CN221115825U

CN221115825U - Conveying device for semiconductor processing

Info

Publication number: CN221115825U
Application number: CN202322935903.6U
Authority: CN
Inventors: 赵江民
Original assignee: Hefei Jiufu Semiconductor Technology Co ltd
Current assignee: Hefei Jiufu Semiconductor Technology Co ltd
Priority date: 2023-10-31
Filing date: 2023-10-31
Publication date: 2024-06-11
Anticipated expiration: 2033-10-31

Abstract

The utility model discloses a conveying device for semiconductor processing, which belongs to the field of semiconductor processing, and comprises an air drying box, wherein a conveyor belt is rotationally connected inside the air drying box, a rotating shaft is rotationally connected in the middle of the conveyor belt, a plurality of groups of V-shaped frames are circumferentially arranged on the outer wall of the rotating shaft, a plurality of groups of air drying covers are fixedly connected inside the air drying box, an air duct is arranged at the top of the air drying box, a fan is fixedly connected inside the air duct, and the air duct is communicated with the air drying covers; when driving the semiconductor through the conveyer belt and carrying, the semiconductor removes in the V type frame, then the pivot drives the semiconductor on the V type frame and turns over to make the semiconductor accept the different faces that multiunit air-dry cover aligns and the air-dry of different angles, avoid moisture to remain in the clearance between the components and parts on the semiconductor, improve air-dry efficiency and effect.

Description

Conveying device for semiconductor processing

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a conveying device for semiconductor processing.

Background

Semiconductors refer to materials having conductivity properties at ordinary temperatures between those of conductors and insulators, and are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high power conversion, and the like, and as diodes, devices fabricated using semiconductors.

At present, a drying mode in the prior art is mainly used for dehumidifying at room temperature, but the mode needs a long time, so that the production efficiency is reduced, a common conveying device is used for drying the semiconductors, the drying effect is not good, and the drying effect on the bottoms of the semiconductors is not good.

The utility model discloses a conveyor is used in semiconductor processing, which comprises a bracket, the inboard rotation of support is connected with two pulleys, two the transmission is connected with the drive belt between the outside of pulley, the top fixedly connected with rubber block of drive belt, the box is placed to the top fixedly connected with of rubber block, the front and the equal fixedly connected with ventilation net in back of placing the box, the inboard fixedly connected with of placing the box shelves the pole, the top fixedly connected with stoving case of support, the stoving hole has all been seted up to the front and the back of stoving case, the inboard fixedly connected with heating wire of stoving hole, the inboard fixedly connected with stoving fan of stoving hole, the louvre has been seted up at the top of stoving case, the top fixedly connected with radiator fan of stoving case, the equal fixedly connected with business turn over hole in the left and right sides of stoving case. The conveying device for the semiconductor processing is convenient to dry and transport.

However, the above-mentioned application has the following disadvantages that when the semiconductor is dried in the transportation, hot air is blown to the semiconductor from the side surface to be dried, and when the semiconductor is dried, the semiconductor can block the gap because of the components and parts on the semiconductor, so that the hot air can not blow off the moisture in the gap, and the moisture remains on the semiconductor, thereby the moisture of the semiconductor is not completely dried, and the drying effect is reduced.

Disclosure of utility model

In order to overcome the technical problems described above, the present utility model is directed to a conveying device for semiconductor processing, so as to solve the problems in the prior art that, because hot air is blown to a semiconductor from a side surface to dry the semiconductor, the semiconductor is blocked from a gap due to components thereon during drying, so that the hot air cannot blow off moisture in the gap, and moisture remains on the semiconductor, thereby causing incomplete moisture air drying of the semiconductor and reducing the drying effect.

The aim of the utility model can be achieved by the following technical scheme:

The conveying device for the semiconductor processing comprises an air drying box, a conveyor belt is connected to the inside of the air drying box in a rotating mode, a rotating shaft is connected to the middle of the conveyor belt in a rotating mode, a plurality of groups of V-shaped frames are arranged on the circumference array of the outer wall of the rotating shaft, a plurality of groups of air drying covers are fixedly connected to the inside of the air drying box, an air duct is arranged at the top of the air drying box, a fan is fixedly connected to the inside of the air duct, and the air duct is communicated with the air drying covers.

As a further scheme of the utility model: the conveyer belt has two sets of, two sets of conveyer belt parallel arrangement, the pivot is located between two sets of conveyer belts.

As a further scheme of the utility model: the inside fixedly connected with backup pad of air-drying cabinet, fixedly connected with two sets of fixed plates in the backup pad, pivot both ends rotate to be connected on the relative one side inner wall of two sets of fixed plates, a set of fixed plate lateral wall fixedly connected with driving motor, the driving motor output passes through the drive belt and links to each other with the pivot transmission.

