CN217418799U - Entrance window protection device and pulsed laser deposition system - Google Patents

Abstract

The embodiment of the application provides an entrance window protection device and a pulsed laser deposition system, and relates to the technical field of thin film deposition. The incident window protection device comprises a fixed cylinder, one end inside the fixed cylinder is coaxially provided with an installation cylinder, a protection lens is fixedly arranged inside the installation cylinder, and the installation cylinder can rotate around an axis relative to the fixed cylinder; the other end in the fixed cylinder is fixedly provided with at least one baffle which is provided with a through hole, and the projections of the through holes on all the baffles on the protective lens are overlapped and deviated from the axis. The incidence window protection device and the pulse laser deposition system can greatly reduce the maintenance and replacement times of the incidence window, have no influence on the vacuum of the pulse laser deposition system, and can meet the long-time preparation requirement of the film.

Description

An incident window protection device and a pulsed laser deposition system

technical field

The present application relates to the technical field of thin film deposition, and in particular, to an incident window protection device and a pulsed laser deposition system.

Background technique

The pulsed laser deposition system uses a focused laser beam to bombard the surface of the target. The high-power-density pulsed laser ablates the target and sputters out plasma. The plasma absorbs laser energy near the surface of the target and sputters out vaporized substances. The species is deposited on the substrate, so that a thin film corresponding to the target is formed on the surface of the substrate. The pulsed laser deposition system can deposit films with complex compositions, and the composition of the deposited films remains unchanged, which is suitable for the preparation of various films.

The main difference between the pulsed laser deposition system and other coating equipment is that a pulsed laser needs to be set up outside the pulsed laser deposition system. The target material is ablated after the incident window. Since the laser needs to pass at the speed of light, the laser path in the pulsed laser deposition system cannot be blocked. The entrance window lens of the current pulsed laser deposition system has no protection measures. Although the plasma plume generated by ablation in the pulsed laser deposition system is mainly deposited near the sample stage, some of it will be deposited inside the system cavity, including the entrance window. lens surface. As the incident window lens is contaminated by the coating, the laser transmittance decreases, which directly affects the growth quality of the film. Once the incident window lens is seriously polluted by the coating, it is necessary to disassemble the incident window and clean the incident window lens; if the cleaning is not done in time, the film on the surface of the incident window lens will absorb the laser energy and cause the lens to be completely damaged, resulting in repeated maintenance and replacement of the pulsed laser deposition system. Costs rise, vacuum levels drop, and equipment usage is limited.

Utility model content

The purpose of the embodiments of the present application is to provide an incident window protection device and a pulsed laser deposition system, which can greatly reduce the number of times of maintenance and replacement of the incident window, have no effect on the vacuum of the pulsed laser deposition system, and can meet the long-term production requirements of thin films.

In the first aspect, the embodiment of the present application provides an incident window protection device, which includes a fixed cylinder, one end inside the fixed cylinder is provided with an installation cylinder coaxially, a protective lens is fixed inside the installation cylinder, and the installation cylinder can be relatively The fixed cylinder rotates around the axis; the other end inside the fixed cylinder is fixed with at least one baffle, the baffle has a perforation, and the projections of the perforations on all baffles on the protective lens are coincident and deviated from the axis.

In the above implementation process, the incident window protection device is installed inside the cavity of the pulsed laser deposition system, and the laser beam emits a laser beam. After passing through the mirror and focusing lens, the focused laser beam passes through the incident window lens, the protective lens and the baffle in turn. And focus on the target surface to produce a plasma plume. Due to the protective effect of the baffle, only a small amount of plasma reaches the protective lens through the perforation of the baffle, and is deposited locally on the protective lens, thereby avoiding contamination of the incident window lens during coating.

