CN217086552U - Base plate of miniLED acupuncture transfer apparatus is got and is put device - Google Patents

Abstract

The application relates to the field of semiconductor display device manufacturing equipment, in particular to a substrate taking and placing device of miniLED needling transfer equipment. The key points of the technical scheme are as follows: the substrate turnover mechanism drives the plurality of first substrate grabbing components to rotate so as to rotate and switch the pick-and-place positions of the substrate workpieces; the substrate feeding mechanism is used for adsorbing and grabbing the substrate and transferring the crystal film to the needling transfer device for transfer; and the substrate swinging and taking mechanism is positioned between the substrate feeding mechanism and the substrate overturning mechanism and used for transferring the substrate which is positioned at the substrate overturning mechanism and is not transferred to the substrate feeding mechanism for grabbing or transferring the transferred substrate which is positioned at the substrate feeding mechanism to the substrate overturning mechanism to realize discharging.

Description

Base plate of miniLED acupuncture transfer apparatus is got and is put device

Technical Field

The application relates to the field of semiconductor display device manufacturing equipment, in particular to a substrate taking and placing device of miniLED needling transfer equipment.

Background

miniLED video picture technique is a novel video picture technique, adopt littleer luminous crystal granule, traditional display screen compares, because of the crystal size is little, consequently the same big panel can hold more miniLED crystals, can divide more meticulous subregion in a poor light, through carrying out independent control to every luminous crystal, more accurate luminous control function and power consumption control function have, and simultaneously, miniLED lamp pearl is more, the backlight is just brighter, mean that it can let the display possess higher luminance, contrast and colour gamut, draw high visual upper limit, for the user, use experience and promote greatly

At present, miniLED crystals generally need to undergo the process steps of crystal expansion, crystal arrangement, welding and the like, wherein the crystal expansion refers to the step of placing cut round crystals on a film body with ductility, and pulling the film body to enable the crystals to have larger spacing so as to facilitate the crystal transfer; and then placing the crystal film after crystal expansion in a transfer device, transferring the crystal film to a glass substrate to realize the ordering of the crystals, then transferring the crystals on the glass substrate to a PCB substrate again, and completing the installation of the crystals in a welding mode.

Before the crystal sorting and transferring, the substrate is usually required to be placed beside a puncture transferring device of a transferring device for transferring, but in the related art, the efficiency of substrate transferring is still not ideal, and the improvement space is large.

SUMMERY OF THE UTILITY MODEL

In order to promote the transshipment efficiency of base plate, this application provides a base plate of miniLED acupuncture transfer apparatus gets puts device.

The application provides a base plate of miniLED acupuncture transfer apparatus gets and puts device adopts following technical scheme:

a substrate taking and placing device of miniLED needling transfer equipment comprises at least two first substrate grabbing components, wherein the first substrate grabbing components can respectively grab transferred and non-transferred substrate workpieces, and a substrate overturning mechanism drives a plurality of first substrate grabbing components to rotate so as to rotatably switch the taking and placing positions of the substrate workpieces; the substrate feeding mechanism is used for adsorbing and grabbing the substrate and transferring the crystal film to the needling transfer device for transfer; and the substrate swinging and taking mechanism is positioned between the substrate feeding mechanism and the substrate overturning mechanism and is used for transferring the substrate which is positioned at the substrate overturning mechanism and is not transferred to the substrate feeding mechanism for grabbing or transferring the substrate which is positioned at the substrate feeding mechanism and is transferred to the substrate overturning mechanism to realize discharging.

