CN217086142U

CN217086142U - Large-stroke five-degree-of-freedom compliant precision positioning platform and positioning system

Info

Publication number: CN217086142U
Application number: CN202123225963.6U
Authority: CN
Inventors: 汪启亮; 龙益平; 魏健鸣; 夏世甜; 郭彬
Original assignee: Jiangxi University of Science and Technology
Current assignee: Jiangxi University of Science and Technology
Priority date: 2021-12-21
Filing date: 2021-12-21
Publication date: 2022-07-29
Anticipated expiration: 2031-12-21

Abstract

The application provides a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system. The first displacement amplifying mechanism is respectively connected with the motion platform and the first driving mechanism; the first displacement amplifying mechanism is used for amplifying, and the first driving mechanism drives the motion displacement of the motion platform. The first driving mechanism is used for driving the motion platform to move, the first displacement amplification mechanism is respectively connected with the motion platform and the first driving mechanism, and the first displacement amplification mechanism is used for amplifying the motion displacement of the motion platform driven by the first driving mechanism, so that the motion stroke of the motion platform in the flexible precision positioning platform can be improved, and the large-stroke five-degree-of-freedom flexible precision positioning platform provided by the embodiment of the application can meet more application scenes.

Description

Large-stroke five-degree-of-freedom compliant precision positioning platform and positioning system

Technical Field

The application belongs to the technical field of precision positioning, and particularly relates to a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system.

Background

With the continuous development of scientific technology, the precision positioning technology has wide application in the fields of biomedical engineering, precision optical engineering, microelectronic systems, national defense technology and the like, and becomes an essential link for high-tech development. Currently, there are three main types of existing positioning platforms:

the first type is a mechanically driven positioning platform, for example: screw mechanisms, lever mechanisms, wedge cam mechanisms, and the like, as well as combinations thereof. The mechanical transmission type positioning platform has the greatest advantages of large stroke and high output rigidity, but has the defects of mechanical clearance, frictional wear and the like, and the motion sensitivity and the positioning precision of the mechanism are difficult to greatly improve.

In the second category, precise positioning is realized through a linear motor or an ultrasonic motor and the like, the positioning precision is improved to a certain degree, and the system has the advantages of good frequency response and the like, but the system is relatively complex, and particularly for a multi-degree-of-freedom positioning platform, a plurality of large-size electric dragging devices need to be designed.

The third type is a multi-degree-of-freedom flexible precision positioning platform which adopts piezoelectric ceramics as a driving device and a flexible hinge mechanism as a transmission device and can realize submicron-level and nanometer-level positioning, so that the platform is more and more widely applied; however, the existing multi-degree-of-freedom compliant precision positioning platform also has the problem of small movement stroke, so that more application scenes are difficult to meet.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a large-stroke five-degree-of-freedom compliant precision positioning platform and a positioning system, and aims to solve the problem that the existing multi-degree-of-freedom compliant precision positioning platform is small in motion stroke and difficult to meet more application scenes.

In a first aspect, an embodiment of the present application provides a large-stroke five-degree-of-freedom compliant precision positioning platform, where the positioning platform includes:

a motion platform;

the first driving mechanism is used for driving the motion platform to move;

the first displacement amplification mechanism is respectively connected with the motion platform and the first driving mechanism; the first displacement amplifying mechanism is used for amplifying, and the first driving mechanism drives the motion displacement of the motion platform.

Optionally, the first displacement amplifying mechanism includes a first-stage amplifying assembly and a second-stage amplifying assembly, and the first-stage amplifying assembly is configured to amplify the motion displacement output by the first driving mechanism;

the second-stage amplification assembly is used for amplifying the motion displacement output by the first driving mechanism amplified by the first-stage amplification assembly.

Optionally, the primary amplifying assembly comprises a first lever amplifying member and a second lever amplifying member, and the secondary amplifying assembly comprises a first half-bridge amplifying member;

the input ends of the first lever amplifying component and the second lever amplifying component are respectively connected with the output end of the first driving mechanism, and the input end of the first half-bridge amplifying component is respectively connected with the output ends of the first lever amplifying component and the second lever amplifying component.

