CN217259213U

CN217259213U - Vacuum drying equipment

Info

Publication number: CN217259213U
Application number: CN202220343116.5U
Authority: CN
Inventors: 唐鹏宇; 穆欣炬; 马中生
Original assignee: Yiwu Qingyue Optoelectronic Technology Research Institute Co Ltd
Current assignee: Yiwu Qingyue Optoelectronic Technology Research Institute Co Ltd
Priority date: 2022-02-21
Filing date: 2022-02-21
Publication date: 2022-08-23
Anticipated expiration: 2032-02-21

Abstract

The utility model discloses a vacuum drying equipment relates to drying equipment technical field. The vacuum drying equipment comprises a shell and a partition plate, wherein a vacuum chamber is arranged in the shell; the vacuum drying device comprises a vacuum chamber, a drying chamber and an air outlet chamber, wherein the vacuum chamber is divided into the air inlet chamber, the drying chamber and the air outlet chamber by the two partition plates, a substrate is arranged in the drying chamber, the partition plates are provided with airflow holes, the air inlet chamber, the drying chamber and the air outlet chamber are communicated through the airflow holes in sequence, and the plane of the lowest point of each airflow hole is higher than the plane of the highest point of the substrate. The vacuum drying equipment has simple structure and convenient operation, and can ensure the smoothness of the film surface of the substrate.

Description

Vacuum drying equipment

Technical Field

The utility model relates to a drying equipment technical field especially relates to a vacuum drying equipment.

Background

In the manufacturing process of such organic light emitting devices as Organic Light Emitting Diodes (OLEDs) and quantum dot light emitting diodes (QLEDs), inkjet printing is widely used due to its advantages of high material utilization and low equipment price. In ink jet printing, the process of drying and film-forming a substrate after ink jet printing is a key factor affecting the flatness of the film surface on the substrate surface.

At present, the substrate is mainly dried by a vacuum drying device, that is, the substrate is mainly placed in a drying chamber, and the vacuum degree in the drying chamber is controlled by a vacuum pump connected with the drying chamber while the substrate is heated by a heating device, so as to complete the heating of the substrate. However, on one hand, because the structure of the drying chamber in the prior art cannot ensure that the airflow at each position of the substrate is uniform, the drying conditions of different positions of the substrate are different, and the film appearance on the surface of the substrate is uneven; on the other hand, the drying chamber cannot be completely sealed, so that the phenomenon of air leakage can occur in the working process of the drying chamber, and the vacuum degree is further influenced, so that the surface of the ink can be influenced by airflow formed when intermittent pressurization and depressurization are carried out in the drying chamber through the vacuum pump, the appearance of the surface of the substrate is uneven, and the flatness of the surface of the substrate is influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum drying equipment, this vacuum drying equipment simple structure, convenient operation can guarantee the planarization of base plate face.

For realizing the above technical effect, the technical scheme of the utility model as follows:

a vacuum drying apparatus comprising:

a housing, a vacuum chamber being provided in the housing;

the vacuum drying device comprises two partition plates, the two partition plates are arranged in the vacuum cavity and divide the vacuum cavity into an air inlet chamber, a drying chamber and an air outlet chamber, a substrate is arranged in the drying chamber, airflow holes are formed in the partition plates, the air inlet chamber, the drying chamber and the air outlet chamber are communicated in sequence through the airflow holes, and the plane of the lowest point of each airflow hole is higher than the plane of the highest point of the substrate.

Preferably, the partition plate is provided with a plurality of airflow holes, and the airflow holes in the partition plate between the inlet chamber and the drying chamber correspond to the airflow holes in the partition plate between the drying chamber and the outlet chamber in a one-to-one manner.

Preferably, two of the partition plates are arranged at intervals along the length direction of the substrate, and the airflow holes on each partition plate are arranged at intervals along the width direction of the substrate.

Preferably, the aperture of the airflow hole is 0.1-2 mm.

Preferably, the shell is provided with an air inlet and an air outlet respectively, the air inlet and the air outlet are communicated with the vacuum chamber respectively, inert gas can be introduced into the air inlet chamber through the air inlet, and the air outlet chamber can be pumped through the air outlet.

Preferably, the vacuum drying equipment further comprises a gas supplementing device, the gas supplementing device is communicated with the gas inlet chamber through the gas inlet, and the gas supplementing device can adjust the gas pressure in the gas inlet chamber.

Preferably, the vacuum drying equipment further comprises a gas extraction device, the gas extraction device is communicated with the gas outlet chamber through the gas outlet, and the gas extraction device can adjust the gas pressure in the gas outlet chamber.

