CN217207504U - Ultralow frequency active micro-vibration prevention base - Google Patents
Ultralow frequency active micro-vibration prevention base Download PDFInfo
- Publication number
- CN217207504U CN217207504U CN202221072985.5U CN202221072985U CN217207504U CN 217207504 U CN217207504 U CN 217207504U CN 202221072985 U CN202221072985 U CN 202221072985U CN 217207504 U CN217207504 U CN 217207504U
- Authority
- CN
- China
- Prior art keywords
- air chamber
- piston
- main air
- vibration
- horizontal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000002265 prevention Effects 0.000 title claims abstract description 6
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 4
- 238000005188 flotation Methods 0.000 claims 1
- 238000002955 isolation Methods 0.000 abstract description 21
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Landscapes
- Combined Devices Of Dampers And Springs (AREA)
Abstract
The utility model provides a super low frequency initiative micro-vibration prevention base, including roof, main air chamber and additional air chamber, main air chamber top is connected with first piston, first piston internally connected has first pendulum rod, be connected with first diaphragm between first piston and the main air chamber, gas pocket A has been seted up to main air chamber bottom, main air chamber bottom is connected with additional air chamber, gas pocket B has been seted up with the perpendicular corresponding position of gas pocket A in additional air chamber top, install the horizontal air chamber that four mutually perpendicular's sides fell all around at main air chamber top, horizontal air chamber top is connected with the second piston, second piston internally connected has the second pendulum rod, be connected with the second diaphragm between second piston and the horizontal air chamber, be connected with the thrust air supporting between main air chamber and the additional air chamber. The utility model discloses the vertical and horizontal direction natural frequency of system can be reality and is less than 0.3Hz, has better vibration isolation effect to the ultralow frequency interference of three degree of freedom, and application scope is wider.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is a base shakes a little actively is prevented to ultralow frequency.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is adopted for medium-high frequency vibration, so that the passive vibration isolation structure is simple, the work is reliable, the power supply is not relied on, and the medium-high frequency vibration interference can be effectively isolated. Aiming at low frequency vibration or even ultra-low frequency vibration, active vibration isolation is adopted mostly, pneumatic active vibration isolation has good adaptivity, low frequency vibration is counteracted through the reverse force output by an actuator, and the pneumatic active vibration isolation has excellent low frequency or ultra-low frequency vibration isolation performance. However, the environment of the precision instrument is complex, and not only the vibration exists in the vertical direction, but also the vibration exists in the horizontal direction, and the traditional pneumatic vibration isolation device generally has a vibration isolation effect on the vibration in the vertical direction, so that the vibration isolation requirement of the complex environment vibration is difficult to meet, and the application range is narrow.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a base that shakes a little is prevented in ultralow frequency initiative to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
an ultralow-frequency active micro-vibration prevention base comprises a top plate, a main air chamber and an additional air chamber, wherein the top of the main air chamber is connected with a first piston, a first swing rod is connected inside the first piston, a first diaphragm is connected between the first piston and the main air chamber, the bottom of the main air chamber is provided with an air hole A, the bottom of the main air chamber is connected with the additional air chamber, the top of the additional air chamber is provided with an air hole B at a position corresponding to the air hole A in a vertical manner, four mutually vertical horizontal air chambers which are inclined to one side are arranged on the periphery of the top of the main air chamber, the top of each horizontal air chamber is connected with a second piston, a second swing rod is connected inside each second piston, a second diaphragm is connected between each second piston and each horizontal air chamber, an anti-thrust is connected between the main air chamber and the additional air chamber, the top of each first swing rod is connected with a mass block, and the peripheral outer side walls of each mass block are respectively connected with the second swing rod, the top of the mass block is connected with a rubber cushion block, the top of the rubber cushion block is connected with the middle of the bottom of the top plate, and the top of the horizontal air chamber is further connected with a speed sensor, a displacement sensor and a controller.
Further, the top plate is made of a stainless steel plate into a rectangular structure.
Furthermore, an air inlet A is formed in one side of the additional air chamber, and an electromagnetic valve A is installed on the air inlet A.
Furthermore, an air inlet B is formed in one side of the horizontal air chamber, and an electromagnetic valve B is installed on the air inlet B.
Furthermore, the rubber cushion block is of a U-shaped structure and is connected to the top of the mass block in an inverted mode.
Further, the mass block is of a cubic structure.