By adopting the technical scheme, in the process of transferring the substrate, the substrate turnover mechanism can grab the substrate which is not transferred, the substrate can be stably sent into the feeding mechanism under the transferring action of the substrate swinging and taking mechanism, the substrate is transferred to the needling transfer device through the feeding mechanism to be transferred, then the substrate which is transferred by the feeding mechanism is transferred to the substrate swinging and taking mechanism again, the substrate which is transferred by the feeding mechanism is taken out, the grabbing component is switched while the substrate which is transferred by the substrate turnover mechanism is taken out, the next unprocessed substrate can be synchronously placed in the substrate swinging and taking mechanism, the substrate turnover mechanism can move the substrate which is transferred out to the outside of the equipment after the substrate is placed in the substrate swinging and taking mechanism, the steps are repeated, the continuous taking and placing of the substrate are realized, and the transferring efficiency of the substrate is efficient and rapid.

Preferably, the substrate turnover mechanism further comprises a turnover motor, the first substrate grabbing assemblies are fixedly arranged on an output shaft of the turnover motor, and the turnover motors are circumferentially arranged along the output shaft of the turnover motor.

Through adopting above-mentioned technical scheme, start driving motor, can make a plurality of base plates snatch the position transfer of subassembly, the absorption position of base plate tilting mechanism rotates the switching, and the action is swift high-efficient.

Preferably, the substrate feeding mechanism includes:

a first substrate feeding transverse moving module;

the second substrate feeding transverse moving module is arranged on the first substrate feeding transverse moving module and is vertical to the moving direction of the first substrate feeding transverse moving module;

and the third substrate grabbing assembly is arranged at the second substrate feeding transverse moving module and used for adsorbing the substrate.

Through adopting above-mentioned technical scheme, first base plate material loading sideslip module and second base plate material loading sideslip module are mutually supported and can be made the third base plate snatch the subassembly horizontal migration adjustment, and then can transfer the base plate to in the acupuncture transfer device, and the structure is swift and convenient.

Preferably, the third substrate grabbing assembly comprises a lifting cylinder, a third grabbing arm and a vacuum element, the lifting cylinder is fixedly arranged on the second substrate feeding transverse moving module, the third substrate grabbing assembly is arranged on the lifting cylinder, an annular adsorption groove is formed in the third grabbing arm, the vacuum element is communicated with the annular adsorption groove and used for absorbing air in the annular adsorption groove, and the third grabbing arm sucks the substrate through the annular adsorption groove.

Through adopting above-mentioned technical scheme, cyclic annular adsorption tank can carry out diversified absorption with the base plate on the circumferential direction, and the third snatchs the arm and snatchs stably, and simultaneously, the lift cylinder can order about the third base plate and snatch the subassembly and move down and get the material near base plate swing feeding agencies department, shortens and gets material stroke and time.

Preferably, an observation window is arranged on the third grabbing arm in a penetrating mode, and the observation window is opposite to the substrate and used for observing the crystal region.

By adopting the technical scheme, the crystal position can be observed through the observation window of the transfer equipment, so that the puncture position can be adjusted conveniently by the transfer equipment, and the structure is practical.

Preferably, the substrate swinging and taking mechanism comprises a second substrate grabbing component and a material taking and placing linear module, the second substrate grabbing component is arranged on the material taking and placing linear module, the material taking and placing linear module drives the second substrate grabbing component to reciprocate between the substrate overturning mechanism and the substrate feeding mechanism, and the second substrate grabbing component is used for grabbing the substrate.

Through adopting above-mentioned technical scheme, get and expect that sharp module drives the second base plate snatchs the subassembly and realizes the displacement to make the base plate that has accomplished processing and for accomplishing the processing realize the reprinting between base plate tilting mechanism and base plate feed mechanism, the action is simple and swift.

Preferably, the second substrate grabbing assembly comprises a second grabbing arm, a lifting element and a substrate rotating motor, the lifting element is arranged on the material taking and placing linear module, the substrate rotating motor is arranged on the lifting element, the lifting element is used for driving the substrate rotating motor to lift, the second grabbing arm is arranged on the substrate rotating motor, and the substrate rotating motor is used for driving the second grabbing arm to swing to the substrate overturning mechanism or the substrate feeding mechanism respectively.

