CN217250952U

CN217250952U - Sucking disc cleaning device and lithography apparatus

Info

Publication number: CN217250952U
Application number: CN202221026954.6U
Authority: CN
Inventors: 黄亚庆; 闫法领
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2022-04-28
Filing date: 2022-04-28
Publication date: 2022-08-23
Anticipated expiration: 2032-04-28

Abstract

The utility model relates to a semiconductor manufacturing technology field especially relates to a sucking disc cleaning device and lithography apparatus. The sucker cleaning device comprises a rack, a lifting driving mechanism and a rotating driving mechanism, wherein the lifting driving mechanism comprises a linear driver and an installation piece, the linear driver is fixed on the rack, and a driving end of the linear driver is fixedly connected with the installation piece so as to drive the installation piece to lift along the vertical direction; the rotary driving mechanism comprises a rotary driver and a cleaning assembly, the rotary driver is fixed on the mounting piece and is coaxially arranged with the linear driver, and the driving end of the rotary driver is in transmission connection with the cleaning assembly to drive the cleaning assembly to rotate. This sucking disc cleaning device realizes through sharp driver and rotation driver that clean subassembly goes up and down and rotate around vertical direction along vertical direction, through making sharp driver and rotation driver coaxial setting from top to bottom to can reduce sucking disc cleaning device at the size of horizontal direction, with the installation demand that satisfies the narrow and small installation space of lithography apparatus.

Description

Sucker cleaning device and photoetching equipment

Technical Field

The utility model relates to a semiconductor manufacturing technology field especially relates to a sucking disc cleaning device and lithography apparatus.

Background

In the process of carrying out silicon wafer loading and unloading and alignment exposure for a long time, the photoetching equipment can not avoid that some pollutants such as pollution particles or photoresist and the like are remained on the wafer bearing platform. The wafer bearing table has salient points, and when the wafer is loaded and the leveling and focusing are carried out under the condition, errors can be reported because the surface type of the upper surface of the silicon wafer cannot be detected. Under the condition, the motion platform (equipment for bearing the wafer bearing platform) is pulled out on site, the cleaning stone is used manually to clean the salient points on the wafer bearing platform, and the motion platform is pushed in after the cleaning is finished to carry out the wafer loading detection on the silicon wafer until the surface type detection on the upper surface of the silicon wafer is qualified. The pushing and pushing of the motion table takes a long time and is cleaned manually, so that the yield is greatly influenced.

The most important parameter in the lithographic apparatus is the throughput of the exposure, and in order to reduce the frequency of pushing the motion stage forward, the prior art uses a suction cup cleaning device instead of manual cleaning, thereby reducing the maintenance time of the lithographic apparatus. The cleaning stone in the sucker cleaning device rubs with the sucker by means of dead weight, so that the purpose of removing 'salient points' is achieved, and normal sheet feeding is guaranteed. Most of working conditions, the sucking disc only has local salient points, the sucking disc cleaning device can be used for cleaning the local part of the sucking disc, pollution particles on the sucking disc can be removed in a short time, the sucking disc cleaning time is shortened, and the exposure yield is improved. However, the existing sucker cleaning device needs to be provided with two sets of driving mechanisms to realize the Z-direction vertical linear motion and the Z-direction rotation motion of the cleaning stone in the sucker cleaning device, and the existing driving mechanism needs to be provided with a speed reducer and other devices, so that the size of the sucker cleaning device in the horizontal direction is larger, a larger installation space is needed, and the installation requirements of the existing photoetching equipment without the sucker cleaning device can not be met.

Therefore, a need exists for a suction cup cleaning device that solves the above problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sucking disc cleaning device, simple structure, the horizontal direction size is littleer to satisfy current lithography apparatus configuration sucking disc cleaning device's functional requirement.

Another object of the utility model is to provide a lithography apparatus, the above-mentioned sucking disc cleaning device of mountable realizes carrying piece platform self-cleaning, improves lithography apparatus's the piece productivity of exposing to the sun.