The installation barrel of the embodiment of the present application can rotate relative to the fixed barrel, but the baffle plate will not rotate along with it, and the path of the focused laser beam passing through the protective lens is not in the center of the protective lens. During the continuous coating process, when the protective lens is partially deposited due to local deposition When the laser beam cannot pass through after reaching a certain thickness, by rotating the installation cylinder at a certain angle until the part of the protective lens that has not deposited the laser beam is rotated to the laser path, so that the focused laser beam spot can completely pass through, achieving long-term continuous coating without Operation needs to be stopped. The incident window protection device can greatly reduce the maintenance and replacement times of the incident window, and can meet the long-term preparation requirements of the thin film, and is especially suitable for the high-power, long-term preparation of thin films and the preparation of high-flux thin-film materials.

In a possible implementation manner, the protective lens and the baffle are parallel to each other and perpendicular to the axis.

In the above implementation process, it is ensured that the perforations on the protective lens and the baffle are on the path of the laser beam.

In a possible implementation, a first baffle and a second baffle are fixed at the other end inside the fixed cylinder, the first baffle has a first through hole, the second baffle has a second through hole, the protective lens, the second baffle A baffle plate and a second baffle plate are arranged at intervals in sequence, and the projection of the second through hole on the protective lens is located within the projection of the first through hole on the protective lens.

In the above implementation process, it is ensured that the focused laser beam spot can completely pass through the protective lens, the first perforation of the first baffle and the second perforation of the second baffle.

In a possible implementation manner, the edge of the baffle is fixed to the fixed cylinder through the fixed frame;

And/or, a bearing is provided between the mounting cylinder and the fixing cylinder.

In a possible implementation manner, at least one first magnet block is fixed on the outer wall of the installation cylinder, and a second magnet block corresponding to the first magnet block is disposed outside the fixing cylinder, and the second magnet block can be fixed relative to the fixed cylinder. The cylinder rotates around the axis, and the corresponding first magnet blocks and the second magnet blocks are in opposite positions and opposite in polarity.

In the above implementation process, by rotating the second magnet block outside the fixed cylinder, the interaction force is maintained between the first magnet block and the second magnet block, and its attractive or repulsive force is sufficient to drive the installation cylinder and the protective lens to rotate, so that by rotating the external The second magnet block can realize the rotation of the inner protective mirror at a certain angle, so that the laser beam can pass through completely.

In a possible implementation manner, the fixed sleeve is provided with a rotating ring, and the second magnet block is fixed on the rotating ring.

In the above implementation process, the setting of the rotating ring is convenient for setting the second magnet block and realizing the rotation of the magnet block.

In a possible implementation manner, the number of the first magnet blocks is at least three, and all the first magnet blocks are evenly distributed around the axis.

In a possible implementation manner, the material of the protective lens is quartz glass, and the thickness is 0.1-10 mm;

And/or, the materials of the first magnet block and the second magnet block are NdFeB magnets.

In the above implementation process, the protective lens satisfies the transmission of light in the ultraviolet-infrared band.

In a second aspect, an embodiment of the present application provides a pulsed laser deposition system, which includes a cavity with an incident window and the incident window protection device provided in the first aspect, wherein one end of the fixed cylinder with the mounting cylinder is mounted on the cavity corresponding to the incident window s position.

In the above implementation process, the incident window protection device is installed inside the cavity and the installation position is fixed, which has no effect on the vacuum inside the cavity. Achieve long-term thin film preparation.

In a possible implementation manner, it further includes a pulsed laser, and the laser emission port of the pulsed laser faces the incident window and is arranged in sequence with the incident window, the protective lens, and the baffle.

Description of drawings

In order to explain the technical solutions of the embodiments of the present application more clearly, the following briefly introduces the accompanying drawings that need to be used in the embodiments of the present application. It should be understood that the following drawings only show some embodiments of the present application, therefore It should not be regarded as a limitation of the scope. For those of ordinary skill in the art, other related drawings can also be obtained from these drawings without any creative effort.

1 is a schematic structural diagram of an incident window protection device provided by an embodiment of the application;

FIG. 2 is a schematic structural diagram of FIG. 1 from another perspective.