Optionally, the first lever amplifying member and the second lever amplifying member are respectively disposed at opposite sides of the first half-bridge amplifying member.

Optionally, the positioning platform further includes:

a carrier connected with the first displacement amplification mechanism;

and the second driving mechanism is connected with the bearing piece and is used for driving the motion platform to move on the bearing piece.

Optionally, the second driving mechanism drives the moving platform to move in a direction perpendicular to the moving direction of the moving platform, and the first driving mechanism drives the moving platform to move in the direction perpendicular to the moving direction of the moving platform.

Optionally, the positioning platform further includes:

the second displacement amplification mechanism is respectively connected with the motion platform and the second driving mechanism; the second displacement amplifying mechanism is used for amplifying, and the second driving mechanism drives the motion platform to move on the bearing piece.

Optionally, the positioning platform further includes:

the third driving mechanism is connected with the bearing piece and is used for driving the motion platform to move on the bearing piece;

the movement direction of the third driving mechanism driving the movement platform is perpendicular to the movement direction of the first driving mechanism driving the movement platform; the third driving mechanism drives the motion direction of the motion platform to be perpendicular to the motion direction of the motion platform, and the second driving mechanism drives the motion direction of the motion platform.

Optionally, the bearing part is further provided with a first decoupling mechanism; the first decoupling mechanism is used for lowering the moving platform, and parasitic displacement in the moving direction of the moving platform is driven by the second driving mechanism.

In a second aspect, embodiments of the present application further provide a positioning system, where the positioning system includes a large-stroke five-degree-of-freedom compliant precision positioning stage as described in any one of the above embodiments.

In the large-stroke five-degree-of-freedom compliant precision positioning platform and the positioning system provided by the embodiment of the application, the first driving mechanism is used for driving the motion platform to move, the first displacement amplification mechanism is respectively connected with the motion platform and the first driving mechanism, and the first displacement amplification mechanism is used for amplifying the motion displacement of the motion platform driven by the first driving mechanism, so that the motion stroke of the motion platform in the compliant precision positioning platform can be improved, and the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiment of the application can meet more application scenes.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings used in the description of the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the application, and that other drawings can be derived from these drawings by a person skilled in the art without inventive effort.

For a more complete understanding of the present application and its advantages, reference is now made to the following descriptions taken in conjunction with the accompanying drawings. Wherein like reference numerals refer to like parts in the following description.

Fig. 1 is a schematic structural diagram of a conventional six-degree-of-freedom Stewart platform.

Fig. 2 is a schematic structural diagram of a positioning platform according to an embodiment of the present application.

Fig. 3 is a schematic structural diagram of a first driving mechanism and a first displacement amplification mechanism in a positioning stage according to an embodiment of the present disclosure.

Fig. 4 is a schematic structural view of the positioning platform of fig. 2 after the carrier is hidden.

Fig. 5 is a schematic structural diagram of the positioning platform of fig. 4 after hiding the middle platform.

Fig. 6 is a top view of the positioning stage of fig. 5.

Fig. 7 is a schematic structural diagram of a carrier and a moving platform in a positioning platform according to an embodiment of the present disclosure.

Fig. 8 is a partial enlarged view of a portion a in fig. 7.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

At present, the prior multi-degree-of-freedom compliant precision positioning platform adopts piezoelectric ceramics as a driving device, and a flexible hinge mechanism as a transmission device; because the piezoelectric ceramic has the advantages of high resolution, high rigidity, large output and the like, the submicron and nanometer positioning can be realized. Therefore, the application of the piezoelectric ceramic is more and more extensive, and meanwhile, in the field of precision positioning, a flexible precision positioning platform using the piezoelectric ceramic as a driver is also a hot point of research.

The degree of freedom of the existing flexible and compliant precision positioning platform is mostly two degrees of freedom, and a Stewart platform with six degrees of freedom is shown in figure 1. The multi-degree-of-freedom flexible precise positioning platform mainly has the connection forms of series connection, parallel connection and series-parallel connection. The serial flexible precise positioning platform has the advantages of large working space, high flexibility and the like, and simultaneously has some defects: the error accumulation of each rod piece and the flexible hinge exists, and the end precision is low. The parallel flexible precise positioning platform is provided with only one motion platform, the motion platform is simultaneously driven by six piezoelectric ceramics, the six piezoelectric ceramics simultaneously coordinate to operate to push the motion platform to output the required motion, compared with a series combination form, the motion platform in a parallel form has much smaller inertia, so the response speed is higher, meanwhile, the piezoelectric ceramics do not move along with the motion platform, and the precision of the motion platform is not influenced by a connecting circuit. This form of stroke in the absence of an amplification mechanism is generally less than a single piezoceramic drive stroke. The series-parallel connection soft precise positioning platform adopts a series-parallel connection mixed combination mode, and the soft precise positioning platform can comprehensively have the advantages of series connection soft precise positioning platform and parallel connection soft precise positioning platform.

Besides the above advantages, the existing compliant and compliant precision positioning platform also has some disadvantages, such as: 1. the output displacement of the piezoelectric ceramic is extremely small, even if the piezoelectric ceramic is a stacked piezoelectric ceramic, the output displacement of the piezoelectric ceramic is generally not more than 0.2 percent of the size of the piezoelectric ceramic, so the piezoelectric ceramic is difficult to meet the requirements in the fields of electronic manufacturing, biomedical engineering, optical micro-assembly, ultra-precision machining and the like; 2. parasitic displacement can be generated, and the decoupling capability is not provided. For a multi-degree-of-freedom compliant and compliant precision positioning platform (such as the Stewart platform), parasitic displacement occurs in the motion process, so that the control of the platform is more difficult, and the positioning precision of the platform is also reduced, so that the decoupling capacity of the platform needs to be considered during design.

In order to solve the above problems, embodiments of the present application provide a large-stroke five-degree-of-freedom compliant precision positioning stage and a positioning system, which will be described below with reference to the accompanying drawings. The compliant precision positioning platform with large stroke and five degrees of freedom provided in the embodiment of the present application can be applied to a positioning system, for example, please refer to fig. 2, and fig. 2 is a schematic structural diagram of the compliant precision positioning platform with large stroke and five degrees of freedom provided in the embodiment of the present application. The large-stroke five-degree-of-freedom compliant precision positioning platform comprises a motion platform 310, a first driving mechanism 110 and a first displacement amplification mechanism, wherein the first driving mechanism 110 is used for driving the motion platform 310 to move. The first displacement amplification mechanism is respectively connected with the motion platform 310 and the first driving mechanism 110; the first displacement amplification mechanism is used for amplifying the movement displacement of the movement platform 310 driven by the first driving mechanism 110.

In the compliant precision positioning platform with large stroke and five degrees of freedom provided in the embodiment of the present application, the first driving mechanism 110 is used for driving the motion platform 310 to move, and the first displacement amplification mechanism is respectively connected to the motion platform 310 and the first driving mechanism 110, and the first displacement amplification mechanism is used for amplifying the motion displacement of the motion platform 310 driven by the first driving mechanism 110, so that the motion stroke of the motion platform 310 in the precision positioning platform can be increased, and therefore, the compliant precision positioning platform with large stroke and five degrees of freedom provided in the embodiment of the present application can meet more application scenarios.

Illustratively, the first displacement amplifying mechanism includes a first stage amplifying assembly i and a second stage amplifying assembly i, the first stage amplifying assembly i is used for amplifying the motion displacement output by the first driving mechanism 110; and the second-stage amplification assembly i is used to amplify the motion displacement output by the first driving mechanism 110 amplified by the first-stage amplification assembly i. The motion displacement output by the first driving mechanism 110 is amplified twice by means of the two-stage amplification assembly, so that the motion stroke of the motion platform 310 in the large-stroke five-degree-of-freedom compliant precision positioning platform is further improved, and the large-stroke five-degree-of-freedom compliant precision positioning platform can further meet more application scenes.