Preferably, the vacuum drying apparatus further includes a heating device for heating the substrate.

Preferably, the heating means includes a hot plate provided in the drying chamber, and the substrate is placed on the hot plate.

Preferably, the heat plate is provided with a flow guide hole.

The utility model has the advantages that: the utility model provides a vacuum drying equipment separates into air inlet chamber, drying chamber and air outlet chamber with the vacuum chamber through the baffle, lets in gas through the air inlet chamber, and air outlet chamber exhaust air current forms the unanimous air current of direction in the drying chamber from this, has improved drying speed, and in addition, the minimum place plane through the air current hole all is higher than the top that the air current that forms can be guaranteed to the peak place plane of base plate is located the base plate, and because the air current can only follow the air current and flow into or flow in the air current hole, even if can guarantee that the air current that also can guarantee the base plate top when carrying out intermittent type to the vacuum chamber is even all the time, has improved the planarization of the face on the base plate.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

Fig. 1 is a front view of a vacuum drying apparatus according to an embodiment of the present invention;

fig. 2 is a plan view of a vacuum drying apparatus according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a partition board according to an embodiment of the present invention.

Reference numerals:

1. a housing; 101. an air intake chamber; 102. a drying chamber; 103. an air outlet chamber; 11. an air inlet; 12. an air outlet;

2. a partition plate; 21. an airflow aperture;

100. a substrate.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary intended for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected", "connected" and "fixed" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the recitation of a first feature "on" or "under" a second feature may include the recitation of the first and second features being in direct contact, and may also include the recitation of the first and second features not being in direct contact, but being in contact with another feature between them. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

It will be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing and simplifying the invention, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning. Wherein the terms "first position" and "second position" are two different positions.

The technical solution of the present invention is further explained by the following embodiments with reference to the drawings.

As shown in fig. 1 to 3, the present embodiment provides a vacuum drying apparatus, which includes a housing 1 and a partition plate 2, wherein a vacuum chamber is provided in the housing 1; the number of the partition boards 2 is two, the two partition boards 2 are arranged in the vacuum chamber and divide the vacuum chamber into an air inlet chamber 101, a drying chamber 102 and an air outlet chamber 103, the substrate 100 is arranged in the drying chamber 102, the partition boards 2 are provided with airflow holes 21, the air inlet chamber 101, the drying chamber 102 and the air outlet chamber 103 are communicated through the airflow holes 21 in sequence, and the plane of the lowest point of each airflow hole 21 is higher than the plane of the highest point of the substrate 100.

The vacuum chamber is divided into an air inlet chamber 101, a drying chamber 102 and an air outlet chamber 103 by the partition board 2, air is introduced through the air inlet chamber 101, and air is exhausted from the air outlet chamber 103, so that air flows with the same direction are formed in the drying chamber 102, the drying speed is improved, in addition, the formed air flows can be ensured to be positioned above the substrate 100 by the fact that the plane where the lowest point of the air flow hole 21 is higher than the plane where the highest point of the substrate 100 is, and because the air flows can only flow in or out from the air flow hole 21, the air flows above the substrate 100 can be ensured to be always uniform even when the vacuum chamber is subjected to intermittent air extraction, and the flatness of the film surface on the substrate 100 is improved.

Further, in order to ensure that a uniform airflow is formed on the substrate 100, a plurality of airflow holes 21 are formed in the partition plate 2, and the airflow holes 21 in the partition plate 2 between the inlet chamber 101 and the drying chamber 102 correspond to the airflow holes 21 in the partition plate 2 between the drying chamber 102 and the outlet chamber 103 in a one-to-one correspondence. That is, by providing a plurality of air flow holes 21 to ensure a more uniform flow rate of the air flow, and by providing a one-to-one correspondence between the air flow holes 21 of the partition plate 2 between the inlet chamber 101 and the drying chamber 102 and the air flow holes 21 of the partition plate 2 between the drying chamber 102 and the outlet chamber 103, a plurality of air flow passages are formed so that the air flow can pass through the plurality of air flow passages when entering the drying chamber 102 from the inlet chamber 101 and when entering the outlet chamber 103 from the drying chamber 102, respectively, and the uniformity of the air flow over the substrate 100 is ensured. Illustratively, the housing 1 and the partition 2 are made of a metal material.

In the present embodiment, as shown in fig. 3, two partition plates 2 are spaced apart along the length direction of the substrate 100, and a plurality of airflow holes 21 on each partition plate 2 are spaced apart along the width direction of the substrate 100, so that a uniform airflow is formed over the substrate 100.