Icons: 1-Fixed cylinder; 2-Installation cylinder; 3-Bearing; 4-First magnet block; 5-Second baffle; 6-First baffle; 7-Protective lens; 8-Second end cap; 9 -Second fixing frame; 10-First fixing frame; 11-First end cap; 12-Protective lens end cap; 13-Second magnet block; 14-Rotating ring.

Detailed ways

The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings in the embodiments of the present application.

In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments It is a part of the embodiments of the present application, but not all of the embodiments. The components of the embodiments of the present application generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations.

Accordingly, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

In the description of this application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings , or the orientation or positional relationship that the product of the application is usually placed in use, it is only for the convenience of describing the application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first", "second", etc. are only used to differentiate the description and should not be construed to indicate or imply relative importance.

In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "arrangement", "installation" and "connection" should be understood in a broad sense, for example, it may be a fixed connection or a connectable connection. Detachable connection, or integral connection; may be mechanical connection or electrical connection; may be direct connection, or indirect connection through an intermediate medium, or internal communication between two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood in specific situations.

first embodiment

Please refer to FIGS. 1 and 2 , an incident window protection device provided in this embodiment includes a fixing cylinder 1 , and an installation cylinder 2 is coaxially provided at one end of the interior of the fixing cylinder 1 , and a protection cylinder 2 is fixed inside the installation cylinder 2 . Lens 7, a bearing 3 is arranged between the installation cylinder 2 and the fixed cylinder 1, the installation cylinder 2 can rotate around the axis relative to the fixed cylinder 1; the other end inside the fixed cylinder 1 is fixed with a first baffle 6 and a second baffle 5. The first baffle 6 has a first perforation, the second baffle 5 has a second perforation, the protective lens 7, the first baffle 6 and the second baffle 5 are spaced in sequence, parallel to the axis, and perpendicular to the axis. The projections of the first perforation and the second perforation on the protective lens 7 are coincident and off-axis.

In this embodiment, the fixing cylinder 1 and the installation cylinder 2 are both cylinders, and the protective lens 7 and the first baffle 6 and the second baffle 5 are all discs, which is convenient to realize that the fixing cylinder 1 is fixed and the installation cylinder 2 is wound around axis rotation. In other embodiments, it may not be limited to a circle, such as corresponding polymorphic cylinders and polygonal disks.

In this embodiment, the first through hole and the second through hole are both circular, and the diameter of the first through hole is larger than the diameter of the second through hole, and the projection of the second through hole on the protective lens 7 is located at the projection of the first through hole on the protective lens 7 In the projection, in order to adapt to the situation that the laser beam is a conical beam, the focused laser light speed can completely pass through the first perforation and the second perforation. It should be noted that the first baffle 6 and the second baffle 5 do not rotate with the installation cylinder 2, the position of the second baffle 5 can be moved relative to the first baffle 6, and the sizes of the first and second through holes can be adjusted . In other embodiments, only one baffle or three baffles may be provided.

In this embodiment, the material of the protective lens 7 is fused silica glass, which satisfies the transmission of light in the ultraviolet-infrared band, the transmittance of ultraviolet light is greater than 70%, and the thickness can be 0.1-10 mm, specifically 5 mm. The protective lens 7 is arranged on one end of the installation barrel 2 adjacent to the first baffle 6 and completely covers the port. The protective lens 7 is detachable relative to the baffle, and the protective lens end cap 12 realizes the connection between the installation barrel 2 and the protective lens 7 . Relatively fixed, the protective lens 7 can be replaced. The edge of the first baffle 6 is fixed to the fixing cylinder 1 through the first fixing frame 10 and the first end cover 11. The first fixing frame 10 is arranged between the edge of the first baffle 6 and the fixing cylinder 1, and then passes through the first fixing frame 10. The end cover 11 fixes them together; the edge of the second baffle 5 is fixed to the fixing cylinder 1 through the second fixing frame 9 and the second end cover 8, and the second fixing frame 9 is arranged on the edge of the second baffle 5 and fixed Between the cylinders 1, they are fixed together by the second end cover 8. The shapes of the first fixed frame 10, the first end cover 11, the second fixed frame 9, the second end cover 8 and the protective lens end cover 12 satisfy the The laser beam can pass through without blocking it.