By adopting the technical scheme, the substrate rotating motor can enable the second grabbing arm to swing to the substrate overturning mechanism or the substrate feeding mechanism respectively, so that the substrate can be conveniently carried; meanwhile, the lifting element can drive the second grabbing arm to be close to the substrate overturning mechanism or the substrate feeding mechanism in a lifting mode, so that the substrate can be grabbed conveniently, the substrate sliding risk is reduced, and the grabbing is stable.

Preferably, the second substrate grabbing assembly further comprises a positioning block, and the positioning block is fixedly connected to the second grabbing arm and used for abutting against and positioning the periphery of the substrate.

By adopting the technical scheme, the positioning block positions the circumferential direction of the second substrate so as to reduce the offset of the second substrate in the grabbing process, and the position precision in the substrate transferring process is further improved.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the substrate positioned outside the equipment can enter the taking and placing device through the substrate turnover mechanism, and can be stably fed into the feeding device under the transfer action of the substrate swinging material taking mechanism, in the process, the substrate turnover mechanism can synchronously place unprocessed substrates in the swinging material taking mechanism, and can synchronously take out transferred substrates from the swinging material taking mechanism, so that continuous taking and placing of the substrates are realized, and the transfer efficiency of the substrates is efficient and rapid;

2. the transfer device can observe the position of the crystal through the observation window, so that the transfer device can conveniently adjust the puncture position, and the structure is practical;

3. the annular adsorption groove can adsorb the substrate in a multi-azimuth manner in the circumferential direction, and the third grabbing arm is stable in grabbing in the transfer process.

Drawings

Fig. 1 is a schematic structural view of a transfer apparatus in the related art.

Fig. 2 is a schematic diagram of the overall structure of the pick and place mechanism in the embodiment of the present application.

Fig. 3 is a schematic structural view of a substrate turnover mechanism in an embodiment of the present application.

Fig. 4 is a schematic structural diagram of a substrate swinging material taking mechanism in an embodiment of the present application.

Fig. 5 is a schematic structural diagram of a substrate loading mechanism in an embodiment of the present application.

Fig. 6 is a schematic structural view of a third gripper arm in the embodiment of the present application.

Description of reference numerals: 1. a frame; 2. a needle transfer device; 3. a visual detection mechanism; 4. a substrate turnover mechanism; 41. a first substrate capture assembly; 411. a first gripper arm; 42. turning over a motor; 5. the substrate swinging material taking mechanism; 51. a second substrate capture assembly; 511. a second gripper arm; 512. a lifting element; 513. a substrate rotating electrical machine; 514. positioning blocks; 52. taking a material discharging linear module; 6. a substrate feeding mechanism; 61. a first substrate feeding transverse moving module; 62. a second substrate feeding transverse moving module; 63. a third substrate capture assembly; 631. a lifting cylinder; 632. a third gripper arm; 7. an observation window; 8. an annular adsorption tank.

Detailed Description

The present application is described in further detail below with reference to figures 1-6.

Referring to fig. 1, a transfer apparatus includes a frame 1, a needle punching transfer device 2 and a visual detection mechanism 3, the needle punching transfer device 2 and the visual detection mechanism 3 are respectively disposed on the frame 1, the visual detection mechanism 3 is located above the needle punching transfer device 2, the needle punching transfer device 2 can be used for placing a crystal film and ejecting a crystal from the crystal film, a substrate needs to be transferred to the crystal film to receive the crystal, and transfer is achieved.

The embodiment of the application discloses miniLED acupuncture transfer apparatus's base plate is got and is put device for the high efficiency is operated the base plate, it needs to explain that, the base plate can be PCB base plate also can be transparent glass substrate, can realize all carrying the base plate that bears the weight of the crystal, does not do the restriction here, and the present embodiment chooses for use to carry the glass substrate.

Referring to fig. 2, the taking and placing device includes a frame 1, a substrate turning mechanism 4, a substrate feeding mechanism 6 and a substrate swinging material taking mechanism 5, wherein the substrate turning mechanism 4, the substrate feeding mechanism 6 and the substrate swinging material taking mechanism 5 are respectively installed on the frame 1, the substrate feeding mechanism 6 is close to the needling transfer device 2, and the substrate swinging material taking mechanism 5 is located between the substrate turning mechanism 4 and the substrate feeding mechanism 6.

Referring to fig. 3, the substrate turnover mechanism 4 may be matched with a feeding device outside the apparatus, and is configured to adsorb and grab substrates, and grab the transferred and non-transferred substrate workpieces, respectively, and switch the rotation of the different substrate workpieces, where the feeding device may feed the non-transferred glass substrate into the substrate turnover mechanism 4, or take out the transferred glass substrate from the substrate turnover mechanism 4, so as to implement automatic material change; here, it should be noted that the glass substrate has a glue layer for adhering the crystals, the transferred glass substrate refers to a glass substrate on which crystal adhesion arrangement is completed by a transfer technique, and the untransferred glass substrate refers to a type of glass substrate on which crystals are not placed.

Specifically, the substrate turnover mechanism 4 includes a first substrate grabbing component 41 and a turnover motor 42, wherein the turnover motor 42 is fixedly mounted on the frame 1, and the first substrate grabbing component 41 is connected with the turnover motor 42; first base plate snatchs subassembly 41 including being platelike first snatchs arm 411 and first vacuum pump, first snatchs the inside runner that has the air feed body and flows of arm 411, and install the vacuum chuck that is linked together with the runner on the first arm 411 of snatching, first snatch arm 411 passes through trachea and first vacuum pump connection, and runner and first vacuum pump intercommunication, through starting first vacuum pump, first vacuum pump forms the negative pressure in vacuum chuck department, place the glass substrate on first base plate snatchs subassembly 41 this moment, can realize adsorbing the outside glass substrate of equipment.

Further, the first substrate grabbing assemblies 41 may be arranged in a group, and meanwhile, in order to improve the operation efficiency, the number of the first substrate grabbing assemblies 41 may be at least two, for example, two, three, or four, and two are selected in this embodiment as an example, the plurality of first substrate grabbing assemblies 41 are circumferentially arranged along the output shaft of the turnover motor 42 and are simultaneously and fixedly mounted on the output shaft of the turnover motor 42, at this time, the first substrate turnover mechanism 4 may grab a plurality of glass substrates simultaneously, for example, grab glass substrates that have been transferred and have not been transferred simultaneously, at this time, by starting the driving motor, the positions of the plurality of first substrate grabbing assemblies 41 may be transferred, and the suction position of the substrate turnover mechanism 4 is rotationally switched; still can place the glass substrate that does not shift when snatching the glass substrate that has shifted, collect the glass substrate of different grade type for need many times, reduced and snatched the step, material transfer efficiency obtains promoting.

Referring to fig. 4, the substrate grabbed by the substrate turnover mechanism 4 is matched with the substrate swing material fetching mechanism 5 and is sent to the substrate feeding mechanism 6 through the substrate swing material fetching mechanism 5, and the substrate feeding mechanism 6 is used for grabbing the substrate to the needling transfer device 2 for transfer. It should be noted that, the needle transfer devices 2 may be provided with multiple groups, for example, two, three, or four groups, the multiple groups of needle transfer devices 2 are arranged at intervals along the moving direction of the substrate swing material taking mechanism 5, correspondingly, the number of the substrate feeding mechanisms 6 is adapted to the number of the needle transfer devices 2, the multiple substrate feeding mechanisms 6 are arranged corresponding to the multiple needle transfer devices 2, at this time, the substrate swing material taking mechanisms 5 may transfer the substrates at the multiple groups of substrate feeding mechanisms 6 respectively, the multiple substrate feeding mechanisms 6 may share one substrate swing material taking mechanism 5, and the structure is compact and the material transfer range is wide.

