CN217434152U

CN217434152U - Chip adsorbs assembly and calibration equipment

Info

Publication number: CN217434152U
Application number: CN202221532805.7U
Authority: CN
Inventors: 王金池
Original assignee: Beijing Heqi Precision Technology Co ltd
Current assignee: Beijing Heqi Precision Technology Co ltd
Priority date: 2022-06-17
Filing date: 2022-06-17
Publication date: 2022-09-16
Anticipated expiration: 2032-06-17

Abstract

The utility model provides a chip adsorbs assembly and calibration equipment. The chip adsorbs the assembly and includes: a support; the rotating shaft is rotatably connected to the bracket; the fixed seat is arranged at one end of the rotating shaft; and the flexible suckers are arranged in a plurality of positions, and are connected to one side, back to the rotating shaft, of the fixed seat. Even under the condition that the chip is warped, the flexible sucker can be in close contact with the chip by virtue of the soft characteristic of the flexible sucker and firmly adsorb the chip, so that the chip is not easy to slide in the rotating process.

Description

Chip adsorbs assembly and calibration equipment

Technical Field

The utility model belongs to the technical field of the semiconductor preparation technique and specifically relates to a chip adsorbs assembly and calibration equipment.

Background

During the chip manufacturing process, in order to accurately place the chip into the process chamber, a calibration apparatus is often used to calibrate the position of the chip.

The calibration apparatus generally has an evaluation portion for holding the chip by the chip holder and driving the chip to rotate, and a displacement calibration portion for measuring data of the edge of the chip by the sensor while the chip is rotating and calculating the position of the center of the chip from the data. The displacement calibration part can drive the chip to move in a plane according to the position of the center of the chip calculated by the measuring and calculating part, so that the position of the chip is calibrated, and the manipulator can accurately place the chip to a target position.

During the chip manufacturing process, some processes may warp the chip (for example, in the case of chip packaging, the chip may warp under the requirement of thinning), and the amplitude of the warpage may sometimes reach ± 5 mm. At present, it is fixed to use adsorption platform to come to adsorb the chip in the calibration equipment more, and adsorption platform is difficult to be fixed firm with the chip that has the warpage, and the chip sideslips easily at rotatory in-process, leads to the calibration equipment precision lower.

The statements in the background section are merely prior art as they are known to the inventors and do not, of course, represent prior art in the field.

SUMMERY OF THE UTILITY MODEL

To one or more defects among the prior art, the utility model provides a chip adsorbs assembly, include:

a support;

the rotating shaft is rotatably connected to the bracket;

the fixed seat is arranged at one end of the rotating shaft; and

the flexible sucker is provided with a plurality of flexible suckers which are connected to one side of the fixed seat back to the rotating shaft.

According to the utility model discloses an aspect, it is a plurality of the flexible sucking disc divide into the multiunit, and the interval is compact between the flexible sucking disc of the same group.

According to the utility model discloses an aspect, flexible sucking disc is Y shape sucking disc, parallel ribbed sucking disc or organ formula sucking disc of silica gel material.

According to the utility model discloses an aspect, flexible sucking disc with be connected with the sucking disc seat between the fixing base, flexible sucking disc cover is established outside the sucking disc seat and with sucking disc seat joint.

According to one aspect of the present invention, the chip adsorption assembly further comprises a rotary driver; the rotary driver is arranged on the bracket and is in belt transmission, chain transmission or gear transmission with the rotary shaft.

According to an aspect of the utility model, the chip adsorbs the assembly still includes the rotation type air pipe joint, the rotation type air pipe joint install in the rotation axis, the rotation axis with be provided with the passageway in the fixing base, the passageway intercommunication the rotation type air pipe joint with flexible sucking disc.

The utility model also provides a calibration equipment, include:

a sensor assembly;

a two-dimensional movement drive assembly; and the combination of (a) and (b),

a chip adsorption assembly as described above;

the chip adsorption assembly is arranged on the two-dimensional movement driving assembly and can be moved to the position of the sensor assembly by the two-dimensional movement driving assembly.