Illustratively, as shown in fig. 3, the first-stage amplifying assembly i includes a first lever amplifying member 210 and a second lever amplifying member 220, and the second-stage amplifying assembly i includes a first half-bridge amplifying member 230. Wherein the input ends of the first and second

lever amplifying members

210 and 220 are connected to the output end of the first driving mechanism 110, respectively, and the input end of the first half-bridge amplifying member 230 is connected to the output ends of the first and second

lever amplifying members

210 and 220, respectively. The two-stage amplification mode that two lever amplification components are connected in parallel and then connected with a half-bridge amplification component in series is realized.

Illustratively, as shown in fig. 3, a first lever amplifying member 210 and a second lever amplifying member 220 are respectively provided at opposite sides of a first half bridge amplifying member 230. The large-stroke five-degree-of-freedom compliant precision positioning platform further comprises a base 340, wherein a plurality of third through holes 341 are formed in the base 340, and bolts can be arranged to penetrate through the third through holes 341 and then screwed down, so that the base 340 of the large-stroke five-degree-of-freedom compliant precision positioning platform is fixed. The first and second

lever amplifying members

210 and 220 are arranged in a vertical direction (the vertical direction is indicated by an arrow Z in the drawing), and the first and second

lever amplifying members

210 and 220 are symmetrical with respect to the vertical direction; the first half-bridge amplifying member 230 is disposed in a horizontal direction. The lower end of the first lever amplification member 210 is connected with the base 340 through a flexible hinge; the upper end of the first lever amplifying member 210 is connected to the left end of the first half-bridge amplifying member 230 by a flexible hinge, and the upper end of the first lever amplifying member 210 is an output end of the first lever amplifying member 210 and the left end of the first half-bridge amplifying member 230 is a first input end of the first half-bridge amplifying member 230. The lower end of the second lever amplification member 220 is connected with the base 340 through a flexible hinge; the upper end of the second lever amplifying member 220 is connected to the right end of the first half-bridge amplifying member 230 by a flexible hinge, and the upper end of the second lever amplifying member 220 is an output end of the second lever amplifying member 220 and the right end of the first half-bridge amplifying member 230 is a second input end of the first half-bridge amplifying member 230. The output end of the first half-bridge amplifying means 230 is located at the middle of the first half-bridge amplifying means 230, and the output end of the first half-bridge amplifying means 230 is located above the first half-bridge amplifying means 230.

As shown in fig. 3, the first driving mechanism 110 is disposed between the first and second

lever amplifying members

210 and 220, and the first driving mechanism 110 is disposed in a horizontal direction. The left end of the first driving mechanism 110 is connected with the first lever amplification member 210 through a flexible hinge, wherein the connection position of the first lever amplification member 210 and the first driving mechanism 110 is the input end of the first driving mechanism 110; the right end of the first driving mechanism 110 is connected to the second lever amplifying member 220 by a flexible hinge, wherein the connection point of the second lever amplifying member 220 and the first driving mechanism 110 is the input end of the second driving mechanism 120. In the present application, the first driving mechanism 110 may be a piezoelectric ceramic driver, but the first driving mechanism 110 may also adopt other driving manners, which is not limited herein. The hinge in the present application may be a circular notch type flexible hinge, but may also be other types of hinges, such as a hyperbolic notch type hinge, an elliptical notch type hinge, a parabolic notch type hinge, and the like.

The motion displacement output by the first driving mechanism 110 is applied to the input ends of the first lever amplifying component 210 and the second lever amplifying component 220, so that the first lever amplifying component 210 and the second lever amplifying component 220 rotate around the hinge joint of the lever amplifying component and the base 340, and the first lever amplifying component 210 and the second lever amplifying component 220 amplify the motion displacement output by the first driving mechanism 110 in one stage. The output ends of the first lever amplifying member 210 and the second lever amplifying member 220 are hinged to the input end of the first half-bridge amplifying member 230, respectively, and the motion displacement amount output by the output ends of the first lever amplifying member 210 and the second lever amplifying member 220 is applied to the input end of the first half-bridge amplifying member 230, so that the output end of the first half-bridge amplifying member 230 rotates around the flexible hinge inside the first half-bridge amplifying member 230, and the first half-bridge amplifying member 230 performs two-stage amplification on the motion displacement amount output by the first driving mechanism 110. Wherein the amount of movement displacement output by the output end of the first half-bridge amplifying member 230 is the amount of movement displacement in the vertical direction.

