CN217251396U - Automatic material seat output device of monocrystalline silicon piece degumming equipment - Google Patents
Automatic material seat output device of monocrystalline silicon piece degumming equipment Download PDFInfo
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- CN217251396U CN217251396U CN202221113817.6U CN202221113817U CN217251396U CN 217251396 U CN217251396 U CN 217251396U CN 202221113817 U CN202221113817 U CN 202221113817U CN 217251396 U CN217251396 U CN 217251396U
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- material seat
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a single crystal silicon wafer equipment of coming unstuck material seat automatic output device, include: the conveying mechanism is provided with two parallel synchronous belts; the supporting frame is fixedly arranged on two sides of the first end of the conveying mechanism, and the first end is a transmission starting end of the conveying mechanism; the bearing turnover mechanism is fixedly arranged on the support frame and is positioned above the first end; and the lifting bearing mechanism is arranged between the two synchronous belts at the first end. The utility model discloses a material seat automatic output device can accomplish the material seat output after coming unstuck automatically, and can not wear and tear the bonding face of material seat, has prolonged the life of material seat.
Description
Technical Field
The utility model relates to a monocrystalline silicon piece technical field that comes unstuck especially relates to a monocrystalline silicon piece equipment of coming unstuck material seat automatic output device.
Background
In the production process of the monocrystalline silicon wafer, the semiconductor wafer is adhered to the material seat shown in figure 1, then the monocrystalline silicon wafer is cut into silicon wafers through cutting equipment, and then the silicon wafers are removed from the material seat through heating degumming treatment, so that degumming of the silicon wafers is completed. After the monocrystalline silicon wafer is degummed, the material seat is required to be output for subsequent use. The bottom surface of the material seat is an arc-shaped bonding surface matched with the semiconductor wafer, and the material seat is directly conveyed and output because the arc-shaped surface of the material seat faces downwards all the time in the degumming process, so that the bonding surface is easily abraded for a long time, the matching degree of the material seat and the semiconductor wafer is reduced, and even the material seat cannot be used continuously.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned defects or shortcomings in the prior art, it is desirable to provide an automatic material seat output device for a single crystal silicon wafer degumming apparatus, which can automatically complete the output of the material seat after degumming, does not wear the bonding surface of the material seat, and prolongs the service life of the material seat.
The utility model provides a pair of monocrystalline silicon piece equipment of coming unstuck material seat automatic output device, include:
the conveying mechanism is provided with two parallel synchronous belts;
the supporting frame is fixedly arranged on two sides of a first end of the conveying mechanism, and the first end is a transmission starting end of the conveying mechanism;
the receiving turnover mechanism is fixedly arranged on the support frame, is positioned above the first end, and is used for receiving the material seat, fixing the material seat, turning the material seat for 180 degrees and then loosening the material seat;
and the lifting bearing mechanism is arranged between the two synchronous belts at the first end and used for receiving the material seat loosened by the bearing turnover mechanism and placing the material seat on the two synchronous belts.
Further, the receiving and overturning mechanism comprises:
the two ends of the turnover shaft are respectively and rotatably connected to the support frame through bearings;
the first bearing seat is arranged above the turnover shaft and is fixedly connected with the turnover shaft through a connecting block;
the first mounting seat is symmetrically and fixedly connected to two sides of the first bearing seat;
the clamping air cylinders are symmetrically and fixedly arranged on the first mounting seats at two sides of the first bearing seat, and piston rods of the clamping air cylinders horizontally extend to the upper part of the first bearing seat and are fixedly connected with clamping plates;
and the first driving motor is in transmission connection with the turnover shaft through a first speed reducer.
Further, the lifting and receiving mechanism comprises:
a base plate;
the guide posts are fixedly arranged on the top surface of the bottom plate in a rectangular distribution manner;
the supporting plate is fixedly arranged among the four guide columns;
the lifting plate is arranged above the supporting plate and is in sliding connection with the four guide columns through guide sleeves;
the second bearing seat is arranged above the four guide columns and used for bearing the material seat;
the first lifting cylinder is fixedly arranged on the bottom surface of the supporting plate, and a piston rod of the first lifting cylinder penetrates through the supporting plate and is fixedly connected with the bottom surface of the lifting plate;
and the second lifting cylinder is fixedly arranged on the top surface of the lifting plate, and a piston rod of the second lifting cylinder is vertically upwards arranged and is fixedly connected with the bottom surface of the second bearing seat.