The beneficial effects of the utility model are that:
the utility model discloses vertical bearing and vibration isolation are realized through air supporting and pendulum rod to set up additional air chamber and further reduce system natural frequency, the vibration isolation is also realized through air supporting and pendulum rod to the horizontal direction, and the vertical and horizontal direction natural frequency of system can be realistic and is less than 0.3Hz, has better vibration isolation effect to the ultralow frequency interference of three degree of freedom, and application scope is wider.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a sectional view of the part a-a of the present invention.
In the figure, 1-top plate, 2-main air chamber, 201-first piston, 202-first swing rod, 203-first diaphragm, 204-air hole A, 3-additional air chamber, 301-air hole B, 302-air inlet A, 303-electromagnetic valve A, 4-horizontal air chamber, 401-second piston, 402-second swing rod, 403-second diaphragm, 404-air inlet B, 405-electromagnetic valve B, 5-air thrust, 6-mass block, 7-rubber cushion block, 8-speed sensor, 9-displacement sensor and 10-controller.
Detailed Description
The technical solutions of the present invention will be described more clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-2, an ultra-low frequency active micro-vibration prevention base comprises a top plate 1, a main air chamber 2 and an additional air chamber 3, wherein a first piston 201 is connected to the top of the main air chamber 2, a first swing rod 202 is connected to the inside of the first piston 201, a first diaphragm 203 is connected between the first piston 201 and the main air chamber 2, an air hole a204 is formed at the bottom of the main air chamber 2, the additional air chamber 3 is connected to the bottom of the main air chamber 2, an air hole B301 is formed at the position of the top of the additional air chamber 3, which vertically corresponds to the air hole a204, four horizontal air chambers 4 which are mutually vertical and are inclined to the side are arranged around the top of the main air chamber 2, a second piston 401 is connected to the top of the horizontal air chamber 4, a second swing rod 402 is connected to the inside of the second piston 401, a second diaphragm 403 is connected between the second piston 401 and the horizontal air chamber 4, and a thrust air float 5 is connected between the main air chamber 2 and the additional air chamber 3, the top of the first swing rod 202 is connected with a mass block 6, the peripheral outer side walls of the mass block 6 are respectively connected with the second swing rods 402, the top of the mass block 6 is connected with a rubber cushion block 7, the top of the rubber cushion block 7 is connected with the middle of the bottom of the top plate 1, and the top of the horizontal air chamber 4 is further connected with a speed sensor 8, a displacement sensor 9 and a controller 10.
The top plate 1 is made of a stainless steel plate into a rectangular structure.
An air inlet hole A302 is formed in one side of the additional air chamber 3, and an electromagnetic valve A303 is installed on the air inlet hole A302.
An air inlet hole B404 is formed in one side of the horizontal air chamber 4, and an electromagnetic valve B405 is installed on the air inlet hole B404.
The rubber cushion block 7 is of a U-shaped structure and is connected to the top of the mass block 6 in an inverted mode.
The mass 6 is in a cubic structure.
When the vibration isolation device works, a precision instrument is arranged on the top plate 1, the bearing and high-frequency vibration isolation are realized vertically through the top plate 1, the main air chamber 2 and the additional air chamber 3, vibration signals are collected through the speed sensor 8 and the displacement sensor 9, the collected signals are transmitted to the controller 10, the controller 10 controls the air pressure change of the main air chamber 2 and the additional air chamber 3 to push the first swing rod to vertically drive, and the ultralow frequency vibration isolation is realized vertically; the vibration signals pass through the speed sensor 8 and the displacement sensor 9 in the horizontal direction, the acquired signals are transmitted to the controller 10, the controller 10 controls the air pressure change of the horizontal air chamber 3 to push the second swing rod to drive in the horizontal direction, and the ultra-low frequency vibration isolation is realized in the horizontal direction.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. An ultralow-frequency active micro-vibration-preventing base comprises a top plate, a main air chamber and an additional air chamber, and is characterized in that a first piston is connected to the top of the main air chamber, a first swing rod is connected to the interior of the first piston, a first diaphragm is connected between the first piston and the main air chamber, an air hole A is formed in the bottom of the main air chamber, an additional air chamber is connected to the bottom of the main air chamber, an air hole B is formed in the top of the additional air chamber and vertically corresponds to the air hole A, four mutually vertical horizontal air chambers which are inclined to one another are arranged on the periphery of the top of the main air chamber, a second piston is connected to the top of the horizontal air chamber, a second swing rod is connected to the interior of the second piston, a second diaphragm is connected between the second piston and the horizontal air chamber, thrust air flotation is connected between the main air chamber and the additional air chamber, a mass block is connected to the top of the first swing rod, and the peripheral outer side walls of the mass block are respectively connected to the second swing rod, the top of the mass block is connected with a rubber cushion block, the top of the rubber cushion block is connected with the middle of the bottom of the top plate, and the top of the horizontal air chamber is further connected with a speed sensor, a displacement sensor and a controller.