As shown in fig. 3, the large-stroke five-degree-of-freedom compliant precision positioning stage further includes a first guide mechanism 410 and a second guide mechanism 420, the first guide mechanism 410 is disposed at the left end of the first driving mechanism 110, and the left end of the first driving mechanism 110 is connected to the first lever amplifying member 210 through a flexible hinge via the first guide mechanism 410. The second guide mechanism 420 is provided at the right end of the first driving mechanism 110, and the right end of the first driving mechanism 110 is connected to the second lever amplifying member 220 through a flexible hinge via the second guide mechanism 420. When the first driving mechanism 110 drives the first lever amplifying component 210 and the first lever amplifying component 210 to rotate, a shearing force is generated on the first driving mechanism 110; the first guide mechanism 410 and the second guide mechanism 420 are respectively disposed at two ends of the first driving mechanism 110, and the first guide mechanism 410 and the second guide mechanism 420 can reduce the shearing force applied to the first driving mechanism 110, thereby protecting the first driving mechanism 110. In the present application, the first guide mechanism 410 and the second guide mechanism 420 may be parallel plate guide mechanisms, or may be guide mechanisms of other types, and are not limited herein.

Illustratively, as shown in fig. 2, 4 and 5, the large-stroke five-degree-of-freedom compliant precision positioning stage further includes a fourth driving mechanism 140, a fifth driving mechanism 150, a fourth displacement amplification mechanism and a fifth displacement amplification mechanism. The fourth driving mechanism 140 is also used for driving the motion platform 310 to move, and the fourth displacement amplification mechanism is respectively connected with the motion platform 310 and the fourth driving mechanism 140; the fourth displacement amplifying mechanism is used for amplifying, and the fourth driving mechanism 140 drives the motion displacement of the motion platform 310. The fifth driving mechanism 150 is also used for driving the motion platform 310 to move, and the fifth displacement amplification mechanism is respectively connected with the motion platform 310 and the fifth driving mechanism 150; the fifth displacement amplification mechanism is used for amplifying, and the fifth driving mechanism 150 drives the motion displacement of the motion platform 310.

For example, the fourth driving mechanism 140 and the fourth displacement amplifying mechanism in the present application have the same structure and connection manner as the first driving mechanism 110 and the first displacement amplifying mechanism. The first displacement amplifying mechanism also comprises a first-stage amplifying assembly II and a second-stage amplifying assembly II, and the first-stage amplifying assembly II is used for amplifying the motion displacement output by the fourth driving mechanism 140; and the second-stage amplification assembly ii is used for amplifying the motion displacement output by the fourth driving mechanism 140 amplified by the first-stage amplification assembly ii. The motion displacement output by the fourth driving mechanism 140 is amplified twice by means of the above two-stage amplification assembly.

Illustratively, the first-stage amplifying assembly ii includes a seventh lever amplifying element and an eighth lever amplifying element, and the second-stage amplifying assembly ii includes a fourth half-bridge amplifying element 231. Wherein the input terminals of the seventh and eighth lever amplifying members are connected to the output terminal of the fourth driving mechanism 140, respectively, and the input terminal of the fourth half-bridge amplifying member 231 is connected to the output terminals of the seventh and eighth lever amplifying members, respectively. The two-stage amplification mode that two lever amplification components are connected in parallel and then connected with a half-bridge amplification component in series is realized.

