CN217377165U

CN217377165U - Tray transferring, loading and unloading device and semiconductor processing equipment

Info

Publication number: CN217377165U
Application number: CN202221228152.3U
Authority: CN
Inventors: 温任华
Original assignee: Meijie Photoelectric Technology Shanghai Co ltd
Current assignee: Meijie Photoelectric Technology Shanghai Co ltd
Priority date: 2022-05-22
Filing date: 2022-05-22
Publication date: 2022-09-06
Anticipated expiration: 2032-05-22

Abstract

The utility model provides a tray transfer handling device and semiconductor processing equipment, the device includes: a mounting substrate defining a first direction and a second direction according to an extending direction of the mounting substrate, the first direction being perpendicular to the second direction; the first direction driving part comprises a first direction movable platform, a first transmission assembly, a second transmission assembly and a first power assembly, the first direction movable platform and the first transmission assembly are arranged on one surface of the mounting substrate, and the first power assembly is arranged on the other surface of the mounting substrate; the first power assembly, the second transmission assembly, the first transmission assembly and the first direction movable platform are sequentially connected, so that the first power assembly is suitable for driving the first direction movable platform to move along the first direction; the second direction driving part is arranged on the first direction movable platform; the second direction driving part includes a robot arm coupled to the tray, the robot arm being configured to move in the second direction.

Description

Tray transferring, loading and unloading device and semiconductor processing equipment

Technical Field

The utility model relates to a semiconductor equipment field, concretely relates to tray transport handling device and semiconductor processing equipment.

Background

In a semiconductor manufacturing process, after a tray magazine conveyed from a front end reaches a predetermined position, a downstream device sometimes only needs to use a tray in the tray magazine alone without performing a transfer operation on the tray magazine. At this time, when the downstream device performs the process, the tray needs to be taken out from the tray box first, and then the tray needs to be conveyed to the next transfer position or processing position of the downstream device, and after the process processing on the downstream device is completed, the tray needs to be returned and conveyed into the tray box. In the above process, the loading and unloading operation and the transferring operation of the tray in the tray box are required to be realized through corresponding devices.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides a handling device is transported to tray, it includes:

a mounting substrate defining a first direction and a second direction according to an extending direction of the mounting substrate, the first direction being perpendicular to the second direction;

the first direction driving component comprises a first direction movable platform, a first transmission assembly, a second transmission assembly and a first power assembly, wherein the first direction movable platform and the first transmission assembly are arranged on one surface of the mounting substrate, and the first power assembly is arranged on the other surface of the mounting substrate; the first power assembly, the second transmission assembly, the first transmission assembly and the first direction movable platform are sequentially connected, so that the first power assembly is suitable for driving the first direction movable platform to move along the first direction;

the second direction driving part is arranged on the first direction movable platform; the second direction driving part comprises a manipulator matched with the tray, and the manipulator is suitable for moving along the second direction.

Furthermore, a through hole is formed in the mounting substrate, and the second transmission assembly penetrates through the through hole and is connected with the first power assembly and the first transmission assembly respectively.

Furthermore, the first transmission assembly comprises a screw rod, a nut, a linear guide rail and a guide rail sliding block, the screw rod and the linear guide rail are arranged along the first direction, and the first direction movable platform is connected with the nut and the guide rail sliding block, so that the first direction movable platform is driven to move along the first direction in a transmission mode that the screw rod is matched with the nut.

Furthermore, a limiting assembly is further arranged on the mounting substrate to limit the limit position of the first-direction movable platform moving along the first direction.

Furthermore, the second direction driving part comprises an electric cylinder module, and the manipulator is driven to move along the second direction through the electric cylinder module.

Further, the second direction driving component further comprises a second power assembly, and the second power assembly is connected with the electric cylinder module.

Further, the first power assembly and the second power assembly adopt servo motors.

Further, still be provided with photoelectric sensor on the mounting substrate, be provided with on the first direction movable platform with photoelectric sensor matched with sensor tablet, thereby work as first direction movable platform can trigger sensing signal when removing to the inductive position.

Further, the pallet transfer handling device further comprises a mounting frame, thereby being adapted for modular assembly of the pallet transfer handling device.

The utility model also provides a semiconductor processing equipment, it includes foretell tray transportation handling device.