In order to realize the purpose, the following technical scheme is provided:

in a first aspect, there is provided a suction cup cleaning device comprising:

a frame;

the lifting driving mechanism comprises a linear driver and a mounting piece, the linear driver is fixed on the rack, and the driving end of the linear driver is fixedly connected with the mounting piece so as to drive the mounting piece to lift along the vertical direction;

and the rotary driving mechanism comprises a rotary driver and a cleaning assembly, the rotary driver is fixed on the mounting piece and is coaxially arranged with the linear driver, and the driving end of the rotary driver is in transmission connection with the cleaning assembly so as to drive the cleaning assembly to rotate.

As an alternative of the sucker cleaning device, the lifting driving mechanism further comprises a flexible hinge, one end of the flexible hinge is fixedly connected with the driving end of the linear driver, and the other end of the flexible hinge is fixedly connected with the mounting piece.

As an alternative to the suction cup cleaning device, the flexible hinge comprises:

the upper end of the first flexible part is fixedly connected with the driving end of the linear driver, and the lower end of the first flexible part is provided with a first limiting groove extending along a horizontal first direction;

the lower end of the second flexible part is fixedly connected with the mounting part, and the upper end of the second flexible part is provided with a second limiting groove extending along a horizontal second direction which is vertical to the first direction;

the upper end of the connecting part is provided with a first flexible connecting part, and the first flexible connecting part is connected with the lower end of the first flexible part and is positioned in the first limiting groove; the lower end of the connecting portion is provided with a second flexible connecting portion, and the second flexible connecting portion is connected with the upper end of the second flexible portion and is located in the second limiting groove.

As an alternative of the sucker cleaning device, an external thread is arranged on the first flexible portion, and a threaded hole in threaded connection with the external thread is arranged at the driving end of the linear driver.

As an alternative of the suction cup cleaning device, a first threaded hole is formed in the mounting member, a second threaded hole coaxially communicated with the first threaded hole is formed in the second flexible portion, and the second flexible portion is fixed to the mounting member by a bolt.

As an alternative to the suction cup cleaning device, the rotary drive mechanism further comprises a coupling, and the drive end of the rotary drive is in transmission connection with the cleaning assembly through the coupling.

As an alternative to the suction cup cleaning device, the linear actuator is a pneumatic cylinder; and/or the rotary drive is a direct current rotary motor.

As an alternative to the suction cup cleaning device, the lifting drive mechanism comprises a guide member fixed to the frame and extending in a vertical direction, the mounting member being in sliding engagement with the guide member.

As an alternative to the suction cup cleaning device, the frame includes a first mounting plate and a second mounting plate which are arranged in parallel, the first mounting plate is used for fixing the linear actuator, the second mounting plate is located below the first mounting plate, an upper surface of the second mounting plate is used for fixing the guide, and the guide is located between the second mounting plate and the first mounting plate.

As an alternative to the suction cup cleaning device, the frame includes a first mounting plate, and the linear actuator and the guide are fixed to a lower surface of the first mounting plate.

In a second aspect, there is provided a lithographic apparatus comprising a suction cup cleaning device as described above.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model provides a sucker cleaning device, which comprises a frame, a lifting driving mechanism and a rotary driving mechanism, wherein the lifting driving mechanism comprises a linear driver and an installation piece, the linear driver is fixed on the frame, and a driving end of the linear driver is fixedly connected with the installation piece so as to drive the installation piece to lift along a vertical direction; the rotary driving mechanism comprises a rotary driver and a cleaning assembly, the rotary driver is fixed on the mounting piece and is coaxially arranged with the linear driver, and the driving end of the rotary driver is in transmission connection with the cleaning assembly so as to drive the cleaning assembly to rotate. This sucking disc cleaning device passes through sharp driver and rotary actuator and realizes that clean subassembly goes up and down and rotate around vertical direction along vertical direction, through making sharp driver and rotary actuator coaxial setting from top to bottom to can reduce sucking disc cleaning device at the size of horizontal direction, with the installation demand that satisfies the narrow and small installation space of lithography apparatus.

