CN217418799U - Entrance window protection device and pulsed laser deposition system - Google Patents
Entrance window protection device and pulsed laser deposition system Download PDFInfo
- Publication number
- CN217418799U CN217418799U CN202221112474.1U CN202221112474U CN217418799U CN 217418799 U CN217418799 U CN 217418799U CN 202221112474 U CN202221112474 U CN 202221112474U CN 217418799 U CN217418799 U CN 217418799U
- Authority
- CN
- China
- Prior art keywords
- entrance window
- baffle
- cylinder
- lens
- fixed cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004549 pulsed laser deposition Methods 0.000 title claims abstract description 12
- 230000001681 protective effect Effects 0.000 claims abstract description 67
- 238000009434 installation Methods 0.000 claims abstract description 24
- 230000001012 protector Effects 0.000 claims description 11
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract description 22
- 230000008021 deposition Effects 0.000 abstract description 22
- 239000010408 film Substances 0.000 abstract description 18
- 238000002360 preparation method Methods 0.000 abstract description 8
- 238000012423 maintenance Methods 0.000 abstract description 5
- 238000000427 thin-film deposition Methods 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 238000002474 experimental method Methods 0.000 description 9
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 7
- 235000017491 Bambusa tulda Nutrition 0.000 description 7
- 241001330002 Bambuseae Species 0.000 description 7
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 7
- 239000011425 bamboo Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 239000013077 target material Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000005350 fused silica glass Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
The embodiment of the application provides an entrance window protection device and a pulsed laser deposition system, and relates to the technical field of thin film deposition. The incident window protection device comprises a fixed cylinder, one end inside the fixed cylinder is coaxially provided with an installation cylinder, a protection lens is fixedly arranged inside the installation cylinder, and the installation cylinder can rotate around an axis relative to the fixed cylinder; the other end in the fixed cylinder is fixedly provided with at least one baffle which is provided with a through hole, and the projections of the through holes on all the baffles on the protective lens are overlapped and deviated from the axis. The incidence window protection device and the pulse laser deposition system can greatly reduce the maintenance and replacement times of the incidence window, have no influence on the vacuum of the pulse laser deposition system, and can meet the long-time preparation requirement of the film.
Description
Technical Field
The application relates to the technical field of thin film deposition, in particular to an entrance window protection device and a pulse laser deposition system.
Background
The pulsed laser deposition system bombards the surface of the target by using a focused laser beam, the high-power-density pulsed laser ablates the target and sputters plasma, the plasma absorbs laser energy near the surface of the target to sputters gasified substances, and then the substances are deposited on the substrate, so that a film corresponding to the target is formed on the surface of the substrate. The pulse laser deposition system can deposit the film with more complex components, the components of the deposited film are kept unchanged, and the pulse laser deposition system is suitable for preparing various films.
The pulse laser deposition system is mainly structurally different from other coating equipment in that a pulse laser is required to be arranged outside the pulse laser deposition system, laser beams emitted by the pulse laser are converged through a reflecting lens and a focusing lens and then pass through an incidence window of the pulse laser deposition system to ablate a target material, and laser needs to pass through the light speed, so that a laser path in the pulse laser deposition system cannot be blocked. In the current pulsed laser deposition system, the entrance window lens has no protective measures, and although the plasma plume generated by ablation in the pulsed laser deposition system is mainly deposited near the sample stage, part of the plasma plume is still deposited inside the system cavity, including the entrance window lens surface. As the incident window lens is polluted by the coating film, the laser light transmittance is reduced, and the growth quality of the film is directly influenced. Once the incident window lens is seriously polluted by the coated film, the incident window needs to be disassembled and the incident window lens needs to be cleaned; if the cleaning is not timely, the film on the surface of the lens of the incidence window can absorb laser energy to thoroughly damage the lens, so that the pulse laser deposition system is repeatedly maintained and replaced, the cost is increased, the vacuum degree is reduced, and the use of equipment is limited.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of the application is to provide an entrance window protector and pulse laser deposition system, can greatly reduce entrance window maintenance change number of times, do not have the influence to pulse laser deposition system vacuum, can realize the long-time preparation demand of film.