2. The ultra-low frequency active micro-vibration preventing pedestal according to claim 1, wherein the top plate is made of stainless steel plate and has a rectangular structure.
3. The active ultra-low frequency anti-micro vibration pedestal according to claim 1, wherein an air inlet A is opened at one side of the additional air chamber, and an electromagnetic valve A is installed on the air inlet A.
4. The ultra-low frequency active micro-vibration prevention base as claimed in claim 1, wherein an air inlet B is opened at one side of the horizontal air chamber, and an electromagnetic valve B is installed on the air inlet B.
5. The ultra-low frequency active micro-vibration preventing pedestal of claim 1, wherein the rubber cushion block is in a U-shaped structure and is connected to the top of the mass block in an inverted manner.
6. The active ultra-low frequency anti-micro vibration pedestal according to claim 1, wherein the mass has a cubic structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072985.5U CN217207504U (en) | 2022-05-07 | 2022-05-07 | Ultralow frequency active micro-vibration prevention base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072985.5U CN217207504U (en) | 2022-05-07 | 2022-05-07 | Ultralow frequency active micro-vibration prevention base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217207504U true CN217207504U (en) | 2022-08-16 |
Family
ID=82777156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221072985.5U Active CN217207504U (en) | 2022-05-07 | 2022-05-07 | Ultralow frequency active micro-vibration prevention base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217207504U (en) |
-
2022
- 2022-05-07 CN CN202221072985.5U patent/CN217207504U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111810581B (en) | Large-scale precision vibration isolation platform based on air spring | |
| JP5064316B2 (en) | Vibration isolator | |
| CN106321708B (en) | A kind of compound active vibration insulator of two-freedom vibration isolation and precision positioning | |
| CN110552429B (en) | Self-balancing three-dimensional shock-isolation anti-swing device and method | |
| CN100554719C (en) | The air spring vibrating insulative basement that has gas-film lubrication unit | |
| CN104315068A (en) | Low-frequency air spring vibration isolator with motion converter | |
| CN217207504U (en) | Ultralow frequency active micro-vibration prevention base | |
| CN102518740A (en) | Ultrasonic levitation and air floatation mixed suspension damping device | |
| CN113266665B (en) | Vibration isolation device and vibration isolation method for unmanned ship floating raft | |
| CN206591674U (en) | A kind of diaphragm of rubber lead core three is combined disc spring shock mount | |
| CN200975036Y (en) | Bidirectional shearing type vibrating device | |
| CN115263924B (en) | Mixed type air bearing with air path and loop based on porous material and air path mechanism | |
| CN219139699U (en) | Negative-rigidity active micro-vibration prevention device | |
| CN218094024U (en) | Active and passive micro-vibration prevention base based on air floatation variable rigidity | |
| CN217207498U (en) | Active vibration isolation platform for large-scale precision instrument | |
| CN115727093B (en) | Rigidity-adjustable double-degree-of-freedom active and passive micro-vibration prevention base | |
| CN217003698U (en) | Active and passive vibration isolation base based on Lorentz force driving | |
| CN219139698U (en) | Double-freedom-degree active micro-vibration prevention base based on magnetic levitation | |
| CN110645272B (en) | Aerostatic bearing based on additional mass motion driven vibration energy consumption | |
| CN113944715A (en) | Multi-degree-of-freedom active and passive vibration isolator | |
| CN100575887C (en) | Horizontal gas/gas two-phase composite straight line reference method and device based on gravitational equilibrium | |
| CN210859661U (en) | Three-dimensional shock insulation anti-swing device with self-balancing function | |
| CN219139701U (en) | Rigidity-variable double-freedom-degree active micro-vibration prevention base | |
| CN217207501U (en) | Active and passive parallel micro-vibration prevention device | |
| CN217633635U (en) | Rigidity-adjustable ultralow-frequency passive micro-vibration-prevention base |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230310 Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Electronic Engineering Technology Co.,Ltd. Address before: 116000 16 Zhenxing street, Haiwan Industrial Zone, Pulandian District, Dalian, Liaoning Province Patentee before: DALIAN DEETOP HEAVY INDUSTRY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |