CN217086537U - Integrated jig capable of being used for integrally loading substrates of various models - Google Patents

Abstract

The utility model discloses a can integrate integration tool that loads multiple model substrate, which comprises a body, the face of placing of body is seted up the substrate of placing the substrate and is placed the chamber, the chamber is placed including a plurality of square chambeies to the substrate, the size in a plurality of square chambeies is followed the substrate and is placed the direction of seting up of chamber and dwindle gradually, and the diagonal coincidence in square chamber, circular chamber has all been seted up to the bottom in every square chamber, and on the forward projection, circular chamber inscribe is in corresponding square chamber, it places to have seted up on the body of chamber one side to be located the substrate and has got the silo, the degree of depth of getting the silo is greater than the degree of depth that the chamber was placed to the substrate, and get the round intracavity that the silo is close to the one end that the substrate placed the chamber and is located the substrate and places the chamber middle part. The utility model has the advantages that: the fixture can be loaded corresponding to substrates of various models, the purchasing and management cost of the fixture is reduced, the models and the number of the fixture are reduced, the cost is greatly reduced, the model changing time caused by fixture changing is reduced, and the production efficiency is greatly improved.

Description

Integrated jig capable of integrally loading various types of substrates

Technical Field

The utility model relates to a semiconductor manufacturing field, especially an integrated tool that can integratedly load multiple model substrate.

Background

In the thin film circuit industry in the field of semiconductor manufacturing, the processing of various types of substrates, such as 2-6 inches, is involved, and the loading and positioning of the substrates are critical links in each processing procedure. In the processes of photolithography, sputter coating, evaporation coating, dry etching, etc., people usually design and manufacture various jigs to correspond to the loading of different types of substrates. The more product models, the more loading jigs are needed, and the more the products are accumulated, and a special warehouse is usually needed to be established to store and manage the countless jigs.

In production, for some important processing procedures, the loading jig needs to be replaced every time the product is replaced, and the replacement of the jig increases the replacement time, so that the production efficiency is reduced. In addition, purchasing a corresponding number of jigs due to increasing product models leads to an increase in production cost, and storing and managing a large number of jigs requires a large space to be occupied and labor and material costs to be invested

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome prior art's shortcoming, provide an integrated tool that can integratedly load multiple model substrate.

The purpose of the utility model is realized through the following technical scheme: the utility model provides a can integrate integration tool of loading multiple model substrate, which comprises a body, the face of placing of body is seted up the substrate of placing the substrate and is placed the chamber, the substrate is placed the chamber and is included a plurality of square chambeies, the size in a plurality of square chambeies is placed the chamber along the substrate and is offered the direction and dwindle gradually, and the diagonal coincidence in square chamber, circular chamber has all been offered to the bottom in every square chamber, and on the forward projection, circular chamber inscribe is in corresponding square chamber, it puts the silo to be located to have seted up on the body of substrate placement chamber one side, the degree of depth of putting the silo is greater than the degree of depth that the substrate placed the chamber, and get the one end that the silo was placed near the substrate and be located the circular intracavity that the chamber middle part was placed to the substrate.

Optionally, the placing surface of the body is a front surface and a back surface of the body.

Optionally, the substrate placing cavities on the front side and the substrate placing cavities on the back side of the body are multiple and distributed on the body in a matrix manner.

Optionally, the front surface of the body has 16 substrate placing cavities, and the substrate placing cavities include a fourth square cavity and a fifth square cavity, the bottom of the fourth square cavity is internally tangent with a fourth circular cavity, and the bottom of the fifth square cavity is internally tangent with a fifth circular cavity.

Optionally, the back of the body has four substrate placing cavities, and the substrate placing cavities include a first square cavity, a second square cavity and a third square cavity, the sizes of the first square cavity, the second square cavity and the third square cavity are gradually reduced, the bottom of the first square cavity is internally tangent with a first circular cavity, the bottom of the second square cavity is internally tangent with a second circular cavity, and the bottom of the third square cavity is internally tangent with a third circular cavity.

The utility model has the advantages of it is following:

1. the utility model discloses an integrative structural design integrates, realizes that a tool can correspond the substrate loading of multiple model, reduces tool purchase and administrative cost.

2. The utility model discloses a structure design of universalization, each process that can produce in the semiconductor trade is general, spouts to glue, sputter coating film, evaporation coating film and dry etching etc. process all can use like at the yellow light. The type and the number of the jig are reduced, the cost is greatly reduced, the time for changing the jig is shortened, and the production efficiency is greatly improved.

Drawings

Fig. 1 is a schematic front structural view of the present invention;

fig. 2 is a schematic front structural view of the present invention;

fig. 3 is a first schematic back structural view of the present invention;

fig. 4 is a schematic diagram of a back structure of the present invention;

