CN217180969U - Micro coaxial radio frequency probe card - Google Patents

Abstract

The utility model relates to the technical field of probe cards, and discloses a micro-coaxial radio frequency probe card, which is embedded in an isolation plastic sleeve through a radio frequency probe, the isolation plastic sleeve is embedded in a grounding copper sleeve, the front end part of a probe shielding grounding head is concavely provided with a second through hole matched with the radio frequency probe, the front end part of the radio frequency probe is provided with a needle point arranged in a cone-shaped structure, the needle point extends out of the second through hole and is arranged, the two sides of the front end wall of the probe shielding grounding head are respectively convexly provided with an inward inclined shielding grounding needle, the needle point is positioned at the inner side of the shielding grounding needle, the lower end part of a coaxial radio frequency connector is provided with a bolt, the lower end part of the bolt is provided with a second inserting hole matched with the radio frequency probe, the upper end part of the radio frequency probe is detachably embedded in the second inserting hole, thereby effectively improving the shielding effect and the performance stability of the radio frequency probe, and has the advantages of simple structure, low manufacturing cost, small insertion loss, low standing wave, stable performance and the like.

Description

Micro-coaxial radio frequency probe card

Technical Field

The utility model relates to a probe card technical field, in particular to coaxial radio frequency probe card a little.

Background

Transmission lines used in radio frequency applications are typically coaxial cables connected to a circuit board, and microstrip lines disposed inside the circuit board. The radio frequency probe is a measuring device used in electronic test equipment to measure Radio Frequency (RF) signals of electronic circuits in silicon wafers, dies and open microchips. In addition, rf probes are also used in narrow pitch or high density rf interconnect applications in connector assemblies. Radio frequency probes were developed in 1980, and since there was no convenient way to test Monolithic Microwave Integrated Circuit (MMIC) devices without the need for mounting or bonding, the testing process often resulted in the destruction of circuit integrity, causing system interference or reduced electrical loading. The first generation of radio frequency probe adopts coplanar ceramic feed and covers the frequency band within 18 GHz. With the development of rf probe technology, rf probes equipped with spring-loaded inner and outer conductors are used in modern communications electronics. Today, rf probes remain an important tool necessary for rf switches, pcb rf traces, termination devices, and other rf device testing.

Measurement of radio frequency circuits is often a tricky task due to the very sensitive and often delicate nature and composition of the Device Under Test (DUT). Two major problems that plague most in high reliability radio frequency measurements are: when the frequency is too high, the current test equipment cannot measure the radio frequency energy; when the circuit to be measured is sensitive to small changes in the electrical environment, no disturbance in frequency or amplitude is required to occur during measurement. These problems can be solved by using a measurement probe with as little energy disturbance as possible of the circuit under test, wherein an amplifier in the high impedance probe is able to balance the disturbed energy of the circuit under test. In rf circuitry testing, impedance matching of the probe to the test equipment is critical to achieving efficient power transfer. However, as the test frequency becomes higher and the requirements for test errors become stricter, the impedance matching becomes more and more difficult.

In high frequency testing, testing of high frequency product components requires the use of sophisticated test equipment that may include Vector Network Analyzers (VNAs), wafer probing systems, high frequency probes, semi-rigid or flexible coaxial rf cables, and calibration substrates. Among them, the probe is the most critical loop in this measurement system because it must be physically connected to the device under test.

In the chip manufacturing process, the performance of the chip needs to be tested firstly when the wafer is subjected to the packaging test procedure after the wafer flow is finished. With the improvement of chip performance, microminiaturization of size and function diversification, the requirement on a probe card serving as a connecting channel between a chip and a tester is higher and higher, the test requirement of a radio frequency chip is shielding protection on a radio frequency signal, the shielding protection is more difficult when the frequency is higher, and the existing micro coaxial radio frequency probe card has stable performance and poor shielding effect, so that a stable test result cannot be obtained, the product yield is influenced, and further improvement is needed.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims at providing a little coaxial radio frequency probe card, aim at solving current little coaxial radio frequency probe card stable performance, the not ideal technical problem of shielding effect inadequately.