Illustratively, the seventh and eighth lever amplifying members are respectively disposed at opposite sides of the fourth half-bridge amplifying member 231. The seventh and eighth lever amplifying members are arranged in a vertical direction, and the seventh and eighth lever amplifying members are symmetrical with respect to the vertical direction; the fourth half-bridge amplifying member 231 is disposed in a horizontal direction. The lower end of the seventh lever amplifying member is connected with the base 340 through a flexible hinge; the upper end of the seventh lever amplifying member is connected to the left end of the fourth half-bridge amplifying member 231 by a flexible hinge, and the upper end of the seventh lever amplifying member is the output end of the seventh lever amplifying member, and the left end of the fourth half-bridge amplifying member 231 is the first input end of the fourth half-bridge amplifying member 231. The lower end of the eighth lever amplifying member is connected with the base 340 through a flexible hinge; the upper end of the eighth lever amplifying member is connected to the right end of the fourth half-bridge amplifying member 231 by a flexible hinge, and the upper end of the eighth lever amplifying member is the output end of the eighth lever amplifying member, and the right end of the fourth half-bridge amplifying member 231 is the second input end of the fourth half-bridge amplifying member 231. The output terminal of the fourth half-bridge amplification means 231 is located at the middle of the fourth half-bridge amplification means 231, and the output terminal of the fourth half-bridge amplification means 231 is located above the fourth half-bridge amplification means 231.

The above-mentioned fourth driving mechanism 140 is disposed between the seventh and eighth lever amplifying members, and the fourth driving mechanism 140 is disposed in a horizontal direction. The left end of the fourth driving mechanism 140 is connected to a seventh lever amplification element through a flexible hinge, wherein the connection between the seventh lever amplification element and the fourth driving mechanism 140 is the input end of the fourth driving mechanism 140; the right end of the fourth driving mechanism 140 is connected to the eighth lever amplifying element through a flexible hinge, wherein the connection point of the eighth lever amplifying element and the fourth driving mechanism 140 is the input end of the second driving mechanism 120. In the present application, the fourth driving mechanism 140 may be a piezoelectric ceramic driver, but the fourth driving mechanism 140 may also adopt other driving manners, which is not limited herein.

The motion displacement outputted by the fourth driving mechanism 140 is applied to the input ends of the seventh and eighth lever amplifying members, respectively, so that the seventh and eighth lever amplifying members rotate around the hinge joint of the lever amplifying member and the base 340, and the seventh and eighth lever amplifying members amplify the motion displacement outputted by the fourth driving mechanism 140 in one stage. The output ends of the seventh and eighth lever amplifying members are hinged to the input end of the fourth half-bridge amplifying member 231, respectively, and the motion displacement amounts output by the output ends of the seventh and eighth lever amplifying members are applied to the input end of the fourth half-bridge amplifying member 231, so that the output end of the fourth half-bridge amplifying member 231 rotates around the flexible hinge inside the fourth half-bridge amplifying member 231, and thus the fourth half-bridge amplifying member 231 performs two-stage amplification on the motion displacement amount output by the fourth driving mechanism 140. Wherein the amount of movement displacement output by the output terminal of the fourth half-bridge amplifying member 231 is the amount of movement displacement in the vertical direction.

Illustratively, the large-stroke five-degree-of-freedom compliant precision positioning platform further comprises a seventh guide mechanism and an eighth guide mechanism, the seventh guide mechanism is disposed at the left end of the fourth drive mechanism 140, and the left end of the fourth drive mechanism 140 is connected to the seventh lever amplification member through a flexible hinge via the seventh guide mechanism. The eighth guide mechanism is provided at the right end of the fourth driving mechanism 140, and the right end of the fourth driving mechanism 140 is connected to the eighth lever amplification member via a flexible hinge via the eighth guide mechanism. When the fourth driving mechanism 140 drives the seventh lever amplifying component and the eighth lever amplifying component to rotate, a shearing force is generated on the fourth driving mechanism 140; the seventh guide mechanism and the eighth guide mechanism are respectively disposed at two ends of the fourth drive mechanism 140, and the seventh guide mechanism and the eighth guide mechanism can reduce the shearing force applied to the fourth drive mechanism 140, thereby protecting the fourth drive mechanism 140. In the present application, the seventh guide mechanism and the eighth guide mechanism may adopt existing parallel plate guide mechanisms, and may also adopt guide mechanisms of other manners, which is not limited herein.