In the present embodiment, four first magnet blocks 4 are fixed on the outer wall of the mounting cylinder 2, and all the first magnet blocks 4 are evenly distributed around the axis. The second magnet block 13 corresponding to the first magnet block 4 one-to-one, the rotating ring 14 can rotate around the axis relative to the fixed cylinder 1, so as to rotate around the axis with the second magnet block 13, the corresponding first magnet block 4 and The second magnet blocks 13 are located opposite to each other and have opposite polarities. For example, the first magnet blocks 4 and the second magnet blocks 13 are made of NdFeB magnets, and the corresponding N poles of the first magnet blocks 4 and the second magnet blocks 13 are maintained. The S poles are opposite to each other, and the interaction force is maintained, and its attractive or repulsive force is sufficient to drive the rotation of the fixed barrel 1 and the protective lens 7 . In other embodiments, the number of the first magnet block 4 and the second magnet block 13 may also be one piece, such as in a ring shape, or the number of the first magnet block 4 and the second magnet block 13 may also be 2, 3 block or 5 or more. In other embodiments, other manners may also be used to drive the installation cylinder 2 to rotate relative to the fixed cylinder 1 .

In addition, the embodiment of the present application also provides a pulsed laser deposition system, which includes a pulsed laser, a cavity with an incident window, and the above-mentioned incident window protection device, the incident window protection device is arranged inside the cavity, and the fixed cylinder 1 has One end of the installation barrel 2 is installed at the position of the cavity corresponding to the incident window. The laser emission port of the pulsed laser faces the incident window and is arranged in sequence with the incident window, the protective lens 7 , the first baffle 6 and the second baffle 5 .

In order to ensure that the incident window protection device works and has an impact on the vacuum of the pulsed laser deposition system, the incidence window protection device is divided into two parts relative to the vacuum cavity of the pulsed laser deposition system. The first part is placed inside the cavity, mainly including: A fixed cylinder 1 fixed in the cavity, a rotatable installation cylinder 2, a bearing 3 is arranged between the fixed cylinder 1 and the installation cylinder 2, a protective lens 7 is arranged inside the installation cylinder 2, and there are evenly distributed first magnet blocks outside the installation cylinder 2 4. A first baffle 6 and a second baffle 5 are installed behind the protective lens 7. The first baffle 6 and the second baffle 5 do not rotate with the protective lens 7; the second part is placed outside the cavity, mainly including the second The magnet block 13 and the rotating ring 14 for supporting the rotation of the second magnet block 13 are composed.

When the surface of the protective lens 7 is seriously polluted and the laser beam cannot pass through, the protective lens 7 needs to be rotated, and the second magnet block 13 is rotated by rotating the rotating ring 14 outside the cavity. The magnet block 4 also rotates with the mounting cylinder 2 and the protective lens 7, so that the uncontaminated area of the protective lens 7 is updated to the laser light path, and the laser beam completely passes through the incident window protective device to reach the target surface.

The operation mode of the pulsed laser deposition system of this embodiment is as follows:

When using PLD sputtering for the first time, first install the first part of the incident window protection device in the cavity of the pulsed laser deposition system. After the laser incident window, adjust the optical path to make the pulsed laser emit a laser beam, and after the reflection mirror and focusing lens , the focused laser beam passes through the incident window lens, the protective lens 7, the first perforation of the first baffle 6 in turn, and focuses on the surface of the target material, the laser beam passes through the path of the protective lens 7, not in the center of the protective lens 7, and should lens 7 edge;

Then fix the first part, install the second baffle 5, adjust the position of the second baffle 5, and install it close to the target without affecting the normal coating; turn on the pulse laser, and ablate the laser spot traces on the second baffle 5, the The size of the trace is the size of the opening window of the second baffle 5.