The utility model provides a lithography apparatus, the above-mentioned sucking disc cleaning device of mountable realizes carrying piece platform self-cleaning, improves lithography apparatus's the piece productivity of exposing to the sun.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.

Fig. 1 is a schematic structural view of a suction cup cleaning device according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a flexible hinge according to an embodiment of the present invention;

fig. 3 is a schematic structural view of a suction cup cleaning device according to a second embodiment of the present invention.

Reference numerals:

1-a frame; 11-a first mounting plate; 12-a second mounting plate; 13-a connecting plate;

2-a lifting driving mechanism; 21-a linear drive; 22-a mounting; 221-a first threaded hole; 23-a guide; 24-a flexible hinge; 241-a first flexible portion; 2411-a first limit groove; 242-second flexible portion 2421-second restraint slot; 2422-a second threaded hole; 243-connecting part; 2431-a first flexible connection; 2432-a second flexible connection;

3-a rotary drive mechanism; 31-a rotary drive; 32-a cleaning assembly; 321-a central axis; 322-clean stone; 33-a coupling; 34-motor support.

Detailed Description

To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the attached drawings in the embodiments of the present invention are combined to clearly and completely describe the technical solution in the embodiments of the present invention, and obviously, the described embodiments are part of the embodiments of the present invention, rather than all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description of the present invention and simplification of description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be further noted that, unless otherwise explicitly stated or limited, the terms "disposed" and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected; either mechanically or electrically.

Example one

The embodiment provides a lithographic apparatus, which comprises a wafer bearing table and a sucker cleaning device, wherein the wafer bearing table is used for bearing a silicon wafer, and the sucker cleaning device is used for cleaning the silicon wafer on the wafer bearing table or the wafer bearing table so as to improve the wafer exposure yield of the lithographic apparatus.

As shown in fig. 1, the present embodiment further provides a suction cup cleaning device, which includes a frame 1, a lifting driving mechanism 2 and a rotating driving mechanism 3, wherein the lifting driving mechanism 2 includes a linear driver 21 and a mounting member 22, the linear driver 21 is fixed on the frame 1, and a driving end thereof is fixedly connected with the mounting member 22 to drive the mounting member 22 to lift and lower along a vertical direction; the rotary driving mechanism 3 comprises a rotary driver 31 and a cleaning assembly 32, the rotary driver 31 is fixed on the mounting part 22 and is arranged coaxially with the linear driver 21, and the driving end of the rotary driver is in transmission connection with the cleaning assembly 32 so as to drive the cleaning assembly 32 to rotate. This sucking disc cleaning device realizes through sharp driver 21 and rotary actuator 31 that clean subassembly 32 goes up and down and rotates around vertical direction along vertical direction, through making sharp driver 21 and rotary actuator 31 coaxial setting from top to bottom to can reduce sucking disc cleaning device in the size of horizontal direction, with the installation demand that satisfies the narrow and small installation space of lithography apparatus.

In order to further reduce the overall size of the suction cup cleaning device, the linear actuator 21 is an air cylinder. The design can make the sucker cleaning device compact in structure, simplify a connecting mechanism between the driver and the driven element, avoid the need of adding a speed reducer and other equipment, and reduce the overall dimension of the whole machine.

Further, the rotary driver 31 is a dc rotary motor. The direct current rotating motor directly drives the cleaning assembly 32 to rotate, a speed reducer is removed, and the vertical occupied space is greatly reduced. Regarding the problem of unstable speed of the direct current motor under low rotating speed caused by the direct-drive cleaning assembly 32, the rotating speed of the motor is monitored at all times by installing an encoder on the motor, rotating speed data is sent to a motor controller, and a speed closed-loop controller is added in the motor controller to carry out speed regulation control on the rotating speed of the motor so as to achieve stable speed at low rotating speed.