In a first aspect, an embodiment of the present application provides an entrance window protection device, which includes a fixed cylinder, a mounting cylinder is coaxially disposed at one end inside the fixed cylinder, a protection lens is fixedly disposed inside the mounting cylinder, and the mounting cylinder can rotate around an axis relative to the fixed cylinder; the other end of the inner part of the fixed cylinder is fixedly provided with at least one baffle which is provided with a through hole, and the projections of the through holes on all the baffles on the protective lens are overlapped and deviated from the axis.
In the implementation process, the incident window protection device is arranged in the cavity of the pulse laser deposition system, the laser beam emits laser beam, the laser beam passes through the reflector and the focusing lens, the focused laser beam sequentially passes through the incident window lens, the protection lens and the baffle, and is focused on the surface of the target to generate plasma plume. Due to the protection effect of the baffle, only a small amount of plasma reaches the protective lens through the perforations of the baffle and is deposited on the local part of the protective lens, so that the pollution to the incident window lens during film coating is avoided.
The installation section of thick bamboo of this application embodiment can be for fixed section of thick bamboo rotation, and the baffle can not rotate thereupon, the path that the laser beam of focus passes through protective lens is not at the protective lens center, at the coating film in-process that lasts, when protective lens reaches certain thickness because of local deposit and leads to the laser beam to be unable to pass through, through making installation section of thick bamboo rotation certain angle to protective lens still not deposit the local rotation of laser beam to the laser path on, make focus laser beam facula can pass through completely, realize long-time continuous coating film, and need not stop the operation. The entrance window protection device can greatly reduce the maintenance and replacement times of the entrance window, can meet the long-time preparation requirement of the film, and is particularly suitable for high-power and long-time preparation of the film and preparation of high-flux film materials.
In one possible implementation, the shield lens and the baffle are parallel to each other and perpendicular to the axis.
In the implementation process, the protective lens and the perforation on the baffle are ensured to be in the laser beam path.
In a possible implementation manner, the other end inside the fixed cylinder is fixedly provided with a first baffle and a second baffle, the first baffle is provided with a first through hole, the second baffle is provided with a second through hole, the protective lens, the first baffle and the second baffle are sequentially arranged at intervals, and the projection of the second through hole on the protective lens is positioned in the projection of the first through hole on the protective lens.
In the above implementation, it is ensured that the focused laser beam spot can completely pass through the protective lens, the first perforation of the first baffle, and the second perforation of the second baffle.
In a possible implementation manner, the edge of the baffle is fixed to the fixed cylinder through a fixed frame;
and/or a bearing is arranged between the mounting cylinder and the fixed cylinder.
In a possible implementation mode, the outer wall of the installation cylinder is fixedly provided with at least one first magnet block, the fixed cylinder is externally provided with second magnet blocks in one-to-one correspondence with the first magnet blocks, the second magnet blocks can rotate around the axis relative to the fixed cylinder, and the positions of the corresponding first magnet blocks and the second magnet blocks are opposite and the polarities of the first magnet blocks and the second magnet blocks are opposite.
In the implementation process, the second magnet block outside the fixed cylinder is rotated, the first magnet block and the second magnet block keep interaction force, and the attraction force or the repulsion force of the interaction force is enough to drive the mounting cylinder and the protective lens to rotate, so that the internal protective lens can be rotated by a certain angle by rotating the external second magnet block, and the laser beam can completely pass through the protective lens.
In a possible implementation manner, the fixed cylinder is sleeved with a rotating ring, and the second magnet block is fixed on the rotating ring.
In the implementation process, the rotation of the second magnet block and the magnet block is convenient to arrange by the aid of the rotating ring.
In one possible implementation, the number of the first magnet blocks is at least 3, and all the first magnet blocks are uniformly distributed around the axis.