In order to achieve the above object, the micro coaxial rf probe card of the present invention comprises a metal fixing support, a coaxial rf connector, an rf probe, an isolating plastic sleeve, a grounding copper sleeve and a probe shielding grounding head, wherein the front end of the metal fixing support is obliquely and concavely provided with a first through hole, the coaxial rf connector is movably embedded in the first through hole, the rf probe is embedded in the isolating plastic sleeve, the isolating plastic sleeve is embedded in the grounding copper sleeve, the rear end of the probe shielding grounding head is concavely provided with a first inserting hole, the lower end of the grounding copper sleeve is detachably embedded in the first inserting hole, the front end of the probe shielding grounding head is concavely provided with a second through hole matched with the rf probe, the front end of the rf probe is provided with a needle point arranged in a cone structure, the needle point extends out of the second through hole, an inward-inclined shielding grounding needle is convexly arranged on two sides of the front end wall of the probe shielding grounding head respectively, the needle point is located on the inner side of the shielding grounding needle, a bolt is arranged at the lower end part of the coaxial radio frequency connector, a second inserting hole matched with the radio frequency probe is arranged at the lower end part of the bolt, the upper end part of the radio frequency probe is detachably embedded in the second inserting hole, and the upper end part of the radio frequency probe is electrically connected with the bolt.

Further, the front end wall of shielding grounding needle all is the inclined plane structure setting of leanin, the outside of the front end wall of shielding grounding needle is protruding respectively and is equipped with a limiting plate, just the lower tip of needle point stretches out the lower terminal wall setting of limiting plate.

Further, still include and cross cab apron and epoxy locating piece, cross the cab apron set up in coaxial radio frequency connector's lower tip, the middle concave third through-hole that is equipped with of upper end wall of cross the cab apron, ground connection copper sleeve pipe wears to locate set up in the third through-hole, cross the cab apron set up in the first through-hole, just cross the cab apron the periphery wall with the internal perisporium butt setting of first through-hole, the epoxy locating piece inlays to be located the lower tip of first through-hole, just the upper end of epoxy locating piece with cross the cab apron butt setting, the radio frequency probe wears to locate the epoxy locating piece setting.

Further, still include spacing bolt, the both sides of the preceding tip of metal fixed bolster respectively the concave screw hole that is equipped with one with first through-hole is linked together, spacing bolt respectively revolve in threaded hole sets up, just preceding tip of spacing bolt respectively can with the periphery wall butt setting of coaxial radio frequency connector.

Furthermore, the peripheral wall of the lower end part of the grounding copper sleeve is in butt electrical connection with the probe shielding grounding head, and the upper end part of the probe shielding grounding head is in butt electrical connection with the coaxial radio frequency connector.

Furthermore, a plurality of mounting holes are concavely arranged at the rear end part of the metal fixing support.

Furthermore, the isolation plastic sleeve is made of polytetrafluoroethylene.

Furthermore, the grounding copper sleeve and the probe shielding grounding head are both made of beryllium copper.

Furthermore, the radio frequency probe is made of rhenium tungsten or beryllium copper.

Furthermore, the distance between the needle tip and the front end wall of the shielding grounding needle ranges from 0.1mm to 0.5 mm.

Adopt the technical scheme of the utility model, following beneficial effect has: the technical proposal of the utility model is that a first through hole is obliquely and concavely arranged at the front end part of a metal fixing bracket, a coaxial radio frequency connector can be movably embedded in the first through hole up and down, a radio frequency probe is embedded in an isolation plastic sleeve, the isolation plastic sleeve is embedded in a grounding copper sleeve, the rear end part of a probe shielding grounding head is concavely provided with a first plug hole, the lower end part of the grounding copper sleeve is detachably embedded in the first plug hole, the front end part of the probe shielding grounding head is concavely provided with a second through hole matched with the radio frequency probe, the front end part of the radio frequency probe is provided with a needle point which is arranged in a cone-shaped structure, the needle point extends out of the second through hole, two sides of the front end wall of the probe shielding grounding head are respectively and convexly provided with an inward-inclined shielding grounding needle, the needle point is positioned at the inner side of the shielding grounding needle, the lower end part of the coaxial radio frequency connector is provided with a bolt, the lower tip of bolt is equipped with a second spliced eye with radio frequency probe looks adaptation, and the upper end detachable of radio frequency probe inlays and locates the setting in the second spliced eye, and the upper end of radio frequency probe is connected with the bolt electricity to effectively improve the shielding effect and the stability of performance of radio frequency probe, and have simple structure, low in manufacturing cost, the insertion loss is little, the standing wave is low, advantages such as stable performance can be used to electronic test equipment, measure the electronic circuit Radio Frequency (RF) signal in silicon chip, tube core and the open microchip.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

Fig. 1 is a schematic view of an overall structure of a micro coaxial rf probe card according to the present invention;

FIG. 2 is an enlarged view taken at A in FIG. 1;

fig. 3 is an exploded schematic view of a micro coaxial rf probe card according to the present invention;

fig. 4 is a schematic partial structural view of a micro-coaxial rf probe card according to the present invention;

fig. 5 is a schematic diagram of a partially exploded structure of a micro coaxial rf probe card according to the present invention;

fig. 6 is a schematic structural diagram of a probe shielding grounding head of a micro-coaxial rf probe card according to the present invention.