In order to ensure that the installation part 22 can be lifted and lowered smoothly, the lifting driving mechanism 2 comprises a guide part 23, the guide part 23 is fixed on the machine frame 1 and extends along the vertical direction, and the installation part 22 is in sliding fit with the guide part 23.

Alternatively, the rack 1 includes a first mounting plate 11 and a second mounting plate 12 arranged in parallel, the first mounting plate 11 is used for fixing the linear driver 21, the second mounting plate 12 is located below the first mounting plate 11, the upper surface of the second mounting plate 12 is used for fixing the guide 23, and the guide 23 is located between the second mounting plate 12 and the first mounting plate 11. Further, the frame 1 further comprises a connecting plate 13, and the connecting plate 13 is used for connecting the first mounting plate 11 and the second mounting plate 12.

Illustratively, the number of the guide members 23 is two, and the two guide members 23 are symmetrically disposed at both sides of the linear actuator 21. Further, the quantity of second mounting panel 12 is two, and two second mounting panels 12 are connected in the both sides of first mounting panel 11 through a connecting plate 13 respectively, and two guides 23 are equipped with respectively on the second mounting panel 12 to guarantee that installed part 22 can stably go up and down.

Preferably, the mounting member 22 is a sliding fit with the guide member 23 via a linear bearing.

In the prior art, for the problem that the driving end of the linear actuator 21 is not coaxial with the guide 23, a ball hinge is usually installed to eliminate mechanical errors, for example, one end of the ball hinge is connected to the driving end of the linear actuator 21, and the other end is connected to the mounting member 22. However, the existing spherical hinge is too large in size, so that the size of the suction cup cleaning device in the vertical direction is easily increased. In order to solve the above problem, the lifting driving mechanism 2 further includes a flexible hinge 24, one end of the flexible hinge 24 is fixedly connected to the driving end of the linear actuator 21, and the other end thereof is fixedly connected to the mounting member 22. This design avoids the problem of the mount 22 being jerky in its movement due to the drive end of the linear actuator 21 being non-coaxial with the guide 23 by virtue of the provision of the flexible hinge 24.

Preferably, as shown in fig. 2, the flexible hinge 24 includes a first flexible portion 241, a second flexible portion 242 and a connecting portion 243, the upper end of the first flexible portion 241 is fixedly connected to the driving end of the linear actuator 21, and the lower end thereof is provided with a first limit groove 2411 extending along the horizontal first direction; the lower end of the second flexible portion 242 is fixedly connected to the mounting member 22, and the upper end thereof is provided with a second limiting groove 2421 extending along a horizontal second direction, wherein the second direction is perpendicular to the first direction; the upper end of the connecting portion 243 is provided with a first flexible connecting portion 2431, and the first flexible connecting portion 2431 is connected with the lower end of the first flexible portion 241 and is located in the first limit groove 2411; the lower end of the connecting portion 243 is provided with a second flexible connecting portion 2432, and the second flexible connecting portion 2432 is connected with the upper end of the second flexible portion 242 and is located in the second limiting groove 2421. The flexible hinge 24 is compact in structure, can solve the problem of movement and jamming of the mounting part 22, and can reduce the size of the sucker cleaning device in the vertical direction.

Preferably, the first flexible connecting portion 2431 extends along a horizontal first direction, and the first flexible connecting portion 2431 is connected to the bottom of the first limiting groove 2411 and is parallel to the groove wall of the first limiting groove 2411. Similarly, the second flexible connecting portion 2432 extends along the horizontal second direction, and the second flexible connecting portion 2432 is connected to the bottom of the second limiting groove 2421 and is parallel to the wall of the second limiting groove 2421. The second flexible coupling portion 2432 is disposed perpendicular to the first flexible coupling portion 2431.