According to an aspect of the present invention, the sensor assembly includes a light source, a reflector and a receiver, the reflector is configured to receive the detection light emitted by the light source and to reflect the detection light to the receiver.

According to the utility model discloses an aspect, two-dimensional movement drive assembly includes first sharp slip table and second sharp slip table, the second sharp slip table is installed on the slider of first sharp slip table, the chip adsorbs the assembly to install on the slider of second sharp slip table.

Compared with the prior art, the embodiment of the utility model provides a chip adsorbs assembly and calibration equipment, even under the warping condition takes place at the chip, flexible sucking disc also can rely on its soft characteristic of texture and the inseparable contact of chip and the absorption chip firmly, makes the chip be difficult for sliding at rotatory in-process. Through setting up rotation type air pipe connector, be convenient for be connected flexible sucking disc and negative pressure source.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 shows an exploded view of a chip adsorption assembly according to one embodiment of the present invention;

fig. 2 shows a cross-sectional view of a flexible suction cup according to an embodiment of the present invention;

FIG. 3 illustrates a cross-sectional view of a dishwashing seat according to one embodiment of the present invention;

fig. 4 shows a schematic view of a calibration device according to an embodiment of the invention;

fig. 5 shows an exploded view of a calibration device according to an embodiment of the invention;

fig. 6 shows a schematic diagram of a two-dimensional motion drive assembly according to an embodiment of the present invention;

fig. 7 shows a schematic view of a state of use of the calibration device according to an embodiment of the invention.

In the figure: 100. a chip adsorption assembly; 110. a support; 111. an upper bearing plate; 112. a lower bearing plate; 113. a plate member; 114. a rod member; 120. a rotating shaft; 130. a fixed seat; 131. connecting holes; 140. a flexible suction cup; 141. a protrusion; 150. a sucker seat; 151. a card slot; 160. a rotary air pipe joint; 170. a rotary driver; 180. an encoder; 200. calibrating the device; 210. a sensor assembly; 211. a light source; 212. a mirror; 213. a receiver; 220. a two-dimensional movement drive assembly; 221. a first linear sliding table; 222. a second linear sliding table; 230. a housing; 231. an upper shell; 232. a lower case; 233. and a through hole.

Detailed Description

In the following, only certain exemplary embodiments are briefly described. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, features defined as "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present invention, it should be noted that unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection, either mechanically, electrically, or in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or reference letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the application of other processes and/or the use of other materials.

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.

Fig. 1 illustrates a chip suction assembly 100 according to an embodiment of the present invention, which is described in detail below with reference to fig. 1.

As shown in fig. 1, the chip suction assembly 100 includes a support 110, a rotation shaft 120, a fixing base 130, and a flexible suction cup 140. Wherein, a plurality of flexible suction cups 140 are provided, and the plurality of flexible suction cups 140 are connected to one side (upper side in the figure) of the fixing base 130. The flexible suction cup 140 may be a Y-shaped suction cup, a parallel ribbed suction cup, or an organ type suction cup made of a silicone material, a rubber material, or other elastic materials. The flexible suction cup 140 can be made to have suction capability by connecting the flexible suction cup 140 to a negative pressure source. Even if the surface of the chip is warped, the flexible suction cup 140 can fully contact with the surface of the chip by virtue of the soft characteristic of the surface of the chip and firmly adsorb the chip, so that the chip is not easy to slide in the rotating and moving processes.

The bracket 110 serves as a load bearing member for providing support to other components. The bracket 110 may include an upper bearing plate 111, a lower bearing plate 112, and a connection member, the upper bearing plate 111 being disposed above the lower bearing plate 112, the connection member being connected between the upper bearing plate 111 and the lower bearing plate 112. The connecting component can be a plate 113, a rod 114, or other supporting components. The rotating shaft 120 is used for driving the fixing base 130 and the flexible suction cup 140 to rotate, the rotating shaft 120 is vertically arranged and fixedly connected to one side (lower side in the figure) of the fixing base 130, which faces away from the flexible suction cup 140, the rotating shaft 120 is rotatably connected to the bracket 110, and specifically, the rotating shaft 120 can vertically penetrate through the upper bearing plate 111 and is in bearing connection with the upper bearing plate 111.