The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

The utility model provides a coaxial radio frequency probe card a little.

As shown in fig. 1 to 6, in an embodiment of the present invention, the micro coaxial rf probe card includes a metal fixing support 101, a coaxial rf connector 102, an rf probe 103, an isolation plastic sleeve 104, a ground copper sleeve 105 and a probe shielding grounding head 106, wherein a first through hole 1011 is obliquely recessed at a front end of the metal fixing support 101, the coaxial rf connector 102 is embedded in the first through hole 1011 in a vertically movable manner, the rf probe 103 is embedded in the isolation plastic sleeve 104, the isolation plastic sleeve 104 is embedded in the ground copper sleeve 105, a first inserting hole 1061 is recessed at a rear end of the probe shielding grounding head 106, a lower end of the ground copper sleeve 105 is detachably embedded in the first inserting hole 1061, a through hole 1062 adapted to the rf probe 103 is recessed at a front end of the probe shielding grounding head 106, the front end part of the radio frequency probe 103 is provided with a needle tip 1031 arranged in a cone-shaped structure, the needle tip 1031 extends out of the through hole 1062, two sides of the front end wall of the probe shielding grounding head 106 are respectively provided with an inward-inclined shielding grounding needle 1063 in a protruding manner, the needle tip 1031 is arranged on the inner side of the shielding grounding needle 1063, the lower end part of the coaxial radio frequency connector 102 is provided with a bolt 1021, the lower end part of the bolt 1021 is provided with a second insertion hole (not shown) matched with the radio frequency probe 103, the upper end part of the radio frequency probe 103 is detachably embedded in the second insertion hole, and the upper end part of the radio frequency probe 103 is electrically connected with the bolt 1021.

Specifically, the front end wall of the shielding grounding needle 1063 is provided with an inclined plane structure inclined inwards, a limiting plate 1064 is respectively and convexly provided at the outer side of the front end wall of the shielding grounding needle 1063, and the lower end portion of the needle tip 1031 extends out of the lower end wall of the limiting plate 1064.

Specifically, still include cab apron 107 and epoxy locating piece 108, the cab apron 107 set up in coaxial radio frequency connector 102's lower tip, the centre of crossing the upper end wall of cab apron 107 is equipped with a third through-hole 1071 in the concave, ground connection copper sleeve 105 wears to locate set up in the third through-hole 1071, cross cab apron 107 set up in the first through-hole 1011, just the periphery wall of crossing cab apron 107 with the internal perisporium butt setting of first through-hole 1011, epoxy locating piece 108 inlays to be located the lower tip of first through-hole 1011, just the upper end of epoxy locating piece 108 with cross the cab apron butt setting, radio frequency probe 103 wears to locate epoxy locating piece 108 sets up.

Specifically, the fixing device further includes a limiting bolt (not shown), two sides of the front end of the metal fixing bracket 101 are respectively provided with a threaded hole 1012 communicated with the first through hole 1011 in a recessed manner, the limiting bolt is respectively screwed in the threaded holes 1012, and the front end of the limiting bolt can be respectively abutted against the outer peripheral wall of the coaxial rf connector 102.

Specifically, the outer peripheral wall of the lower end of the grounding copper sleeve 105 is in abutting electrical connection with the probe shield grounding head 106, and the upper end of the probe shield grounding head 106 is in abutting electrical connection with the coaxial rf connector 102.

Specifically, the rear end of the metal fixing bracket 101 is recessed with a plurality of mounting holes 1013.

Specifically, the isolation plastic sleeve is made of polytetrafluoroethylene.

Specifically, the grounding copper sleeve and the probe shielding grounding head are both made of beryllium copper.

Specifically, the radio frequency probe is made of rhenium tungsten or beryllium copper, has the advantages of good hardness/fatigue resistance and good stability, and is suitable for long-time testing.

Specifically, the distance between the needle tip and the front end wall of the shielding grounding needle ranges from 0.1mm to 0.5 mm.