For example, the structure and connection of the fifth driving mechanism 150 and the fifth displacement amplification mechanism are the same as those of the first driving mechanism 110 and the first displacement amplification mechanism. The first displacement amplifying mechanism also comprises a first-stage amplifying assembly III and a second-stage amplifying assembly III, and the first-stage amplifying assembly III is used for amplifying the motion displacement output by the fifth driving mechanism 150; and the second-stage amplification assembly iii is used to amplify the motion displacement output by the fifth driving mechanism 150 amplified by the first-stage amplification assembly iii. The motion displacement output by the fifth driving mechanism 150 is amplified twice by means of the above two-stage amplification assembly.

Illustratively, the first-stage amplifying assembly iii includes a ninth lever amplifying component and a tenth lever amplifying component, and the second-stage amplifying assembly iii includes a fifth half-bridge amplifying component 232. Wherein the input terminals of the ninth lever amplifying means and the tenth lever amplifying means are connected to the output terminal of the fifth driving mechanism 150, respectively, and the input terminal of the fifth half-bridge amplifying means 232 is connected to the output terminals of the ninth lever amplifying means and the tenth lever amplifying means, respectively. The two-stage amplification mode that two lever amplification components are connected in parallel and then connected with a half-bridge amplification component in series is realized.

Illustratively, a ninth lever amplifying member and a tenth lever amplifying member are respectively provided at opposite sides of the fifth half-bridge amplifying member 232. The ninth lever amplifying member and the tenth lever amplifying member are arranged in a vertical direction, and the ninth lever amplifying member and the tenth lever amplifying member are symmetrical with respect to the vertical direction; the fifth half-bridge amplifying member 232 is disposed in a horizontal direction. The lower end of the ninth lever amplifying member is connected with the base 340 through a flexible hinge; the upper end of the ninth lever amplifying member is connected to the left end of the fifth half-bridge amplifying member 232 by a flexible hinge, and the upper end of the ninth lever amplifying member is the output end of the ninth lever amplifying member, and the left end of the fifth half-bridge amplifying member 232 is the first input end of the fifth half-bridge amplifying member 232. The lower end of the tenth lever amplification member is connected with the base 340 through a flexible hinge; the upper end of the tenth lever amplifying member is connected to the right end of the fifth half-bridge amplifying member 232 by a flexible hinge, and the upper end of the tenth lever amplifying member is the output end of the tenth lever amplifying member and the right end of the fifth half-bridge amplifying member 232 is the second input end of the fifth half-bridge amplifying member 232. The output terminal of the fifth half-bridge amplifying means 232 is located at the middle of the fifth half-bridge amplifying means 232, and the output terminal of the fifth half-bridge amplifying means 232 is located above the fifth half-bridge amplifying means 232.

The above-described fifth driving mechanism 150 is provided between the ninth and tenth lever amplifying members, and the fifth driving mechanism 150 is provided in the horizontal direction. The left end of the fifth driving mechanism 150 is connected with a ninth lever amplification member through a flexible hinge, wherein the connection position of the ninth lever amplification member and the fifth driving mechanism 150 is the input end of the fifth driving mechanism 150; the right end of the fifth driving mechanism 150 is connected to the tenth lever amplifying member through a flexible hinge, wherein the connection between the tenth lever amplifying member and the fifth driving mechanism 150 is the input end of the second driving mechanism 120. In the present application, the fifth driving mechanism 150 may be a piezoelectric ceramic driver, and of course, the fifth driving mechanism 150 may also adopt other driving manners, which is not limited herein.