According to the utility model discloses an embodiment, as shown in FIG. 1, a plurality of flexible sucking discs 140 can divide into the multiunit, in this embodiment to six flexible sucking discs 140 equally divide into three groups as the example, and three flexible sucking discs 140 of group can set up along a circumference interval on fixing base 130, and the interval is compact between the flexible sucking disc 140 with the group to carry out better support to the chip, avoid the chip to take place to warp.

According to an embodiment of the present invention, as shown in fig. 1, a suction cup seat 150 can be disposed between the flexible suction cup 140 and the fixing seat 130, and the flexible suction cup 140 is sleeved outside the suction cup seat 150 and is connected to the suction cup seat 150 in a clamping manner. The provision of the suction cup holder 150 improves the ease of replacement of the flexible suction cup 140. Figure 2 shows a cross-sectional view of the flexible suction cup 140 and figure 3 shows a cross-sectional view of the suction cup holder 150. Specifically, as shown in fig. 2 and 3, a plurality of slots 151 may be disposed on the outer side of the suction cup holder 150, the slots 151 may be annularly disposed on the outer side wall of the suction cup holder 150, or a plurality of slots may be disposed around the outer side wall of the suction cup holder 150 at intervals, and a protrusion 141 adapted to the slots 151 is disposed on the inner side of the flexible suction cup 140. The annular slot 151 is matched with the protrusion 141, so that the flexible sucker 140 can be connected with the sucker seat 150 more tightly, and air leakage is not easy to occur. As shown in fig. 1, the fixing base 130 is provided with a connection hole 131, a portion of the suction cup holder 150 is inserted into the connection hole 131, and the connection hole 131 and the suction cup holder 150 can be fastened by a screw fit or an interference fit, so as to facilitate the installation and the removal of the suction cup holder 150.

According to an embodiment of the present invention, as shown in fig. 1, the chip suction assembly 100 may further include a rotary air pipe joint 160, the rotary air pipe joint 160 is connected to one end (lower end in the figure) of the rotating shaft 120 far away from the fixing base 130, a channel (not shown in the figure) is provided in the rotating shaft 120 and the fixing base 130, and the channel communicates the rotary air pipe joint 160 and the flexible suction cup 140. The negative pressure source may be connected to the rotary air line connector 160 through an air line to communicate with the flexible suction cup 140.

According to an embodiment of the present invention, as shown in fig. 1, the chip adsorption assembly 100 may further include a rotary driver 170, and the rotary driver 170 may be a pneumatic motor, a hydraulic motor, an electric motor, or a rotary electromagnet. The rotary driver 170 may be installed on the frame, and power may be transmitted between the rotary driver 170 and the rotating shaft 120 by belt transmission, chain transmission or gear transmission.

According to an embodiment of the present invention, as shown in fig. 1, the chip adsorption assembly 100 may further include an encoder 180, and the encoder 180 is connected to the rotation shaft 120 to measure the rotation angle and the rotation speed of the rotation shaft 120.

Fig. 4 shows a calibration device 200 according to an embodiment of the present invention, fig. 5 shows an exploded view of the calibration device 200 according to an embodiment of the present invention, fig. 6 shows a two-dimensional movement driving assembly 220 according to an embodiment of the present invention, which is described in detail below with reference to fig. 4-6.

As shown in fig. 4-6, the calibration apparatus 200 includes a sensor assembly 210, a two-dimensional movement driving assembly 220, and the chip adsorption assembly 100 as described above, wherein the chip adsorption assembly 100 is mounted on the two-dimensional movement driving assembly 220 and can be moved to the position of the sensor assembly 210 by the two-dimensional movement driving assembly 220.

As shown in fig. 5, the sensor assembly 210 may include a light source 211, a mirror 212, and a receiver 213, the mirror 212 being configured to receive the detection light emitted by the light source 211 and reflect the detection light toward the receiver 213.