In a possible implementation mode, the protective lens is made of quartz glass and has the thickness of 0.1-10 mm;
and/or the first magnet block and the second magnet block are made of neodymium iron boron magnets.
In the implementation process, the protective lens meets the requirement of ultraviolet-infrared band light transmission.
In a second aspect, an embodiment of the present application provides a pulsed laser deposition system, which includes a cavity having an entrance window and the entrance window protection device provided in the first aspect, wherein one end of the fixed cylinder having the installation cylinder is installed at a position corresponding to the entrance window in the cavity.
In the implementation process, the incident window protection device is installed in the cavity and is fixed at the installation position, the vacuum inside the cavity is not affected, the incident window protection device has the function of protecting the incident window, the number of times of maintenance and replacement of the incident window can be reduced, and long-time film preparation can be realized.
In a possible implementation manner, the device further comprises a pulse laser, wherein a laser emission port of the pulse laser faces the entrance window and is sequentially arranged with the entrance window, the protective lens and the baffle.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of an entrance window protector according to an embodiment of the present disclosure;
fig. 2 is a schematic structural view of fig. 1 from another view angle.
Icon: 1-a fixed cylinder; 2, mounting a cylinder; 3-a bearing; 4-a first magnet block; 5-a second baffle; 6-a first baffle; 7-a protective lens; 8-a second end cap; 9-a second fixed frame; 10-a first fixed frame; 11-a first end cap; 12-a protective lens end cap; 13-a second magnet block; 14-rotating ring.
Detailed Description
The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, as presented in the figures, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.
In the description of the present application, it is to be noted that the terms "center", "upper", "lower", "inner", "outer", and the like refer to the orientation or positional relationship shown in the drawings, or the orientation or positional relationship which the product of the application is conventionally placed in use, which are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is further noted that, unless expressly stated or limited otherwise, the terms "disposed," "mounted," and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
First embodiment
Referring to fig. 1 and 2, the incident window protection device provided in this embodiment includes a fixed cylinder 1, an installation cylinder 2 is coaxially disposed at one end inside the fixed cylinder 1, a protection lens 7 is fixedly disposed inside the installation cylinder 2, a bearing 3 is disposed between the installation cylinder 2 and the fixed cylinder 1, and the installation cylinder 2 can rotate around an axis relative to the fixed cylinder 1; the other end of the interior of the fixed cylinder 1 is fixedly provided with a first baffle 6 and a second baffle 5, the first baffle 6 is provided with a first through hole, the second baffle 5 is provided with a second through hole, the protective lens 7, the first baffle 6 and the second baffle 5 are sequentially arranged at intervals and in parallel, the first through hole and the second through hole are overlapped and deviated from the axis in projection on the protective lens 7.
In this embodiment, the fixed cylinder 1 and the installation cylinder 2 are both cylinders, and the protective lens 7, the first baffle 6 and the second baffle 5 are both discs, so that the fixed cylinder 1 is fixed and immovable, and the installation cylinder 2 rotates around an axis. In other embodiments, the shape may also be not limited to circular, such as corresponding multi-morphed cylinders and polygonal discs.
In this embodiment, the first through hole and the second through hole are both circular, the diameter of the first through hole is larger than that of the second through hole, and the projection of the second through hole on the protective lens 7 is located in the projection of the first through hole on the protective lens 7, so as to adapt to the situation that the laser beam is a cone beam, and enable the focused laser beam to completely pass through the first through hole and the second through hole. It should be noted that the first baffle 6 and the second baffle 5 do not rotate with the installation cylinder 2, the position of the second baffle 5 can move relative to the first baffle 6, and the sizes of the first through hole and the second through hole can be adjusted. In other embodiments, only one baffle, or three baffles, may be provided.