Specifically, the utility model discloses a front end portion of metal fixed bolster is concave to have a first through-hole aslope, coaxial radio frequency connector can be from top to bottom movable inlays and locates in the first through-hole, the radio frequency probe inlays and locates and separates the plastic sleeve and set up, it inlays and locates and connects the plastic sleeve and set up to separate, it is concave to be equipped with a first spliced eye to separate the rear end portion of probe shielding ground head, the lower tip detachable of ground copper sleeve inlays and locates and sets up in the first spliced eye, the front end portion of probe shielding ground head is concave to be equipped with a second through-hole with the radio frequency probe looks adaptation, the front end portion of radio frequency probe is equipped with a needle point that takes the form of the cone structure setting, the needle point stretches out the second through-hole and sets up outward, the both sides of the front end wall of probe shielding ground head are protruding to be equipped with an inward sloping shielding ground needle respectively, the needle point is located the inboard setting of shielding ground needle, the lower tip of coaxial radio frequency connector is equipped with a bolt, the lower tip of bolt is equipped with a second spliced eye with radio frequency probe looks adaptation, and the upper end detachable of radio frequency probe inlays and locates the setting in the second spliced eye, and the upper end of radio frequency probe is connected with the bolt electricity to effectively improve the shielding effect and the stability of performance of radio frequency probe, and have simple structure, low in manufacturing cost, the insertion loss is little, the standing wave is low, advantages such as stable performance can be used to electronic test equipment, measure the electronic circuit Radio Frequency (RF) signal in silicon chip, tube core and the open microchip.

The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.

Claims (10)

1. A micro-coaxial radio frequency probe card is characterized by comprising a metal fixing support, a coaxial radio frequency connector, a radio frequency probe, an isolation plastic sleeve, a grounding copper sleeve and a probe shielding grounding head, wherein the front end part of the metal fixing support is obliquely and concavely provided with a first through hole, the coaxial radio frequency connector can be movably embedded in the first through hole up and down, the radio frequency probe is embedded in the isolation plastic sleeve, the isolation plastic sleeve is embedded in the grounding copper sleeve, the rear end part of the probe shielding grounding head is concavely provided with a first inserting hole, the lower end part of the grounding copper sleeve is detachably embedded in the first inserting hole, the front end part of the probe shielding grounding head is concavely provided with a second through hole matched with the radio frequency probe, and the front end part of the radio frequency probe is provided with a needle point which is arranged in a cone-shaped structure, the needle point extends out of the second through hole, an inward-inclined shielding grounding needle is convexly arranged on two sides of the front end wall of the probe shielding grounding head respectively, the needle point is located on the inner side of the shielding grounding needle, a bolt is arranged at the lower end part of the coaxial radio frequency connector, a second inserting hole matched with the radio frequency probe is arranged at the lower end part of the bolt, the upper end part of the radio frequency probe is detachably embedded in the second inserting hole, and the upper end part of the radio frequency probe is electrically connected with the bolt.

2. The micro-coaxial radio frequency probe card according to claim 1, wherein the front end walls of the shielding grounding needles are all arranged in an inwardly inclined plane structure, a limiting plate is respectively and convexly arranged on the outer sides of the front end walls of the shielding grounding needles, and the lower end portions of the needle tips extend out of the lower end walls of the limiting plates.

3. The micro-coaxial radio frequency probe card according to claim 1, further comprising a transition plate and an epoxy positioning block, wherein the transition plate is disposed at a lower end of the coaxial radio frequency connector, a third through hole is concavely disposed in a middle of an upper end wall of the transition plate, the grounding copper sleeve is disposed in the third through hole in a penetrating manner, the transition plate is disposed in the first through hole, an outer peripheral wall of the transition plate is abutted against an inner peripheral wall of the first through hole, the epoxy positioning block is embedded at a lower end of the first through hole, an upper end of the epoxy positioning block is abutted against the transition plate, and the radio frequency probe is disposed in the epoxy positioning block in a penetrating manner.

4. The micro-coaxial radio frequency probe card according to claim 1, further comprising a limit bolt, wherein two sides of the front end of the metal fixing bracket are respectively concavely provided with a threaded hole communicated with the first through hole, the limit bolt is respectively screwed in the threaded holes, and the front end of the limit bolt can be respectively abutted against the outer peripheral wall of the coaxial radio frequency connector.

5. The micro-coaxial rf probe card of claim 1, wherein the outer peripheral wall of the lower end of the grounding copper sleeve is in abutting electrical connection with the probe shield ground contact, and the upper end of the probe shield ground contact is in abutting electrical connection with the coaxial rf connector.

6. The micro-coaxial rf probe card of claim 1, wherein the rear end of the metal fixing bracket is recessed with a plurality of mounting holes.

7. The micro-coaxial rf probe card of claim 1, wherein the isolation plastic sleeve is formed of ptfe.

8. The micro-coaxial rf probe card of claim 1, wherein the grounding copper sleeve and the probe shield grounding header are both formed of beryllium copper.

9. The micro-coaxial rf probe card of claim 1, wherein the rf probes are formed of rhenium tungsten or beryllium copper.

10. The micro-coaxial rf probe card of claim 1, wherein the distance between the tip and the front end wall of the shielding ground pin is in a range of 0.1mm to 0.5 mm.

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