As shown in fig. 6, the two-dimensional moving driving assembly 220 may include a first linear sliding table 221 and a second linear sliding table 222, the second linear sliding table 222 is transversely disposed on the slider of the first linear sliding table 221, and the bracket 110 of the chip suction assembly 100 is mounted on the slider of the second linear sliding table 222, so that the position of the bracket 110 can be adjusted along the first linear sliding table 221 and the second linear sliding table 222.

As shown in fig. 5, the calibration device 200 may also include a chassis 230, the chassis 230 acting as a load bearing component for providing support and protection to other components. The case 230 may be divided into an upper case 231 and a lower case 232, the upper case 231 is mounted on the upper portion of the lower case 232, and a detection space into which the chip can enter is provided between the upper case 231 and the lower case 232. The receiver 213 may be installed in the upper case 231, the light source 211 and the reflecting mirror 212 may be installed in the lower case 232, holes through which the detection light passes are provided in the upper case 231 and the lower case 232, and the light path of the detection light passes through the detection space. As shown in fig. 4 and 6, the two-dimensional movement driving assembly 220 and the chip suction assembly 100 may be disposed in the lower housing 232, and a through hole 233 is formed at an upper portion of the lower housing 232 for exposing the fixing base 130 and the flexible suction cup 140.

Fig. 7 is a schematic diagram illustrating a usage state of the calibration device according to an embodiment of the present invention, and the operation principle of the calibration device is described below with reference to fig. 4 to 7.

In calibrating the position of the chip, the chip may be placed on the flexible chuck 140 of the chip suction assembly 100. When the chip is placed on the chip suction assembly 100, the edge of the chip is located in the detection space, or the chip suction assembly 100 may be driven to move by the two-dimensional movement driving assembly 220, so that the edge of the chip moves to the detection space. Then, a light source 211 of the sensor assembly 210 is turned on, the light source 211 emits detection light to a reflector 212, the detection light is refracted by the reflector 212, a part of the detection light is received by a receiver 213, a part of the detection light is shielded by the chip, the receiver 213 collects data of the edge of the chip according to a shading principle, and the center of the chip can be confirmed by using the data; the two-dimensional movement driving assembly 220 then drives the chip suction assembly 100 to move to calibrate the position of the chip.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A chip suction assembly, comprising:

a support;

the rotating shaft is rotatably connected to the bracket;

the fixed seat is arranged at one end of the rotating shaft; and

2. The chip suction assembly of claim 1, wherein the plurality of flexible suction cups are grouped into a plurality of groups, and the flexible suction cups of a same group are closely spaced.

3. The chip suction assembly according to claim 1, wherein the flexible suction cup is a Y-shaped suction cup, a parallel ribbed suction cup or an accordion suction cup made of silicone.

4. The chip suction assembly according to claim 1, wherein a suction cup seat is connected between the flexible suction cup and the fixed seat, and the flexible suction cup is sleeved outside the suction cup seat and clamped with the suction cup seat.

5. The chip suction assembly of claim 1, further comprising a rotary drive; the rotary driver is arranged on the bracket and is in belt transmission, chain transmission or gear transmission with the rotary shaft.

6. The chip suction assembly according to any one of claims 1 to 5, further comprising a rotary air pipe joint, wherein the rotary air pipe joint is mounted on the rotary shaft, and a channel is provided in the rotary shaft and the fixing seat, and the channel communicates the rotary air pipe joint and the flexible suction cup.

7. A calibration device, comprising:

a sensor assembly;

a two-dimensional movement drive assembly; and the combination of (a) and (b),

the chip adsorption assembly of any one of claims 1 to 6;

8. The calibration apparatus of claim 7, wherein the sensor assembly comprises a light source, a mirror, and a receiver, the mirror configured to receive detection light from the light source and reflect the detection light toward the receiver.

9. The calibration apparatus of claim 7, wherein the two-dimensional movement drive assembly comprises a first linear slide and a second linear slide, the second linear slide being mounted on a slide of the first linear slide, and the chip suction assembly being mounted on a slide of the second linear slide.