CN217155683U - Micro differential pressure sensor - Google Patents
Micro differential pressure sensor Download PDFInfo
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- CN217155683U CN217155683U CN202220962071.XU CN202220962071U CN217155683U CN 217155683 U CN217155683 U CN 217155683U CN 202220962071 U CN202220962071 U CN 202220962071U CN 217155683 U CN217155683 U CN 217155683U
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Abstract
The utility model relates to a sensor, especially a little differential pressure sensor, including mems hot type flow sensor, still include: the detection flow channel comprises an air inlet hole, a first throttling hole, a detection hole, a second throttling hole and an air outlet hole which are sequentially arranged, wherein the diameters of the first throttling hole and the second throttling hole are smaller than the diameters of the air inlet hole, the detection hole and the air outlet hole, the diameters of the first throttling hole and the second throttling hole are the same, the diameters of the air inlet hole and the air outlet hole are the same, and the mems thermal type flow sensor is installed in the detection hole. When the pressure of the air inlet and the pressure of the air outlet are different, air flow can flow through the sensor through the small throttling hole and the detection hole, the pressure of the air inlet and the air outlet and the flow speed of the surface of the mems thermal flow sensor are in one-to-one correspondence, the pressure difference between the two ends of the air inlet and the two ends of the air outlet is measured by measuring the flow speed of the surface of the mems thermal flow sensor, the detection precision is high, signals are sensitive, and zero drift is small.
Description
Technical Field
The utility model relates to a sensor, especially a little differential pressure sensor.
Background
The existing differential pressure sensor generally adopts a film type, a resistance bridge is processed on the film, deformation and resistance change are caused after pressure on two sides of the film changes, and a pressure signal is measured by measuring the change of the resistance. However, the thin film type differential pressure sensor has low precision, large zero drift, low small signal sensitivity and easy drift after long-term operation because the thin film type differential pressure sensor needs to cause the deformation of the thin film.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, the utility model provides a differential pressure sensor is a little that measurement accuracy is high, the drift is little, sensitivity is high, and concrete technical scheme is:
a micro differential pressure sensor comprises a mems thermal flow sensor and also comprises: the detecting flow channel comprises an air inlet hole, a first throttling hole, a detecting hole, a second throttling hole and an air outlet hole which are sequentially arranged, wherein the diameter of the first throttling hole and the diameter of the second throttling hole are smaller than that of the air inlet hole, the diameter of the detecting hole is smaller than that of the air outlet hole, the diameter of the first throttling hole is the same as that of the second throttling hole, the diameter of the air inlet hole is the same as that of the air outlet hole, and the mems thermal type flow sensor is installed in the detecting hole.
Preferably, the aspect ratio of the detection flow channel is greater than 5.
Compared with the prior art the utility model discloses following beneficial effect has:
the utility model provides a pair of differential pressure sensor is different at air inlet and gas outlet pressure, and the air current can be through throttle aperture and inspection hole flow sensor, and the pressure of inlet port and venthole is the one-to-one relation with the velocity of flow on mems thermal type flow sensor surface, measures the pressure differential at inlet port and venthole both ends through the velocity of flow that measures mems thermal type flow sensor surface, and it is little to detect the precision height, signal sensitivity, drift at zero point.
Drawings
Fig. 1 is a schematic structural view of a micro differential pressure sensor.
Detailed Description
The present invention will now be further described with reference to the accompanying drawings.
As shown in fig. 1, the micro differential pressure sensor comprises a mems thermal flow sensor 4 and a detection flow channel, wherein the detection flow channel comprises an air inlet 1, a first throttle hole 2, a detection hole 3, a second throttle hole 5 and an air outlet 6 which are sequentially arranged, the diameters of the air inlet 1 and the air outlet 6 are the same, the diameters of the first throttle hole 2 and the second throttle hole 5 are smaller than those of the air inlet 1, the detection hole 3 and the air outlet 6, the aspect ratio of the detection flow channel is larger than 5, and the mems thermal flow sensor 4 is installed in the detection hole 3.
The aspect ratio of the detection flow channel is larger than 5, namely the ratio of the length of the detection flow channel to the diameters of the air inlet hole 1 and the air outlet hole 6 is larger than 5, so that the stability of the surface air flow of the mems thermal type flow sensor 4 is ensured.
The pressure difference signal is measured by adopting the mems thermal type flow sensor 4, when the pressure of the air inlet hole 1 is different from that of the air outlet hole 6, the air flow can flow through the sensor through the first throttling small hole and the flow channel, the pressure of the air inlet and the air outlet is in one-to-one correspondence with the flow speed of the surface of the mems thermal type flow sensor 4, and the pressure difference signal between the two ends of the air inlet hole 1 and the two ends of the air outlet hole 6 is measured by measuring the flow speed of the surface of the mems thermal type flow sensor 4
The mems thermal flow sensor 4 has high long-term stability, high accuracy, difficulty in zero drift, and high sensitivity because of no moving parts.
The throttling small holes can adopt different diameters, so that products with different pressure measuring ranges can be designed.
The technical principle of the present invention is described above with reference to specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without any inventive effort, which would fall within the scope of the claims of the present invention.
Claims (2)
1. A micro differential pressure sensor comprises a mems thermal flow sensor (4), and is characterized by further comprising: detect the runner, detect the runner including inlet port (1), first orifice (2), inspection hole (3), second orifice (5) and venthole (6) that set gradually, wherein, first orifice (2) with the diameter of second orifice (5) all is less than inlet port (1) inspection hole (3) with venthole (6), just first orifice (2) with the diameter of second orifice (5) is the same, inlet port (1) with the diameter of venthole (6) is the same, mems thermal flow sensor (4) are installed in inspection hole (3).
2. The micro differential pressure sensor according to claim 1, wherein the aspect ratio of the detection flow channel is greater than 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220962071.XU CN217155683U (en) | 2022-04-24 | 2022-04-24 | Micro differential pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220962071.XU CN217155683U (en) | 2022-04-24 | 2022-04-24 | Micro differential pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217155683U true CN217155683U (en) | 2022-08-09 |
Family
ID=82661672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220962071.XU Active CN217155683U (en) | 2022-04-24 | 2022-04-24 | Micro differential pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217155683U (en) |
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2022
- 2022-04-24 CN CN202220962071.XU patent/CN217155683U/en active Active
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