Next, install the second part of the incident window protection device outside the cavity, which mainly includes a second magnet block 13 and a rotating ring 14 . The rotating ring 14 has a dial that can display the rotation angle of the second magnet block 13 . Install and maintain the inner first magnet block 4 and the outer second magnet block 13 symmetrically and evenly distributed, and keep the N pole of the corresponding first magnet block 4 and the S pole of the second magnet block 13 opposite, and maintain the interaction force, its attractive force Or the repulsive force is sufficient to drive the rotation of the mounting barrel 2 and the protective lens 7 .

In order to verify the effect of the incident window protection device of the embodiment of the present application, a test experiment was carried out. The laboratory conducts experiments in the ultra-high vacuum PLD450 pulsed laser sputtering deposition system produced by Shenyang Scientific Instrument Co., Ltd. of the Chinese Academy of Sciences. The ultimate vacuum degree of the system is ≤6.67x10 ^-8 Pa, the focal length of the laser focusing lens is 50cm, and the distance of the incident window from the target is 50cm. 40cm. The pulsed laser is a COMPex 205F excimer laser produced by Coherent Corporation, with a wavelength of 248nm, an average power greater than 33W, a pulse energy of 100-750mJ, a spot size of 10*25mm, and the test target is Zr ₅₅ Cu ₃₀ Ni ₅ Al ₁₀ . The test coating steps are as follows:

First, turn on the pulsed laser to replace the premixed gas of the excimer laser, set the energy mode to 700 mJ and the frequency to 10 Hz.

Then clean the target Zr ₅₅ Cu ₃₀ Ni ₅ Al ₁₀ , install the target, turn off the PLD450 pulsed laser sputtering deposition system, turn on the mechanical pump, pump the cavity vacuum to less than 10Pa in advance, turn on the molecular pump until the vacuum is less than or equal to 1x10 ^-5 Pa, turn on the rotary switch of the sample stage and the target material, and set the rotation speed to 5rad/min respectively.

Finally, turn on the laser for coating test and record the test time. When the optical path is seriously polluted, it can be observed that the target has no laser ablation phenomenon. Then, turn off the pulsed laser and record the end time. The time difference is the maximum coating time under this parameter.

In Comparative Example 1, no protection measures were provided for the incident window during the above experiment, but in order to avoid damage to the incident window lens of the pulsed laser sputtering deposition system, a 1 mm thick JGS1 fused silica glass sheet of 248nm was placed behind the incident window lens. , the transmittance is greater than 90%, and other operations are the same as the above test coating steps.

Comparative Example 2 is to install a protective device similar to the first embodiment during the above experiment. The protective device lacks a protective lens, the second baffle is 20 cm from the target material, and the opening size is 5*12 mm. Other operations are the same as the above test coating steps.

Example 1 is to install the incident window protection device similar to the first embodiment during the above-mentioned experimental process. The incident window protection device is only provided with a second baffle, and no second baffle is provided. The protective lens is a 1 mm thick JGS1 melting Quartz glass sheet 248nm, light transmittance greater than 90%. When the local deposition of the protective lens reaches a certain thickness and the laser beam cannot pass through, for one-time protection, the second external magnet block is rotated to force the protective lens to rotate at a certain angle, so that the laser beam can pass through again until the entire protective lens is contaminated, and record the protective lens. times and time, other operations are the same as the above test coating steps.

Embodiment 2 is to install the incident window protection device of the first embodiment in the above-mentioned experimental process. The protective lens is a 1 mm thick JGS1 fused silica glass sheet of 248 nm, the light transmittance is greater than 90%, and the second baffle is 20 cm away from the target. The size of the second perforation is 5*12mm. When the local deposition of the protective lens reaches a certain thickness and the laser beam cannot pass through, for one-time protection, the second external magnet block is rotated to force the protective lens to rotate at a certain angle, so that the laser beam can pass through again until the entire protective lens is contaminated, and record the protective lens. times and time, other operations are the same as the above test coating steps.

