CN217110360U - Conveying device for semiconductor processing - Google Patents
Conveying device for semiconductor processing Download PDFInfo
- Publication number
- CN217110360U CN217110360U CN202220680518.4U CN202220680518U CN217110360U CN 217110360 U CN217110360 U CN 217110360U CN 202220680518 U CN202220680518 U CN 202220680518U CN 217110360 U CN217110360 U CN 217110360U
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- air
- hollow roller
- belt
- semiconductor processing
- stoving case
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a conveying device for semiconductor processing, which comprises a frame, a plurality of hollow rollers are arranged in the frame, and each hollow roller is provided with a plurality of air outlets, one end of each hollow roller is closed and is provided with a belt pulley, the belt pulleys are connected by adopting a belt for transmission, the belt is driven by a motor, the other end of each hollow roller is provided with a rotary joint, the rotary joints are connected with an air pipe together, a plurality of air inlets are arranged on the air pipe, and the air inlets are externally connected with a hot air source; the top of hollow roller sets up the stoving case, the bottom of stoving case sets up a plurality of air outlet nozzles, the top of stoving case sets up a plurality of intake pipes, the intake pipe connects hot-air source outward. The utility model has compact and reasonable structure and convenient use; the hollow roller and the drying box are arranged to heat and dry the semiconductor up and down simultaneously, so that the drying efficiency and the drying quality are improved.
Description
Technical Field
The utility model relates to a semiconductor processing technology field, concretely relates to a conveyor for semiconductor processing.
Background
At present, the drying mode in the prior art mostly uses room temperature for dehumidification, but the drying mode needs a long time, so that the production efficiency is reduced, and a common conveying device dries the semiconductor, the drying effect is not good, and the drying effect on the bottom of the semiconductor is not good, so that the conveying device for semiconductor processing is provided to solve the problem.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a conveyor for semiconductor processing to prior art's defect and not enough.
In order to achieve the above object, the utility model adopts the following technical scheme: a conveyor for semiconductor processing, includes the frame, and its innovation point lies in: the machine frame is internally provided with a plurality of hollow rollers, each hollow roller is provided with a plurality of air outlet holes, one end of each hollow roller is closed and is provided with belt pulleys, the belt pulleys are in transmission connection by adopting a belt, the belt is driven by a motor, the other end of each hollow roller is provided with a rotary joint, the rotary joints are jointly connected with an air pipe, a plurality of air inlets are formed in the air pipe, and the air inlets are externally connected with a hot air source; the top of hollow roller sets up the stoving case, the bottom of stoving case sets up a plurality of air outlet nozzles, the top of stoving case sets up a plurality of intake pipes, the intake pipe connects hot-air source outward.
Furthermore, the air outlet nozzles are arranged in rows, and each row corresponds to one hollow roller.
Furthermore, the drying box can also be heated by adopting an electric heating pipe.
Further, air inlet and intake pipe all include 3 at least, and are located left side well right side respectively.
After the structure is adopted, the utility model discloses beneficial effect does:
the utility model has compact and reasonable structure and convenient use; the hollow roller and the drying box are arranged to heat and dry the semiconductor up and down simultaneously, so that the drying efficiency and the drying quality are improved.
Drawings
Fig. 1 is a front view of the present invention;
fig. 2 is a top view of the present invention.
Description of reference numerals:
1 frame, 2 hollow rollers, 3 ventholes, 4 belt pulleys, 5 belts, 6 motors, 7 rotary joints, 8 trachea, 9 air inlets, 10 stoving case, 11 air outlet mouths, 12 intake pipes.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and the following detailed description. It should be understood that the detailed description and specific examples, while indicating the invention, are given by way of illustration only.
Referring to fig. 1-2, a conveying device for semiconductor processing comprises a frame 1, wherein a plurality of hollow rollers 2 are arranged in the frame 1, each hollow roller 2 is provided with a plurality of air outlet holes 3, one end of each hollow roller 2 is closed and is provided with a belt pulley 4, the belt pulleys 4 are in transmission connection by adopting a belt 5 and are driven by a motor 6, the other end of each hollow roller 2 is provided with a rotary joint 7, the rotary joints 7 are connected with an air pipe 8 together, a plurality of air inlets 9 are arranged on the air pipes 8, and the air inlets 9 are externally connected with a hot air source; the top of hollow roller 2 sets up stoving case 10, and the bottom of stoving case 10 sets up a plurality of air outlet nozzle 11, and the top of stoving case 10 sets up a plurality of intake pipes 12, and the intake pipe connects the hot-air supply outward. Specifically, a semiconductor is placed on a hollow roller 2, the hollow roller 2 rotates to move forwards, in the moving process, a hot gas source enters the hollow roller 2 through an air inlet 9, an air pipe 8 and a rotary joint 7 respectively and is discharged from an air outlet 3 to dry the bottom of the semiconductor, and meanwhile, hot gas in a drying box is discharged from an air outlet nozzle 11 to dry the upper surface of the semiconductor, so that the drying efficiency and the drying quality are improved; bearing seats are arranged on the left side and the right side of the hollow roller 2 and fixed in the frame.
In this embodiment, the air outlet nozzles 11 are arranged and each row corresponds to one hollow roller 2, so that the semiconductor is dried at the same time, and the drying efficiency is improved.
In this embodiment, the drying box 10 may also be heated by an electric heating tube.
In this embodiment, each of the intake ports 9 and the intake pipes 12 includes at least 3, and is respectively located at the left, middle, and right sides, thereby ensuring a sufficient amount of hot air.
The above description is only used for illustrating the technical solutions of the present invention and not for limiting the same, and other modifications or equivalent replacements made by the technical solutions of the present invention by those of ordinary skill in the art should be covered within the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solutions of the present invention.
Claims (4)
1. A conveyor for semiconductor processing, includes the frame, its characterized in that: the machine frame is internally provided with a plurality of hollow rollers, each hollow roller is provided with a plurality of air outlet holes, one end of each hollow roller is closed and is provided with belt pulleys, the belt pulleys are in transmission connection by adopting a belt, the belt is driven by a motor, the other end of each hollow roller is provided with a rotary joint, the rotary joints are jointly connected with an air pipe, a plurality of air inlets are formed in the air pipe, and the air inlets are externally connected with a hot air source; the top of hollow roller sets up the stoving case, the bottom of stoving case sets up a plurality of air outlet nozzles, the top of stoving case sets up a plurality of intake pipes, the intake pipe connects hot-air source outward.
2. The conveying apparatus for semiconductor processing according to claim 1, wherein: the air outlet nozzles are arranged in rows, and each row corresponds to one hollow roller.
3. The conveying apparatus for semiconductor processing according to claim 1, wherein: the drying box can also be heated by adopting an electric heating pipe.
4. The conveying device for semiconductor processing according to claim 1, wherein: the air inlet and the air inlet pipe at least comprise 3 air inlets and are respectively positioned at the left, middle and right sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220680518.4U CN217110360U (en) | 2022-03-27 | 2022-03-27 | Conveying device for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220680518.4U CN217110360U (en) | 2022-03-27 | 2022-03-27 | Conveying device for semiconductor processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217110360U true CN217110360U (en) | 2022-08-02 |
Family
ID=82605292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220680518.4U Active CN217110360U (en) | 2022-03-27 | 2022-03-27 | Conveying device for semiconductor processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217110360U (en) |
-
2022
- 2022-03-27 CN CN202220680518.4U patent/CN217110360U/en active Active
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