As a further scheme of the utility model: six groups of V-shaped frames are arranged, and the included angle of each V-shaped frame is 30 degrees.

As a further scheme of the utility model: the outer wall of the V-shaped frame is sleeved with a rubber sleeve.

As a further scheme of the utility model: the air dryer is characterized in that an air distribution pipe is fixedly connected to the bottom of the air dryer and is communicated with a plurality of groups of air drying covers, and a filter plate and an electric heating rod are fixedly connected to the inner wall of the air dryer.

As a further scheme of the utility model: the air-drying covers are three groups, and the three groups of air-drying covers are respectively positioned at the top and two sides of the V-shaped frame.

As a further scheme of the utility model: the inner wall of the bottom of the air drying box is provided with a water receiving tank.

The utility model has the beneficial effects that:

According to the utility model, when the semiconductor is driven to be conveyed by the conveyor belt, the semiconductor moves into the V-shaped frame, and then the rotating shaft drives the semiconductor on the V-shaped frame to turn over, so that the semiconductor is subjected to air drying of different surfaces and different angles by aligning a plurality of groups of air drying covers, the gap residue of moisture between components on the semiconductor is avoided, and the air drying efficiency and effect are improved.

Drawings

The utility model is further described below with reference to the accompanying drawings.

FIG. 1 is a schematic view of the overall structure of the present utility model;

FIG. 2 is a schematic top view of the cross-sectional structure of the present utility model;

FIG. 3 is a schematic view of the structure of the rotating shaft and the V-shaped frame in the utility model.

In the figure: 1. an air drying box; 2. a conveyor belt; 3. a rotating shaft; 301. a support plate; 302. a fixing plate; 4. a V-shaped frame; 401. a rubber sleeve; 5. an air drying cover; 6. an air duct; 601. a blower; 602. a gas distribution pipe; 603. a filter plate; 604. an electric heating rod; 7. a driving motor; 701. a transmission belt; 8. a water receiving tank.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in figures 1-3, the conveying device for semiconductor processing comprises an air drying box 1, wherein conveying belts 2 are rotatably connected inside the air drying box 1, two groups of conveying belts 2 are arranged in parallel, a rotating shaft 3 is positioned between the two groups of conveying belts 2, a plurality of groups of V-shaped frames 4 are arranged on the circumferential array of the outer wall of the rotating shaft 3, six groups of V-shaped frames 4 are arranged, the included angle of each V-shaped frame 4 is 30 degrees, a plurality of groups of air drying covers 5 are fixedly connected inside the air drying box 1, three groups of air drying covers 5 are arranged, the three groups of air drying covers 5 are respectively positioned at the top and two sides of each V-shaped frame 4, an air cylinder 6 is arranged at the top of the air drying box 1, a fan 601 is fixedly connected inside the air cylinder 6, and the air cylinder 6 is communicated with the air drying covers 5.

As shown in fig. 1 and 3, the inside fixedly connected with backup pad 301 of air-drying cabinet 1 in the aforesaid, fixedly connected with two sets of fixed plates 302 on the backup pad 301, pivot 3 both ends rotate and connect on the inner wall of one side that two sets of fixed plates 302 are relative, a set of fixed plate 302 lateral wall fixedly connected with driving motor 7, driving motor 7 output passes through drive belt 701 and links to each other with pivot 3 transmission, driving motor 7 passes through drive belt 701 and drives pivot 3 rotation, pivot 3 drives multiunit V type frame 4 rotation, thereby carry out rotatory turn-over to the semiconductor that conveyor 2 conveyed on the V type frame 4, the convenience is air-dried to the different faces of semiconductor, improve the comprehensiveness of air-drying, simultaneously be equipped with rubber sleeve 401 at the outer wall cover of V type frame 4, through the setting of rubber sleeve 401 and semiconductor contact, avoid the semiconductor to remove to collide with on the V type frame 4, improve the stability of turn-over.

As shown in fig. 1, the bottom of the air duct 6 is fixedly connected with the air distribution pipe 602, the air distribution pipe 602 is communicated with the air drying hoods 5 in a plurality of groups for synchronous ventilation, the filter plate 603 and the electric heating rod 604 are fixedly connected to the inner wall of the air duct 6, the air entering the air distribution pipe is filtered through the filter plate 603, dust is prevented from adhering to a semiconductor, the air entering the air distribution pipe is heated through the electric heating rod 604, the air drying efficiency is improved, the inner wall of the bottom of the air drying box 1 is provided with the water receiving tank 8, and moisture blown out of the semiconductor is received through the water receiving tank 8, so that the moisture is prevented from flowing into the ground.