In this embodiment, the protective lens 7 is made of fused silica glass, so as to satisfy the ultraviolet-infrared band light transmission, the ultraviolet transmittance is greater than 70%, and the thickness may be 0.1 to 10 mm, specifically 5 mm. The protective lens 7 is arranged at one end of the mounting cylinder 2, which is close to the first baffle 6, and completely covers the port, the protective lens 7 is detachable relative to the baffles, relative fixation of the mounting cylinder 2 and the protective lens 7 is realized through the protective lens end cover 12, and the protective lens 7 can be replaced. The edge of the first baffle 6 is fixed on the fixed cylinder 1 through a first fixed frame 10 and a first end cover 11, the first fixed frame 10 is arranged between the edge of the first baffle 6 and the fixed cylinder 1, and then the first baffle 6 and the fixed cylinder are fixed together through the first end cover 11; the border of second baffle 5 is fixed in fixed section of thick bamboo 1 through the fixed frame 9 of second and second end cover 8, and the fixed frame 9 of second sets up between the border of second baffle 5 and fixed section of thick bamboo 1, and rethread second end cover 8 is together fixed, and the shape of the fixed frame 10 of first end cover 11, the fixed frame 9 of second, second end cover 8 and protection lens end cover 12 satisfies and does not shelter from laser beam and pass through can.
In this embodiment, 4 first magnet blocks 4 are fixedly arranged on the outer wall of the mounting cylinder 2, all the first magnet blocks 4 are uniformly distributed around the axis, the rotating ring 14 is sleeved outside the fixing cylinder 1, the second magnet blocks 13 corresponding to the first magnet blocks 4 are fixedly arranged on the rotating ring 14, the rotating ring 14 can rotate around the axis relative to the fixing cylinder 1, so as to drive the second magnet blocks 13 to rotate around the axis, the corresponding first magnet blocks 4 and the corresponding second magnet blocks 13 are opposite in position and opposite in polarity, for example, the first magnet blocks 4 and the second magnet blocks 13 are made of neodymium iron boron magnets, the N poles of the corresponding first magnet blocks 4 are kept opposite to the S poles of the second magnet blocks 13, and the mutual acting force is kept, and the attractive force or the repulsive force is enough to drive the fixing cylinder 1 and the protective lens 7 to rotate. In other embodiments, the number of the first and second magnet blocks 4, 13 may also be one, such as in a ring shape, or the number of the first and second magnet blocks 4, 13 may also be 2, 3, or 5 or more. In other embodiments, the mounting cylinder 2 can be driven to rotate relative to the fixed cylinder 1 in other manners.
In addition, this application embodiment still provides a pulsed laser deposition system, and it includes pulsed laser, the cavity that has the entrance window and foretell entrance window protector, and entrance window protector sets up inside the cavity, and the one end that fixed section of thick bamboo 1 had installation section of thick bamboo 2 is installed in the position that the cavity corresponds the entrance window, and pulsed laser's laser emission mouth is facing to the entrance window, and sets up in order with entrance window, protective lens 7, first baffle 6, second baffle 5.
In order to ensure that the entrance window protective device plays a role and has no influence on the vacuum of the pulse laser deposition system, the entrance window protective device is divided into two parts relative to a vacuum cavity of the pulse laser deposition system, the first part is placed in the cavity and mainly comprises a fixed cylinder 1 fixed in the cavity and a rotatable installation cylinder 2, a bearing 3 is arranged between the fixed cylinder 1 and the installation cylinder 2, a protective lens 7 is arranged in the installation cylinder 2, first magnet blocks 4 which are uniformly distributed are arranged outside the installation cylinder 2, a first baffle 6 and a second baffle 5 are arranged behind the protective lens 7, and the first baffle 6 and the second baffle 5 do not rotate along with the protective lens 7; the second part is arranged outside the cavity and mainly comprises a second magnet block 13 and a rotating ring 14 for supporting the second magnet block 13 to rotate.
When the surface of the protective lens 7 is seriously polluted and laser beams cannot pass through the protective lens, the protective lens 7 needs to be rotated, the second magnet block 13 is rotated along with the second magnet block through the rotating ring 14 outside the rotating cavity, the first magnet block 4 drives the mounting cylinder 2 and the protective lens 7 to rotate under the action of magnetic force, so that the area of the protective lens 7 which is not polluted is updated to the laser path, and the laser beams completely pass through the incident window protective device and reach the surface of the target material.