Further, the transfer mechanism includes:
a mounting frame;
the driven shaft is arranged at the first end, two ends of the driven shaft are respectively and rotatably connected to the mounting rack through bearings, and driven wheels are fixedly sleeved at two ends of the driven shaft;
the driving shaft is arranged at a second end, two ends of the driving shaft are respectively connected to the mounting frame in a rotating mode through bearings, the second end is the transmission tail end of the conveying mechanism, driving wheels which correspond to the driven wheels one by one are fixedly sleeved on the driving shaft, and the synchronous belt is sleeved between the corresponding driven wheels and the driving wheels;
and the second driving motor is in transmission connection with the driving shaft through a second speed reducer.
Further, the second end is located two be provided with the baffle between the hold-in range, the top of baffle exceeds the hold-in range, the baffle is close to be provided with the cushion coat on the face of first end.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses an output device is provided with transport mechanism, accepts tilting mechanism and lift accepting mechanism. After the monocrystalline silicon wafer is separated from the material seat, the manipulator grabs the material seat and places the material seat on the receiving turnover mechanism, the receiving turnover mechanism fixes the material seat and then turns over 180 degrees, so that the top surface of the material seat faces downwards, the bonding surface faces upwards, and then the material seat is loosened; meanwhile, the lifting and supporting mechanism rises to support the material seat loosened by the supporting and overturning mechanism, then descends, places the material seat on the conveying mechanism, conveys and outputs the material seat through the conveying mechanism, and realizes automatic conveying and outputting of the material seat. In the transmission process of the material seat, the bonding surface of the material seat can not contact with the transmission device, so that the abrasion of the bonding surface can not be caused, and the service life of the material seat is effectively prolonged.
It should be understood that what is described in this summary section is not intended to limit key or critical features of embodiments of the invention, nor is it intended to limit the scope of the invention. Other features of the present invention will become apparent from the following description.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic structural view of a material seat;
FIG. 2 is a schematic structural diagram of an automatic output device of a material seat of the single crystal silicon wafer degumming equipment;
FIG. 3 is a schematic structural view of the carrying and turning mechanism;
fig. 4 is a schematic structural view of the lifting and receiving mechanism.
Reference numbers in the figures: 11. a material seat; 12. a transport mechanism; 13. a support frame; 14. a receiving turnover mechanism; 15. a lifting and receiving mechanism;
21. a synchronous belt; 22. a mounting frame; 23. a driven shaft; 24. a driven wheel;
25. a drive shaft; 26. a driving wheel; 27. a second drive motor; 28. a second speed reducer; 29. a baffle plate;
41. a turning shaft; 42. a first bearing seat; 43. connecting blocks; 44. a first mounting seat; 45. a clamping cylinder; 46. a clamping plate; 47. a first drive motor; 48. a first speed reducer;
51. a base plate; 52. a guide post; 53. a support plate; 54. a lifting plate; 55. a guide sleeve; 56. a second bearing seat; 57. a first lifting cylinder; 58. and a second lifting cylinder.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Referring to fig. 1 to 4, an embodiment of the present invention provides an automatic output device for a material seat of a single crystal silicon wafer degumming apparatus, including:
a conveying mechanism 12 having two parallel timing belts 21;
the supporting frames 13 are fixedly arranged on two sides of the first end of the conveying mechanism 12, and the first end is a transmission starting end of the conveying mechanism 12;
the receiving turnover mechanism 14 is fixedly arranged on the support frame 13, is positioned above the first end, and is used for receiving the material seat 11, fixing the material seat, turning the material seat for 180 degrees and then loosening the material seat;
and the lifting bearing mechanism 15 is arranged between the two synchronous belts 21 at the first end and used for receiving the material seat 11 loosened by the turnover mechanism 14 and placing the material seat on the two synchronous belts 21.
In this embodiment, after the single crystal silicon wafer is degummed in the automatic degumming device, the single crystal silicon wafer is separated from the bonding surface at the bottom of the material seat 11. A manipulator of the degumming equipment grabs the material seat 11 and places the material seat on the receiving turnover mechanism 14, the receiving turnover mechanism 14 fixes the material seat, then the material seat 11 is driven to turn over for 180 degrees, the top surface of the material seat 11 faces downwards, the bonding surface faces upwards, and then the material seat is loosened; meanwhile, the lifting and supporting mechanism 15 rises to be equal to the height of the turned material seat 11, the material seat 11 loosened by the supporting and turning mechanism 14 is received, then the lifting and supporting mechanism descends, the material seat 11 is placed on the conveying mechanism 12, and the material seat 11 is conveyed and output through the conveying mechanism 12.
