CN217431512U - 纳米晶圆研磨液混搅筒出料缓冲结构 - Google Patents
纳米晶圆研磨液混搅筒出料缓冲结构 Download PDFInfo
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- CN217431512U CN217431512U CN202221557919.7U CN202221557919U CN217431512U CN 217431512 U CN217431512 U CN 217431512U CN 202221557919 U CN202221557919 U CN 202221557919U CN 217431512 U CN217431512 U CN 217431512U
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- 238000000227 grinding Methods 0.000 title claims abstract description 28
- 239000012530 fluid Substances 0.000 title claims abstract description 24
- 230000003139 buffering effect Effects 0.000 title description 2
- 238000003756 stirring Methods 0.000 claims abstract description 55
- 239000007788 liquid Substances 0.000 claims abstract description 27
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims abstract description 24
- 235000017491 Bambusa tulda Nutrition 0.000 claims abstract description 24
- 241001330002 Bambuseae Species 0.000 claims abstract description 24
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims abstract description 24
- 239000011425 bamboo Substances 0.000 claims abstract description 24
- 238000007599 discharging Methods 0.000 claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 12
- 238000010276 construction Methods 0.000 claims abstract description 3
- 238000009434 installation Methods 0.000 claims description 13
- 238000013016 damping Methods 0.000 claims description 12
- 238000007790 scraping Methods 0.000 claims description 8
- 238000003491 array Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 230000006378 damage Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 12
- 238000005498 polishing Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
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Application Number | Priority Date | Filing Date | Title |
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CN202221557919.7U CN217431512U (zh) | 2022-06-21 | 2022-06-21 | 纳米晶圆研磨液混搅筒出料缓冲结构 |
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CN202221557919.7U CN217431512U (zh) | 2022-06-21 | 2022-06-21 | 纳米晶圆研磨液混搅筒出料缓冲结构 |
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CN217431512U true CN217431512U (zh) | 2022-09-16 |
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CN202221557919.7U Active CN217431512U (zh) | 2022-06-21 | 2022-06-21 | 纳米晶圆研磨液混搅筒出料缓冲结构 |
Country Status (1)
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CN (1) | CN217431512U (zh) |
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2022
- 2022-06-21 CN CN202221557919.7U patent/CN217431512U/zh active Active
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Effective date of registration: 20240124 Address after: 202161 no.4925 Chenzhao Road, Xianghua Town, Chongming District, Shanghai (Shanghai Yongguan Economic Development Zone) Patentee after: Shanghai enjoy Photoelectric Technology Co.,Ltd. Country or region after: China Address before: 230001 In the government compound of the former intersection of Hefei Shanghai Industrial Park, Liangyuan Town, Feidong County, Hefei City, Anhui Province Patentee before: Hefei Changtian Chemical Technology Co.,Ltd. Country or region before: China |