in the figure, 1-body, 2-picking and placing trough, 11-first square cavity, 12-second square cavity, 13-third square cavity, 14-first round cavity, 15-second round cavity, 16-third round cavity, 17-fourth square cavity, 18-fifth square cavity, 19-fourth round cavity, and 20-fifth round cavity.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. The embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the present invention, the embodiments and the features of the embodiments may be combined with each other without conflict.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which the products of the present invention are conventionally placed in use, or the position or positional relationship which the skilled person conventionally understand, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element to which the reference is made must have a specific position, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1 to 4, an integrated jig capable of integrally loading substrates of various models comprises a body 1, preferably, the body 1 is made of polytetrafluoroethylene material, so that the jig can be used at 250 ℃ or under a vacuum environment, when in use, the jig can be used alone or loaded on other platforms of equipment for use, in this embodiment, a substrate placing cavity for placing substrates is formed on a placing surface of the body 1, further, the placing surface of the body 1 is the front surface and the back surface of the body 1, so that the front surface and the back surface of the jig can be loaded with substrates, and in an actual process, the substrates comprise square sheets and round sheets, so that the substrate placing cavity comprises a plurality of square cavities, the size of the square cavities is gradually reduced along the opening direction of the substrate placing cavity, the diagonals of the square cavities are overlapped, and a round cavity is formed at the bottom of each square cavity, in the forward projection, the circular cavity is internally tangent to the corresponding square cavity, the circular cavity and the square cavity are processed by hollowing and grooving, the groove depth is usually determined according to the thickness of the substrate during processing, and in principle, after the circular substrate is placed in the circular cavity, the square substrate can be placed in the corresponding square cavity. Since the circular cavities are internally tangent to the corresponding square cavities, a 5-inch circular substrate can be placed in the corresponding circular cavity after a 5-inch square substrate can be placed in the square cavities

In this embodiment, it puts silo 2 to have seted up on body 1 that is located substrate and places chamber one side to get to put, gets the degree of depth that puts silo 2 and is greater than the degree of depth that the chamber was placed to the substrate, and gets to put silo 2 and be close to the one end that the chamber was placed to the substrate and be located the circular intracavity that the chamber middle part was placed to the substrate, and when getting the substrate, the material loading and the unloading of substrate are realized to the absorption mode of clamp or sucking disc that usually adopt tweezers.

In this embodiment, as shown in fig. 1 and fig. 2, the substrate placing cavities on the front side of the body 1 and the substrate placing cavities on the back side are both multiple and distributed on the body 1 in a matrix, preferably, the front side of the body 1 has 16 substrate placing cavities, and after the 16 substrate placing cavities are distributed in a matrix, that is, the 16 substrates are distributed in four longitudinal directions and four transverse directions, specifically, the substrate placing cavities include a fourth square cavity 17 and a fifth square cavity 18, a fourth circular cavity 19 is inscribed at the bottom of the fourth square cavity, and a fifth circular cavity 20 is inscribed at the bottom of the fifth square cavity 18, wherein, in actual use, the fourth square cavity 17 places a 3-inch square substrate, the fourth circular cavity 19 places a 3-inch circular substrate, the fifth square cavity 18 places a 2-inch square substrate, and the fifth circular cavity 20 places a 2-inch circular substrate.

In this embodiment, as shown in fig. 3 and 4, the back surface of the body 1 has four substrate placing cavities, and of course, the four substrate placing cavities are distributed in a matrix, specifically, the substrate placing cavities include a first square cavity 11, a second square cavity 12 and a third square cavity 13, the sizes of the first square cavity 11, the second square cavity 12 and the third square cavity 13 are gradually reduced, a first circular cavity 14 is inscribed in the bottom of the first square cavity 11, a second circular cavity 15 is inscribed in the bottom of the second square cavity 12, a third circular cavity 16 is inscribed in the bottom of the third square cavity 13, in this embodiment, a 6-inch square substrate is placed in the first square cavity 11, a 6-inch circular substrate is placed in the first circular cavity 14, a 5-inch square substrate is placed in the second square cavity 12, a 5-inch circular substrate is placed in the second circular cavity 15, a 4-inch square substrate is placed in the third square cavity 13, a 4 inch circular substrate is placed in third circular chamber 16.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims (5)

1. The utility model provides a can integrate integration tool of loading multiple model substrate which characterized in that: the substrate placing cavity comprises a body, the placing surface of the body is provided with a substrate placing cavity for placing a substrate, the substrate placing cavity comprises a plurality of square cavities, the size of each square cavity is a plurality of along the direction of the substrate placing cavity, the diagonal lines of the square cavities are overlapped and every circular cavity is formed in the bottom of each square cavity and projected in the forward direction, the circular cavities are internally tangent to correspond to the square cavities and located on one side of the substrate placing cavity, a taking and placing trough is formed in the body, the depth of the taking and placing trough is larger than that of the substrate placing cavity, and the taking and placing trough is close to one end of the substrate placing cavity, which is located in the middle of the substrate placing cavity, of the circular cavity.

2. The integrated jig according to claim 1, wherein the jig comprises: the placing surfaces of the body are the front surface and the back surface of the body.

3. The integrated jig of claim 2, wherein the jig comprises: the substrate placing cavities on the front side and the back side of the body are multiple and distributed on the body in a matrix manner.

4. The integrated jig of claim 3, wherein the jig comprises: the front of body has 16 substrates and places the chamber, and this substrate is placed the chamber and is included fourth square chamber and fifth square chamber, the bottom inscribe in fourth square chamber has fourth circular chamber, the bottom inscribe in fifth square chamber has fifth circular chamber.

5. The integrated jig according to claim 3 or 4, wherein the jig comprises: the back of the body is provided with four substrate placing cavities, each substrate placing cavity comprises a first square cavity, a second square cavity and a third square cavity, the sizes of the first square cavity, the second square cavity and the third square cavity are gradually reduced, a first circular cavity is internally tangent to the bottom of the first square cavity, a second circular cavity is internally tangent to the bottom of the second square cavity, and a third circular cavity is internally tangent to the bottom of the third square cavity.

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