The automatic material seat output device realizes automatic transmission and output of the material seat 11, and is high in automation degree. In the transmission process of the material seat 11, the bonding surface of the material seat does not contact with the output device, so that the abrasion of the bonding surface is avoided, and the service life of the material seat 11 is effectively prolonged.
In a preferred embodiment, as shown in fig. 2 and 3, the take-up and turnover mechanism 14 includes:
the two ends of the turning shaft 41 are respectively and rotatably connected to the support frame 13 through bearings;
the first bearing seat 42 is arranged above the overturning shaft 41 and is fixedly connected with the overturning shaft 41 through a connecting block 43;
the first mounting seats 44 are symmetrically and fixedly connected to two sides of the first bearing seat 42;
the clamping air cylinder 45 is symmetrically and fixedly arranged on the first installation seats 44 at two sides of the first bearing seat 42, and a piston rod of the clamping air cylinder 45 horizontally extends to the upper part of the first bearing seat 42 and is fixedly connected with a clamping plate 46;
the first driving motor 47 is in transmission connection with the turning shaft 41 through a first speed reducer 48.
In this embodiment, the manipulator of the degumming apparatus places the material seat 11 on the first receiving seat 42, and then drives the clamping plates 46 to clamp and fix the material seat 11 through the clamping cylinders 45 on both sides. The first driving motor 47 drives the turning shaft 41 to rotate 180 degrees through the first speed reducer 48, so that the driving torque is large and the rotation is stable. The turning shaft 41 drives the material seat 11 to turn downwards 180 degrees through the first bearing seat 42 and the clamping cylinder 45, so that the top surface of the material seat 11 faces downwards and is used as a contact surface for transmission. The bonding surface of the material seat 11 is effectively protected.
In a preferred embodiment, as shown in fig. 2 and 4, the lift receiving mechanism 15 includes:
a bottom plate 51;
guide posts 52 which are distributed in a rectangular shape and fixedly arranged on the top surface of the bottom plate 51;
a support plate 53 fixedly arranged among the four guide posts 52;
a lifting plate 54 disposed above the support plate 53 and slidably connected to the four guide posts 52 through guide sleeves 55;
the second bearing seat 56 is arranged above the four guide columns 52 and is used for bearing the material seat 11;
a first lifting cylinder 57 fixedly arranged on the bottom surface of the support plate 53, wherein a piston rod of the first lifting cylinder 57 penetrates through the support plate 53 and is fixedly connected with the bottom surface of the lifting plate 54;
and the second lifting cylinder 58 is fixedly arranged on the top surface of the lifting plate 54, and a piston rod of the second lifting cylinder 58 is vertically arranged upwards and is fixedly connected with the bottom surface of the second bearing seat 56.
In this embodiment, the height of the guide post 52 cannot be higher than the timing belt 21 due to the limitation of the installation position of the lifting/lowering receiving mechanism 15, and thus the second receiving base 56 cannot be guided in the whole lifting process, so that the second lifting/lowering stage is installed, and the first lifting/lowering cylinder 57 drives the lifting/lowering plate 54 to move up and down to the first stage, and is guided by the guide post 52; the second elevating cylinder 58 drives the second socket 56 to move up and down in two stages. The driving stroke without a guide structure is shortened, and the stability and the safety of the lifting and supporting mechanism 15 are improved.
In a preferred embodiment, as shown in FIG. 2, the transfer mechanism 12 comprises:
a mounting frame 22;
the driven shaft 23 is arranged at the first end, two ends of the driven shaft 23 are respectively and rotatably connected to the mounting rack 22 through bearings, and driven wheels 24 are fixedly sleeved at two ends of the driven shaft 23;
the driving shaft 25 is arranged at the second end, two ends of the driving shaft are respectively connected to the mounting frame 22 through bearings in a rotating mode, the second end is the transmission tail end of the transmission mechanism 12, driving wheels 26 which correspond to the driven wheels 24 one by one are fixedly sleeved on the driving shaft 25, and the synchronous belt 21 is sleeved between the corresponding driven wheels 24 and the driving wheels 26;
and a second driving motor 27 which is in transmission connection with the driving shaft 26 through a second speed reducer 28.
In the present embodiment, the second driving motor 27 drives the driving shaft 26 to rotate through the second speed reducer 28, so that the output torque is large and the driving is smooth. Thereby, the two synchronous belts 21 are driven by the driving wheel 26 and the driven wheel 24 to synchronously move, and the material seat 11 is conveyed and output.