In short, there are a first flexible portion 241 and a second flexible portion 242 in the middle of the flexible hinge 24, the first flexible portion 241 and the second flexible portion 242 are connected by a connecting portion 243, and the two connecting portions are a first flexible connecting portion 2431 and a second flexible connecting portion 2431, respectively, which are orthogonally arranged in the horizontal direction. The first flexible connecting portion 2431 can slightly rotate the first flexible portion 241 and the second flexible portion 242 of the flexible hinge 24 along the Ry axis (horizontal first direction), i.e., can slightly swing between the driving end of the linear actuator 21 and the mounting member 22 along the Ry axis (horizontal first direction) to solve the mechanical error between the driving end of the linear actuator 21 and the guide 23 in the Ry direction. The second flexible connecting portion 2432 can make the first flexible portion 241 and the second flexible portion 242 of the flexible hinge 24 slightly rotate along the Rx axis (the horizontal second direction), i.e., can make the driving end of the linear driver 21 and the mounting member 22 slightly swing along the Rx axis (the horizontal second direction), so that the mechanical error of the driving end of the linear driver 21 and the guide member 23 in the Rx direction (the horizontal second direction) can be solved. The use of the first flexible structure 241 in combination with the second flexible structure 242 eliminates the problem of motion seizure due to the non-alignment, or non-parallelism, of the cylinder drive shaft with the guide shaft.

Optionally, the first and second

flexible connections

2431, 2432 are thin sheet structures having a thickness of 0.2mm to 0.3 mm. The rotation of the flexible hinge 24 mainly occurs in this portion of deformation. The first limiting groove 2411 and the second limiting groove 2421 are gaps with the width of 0.2-0.3 mm, and are used for preventing the deformed parts (the first flexible connecting part 2431 and the second flexible connecting part 2432) from exceeding the stress limit of the material used for the flexible hinge after being excessively deformed to generate plastic deformation or even damage. In addition, the structural length of the deformation part and the length of the gap at the limit part are also factors influencing whether the maximum stress exceeds the stress limit when the flexible hinge 24 deforms.

The present embodiment provides the flexible hinge 24 with a maximum stress of 1094.2Mpa when rotated to the maximum deformation about the Rx axis (horizontal second direction) and a maximum stress of 877.9Mpa when rotated to the maximum deformation about the Ry axis (horizontal first direction). In consideration of a certain safety margin, the material of the flexible hinge 24 is 18Ni300, and the yield limit of the material is about 1800 MPa.

Alternatively, the first flexible portion 241 is provided with an external thread, and the driving end of the linear actuator 21 is provided with a threaded hole in threaded connection with the external thread. The design not only facilitates the fixed connection of the first flexible part 241 and the driving end of the linear actuator 21, but also reduces the size of the suction cup cleaning device in the vertical direction.

Alternatively, as shown in fig. 2 in conjunction with fig. 1, the mounting member 22 is provided with a first threaded hole 221, the second flexible portion 242 is provided with a second threaded hole 2422 coaxially communicating with the first threaded hole 221, and the second flexible portion 242 is fixed to the mounting member 22 by a bolt. This design can both facilitate the secure attachment of the second flexible portion 242 to the mounting member 22 and reduce the vertical dimension of the suction cup cleaning device.

Preferably, the rotary drive mechanism 3 further comprises a coupling 33, and the drive end of the rotary drive 31 is in driving connection with the cleaning assembly 32 via the coupling 33. This design realizes transmitting rotary actuator 31 power and motion to cleaning assembly 32 through shaft coupling 33, guarantees both rotatory together, prevents simultaneously that cleaning assembly 32 from bearing too big load, plays overload protection's effect.

The cleaning assembly 32 includes a central shaft 321 and a cleaning stone 322, the upper end of the central shaft 321 is connected with the coupling 33, and the lower end thereof is connected with the cleaning stone 322.

Illustratively, the rotary drive mechanism 3 further includes a motor bracket 34, the motor bracket 34 is fixed to the mounting member 22, the rotary driver 31 is fixed to the motor bracket 34, and a driving end of the rotary driver 31 is rotatably connected to the motor bracket 34 through a ball bearing.