The working principle of the utility model is as follows: when the semiconductor dryer is used, a semiconductor is placed on the conveyor belt 2, the bottoms of the two ends of the semiconductor are attached to the tops of the two ends of the two groups of conveyor belts 2, the conveyor belt 2 rotates to drive the semiconductor to move, meanwhile, the fan 601 inside the air duct 6 is started, the fan 601 pumps air, the air is sent into the air drying hoods 5 of the multiple groups through the air distribution pipe 602 to blow out the semiconductor onto the conveyor belt 2, when the semiconductor moves to the lower part of the air drying hoods 5, the air blown by the air drying hoods 5 is blown out, the moisture on the semiconductor is blown out to be dried, then the conveyor belt 2 drives the semiconductor to continuously move to the inner wall of the V-shaped frame 4 of the outer wall of the rotating shaft 3, then the driving motor 7 is started, the driving motor 7 drives the rotating shaft 3 to rotate through the conveyor belt 701, the rotating shaft 3 drives the V-shaped frame 4 to rotate upwards, the semiconductor is attached to the inner wall of one side of the V-shaped frame 4, the group of the air drying hoods 5 located on the upper side of the V-shaped frame 4 simultaneously when the V-shaped frame 4 drives the semiconductor to rotate upwards, the semiconductor is blown out of the air, the semiconductor is blown out through different angles of the V-shaped frame 4 when the semiconductor is driven to rotate upwards, the semiconductor is blown out, the different angles of the air drying hoods 5 are made to be inclined, the semiconductor is made to be different, the semiconductor is further inclined to the inner side of the V-shaped frame 5 is further rotates, the semiconductor is further subjected to the inner side 2 is driven to the inner side of the semiconductor is continuously rotates, the inner side of the semiconductor is subjected to be subjected to the air drying effect is subjected to the drying 2, and the semiconductor is subjected to the drying effect is subjected to the drying effect to the drying and the drying effect is carried.

The foregoing describes one embodiment of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.

Claims

1. The conveying device for the semiconductor processing comprises an air drying box (1) and is characterized in that a conveying belt (2) is connected to the inside of the air drying box (1) in a rotating mode, a rotating shaft (3) is connected to the middle of the conveying belt (2), a plurality of groups of V-shaped frames (4) are arranged on the circumferential array of the outer wall of the rotating shaft (3), a plurality of groups of air drying covers (5) are fixedly connected to the inside of the air drying box (1), an air duct (6) is arranged at the top of the air drying box (1), a fan (601) is fixedly connected to the inside of the air duct (6), and the air duct (6) is communicated with the air drying covers (5).

2. The conveying device for semiconductor processing according to claim 1, wherein the conveyor belts (2) are arranged in two groups, the conveyor belts (2) of two groups are arranged in parallel, and the rotating shaft (3) is positioned between the conveyor belts (2) of two groups.

3. The conveying device for semiconductor processing according to claim 1, wherein a supporting plate (301) is fixedly connected inside the air drying box (1), two groups of fixing plates (302) are fixedly connected to the supporting plate (301), two ends of the rotating shaft (3) are rotatably connected to inner walls of one side, opposite to the two groups of fixing plates (302), of the rotating shaft, a group of side walls of the fixing plates (302) are fixedly connected with a driving motor (7), and the output end of the driving motor (7) is in transmission connection with the rotating shaft (3) through a transmission belt (701).

4. The conveying device for semiconductor processing according to claim 1, wherein the V-shaped frames (4) have six groups, and the included angle of the V-shaped frames (4) is 30 °.

5. The conveying device for semiconductor processing according to claim 1, wherein a rubber sleeve (401) is sleeved on the outer wall of the V-shaped frame (4).

6. The conveying device for semiconductor processing according to claim 1, wherein a gas distribution pipe (602) is fixedly connected to the bottom of the air duct (6), the gas distribution pipe (602) is communicated with a plurality of groups of air drying hoods (5), and a filter plate (603) and an electric heating rod (604) are fixedly connected to the inner wall of the air duct (6).

7. The conveying device for semiconductor processing according to claim 1, wherein the air-drying hoods (5) are three groups, and the three groups of air-drying hoods (5) are respectively positioned at the top and at two sides of the V-shaped frame (4).

8. The conveying device for semiconductor processing according to claim 1, wherein a water receiving groove (8) is arranged on the inner wall of the bottom of the air drying box (1).