In a preferred embodiment, as shown in fig. 2, a baffle 29 is disposed between the two timing belts 21 at the second end, the top of the baffle 29 is higher than the timing belts 21, and a flexible cushion is disposed on the surface of the baffle 29 near the first end. The baffle 29 can prevent the material seat 11 from falling off from the conveying mechanism 12, and the flexible cushion layer plays a role in protecting the material seat 11 and can be made of flexible materials such as rubber or silica gel.
In the description of the present specification, the terms "connect", "mount", "fix", and the like are to be understood in a broad sense, for example, "connect" may be a fixed connection, a detachable connection, or an integral connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In the description of the present application, the description of the terms "one embodiment," "some embodiments," etc. means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (5)
1. The utility model provides a material seat automatic output device of monocrystalline silicon piece equipment that comes unstuck which characterized in that includes:
the conveying mechanism is provided with two parallel synchronous belts;
the supporting frame is fixedly arranged on two sides of a first end of the conveying mechanism, and the first end is a transmission starting end of the conveying mechanism;
the receiving turnover mechanism is fixedly arranged on the support frame, is positioned above the first end, and is used for receiving the material seat, fixing the material seat, turning the material seat for 180 degrees and then loosening the material seat;
and the lifting bearing mechanism is arranged between the two synchronous belts at the first end and used for receiving the material seat loosened by the bearing turnover mechanism and placing the material seat on the two synchronous belts.
2. The automatic output device of the material seat of the monocrystalline silicon wafer degumming equipment according to claim 1, wherein the receiving and overturning mechanism comprises:
the two ends of the turnover shaft are respectively and rotatably connected to the support frame through bearings;
the first bearing seat is arranged above the turnover shaft and is fixedly connected with the turnover shaft through a connecting block;
the first mounting seat is symmetrically and fixedly connected to two sides of the first bearing seat;
the clamping air cylinders are symmetrically and fixedly arranged on the first mounting seats at two sides of the first bearing seat, and piston rods of the clamping air cylinders horizontally extend to the upper part of the first bearing seat and are fixedly connected with clamping plates;
and the first driving motor is in transmission connection with the turnover shaft through a first speed reducer.
3. The automatic material seat output device of the monocrystalline silicon wafer degumming equipment according to claim 1, wherein the lifting and receiving mechanism comprises:
a base plate;
the guide posts are fixedly arranged on the top surface of the bottom plate in a rectangular distribution manner;
the supporting plate is fixedly arranged among the four guide columns;
the lifting plate is arranged above the supporting plate and is in sliding connection with the four guide columns through guide sleeves;
the second bearing seat is arranged above the four guide columns and used for bearing the material seat;
the first lifting cylinder is fixedly arranged on the bottom surface of the supporting plate, and a piston rod of the first lifting cylinder penetrates through the supporting plate and is fixedly connected with the bottom surface of the lifting plate;
and the second lifting cylinder is fixedly arranged on the top surface of the lifting plate, and a piston rod of the second lifting cylinder is vertically upwards arranged and is fixedly connected with the bottom surface of the second bearing seat.
4. The automatic output device of the material seat of the monocrystalline silicon wafer degumming equipment according to claim 1, wherein the conveying mechanism comprises:
a mounting frame;
the driven shaft is arranged at the first end, two ends of the driven shaft are respectively and rotatably connected to the mounting rack through bearings, and driven wheels are fixedly sleeved at two ends of the driven shaft;
the driving shaft is arranged at a second end, two ends of the driving shaft are respectively connected to the mounting frame in a rotating mode through bearings, the second end is the transmission tail end of the conveying mechanism, driving wheels which correspond to the driven wheels one by one are fixedly sleeved on the driving shaft, and the synchronous belt is sleeved between the corresponding driven wheels and the driving wheels;
and the second driving motor is in transmission connection with the driving shaft through a second speed reducer.
5. The automatic material seat output device of single crystal silicon wafer degumming equipment according to claim 4, wherein a baffle is arranged between the two synchronous belts at the second end, the top of the baffle is higher than the synchronous belts, and a flexible cushion layer is arranged on the surface of the baffle close to the first end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221113817.6U CN217251396U (en) | 2022-05-11 | 2022-05-11 | Automatic material seat output device of monocrystalline silicon piece degumming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221113817.6U CN217251396U (en) | 2022-05-11 | 2022-05-11 | Automatic material seat output device of monocrystalline silicon piece degumming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217251396U true CN217251396U (en) | 2022-08-23 |
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ID=82884328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221113817.6U Active CN217251396U (en) | 2022-05-11 | 2022-05-11 | Automatic material seat output device of monocrystalline silicon piece degumming equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217251396U (en) |
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2022
- 2022-05-11 CN CN202221113817.6U patent/CN217251396U/en active Active
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