Table 1 Test Experiment Record Form

As can be seen from Table 1, the incident window was completely polluted in a relatively short period of time under the condition of high energy of 700mJ, frequency of 20Hz, and direct coating without protective device in Comparative Example 1; Comparative Example 2 shows that , through the baffle filter, the pollution time can be slowed down, but the lens lens of the incident window can still be polluted; the protective effect of the incident window protection device can be seen in Example 1, and it can be rotated for multiple times; Example 2 passed the second baffle 5 Filtering the source of plasma pollution reduces the exposure area of the protective lens 7, further illustrating the protective advantages of the incident window protective device, reducing the number of maintenance and replacement of the incident window, and has no effect on the vacuum. Preparation of high-throughput thin film materials.

In addition, it was found through experiments that when the experiment was performed at low energy and low frequency, the protection time was further extended.

To sum up, the incident window protection device and the pulsed laser deposition system of the embodiments of the present application can greatly reduce the number of times of maintenance and replacement of the incident window, have no impact on the vacuum of the pulsed laser deposition system, and can meet the requirement of long-term preparation of thin films.

The above descriptions are merely examples of the present application, and are not intended to limit the protection scope of the present application. For those skilled in the art, various modifications and changes may be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims (10)

1. An incident window protection device is characterized by comprising a fixed cylinder, wherein one end inside the fixed cylinder is coaxially provided with an installation cylinder, a protection lens is fixedly arranged inside the installation cylinder, and the installation cylinder can rotate around an axis relative to the fixed cylinder; the other end of the interior of the fixed cylinder is fixedly provided with at least one baffle, the baffle is provided with a through hole, and the projections of the through holes on the baffle on the protective lens are overlapped and deviated from the axis.

2. The entrance window guard as recited in claim 1, wherein said guard lens and said baffle are parallel to each other and perpendicular to said axis.

3. The entrance window protector as recited in claim 2, wherein a first baffle plate and a second baffle plate are fixedly disposed at the other end inside the fixed cylinder, the first baffle plate has a first through hole, the second baffle plate has a second through hole, the protective lens, the first baffle plate and the second baffle plate are sequentially spaced apart, and a projection of the second through hole on the protective lens is located within a projection of the first through hole on the protective lens.

4. The entrance window guard as claimed in claim 1, wherein the edge of the baffle is fixed to the fixed cylinder by a fixed frame;

and/or a bearing is arranged between the mounting cylinder and the fixed cylinder.

5. An entrance window protector as defined in claim 1, wherein at least one first magnet is mounted to an outer wall of said mounting cylinder, and a second magnet is mounted to an outer wall of said mounting cylinder in one-to-one correspondence with said first magnet, said second magnet being rotatable relative to said mounting cylinder about said axis, said first and second magnets being opposite in position and polarity to each other.

6. An entrance window protector as claimed in claim 5, wherein the stationary cylinder is sheathed with a rotating ring, the second magnet block being fixed to the rotating ring.

7. The entrance window guard as recited in claim 5, wherein the number of said first magnet pieces is at least 3, and all of said first magnet pieces are evenly distributed around said axis.

8. The entrance window protector as recited in claim 5, wherein said protective lens is made of quartz glass and has a thickness of 0.1-10 mm;

and/or, the first magnet block and the second magnet block are made of neodymium iron boron magnets.

9. A pulsed laser deposition system comprising a chamber having an entrance window and the entrance window guard of claim 1, wherein said stationary barrel has one end of said mounting barrel mounted to said chamber at a position corresponding to said entrance window.

10. The pulsed laser deposition system of claim 9, further comprising a pulsed laser having a laser emission port facing the entrance window and arranged in sequence with the entrance window, the shield lens, and the baffle.

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