Example two

The difference between the present embodiment and the first embodiment is:

as shown in fig. 3, in the present embodiment, the frame 1 includes the first mounting plate 11, and the linear actuator 21 and the guide 23 are fixed to the lower surface of the first mounting plate 11. The chassis 1 in this embodiment does not comprise the second mount 12.

Preferably, the mounting member 22 and the guide member 23 are slidably coupled by an oilless bushing.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims

1. A suction cup cleaning device, comprising:

a frame (1);

the lifting driving mechanism (2) comprises a linear driver (21) and a mounting piece (22), the linear driver (21) is fixed on the rack (1), and the driving end of the linear driver is fixedly connected with the mounting piece (22) so as to drive the mounting piece (22) to lift along the vertical direction;

and the rotary driving mechanism (3) comprises a rotary driver (31) and a cleaning assembly (32), the rotary driver (31) is fixed on the mounting piece (22) and is coaxially arranged with the linear driver (21), and the driving end of the rotary driver is in transmission connection with the cleaning assembly (32) so as to drive the cleaning assembly (32) to rotate.

2. Suction cup cleaning device according to claim 1, characterized in that the lifting drive (2) further comprises a flexible hinge (24), one end of the flexible hinge (24) being fixedly connected to the drive end of the linear drive (21) and the other end thereof being fixedly connected to the mounting (22).

3. Suction cup cleaning device according to claim 2, characterized in that the flexible hinge (24) comprises:

the upper end of the first flexible part (241) is fixedly connected with the driving end of the linear driver (21), and the lower end of the first flexible part is provided with a first limiting groove (2411) extending along a horizontal first direction;

the lower end of the second flexible part (242) is fixedly connected with the mounting part (22), the upper end of the second flexible part is provided with a second limiting groove (2421) extending along a horizontal second direction, and the second direction is vertical to the first direction;

the upper end of the connecting part (243) is provided with a first flexible connecting part (2431), and the first flexible connecting part (2431) is connected with the lower end of the first flexible part (241) and is positioned in the first limiting groove (2411); the lower end of the connecting part (243) is provided with a second flexible connecting part (2432), and the second flexible connecting part (2432) is connected with the upper end of the second flexible part (242) and is positioned in the second limiting groove (2421).

4. Suction cup cleaning device according to claim 3, characterized in that the first flexible part (241) is provided with an external thread and the driving end of the linear actuator (21) is provided with a threaded hole in threaded connection with the external thread.

5. Suction cup cleaning device according to claim 3, characterized in that a first threaded hole (221) is provided in the mounting piece (22), a second threaded hole (2422) is provided in the second flexible part (242) coaxially communicating with the first threaded hole (221), and the second flexible part (242) is fixed to the mounting piece (22) by means of a bolt.

6. Suction cup cleaning device according to claim 1, characterized in that the rotary drive mechanism (3) further comprises a coupling (33), the drive end of the rotary drive (31) being in transmission connection with the cleaning assembly (32) through the coupling (33).

7. Suction cup cleaning device according to claim 1, characterized in that the linear drive (21) is a pneumatic cylinder; and/or the rotary drive (31) is a direct current rotary motor.

8. Suction cup cleaning device according to any one of claims 1-7, characterized in that the lifting drive mechanism (2) comprises a guide (23), which guide (23) is fixed to the frame (1) and extends in a vertical direction, and that the mounting member (22) is in sliding engagement with the guide (23).

9. Suction cup cleaning device according to claim 8, characterized in that the frame (1) comprises a first mounting plate (11) and a second mounting plate (12) arranged in parallel, the first mounting plate (11) being used for fixing the linear drive (21), the second mounting plate (12) being located below the first mounting plate (11), the upper surface of the second mounting plate (12) being used for fixing the guide (23), and the guide (23) being located between the second mounting plate (12) and the first mounting plate (11); or

The frame (1) comprises a first mounting plate (11), and the linear actuator (21) and the guide piece (23) are fixed on the lower surface of the first mounting plate (11).

10. A lithographic apparatus comprising a suction cup cleaning device according to any one of claims 1 to 9.