 7; the marking pen 4 is detachably connected on the first self-locking sliding block 6, the first self-locking sliding block 6 is arranged on the transverse rod 5, the transverse rod 5 is detachably connected on the second self-locking sliding block 7, the second self-locking sliding block 7 is arranged on the vertical rod 8, and the vertical rod 8 is arranged on one side of the rotating platform 1.
The first self-locking sliding block 6 can freely slide left and right on the cross rod 5 and is fixed in a self-locking mode after reaching a preset position, the second self-locking sliding block 7 can freely slide up and down on the vertical rod 8 and is fixed in a self-locking mode after reaching the preset position, the self-locking sliding blocks are conventional universal parts, specific structures and working principles are not repeated herein, for example, the self-locking sliding blocks produced by a Lishui Borui bearing are used, the relative positions of the marking pen 4 and the wafer 10 are adjusted by moving the two self-locking sliding blocks, and after the position of the marking pen 12 is determined, the rotating platform 1 rotates to complete circle drawing. The wafer 3 after marking is shown in fig. 4 in detail, and the specific position of the marking line 32 is determined according to the actual arrangement of the chips 31, so that each side piece 33 can be marked and then knocked out by a visual screening device.
In the conventional method, the marking pen is used for removing the edge pieces at the edge position of the wafer one by one, each point takes 2 to 3 seconds, and the whole marking process needs more than ten minutes; and the yield brought by production is accelerated and is far higher than the loss brought by error marking.
Referring to fig. 2 and 3, a height fine-adjustment mechanism is arranged at the upper part of the marker pen 4, the height fine-adjustment mechanism includes a sleeve 9, the sleeve 9 is detachably fixed on the first self-locking slider 6, a rotating handle 91 is arranged at the top surface of the sleeve 9, a first rotating shaft 92 is arranged at the lower part of the rotating handle 91, the first rotating shaft 92 is inserted into the sleeve 9 and can freely rotate in the sleeve 9, an upper limiting block and a lower limiting block are arranged on the first rotating shaft 92 and used for fixing the position of the first rotating shaft 92 in the sleeve 9 and preventing the first rotating shaft from moving up and down, a first gear 93 is arranged at the bottom end of the first rotating shaft 92, a circular slot 98 is arranged in the sleeve 9, a rotating block 95 is arranged in the circular slot 98, the rotating block 95 can freely rotate in the circular slot 98, a second rotating shaft 94 is arranged at the upper part of the rotating block 95, a second gear 94 is arranged at the upper part of the second rotating shaft 94, the second gear 94 is meshed with the first gear 93, the diameter of the second gear 94 is larger than the first gear 93, the 95 lower part of commentaries on classics piece is equipped with threaded rod 97, and the top of marker pen 4 is equipped with the nut, through the cooperation of threaded rod 97 and nut for marker pen 4 cup joints in sleeve 9, is equipped with a plurality of vertical sliders on the sleeve 9 inner wall, is equipped with the spout that corresponds with the slider on the 4 outer walls of marker pen.
Increase high fine-tuning, the control marking pen 4 that can be accurate is to the pressure of wafer 3, and then the thickness of accurate control marking line 12 reduces the mistake and draws, its theory of operation: because the diameter of the second gear is greater than that of the first gear, after the rotating handle 91 is rotated, the rotating speed of the rotating block 96 is lower than that of the rotating handle 91, the rotating block 96 rotates to drive the threaded rod 97 to rotate, and due to the limiting effect of the sliding grooves on the sliding blocks, the marking pen 4 moves up and down slowly in the sleeve 9, so that the purpose of fine adjustment is achieved.
The contact surface of the flexible mounting 2 and the rotary table 1 is rough, for example, frosted. The contact surface of dull polish form multiplicable flexible collet 2 and revolving stage 1 between the frictional force, prevent that flexible collet 2 from producing the displacement in the course of the work.
And a lifting motor for driving the second self-locking sliding block to do vertical lifting motion is arranged at the bottom of the vertical rod 8. After the circle is drawn once, the marking pen 4 can be automatically lifted through the lifting motor, the wafer 3 is convenient to replace, and the access of automatic equipment is facilitated.