The pulsed laser deposition system of the present embodiment operates as follows:
when the PLD is used for the first time for sputtering, the first part of the incident window protection device is firstly installed in a cavity of a pulse laser deposition system, a laser beam is emitted by a pulse laser through adjusting a light path after the laser incident window, the focused laser beam passes through a reflector and a focusing lens, sequentially passes through the incident window lens, the protection lens 7 and the first through hole of the first baffle 6 and is focused on the surface of a target material, and the path of the laser beam passing through the protection lens 7 is not in the center of the protection lens 7 and is supposed to be at the edge of the protection lens 7;
then fixing the first part, installing a second baffle 5, adjusting the position of the second baffle 5, and installing the second baffle close to the target material under the condition of not influencing normal coating; the pulsed laser is turned on and laser spot marks are ablated in the second baffle 5, the size of the marks being even the size of the open window of the second baffle 5.
And then, installing a second part of the incident window protection device, which is positioned outside the cavity, mainly comprising a second magnet block 13 and a rotating ring 14, wherein the rotating ring 14 is provided with a dial scale which can display the rotating angle of the second magnet block 13. The inner first magnet block 4 and the outer second magnet block 13 are installed and held symmetrically and uniformly, and the N pole of the corresponding first magnet block 4 is held opposite to the S pole of the second magnet block 13, and the interaction force is held, the attraction force or the repulsion force of which is sufficient to drive the rotation of the installation cylinder 2 and the protection lens 7.
In order to verify the effect of the entrance window protector of the embodiment of the application, a test experiment is performed. The laboratory carries out the experiment in the ultra-high vacuum PLD450 pulse laser sputtering deposition system produced by Shenyang scientific instruments GmbH of Chinese academy of sciences, the ultimate vacuum degree of the system is less than or equal to 6.67x10 -8 Pa, configuring the focal length of the laser focusing lens to be 50cm, and enabling the entrance window to be 40cm away from the target. The pulse laser is a COMPex 205F excimer laser produced by American coherent company, the wavelength is 248nm, the average power is more than 33W, the pulse energy is 100-750mJ, the spot size is 10 × 25mm, and the test target is Zr 55 Cu 30 Ni 5 Al 10 . The coating testing steps are as follows:
firstly, a pulse laser is started to replace the excimer laser premix gas, the energy mode is set to 700mJ, and the frequency is set to 10 Hz.
Then cleaning the target Zr 55 Cu 30 Ni 5 Al 10 Installing a target material, closing the PLD450 pulse laser sputtering deposition system, starting a mechanical pump, pumping the vacuum degree of a cavity to be less than 10Pa in advance, and starting a molecular pump until the vacuum degree is less than or equal to 1x10 -5 And Pa, opening the sample stage and the target rotary switch, and setting the rotating speed to be 5rad/min respectively.
And finally, starting a laser to carry out coating test and recording test time, observing that the target has no laser ablation phenomenon after the light path is seriously polluted, then closing the pulse laser, and recording the finish time, wherein the time difference is the maximum coating time under the parameter.
Comparative example 1 is the experiment process without any entrance window protection, but to avoid the damage of the entrance window lens of the pulsed laser sputter deposition system, a 1 mm thick piece of JGS1 fused silica glass 248nm was placed behind the entrance window lens, the transmittance was greater than 90%, and the other operations were the same as the test coating process.
Comparative example 2 a similar guard to that of the first example was installed during the above experiment, the guard was devoid of a guard lens, the second shutter was 20cm from the target, and the opening size was 5 x 12mm, otherwise the procedure was the same as the test coating procedure described above.