In order to transfer the substrates which are not transferred and have been transferred, the substrate swing material taking mechanism 5 comprises a second substrate grabbing component 51 and a material fetching linear module 52, the material fetching linear module 52 generally adopts a motor screw rod type linear module, the material fetching linear module 52 is provided with a sliding table capable of reciprocating, one end of the material fetching linear module 52 is close to the substrate turnover mechanism 4, the substrate feeding mechanism 6 is positioned on one side of the displacement direction of the sliding table and is arranged at intervals along the displacement direction of the sliding table, the material fetching linear module 52 drives the second substrate grabbing component 51 to reciprocate between the substrate turnover mechanism 4 and the multiple groups of substrate feeding mechanisms 6, the second substrate grabbing component 51 is arranged on the sliding table of the material fetching linear module 52, and the second substrate grabbing component 51 is used for grabbing the substrates in the substrate turnover mechanism 4.

Specifically, the second substrate grabbing assembly 51 includes a second grabbing arm 511, a lifting element 512, a substrate rotating motor 513 and a positioning block 514, the lifting element 512 adopts a motor with a screw rod telescopic structure in this embodiment, the telescopic rod is telescopic by outputting torque and matching with the screw rod, and the lifting element 512 is fixedly mounted at the sliding table of the material taking and placing linear module 52; meanwhile, the substrate rotating motor 513 is disposed at the lifting element 512 in a sliding manner along a vertical direction, generally, a sliding rail is additionally disposed at the substrate rotating motor 513, and a sliding block matched with the sliding rail is additionally disposed at the lifting element 512, so as to achieve the installation of the substrate rotating motor 513, the substrate rotating motor 513 is fixedly connected with the telescopic rod of the lifting element 512 through a seat plate, and the substrate rotating motor 513 can perform a stable lifting motion under the driving of the lifting element 512.

The base plate rotating electrical machines 513 are vertically arranged, the second grabbing arms 511 are arranged in a long plate shape in the embodiment, one end of each second grabbing arm 511 is fixedly installed on a telescopic rod of the base plate rotating electrical machines 513, the base plate rotating electrical machines 513 can drive the second grabbing arms 511 to swing in the horizontal direction, one ends, far away from the base plate rotating electrical machines 513, of the second grabbing arms 511 are used for placing the base plates, wherein the positioning blocks 514 are fixedly connected to the peripheral positions of the second grabbing arms 511, the positioning blocks 514 are arranged into a plurality of blocks, the plurality of positioning blocks 514 are arranged along the circumferential direction of the second grabbing arms 511, the base plates are placed on the second grabbing arms 511, the positioning blocks 514 are abutted to the peripheries of the base plates, the base plates are not prone to offset, and grabbing is stable.

By starting the substrate rotating motor 513, the substrate rotating motor 513 drives the second grabbing arm 511 to swing to the lower side of the substrate overturning mechanism 4 or the substrate feeding mechanism 6 respectively, at this time, the lifting element 512 is started to enable the second grabbing arm 511 to ascend, and further to accept the substrate, and under the cooperation of the material taking and placing linear module 52, the substrate which is located at the substrate overturning mechanism 4 and is not transferred is transferred to the substrate feeding mechanism 6 for grabbing, and the substrate which is located at the substrate feeding mechanism 6 and is transferred to the substrate overturning mechanism 4 to achieve discharging, so that substrate transfer is achieved, and the action is efficient and simple.

Referring to fig. 5, the substrate feeding mechanism 6 includes a first substrate feeding traversing module 61, a second substrate feeding traversing module 62, and a third substrate grabbing assembly 63, wherein the first substrate feeding traversing module 61 and the second substrate feeding traversing module 62 both adopt motor screw linear modules, and simultaneously can adopt linear modules in a synchronous belt form, and linear modules capable of realizing reciprocating movement can be adopted, which is not limited herein.