Further, a plurality of airflow holes 21 arranged at intervals in the width direction of the substrate 100 form a plurality of airflow hole 21 groups, the number of airflow hole 21 groups is plural, and the plurality of airflow holes 21 are arranged at intervals in the thickness direction of the substrate 100, so that the airflow is further dispersed to ensure the uniformity of the airflow.

Preferably, the airflow holes 21 are circular holes, and the aperture of the airflow holes 21 is 0.1-2 mm.

In this embodiment, the housing 1 is provided with an air inlet 11 and an air outlet 12, the air inlet 11 and the air outlet 12 are respectively communicated with the vacuum chamber, the inert gas can be introduced into the air inlet chamber 101 through the air inlet 11, and the air can be extracted from the air outlet chamber 103 through the air outlet 12. Thus, the drying requirement of the substrate 100 can be realized by the direction of air suction while air intake or only air suction. The inert gas introduced therein serves as a shielding gas for drying the substrate 100 to improve drying efficiency and ensure quality.

Specifically, the vacuum drying apparatus further includes a gas supplementing device, the gas supplementing device is communicated with the gas inlet chamber 101 through the gas inlet 11, and the gas supplementing device can adjust the gas pressure in the gas inlet chamber 101 to meet different requirements required when the substrate 100 is dried.

Similarly, the vacuum drying apparatus further includes a gas extraction device, the gas extraction device is communicated with the gas outlet chamber 103 through the gas outlet 12, and the gas extraction device can adjust the gas pressure in the gas outlet chamber 103 to meet different requirements required when the substrate 100 is dried.

Further, the vacuum drying apparatus further includes a heating device for heating the substrate 100, so that the substrate 100 can be dried and heated in a vacuum environment.

Specifically, the heating means includes a hot plate disposed inside the drying chamber 102, on which the substrate 100 is placed.

Optionally, the hot plate is provided with a diversion hole, so that the removal efficiency of the high-boiling-point solvent in the film layer on the substrate 100 can be further improved as a whole, and the drying process is accelerated.

Reference throughout this specification to "some embodiments," "other embodiments," or similar language means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.

Claims

1. A vacuum drying apparatus, comprising:

the device comprises a shell (1), wherein a vacuum chamber is arranged in the shell (1);

the vacuum drying device comprises two partition plates (2), the two partition plates (2) are arranged in the vacuum chamber and divide the vacuum chamber into an air inlet chamber (101), a drying chamber (102) and an air outlet chamber (103), a substrate (100) is arranged in the drying chamber (102), the partition plates (2) are provided with air flow holes (21), the air inlet chamber (101), the drying chamber (102) and the air outlet chamber (103) are communicated with each other through the air flow holes (21), and the plane of the lowest point of each air flow hole (21) is higher than the plane of the highest point of the substrate (100).

2. Vacuum drying apparatus according to claim 1, characterised in that the partition (2) is provided with a plurality of air flow holes (21), and the air flow holes (21) in the partition (2) between the inlet chamber (101) and the drying chamber (102) and the air flow holes (21) in the partition (2) between the drying chamber (102) and the outlet chamber (103) are in one-to-one correspondence.

3. The vacuum drying apparatus according to claim 2, wherein two of the partition plates (2) are provided at intervals in a length direction of the substrate (100), and the plurality of gas flow holes (21) on each of the partition plates (2) are provided at intervals in a width direction of the substrate (100).

4. The vacuum drying apparatus according to claim 2, wherein the aperture of the air flow hole (21) is 0.1-2 mm.

5. The vacuum drying apparatus according to claim 1, wherein the housing (1) is provided with a gas inlet (11) and a gas outlet (12), the gas inlet (11) and the gas outlet (12) are respectively communicated with the vacuum chamber, an inert gas can be introduced into the gas inlet chamber (101) through the gas inlet (11), and the gas outlet chamber (103) can be evacuated through the gas outlet (12).

6. Vacuum drying apparatus according to claim 5, further comprising a gas replenishing device communicating with the gas inlet chamber (101) through the gas inlet (11), the gas replenishing device being capable of adjusting the gas pressure inside the gas inlet chamber (101).

7. Vacuum drying apparatus according to claim 5, further comprising a gas extraction device communicating with the gas outlet chamber (103) through the gas outlet (12), the gas extraction device being capable of adjusting the gas pressure within the gas outlet chamber (103).

8. Vacuum drying apparatus according to claim 1, further comprising heating means for heating the substrate (100).

9. Vacuum drying apparatus according to claim 8, wherein the heating means comprises a hot plate arranged within the drying chamber (102), on which hot plate the substrate (100) is placed.

10. Vacuum drying apparatus according to claim 9, wherein the hot plate is provided with deflector holes.