Example 1 a similar entrance window protector as the first example was installed during the above experiment with only the second baffle plate, without the second baffle plate, and with a protective lens of 248nm, a 1 mm thick piece of JGS1 fused silica glass, with a light transmittance of more than 90%. When the local deposition of the protective lens reaches a certain thickness and the laser beam cannot pass through the protective lens, the protective lens is forced to rotate by a certain angle through rotating the external second magnet block, so that the laser beam passes through the protective lens again until the whole protective lens is polluted, the protection times and time are recorded, and other operations are the same as the testing and coating steps.
Example 2 the entrance window shield apparatus of the first example was installed during the above experiment with a protective lens of 248nm thickness of a 1 mm JGS1 fused silica glass plate, a light transmission of more than 90%, a second baffle plate 20cm from the target, and a second aperture size of 5 x 12 mm. When the local deposition of the protective lens reaches a certain thickness and the laser beam cannot pass through the protective lens, the protective lens is forced to rotate by a certain angle through rotating the external second magnet block, so that the laser beam passes through the protective lens again until the whole protective lens is polluted, the protection times and time are recorded, and other operations are the same as the testing and coating steps.
Table 1 test experiment recording table
As can be seen from Table 1, in comparative example 1, the film is directly coated under the condition of no protective device under the high energy of 700mJ and the frequency of 20Hz, and the entrance window is completely polluted in a short time; comparative example 2 shows that the contamination time can be slowed down by the baffle filtration, but the entrance window lens still can be contaminated; the embodiment 1 can show the protection effect of the entrance window protection device, and can be rotated for multiple times; in embodiment 2, the second baffle 5 is used for filtering the plasma pollution source to reduce the exposure area of the protective lens 7, further illustrate the protective advantages of the incident window protective device, reduce the maintenance and replacement times of the incident window, have no influence on vacuum, can meet the preparation requirements of high-power long-time thin films and multilayer thin films, and is suitable for preparing high-flux thin film materials.
In addition, experiments show that the protection time is further prolonged when the experiment is carried out at low energy and low frequency.
To sum up, the incident window protector and the pulse laser deposition system of this application embodiment can greatly reduce the incident window and maintain and change the number of times, do not have the influence to pulse laser deposition system vacuum, can realize the long-time preparation demand of film.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. An incident window protection device is characterized by comprising a fixed cylinder, wherein one end inside the fixed cylinder is coaxially provided with an installation cylinder, a protection lens is fixedly arranged inside the installation cylinder, and the installation cylinder can rotate around an axis relative to the fixed cylinder; the other end of the interior of the fixed cylinder is fixedly provided with at least one baffle, the baffle is provided with a through hole, and the projections of the through holes on the baffle on the protective lens are overlapped and deviated from the axis.
2. The entrance window guard as recited in claim 1, wherein said guard lens and said baffle are parallel to each other and perpendicular to said axis.
3. The entrance window protector as recited in claim 2, wherein a first baffle plate and a second baffle plate are fixedly disposed at the other end inside the fixed cylinder, the first baffle plate has a first through hole, the second baffle plate has a second through hole, the protective lens, the first baffle plate and the second baffle plate are sequentially spaced apart, and a projection of the second through hole on the protective lens is located within a projection of the first through hole on the protective lens.
4. The entrance window guard as claimed in claim 1, wherein the edge of the baffle is fixed to the fixed cylinder by a fixed frame;
and/or a bearing is arranged between the mounting cylinder and the fixed cylinder.
5. An entrance window protector as defined in claim 1, wherein at least one first magnet is mounted to an outer wall of said mounting cylinder, and a second magnet is mounted to an outer wall of said mounting cylinder in one-to-one correspondence with said first magnet, said second magnet being rotatable relative to said mounting cylinder about said axis, said first and second magnets being opposite in position and polarity to each other.
6. An entrance window protector as claimed in claim 5, wherein the stationary cylinder is sheathed with a rotating ring, the second magnet block being fixed to the rotating ring.
7. The entrance window guard as recited in claim 5, wherein the number of said first magnet pieces is at least 3, and all of said first magnet pieces are evenly distributed around said axis.