Wherein, the first substrate feeding traversing module 61 is fixedly arranged on the frame 1 and is positioned above the needling transfer device 2, in addition, the second substrate feeding traversing module 62 is arranged at the sliding table position of the first substrate feeding traversing module 61, at the moment, the sliding table moving direction of the second substrate feeding traversing module 62 is vertical to the sliding table moving direction of the first substrate feeding traversing module 61, the third substrate grabbing component 63 is arranged at the second substrate feeding traversing module 62, the third substrate grabbing component 63 is used for adsorbing the substrate, the first substrate feeding traversing module 61 and the second substrate feeding traversing module 62 are matched with each other to enable the third substrate grabbing component 63 to move horizontally and adjust, so that the glass substrate can be transferred between the needling transfer device 2 and the substrate swinging and taking mechanism, in addition, if the substrate grabbing position is deviated, the first substrate feeding traversing module 61 and the second substrate feeding module 62 can drive the third substrate grabbing component 63 to move horizontally on the needling transfer device 2 and the substrate swinging and taking mechanism The defect of inaccurate placement of the substrate position can be overcome by adjusting in the plane direction, and the position precision during transfer is improved.

Refer to fig. 5 and fig. 6, it is concrete, do not realize adsorbing the base plate and snatch, the third base plate snatchs the subassembly 63 and includes lift cylinder 631, the third snatchs arm 632 and vacuum component, lift cylinder 631 is fixed to be set up on the slip table of second base plate material loading sideslip module 62, the third base plate snatchs the subassembly 63 and locates on lift cylinder 631, lift cylinder 631 drive third base plate snatchs subassembly 63 elevating movement, and simultaneously, lift cylinder 631 can order about the third base plate to snatch subassembly 63 and move down and be close to base plate swing feeding agencies 5 departments and get the material, shorten and get material stroke and time.

The third grabber arm 632 is disposed in a plate shape, and an observation window 7 for observing the relative position between the glass substrate and the crystal film is formed in the middle of the third grabber arm, and the observation window 7 is opposite to the substrate and used for observing the crystal region. In addition, an annular adsorption groove 8 is concavely arranged at the bottom surface of the third grabbing arm 632 from outside to inside, and the annular adsorption grooves 8 of the vacuum element are communicated and used for absorbing air in the annular adsorption groove 8; specifically, the vacuum element is a second vacuum pump, an air pipe is installed between the second vacuum pump and the third grabbing arm 632, the air pipe is respectively communicated with the annular adsorption groove 8 and the second vacuum pump, the second vacuum pump is started, the second vacuum pump forms negative pressure at the annular adsorption groove 8 on the third grabbing arm 632, then the periphery of the substrate is sucked through the annular adsorption groove 8, and the third grabbing arm 632 is stably grabbed.

The implementation principle of the substrate taking and placing device of miniLED needling transfer equipment in the embodiment of the application is as follows: in the process of transferring the substrate, the substrate turnover mechanism 4 can grab the substrate which is not transferred, the substrate can be stably conveyed into the feeding mechanism under the transferring action of the substrate swinging material taking mechanism 5, the substrate is transferred to the needling transfer device 2 through the feeding mechanism to be transferred, then the substrate which is transferred by the substrate feeding mechanism 6 is transferred to the substrate swinging material taking mechanism 5 again, the substrate which is transferred is taken out by the substrate turnover mechanism 4, meanwhile, the grabbing component is switched, the next unprocessed substrate can be synchronously placed in the substrate swinging material taking mechanism 5, the substrate is placed behind the substrate swinging material taking mechanism 5, the substrate turnover mechanism 4 can move the substrate which is transferred to the outside of the equipment, the steps are repeated, the continuous material taking and placing of the substrate are realized, and the transferring efficiency of the substrate is efficient and rapid.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. The utility model provides a miniLED acupuncture transfer apparatus's base plate is got and is put device which characterized in that includes:

the substrate turnover mechanism (4) is provided with at least two first substrate grabbing components (41), the first substrate grabbing components (41) can grab the transferred and non-transferred substrate workpieces respectively, and the substrate turnover mechanism (4) drives the first substrate grabbing components (41) to rotate so as to rotate and switch the pick-and-place positions of the substrate workpieces;

the substrate feeding mechanism (6) is used for adsorbing and grabbing the substrate and transferring the crystal film to the needle punching transfer device (2) for transfer;

and the substrate swinging and taking mechanism (5) is positioned between the substrate feeding mechanism (6) and the substrate overturning mechanism (4) and is used for transferring the substrate which is positioned at the substrate overturning mechanism (4) and is not transferred to the substrate feeding mechanism (6) for grabbing, or transferring the transferred substrate which is positioned at the substrate feeding mechanism (6) to the substrate overturning mechanism (4) to realize discharging.

2. The substrate taking and placing device of the miniLED needling transfer equipment according to claim 1, characterized in that: the substrate turnover mechanism (4) further comprises a turnover motor (42), the first substrate grabbing assemblies (41) are fixedly arranged on an output shaft of the turnover motor (42), and the turnover motors (42) are circumferentially arranged along the output shaft of the turnover motor (42).

3. The substrate pick-and-place device of the miniLED needling transfer apparatus according to claim 1, wherein the substrate feeding mechanism (6) comprises:

a first substrate loading traverse module (61);

the second substrate feeding transverse moving module (62) is arranged on the first substrate feeding transverse moving module (61) and is vertical to the moving direction of the first substrate feeding transverse moving module (61);

and the third substrate grabbing assembly (63) is arranged at the second substrate feeding transverse moving module (62) and is used for adsorbing the substrate.

4. The substrate pick-and-place device of the miniLED needling transfer apparatus according to claim 3, wherein the third substrate grabbing component (63) comprises a lifting cylinder (631), a third grabbing arm (632) and a vacuum element, the lifting cylinder (631) is fixedly arranged on the second substrate loading traversing module (62), the third substrate grabbing component (63) is arranged on the lifting cylinder (631), the third grabbing arm (632) is provided with an annular adsorption groove (8), the vacuum element is communicated with the annular adsorption groove (8) and used for sucking air in the annular adsorption groove (8), and the third grabbing arm (632) sucks the substrate through the annular adsorption groove (8).

5. The substrate taking and placing device of the miniLED needling transfer equipment according to claim 4, wherein: an observation window (7) penetrates through the third grabbing arm (632), and the observation window (7) is opposite to the substrate and used for observing the crystal region.

6. The substrate taking and placing device of the miniLED needling transfer equipment according to claim 1, characterized in that: the substrate swinging and taking mechanism (5) comprises a second substrate grabbing component (51) and a material taking and placing linear module (52), the second substrate grabbing component (51) is arranged on the material taking and placing linear module (52), the material taking and placing linear module (52) drives the second substrate grabbing component (51) to reciprocate between the substrate overturning mechanism (4) and the substrate feeding mechanism (6), and the second substrate grabbing component (51) is used for grabbing substrates.

7. The substrate pick-and-place device of the miniLED needling transfer apparatus according to claim 6, wherein: the second substrate grabbing component (51) comprises a second grabbing arm (511), a lifting element (512) and a substrate rotating motor (513), wherein the lifting element (512) is arranged on the material taking and placing linear module (52), the substrate rotating motor (513) is arranged on the lifting element (512), the lifting element (512) is used for driving the substrate rotating motor (513) to lift, the second grabbing arm (511) is arranged on the substrate rotating motor (513), and the substrate rotating motor (513) is used for driving the second grabbing arm (511) to swing to the substrate overturning mechanism (4) or the substrate feeding mechanism (6) respectively.

8. The substrate pick-and-place device of the miniLED needling transfer apparatus according to claim 7, wherein: the second substrate grabbing component (51) further comprises a positioning block (514), and the positioning block (514) is fixedly connected to the second grabbing arm (511) and used for abutting against and positioning the periphery of the substrate.

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