The utility model discloses a handling device is transported to tray can assist and realize that the tray transports the automation mechanized operation of unloading the box dress box, avoids personnel's manual operation in the narrow and small space to intervene, avoid personnel's manual operation error, improve production efficiency and produce the line productivity. Meanwhile, the tray transferring, loading and unloading device is compact in overall design and suitable for modular assembly, so that equipment maintenance is easy to perform, and the equipment maintenance time is shortened.

The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings, so as to fully understand the objects, the features and the effects of the present invention.

Drawings

Fig. 1 is a schematic structural view of a pallet transfer handling device according to an embodiment of the present invention;

FIG. 2 is another schematic structural view of the pallet transfer handler of FIG. 1, wherein the pick and place mechanism is not shown;

FIG. 3 is a schematic structural view from another perspective of the pallet transfer handler of FIG. 1 showing the back side of the mounting substrate;

FIG. 4 is a schematic view of the pallet transfer handler of FIG. 1 from another perspective;

FIG. 5 is a schematic view of the pick and place mechanism of the pallet transferring and handling device of FIG. 1;

fig. 6 is a schematic structural view of a pallet transfer handling device and a pallet magazine and pallet according to an embodiment of the present invention.

Description of reference numerals:

101-a mounting substrate, 102-a ball screw,

103-a screw nut, 104-a screw rod fixing seat,

105-a screw rod supporting seat, 106-a passive synchronous belt wheel,

107-synchronous belt, 108-driving synchronous pulley,

109-servo motor, 110-motor mounting bracket,

111-drag chain, 112, 113-drag chain mounting plate,

114-a photoelectric sensor, 115-a sensor mounting plate,

116-sensor sensing plate, 117-sensor mounting profile,

118-a lifting platform, 119-a limiting block mounting plate,

120, a limiting block, 121, a linear guide rail,

122-a guide rail slide block, 123-a through hole,

200-a pick and place mechanism, 201-an electric cylinder module,

202-servo motor, 203-drag chain,

204-a drag chain mounting plate, 205-a manipulator,

300-a mounting frame, 400-a pallet magazine,

500-tray.

Detailed Description

In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the invention. The drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and the width of each part, the proportional relationship between the parts and the like are not completely consistent with actual values.

Fig. 1 to fig. 4 show a schematic structural diagram of a pallet transfer handling device according to an embodiment of the present invention, which includes a mounting substrate 101, an elevating mechanism installed on the mounting substrate 101, a pick-and-place mechanism 200 connected to the elevating mechanism, and a mounting frame 300.

The mounting substrate 101 of the present embodiment is a rectangular plate-shaped structure, the front surface of the mounting substrate 101 is provided with a screw holder 104, a screw support base 105 and a linear guide 121, and the ball screw 102 is mounted on the screw holder 104 and the screw support base 105. The arrangement direction of the ball screw 102 and the linear guide 121 coincides with the longitudinal extension direction of the mounting substrate 101.

The nut 103 and the rail slider 122 are engaged with the ball screw 102 and the linear guide 121, respectively, and the nut 103 and the rail slider 122 are further coupled with the elevating platform 118 so as to be adapted to move the elevating platform 118 along the linear guide 121, i.e., along the lengthwise extension direction of the mounting substrate 101, by rotating the ball screw 102.

A motor mounting bracket 110 is provided on the back surface of the mounting substrate 101, and a servo motor 109 is provided on the motor mounting bracket 110. A motor shaft of the servo motor 109 is connected with the driving synchronous pulley 108, and in cooperation therewith, one end of the ball screw 102 is connected with the driven synchronous pulley 106, and the driving synchronous pulley 108 and the driven synchronous pulley 106 can synchronously rotate by connecting the synchronous belt 107, specifically, the mounting substrate 101 is provided with a through hole 123, and the synchronous belt 107 passes through the through hole 123 and is respectively in fit connection with the driving synchronous pulley 108 and the driven synchronous pulley 106, so that the ball screw 102 can be driven to rotate by controlling the servo motor 109, and then the lifting platform 118 is driven to move along the linear guide rail 121, and the moving amount of the lifting platform 118 can be accurately controlled by the servo motor 109. The servo motor 109 and the ball screw 102 are respectively disposed on different sides of the mounting substrate 101, and the servo motor 109 and the ball screw 102 are disposed on the same side of the timing belt 107 in the spatial position, i.e., disposed above the timing belt 107, so that the overall structure can be more compact and the maintenance can be facilitated.

The front surface of the mounting substrate 101 is further provided with a limiting block mounting plate 119, a limiting block 120 is arranged on the limiting block mounting plate 119, the limiting block 120 physically limits the limit position that the lifting platform 118 can reach, and when the lifting platform 118 moves due to some abnormalities and abuts against the limiting block 120, the servo motor 109 usually has overload or overcurrent alarm to stop running, so that the lifting platform 118 is braked.

The sensor mounting profile 117 is further disposed on one side of the front surface of the mounting substrate 101, and the sensor mounting profile 117 has a strip structure, and the arrangement direction of the strip structure is consistent with the length extension direction of the mounting substrate 101, that is, the sensor mounting profile 117 is disposed in parallel with the linear guide 121 and the ball screw 102. The sensor mounting plate 115 can be arranged at any position of the sensor mounting profile 117, the photoelectric sensor 114 is mounted on the sensor mounting plate 115, correspondingly, the sensor sensing plate 116 is arranged on one side of the lifting platform 118, the sensor sensing plate 116 is matched with the photoelectric sensor 114, and when the sensor sensing plate 116 and the photoelectric sensor 114 are in opposite positions, sensing signals of the photoelectric sensor 114 can be triggered or changed, so that the position of the lifting platform 118 can be known.

A plurality of sets of sensor mounting plates 115 and photosensors 114 can be disposed on the sensor mounting profile 117 to suit different application requirements. If a group of sensor mounting plates 115 and a photoelectric sensor 114 are respectively arranged at two ends of the sensor mounting profile 117, the sensor mounting profile can be used as a limit switch for the up-and-down movement of the lifting platform 118, so that the lifting platform 118 can be braked at the upper limit position and the lower limit position, and the position during initialization can be reset to zero; for example, the corresponding sensor mounting plate 115 and the photoelectric sensor 114 are disposed at the middle section of the sensor mounting section bar 117 to define each working position of the lifting platform 118, such as stopping the lifting platform 118 at a position where the tray needs to be taken and placed, and then performing the operation of the taking and placing mechanism 200. In this embodiment, a set of sensor mounting plate 115 and a set of photoelectric sensor 114 are disposed at the upper end of the sensor mounting profile 117, two sets of sensor mounting plate 115 and a set of photoelectric sensor 114 are disposed at the lower end, the two photoelectric sensors 114 at the lower end are closer in position, the three photoelectric sensors 114 are respectively used as an upper limit position sensor, an origin position sensor and a lower limit position sensor from top to bottom, when the position of the lifting platform 118 is initialized, the lifting platform 118 is driven to return to the origin position sensor when reaching any limit position sensor, and the movement amount of the lifting platform 118 in subsequent work can be controlled by the servo motor 109.

The above-described components directly or indirectly disposed on the mounting substrate 101 enable the lifting platform 118 to controllably and safely move in the direction extending along the length of the mounting substrate 101, in practical use, the mounting substrate 101 is vertically disposed substantially perpendicular to the horizontal plane, and the lifting platform 118 is horizontally disposed, so that the lifting platform 118 can be used as a horizontal platform which can be vertically lifted in practical use.

The pick-and-place mechanism 200 is provided on the lifting platform 118 and arranged in the width extending direction of the mounting substrate 101 so that the pick-and-place mechanism 200 can be lifted and lowered together with the lifting platform 118. The pick and place mechanism 200 includes an electric cylinder module 201, a robot 205 and a servo motor 202, wherein the servo motor 202 is connected to the electric cylinder module 201 for providing power to the electric cylinder module 201, and the robot 205 is connected to a sliding component of the electric cylinder module 201, so that the robot 205 can be driven by the servo motor 202 to move along the width extending direction of the mounting substrate 101, and in practical application, the robot 205 can move linearly along the horizontal direction, as shown in fig. 5.

The pallet transfer and handling device of the present embodiment further includes a mounting frame 300, and the mounting substrate 101 is connected to the mounting frame 300. A tow chain mounting plate 112 is further provided on the mounting frame 300 on the side of the mounting substrate 101, and correspondingly, a tow chain mounting plate 113 is provided on the edge of the elevating platform 118, and both ends of the tow chain 111 are connected to the tow

chain mounting plates

112 and 113, respectively. In this embodiment, a cable connected to the servo motor 202 is inserted into the tow chain 111.