8. The entrance window protector as recited in claim 5, wherein said protective lens is made of quartz glass and has a thickness of 0.1-10 mm;
and/or, the first magnet block and the second magnet block are made of neodymium iron boron magnets.
9. A pulsed laser deposition system comprising a chamber having an entrance window and the entrance window guard of claim 1, wherein said stationary barrel has one end of said mounting barrel mounted to said chamber at a position corresponding to said entrance window.
10. The pulsed laser deposition system of claim 9, further comprising a pulsed laser having a laser emission port facing the entrance window and arranged in sequence with the entrance window, the shield lens, and the baffle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221112474.1U CN217418799U (en) | 2022-05-09 | 2022-05-09 | Entrance window protection device and pulsed laser deposition system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221112474.1U CN217418799U (en) | 2022-05-09 | 2022-05-09 | Entrance window protection device and pulsed laser deposition system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217418799U true CN217418799U (en) | 2022-09-13 |
Family
ID=83186305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221112474.1U Active CN217418799U (en) | 2022-05-09 | 2022-05-09 | Entrance window protection device and pulsed laser deposition system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217418799U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116994777A (en) * | 2023-09-27 | 2023-11-03 | 陕西星环聚能科技有限公司 | Glass window protection device, glass window and fusion device |
-
2022
- 2022-05-09 CN CN202221112474.1U patent/CN217418799U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116994777A (en) * | 2023-09-27 | 2023-11-03 | 陕西星环聚能科技有限公司 | Glass window protection device, glass window and fusion device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102578666B1 (en) | Deposition system with shield mount | |
| CN217418799U (en) | Entrance window protection device and pulsed laser deposition system | |
| JP2000073168A (en) | Multilayer pvd film forming apparatus for substrate and method therefor | |
| JP2004524435A (en) | Material processing system using differential pump operation | |
| KR20170097187A (en) | Lighthouse scanner with a rotating mirror and a circular ring target | |
| JP4755475B2 (en) | Sputtering equipment | |
| US6736949B2 (en) | Filtered cathode arc source deposition apparatus | |
| TW200424336A (en) | Sputtering device | |
| KR20180058865A (en) | Film forming device | |
| JP2011001597A (en) | Sputtering system and sputtering method | |
| IE33433B1 (en) | Apparatus for coating by thermal evaporation | |
| US20210164092A1 (en) | Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate guiding | |
| US6338778B1 (en) | Vacuum coating system with a coating chamber and at least one source chamber | |
| EP2638182A1 (en) | Apparatus and method for surface processing | |
| JP2005213587A (en) | Magnetron sputtering apparatus | |
| KR20180097163A (en) | Box coating apparatus for vacuum coating of substrates, in particular spectacle lenses | |
| US5482604A (en) | Off-axis radio frequency diode apparatus for sputter deposition of RLG mirrors | |
| JP2021516286A (en) | Equipment for coating multiple substrates | |
| EP2182087A1 (en) | A vacuum vapor coating device for coating a substrate | |
| CN207904357U (en) | A kind of vacuum magnetron sputtering coating film device preparing gradual change neutral-density filter | |
| KR102578667B1 (en) | Deposition system with multi-cathode | |
| JP2004533538A (en) | Double scan thin film processing system | |
| CN110093589A (en) | A kind of vacuum magnetron sputtering coating film device preparing gradual change neutral-density filter | |
| JP2017222919A (en) | Film deposition apparatus | |
| US9099278B2 (en) | Protective enclosure for an ion gun, device for depositing materials through vacuum evaporation comprising such a protective enclosure and method for depositing materials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhen Tiecheng Inventor before: Ke Haibo Inventor before: Yan Yuqiang Inventor before: Zhen Tiecheng Inventor before: Zhao Yong Inventor before: Sun Baoan Inventor before: Zhang Bo Inventor before: Huang Xiao Inventor before: Wang Weihua |
|
| CB03 | Change of inventor or designer information |