The first self-locking sliding block 6 is provided with a first quick-release clamp, the connection mode of the first self-locking sliding block and the second self-locking sliding block can be welding, screw fixation and the like, the conventional technology is adopted, the marking pen 4 is arranged in the first quick-release clamp, the second self-locking sliding block 7 is provided with a second quick-release clamp, and the cross rod 5 is arranged in the second quick-release clamp. The quick release clamp is a conventional universal part, such as a quick release clamp produced by Wenzhou Jingwei stainless steel, the specific structure of the quick release clamp is not described in detail, and the use of the conventional part helps to reduce the cost.
The pen core of the marking pen 4 is of a detachable structure. The marking pen with the detachable refill is a conventional universal tool, the specific structure is not repeated, when the marking pen with the detachable refill is used, the marking pen can start working only by replacing the refill with the same specification after the ink of the marking pen is used up, the relative position does not need to be adjusted again,
the present invention is not limited to the above embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some technical features without creative labor, and these substitutions and modifications are all within the protection scope of the present invention.
Claims (6)
1. Wafer limit piece mark device, including revolving stage and marker pen, characterized by: a flexible bottom support is arranged on the rotating table and used for bearing the wafer;
still include marker pen position control mechanism, marker pen position control mechanism includes: the self-locking device comprises vertical rods, transverse rods, a first self-locking sliding block and a second self-locking sliding block;
the marking pen is detachably connected to the first self-locking sliding block, the first self-locking sliding block is arranged on the cross rod, the cross rod is detachably connected to the second self-locking sliding block, the second self-locking sliding block is arranged on the vertical rod, and the vertical rod is arranged on one side of the rotating table.
2. The wafer edge marking apparatus of claim 1, wherein: the upper part of the marking pen is provided with a height fine adjustment mechanism which comprises a sleeve, the sleeve is detachably fixed on the first self-locking sliding block, the top surface of the sleeve is provided with a rotating handle, the lower part of the rotating handle is provided with a first rotating shaft, the first rotating shaft is inserted into the sleeve, the bottom end of the first rotating shaft is provided with a first gear, a round clamping groove is arranged in the sleeve, a rotating block is arranged in the round clamping groove, the upper part of the rotating block is provided with a second rotating shaft, the upper part of the second rotating shaft is provided with a second gear, the second gear is meshed with the first gear, the diameter of the second gear is larger than that of the first gear, a threaded rod is arranged at the lower part of the rotating block, a nut is arranged at the top of the marking pen, through the cooperation of threaded rod and nut for the marker pen cup joints in the sleeve, be equipped with a plurality of sliders on the sleeve inner wall, be equipped with the spout that corresponds with the slider on the marker pen outer wall.
3. The wafer edge marking apparatus of claim 1, wherein: the contact surface of the flexible bottom support and the rotating platform is a rough surface.
4. The wafer edge marking apparatus of claim 1, wherein: and a lifting motor for driving the second self-locking sliding block to vertically lift is arranged at the bottom of the vertical rod.
5. The wafer edge marking apparatus of claim 1, wherein: the marking pen is arranged in the first quick-release clamp, the second quick-release clamp is arranged on the second self-locking slide block, and the cross rod is arranged in the second quick-release clamp.
6. The wafer edge marking apparatus of claim 1, wherein: the pen core of the marking pen is of a detachable structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221294613.7U CN217444345U (en) | 2022-05-27 | 2022-05-27 | Wafer edge marking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221294613.7U CN217444345U (en) | 2022-05-27 | 2022-05-27 | Wafer edge marking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217444345U true CN217444345U (en) | 2022-09-16 |
Family
ID=83222688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221294613.7U Active CN217444345U (en) | 2022-05-27 | 2022-05-27 | Wafer edge marking device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217444345U (en) |
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2022
- 2022-05-27 CN CN202221294613.7U patent/CN217444345U/en active Active
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