As shown in fig. 5, the pick and place mechanism 200 further includes a drag chain mounting plate 204 and a drag chain 203, the drag chain mounting plate 204 is connected to the end of the robot 205, one end of the drag chain 203 is connected to the drag chain mounting plate 204, and the other end is connected to the surface of the lifting platform 118. In this embodiment, the manipulator 205 is further provided with an air duct and an air pipe joint, and an air pipe connected to the air pipe joint is inserted into the

drag chains

203 and 111.

The tray transferring and handling device of the embodiment is compact in overall structural design and suitable for modular assembly, wherein the overall structural design is formed by the mounting frame 300, the mounting substrate 101 and the upper components thereof on the premise that the tray can be taken, placed and moved. In actual use, the modularized tray transferring, loading and unloading device can be integrally and directly installed on semiconductor processing equipment, and can also be integrally disassembled and replaced, so that equipment maintenance is easy to carry out, and the equipment maintenance time is shortened.

Referring to fig. 6, the operation of taking out the tray of the tray transfer handling apparatus of the present embodiment includes:

lifting the lifting platform 118 to a corresponding height position;

the driving manipulator 205 extends into the lower part of the tray 500, and the corresponding height position meets the condition that the manipulator 205 and the tray 500 above the manipulator have a preset distance;

raising the lifting platform 118 a predetermined distance to separate the pallet 500 from the frame supporting the pallet in the pallet magazine 400 and to be carried on the robot 205;

the robot 205 is retracted.

The operation of replacing the pallet of the pallet transfer handling apparatus of the present embodiment includes:

lifting the lifting platform 118 to a corresponding height position;

the manipulator 205 is driven to extend into the tray box 400, and the corresponding height position meets the condition that a preset distance is formed between the tray 500 on the manipulator 205 and a frame for supporting the tray in the tray box 400;

lowering the lifting platform 118 a predetermined distance to disengage the pallet 500 from the robot 205 and load it onto the frame supporting the pallet in the pallet magazine 400;

the robot 205 is retracted.

The loading and unloading device for transferring trays in the embodiment can realize loading and unloading of trays through operations similar to the above operations of taking out trays and putting back push trays, such as taking and putting trays from stations or other transfer positions of semiconductor processing equipment.

The foregoing has described in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be devised by those skilled in the art in light of the teachings of the present invention without undue experimentation. Therefore, the technical solutions that can be obtained by a person skilled in the art through logic analysis, reasoning or limited experiments based on the prior art according to the concepts of the present invention should be within the scope of protection defined by the claims.

Claims

1. A pallet transfer handling device, comprising:

the first direction driving component comprises a first direction movable platform, a first transmission assembly, a second transmission assembly and a first power assembly, wherein the first direction movable platform and the first transmission assembly are arranged on one surface of the mounting substrate, and the first power assembly is arranged on the other surface of the mounting substrate; the first power assembly, the second transmission assembly, the first transmission assembly and the first direction movable platform are sequentially connected, so that the first direction movable platform is driven to move along the first direction by the first power assembly;

2. The pallet transfer handler of claim 1 wherein said mounting base has a through hole, said second drive assembly passing through said through hole and being connected to said first power assembly and said first drive assembly, respectively.

3. The pallet transfer handler of claim 1 wherein said first drive assembly comprises a lead screw, a nut, a linear guide and a guide slider, said lead screw and said linear guide being arranged in said first direction, said first direction movable platform being coupled to said nut and said guide slider and adapted to drive said first direction movable platform in said first direction by a drive of said lead screw engaging said nut.

4. The pallet transferring and handling device of claim 1 further comprising a limiting assembly disposed on said mounting base plate to limit the limit position of movement of said first direction movable platform along said first direction.

5. The pallet transfer handler of claim 1 wherein said second direction drive means comprises an electric cylinder module by which said robot is moved in said second direction.

6. The pallet transfer handler of claim 5 wherein said second direction drive component further comprises a second power assembly, said second power assembly being connected to said electric cylinder module.

7. The pallet transfer handler of claim 6 wherein said first power module and said second power module employ servo motors.

8. The pallet transfer handler of claim 1 wherein a photo sensor is further disposed on the mounting substrate and a sensor plate is disposed on the first direction movable platform and cooperates with the photo sensor to trigger a sensing signal when the first direction movable platform moves to a sensing position.

9. The pallet transfer handler of claim 1 further comprising a mounting frame to which said mounting base is attached, thereby adapting said pallet transfer handler to be modularly assembled.

10. A semiconductor processing apparatus comprising the tray transfer handling device according to any one of claims 1 to 9.