The motion displacement output by the fifth driving mechanism 150 is applied to the input ends of the ninth lever amplifying member and the tenth lever amplifying member, respectively, so that the ninth lever amplifying member and the tenth lever amplifying member rotate around the hinge joint of the lever amplifying member and the base 340, and the ninth lever amplifying member and the tenth lever amplifying member amplify the motion displacement output by the fifth driving mechanism 150 in a first stage. The output ends of the ninth lever amplifying element and the tenth lever amplifying element are respectively hinged to the input end of the fifth half-bridge amplifying element 232, and the motion displacement amounts output by the output ends of the ninth lever amplifying element and the tenth lever amplifying element are applied to the input end of the fifth half-bridge amplifying element 232, so that the output end of the fifth half-bridge amplifying element 232 rotates around the flexible hinge inside the fifth half-bridge amplifying element 232, and thus the fifth half-bridge amplifying element 232 performs two-stage amplification on the motion displacement amount output by the fifth driving mechanism 150. Wherein the amount of movement displacement output by the output terminal of the fifth half-bridge amplifying member 232 is the amount of movement displacement in the vertical direction. The first driving mechanism 110, the fourth driving mechanism 140 and the fifth driving mechanism 150 are simultaneously moved in the vertical direction, and the movement platform 310 can be driven to move in the vertical direction.

Illustratively, the large-stroke five-degree-of-freedom compliant precision positioning platform further includes a ninth guide mechanism and a tenth guide mechanism, the ninth guide mechanism is disposed at the left end of the fifth driving mechanism 150, and the left end of the fifth driving mechanism 150 is connected to the ninth lever amplification member through a flexible hinge via the ninth guide mechanism. The tenth guide mechanism is provided at the right end of the fifth driving mechanism 150, and the right end of the fifth driving mechanism 150 is connected to the tenth lever amplification member through a flexible hinge via the tenth guide mechanism. When the fifth driving mechanism 150 drives the ninth lever amplifying component and the tenth lever amplifying component to rotate, a shearing force is generated on the fifth driving mechanism 150; the ninth guide mechanism and the tenth guide mechanism are respectively disposed at two ends of the fifth drive mechanism 150, and the ninth guide mechanism and the tenth guide mechanism can reduce the shearing force applied to the fifth drive mechanism 150, thereby protecting the fifth drive mechanism 150. In the present application, the ninth guide mechanism and the tenth guide mechanism may adopt an existing parallel plate guide mechanism, and may also adopt guide mechanisms of other manners, which is not limited herein.

Illustratively, as shown in fig. 4 and 5, the large-stroke five-degree-of-freedom compliant precision positioning stage in the present application further comprises an intermediate stage 330, and the initial state of the intermediate stage 330 is parallel to the base 340. The output end of the first half-bridge amplification component 230 is connected with the middle platform 330 through a first flexible hooke hinge 332, the output end of the fourth half-bridge amplification component 231 is connected with the middle platform 330 through a second flexible hooke hinge 333, the output end of the fifth half-bridge amplification component 232 is connected with the middle platform 330 through a third flexible hooke hinge 334, and the motion displacement amounts of the first half-bridge amplification component 230, the fourth half-bridge amplification component 231 and the fifth half-bridge amplification component 232 are motion displacement amounts in the vertical direction; thus, the intermediate stage 330 has 3 degrees of freedom, i.e., rotational freedom about the X-axis, rotational freedom about the Y-axis, and translational freedom along the Z-axis (the X-axis, the Y-axis, and the Z-axis are shown).

As shown in fig. 6, in the present application, the first half-bridge amplifying component 230, the fourth half-bridge amplifying component 231 and the fifth half-bridge amplifying component 232 are arranged in a circular array on a horizontal plane, and the projections of the first half-bridge amplifying component 230, the fourth half-bridge amplifying component 231 and the fifth half-bridge amplifying component 232 on the horizontal plane extend to two-by-two intersection to form an equilateral triangle on the horizontal plane.

As shown in fig. 2, the large-stroke five-degree-of-freedom compliant precision positioning stage in the present application further includes a carrier 320 and a second driving mechanism 120, where the carrier 320 is provided with a plurality of first through holes 321, and the intermediate stage 330 is also provided with second through holes 331 corresponding to the first through holes 321, so that after passing through one first through hole 321 and one second through hole 331 through a bolt connection, the carrier 320 and the intermediate stage 330 are fixedly connected, so that the carrier 320 also has the same 3 degrees of freedom. As shown in fig. 7, the second driving mechanism 120 is connected to the carrier 320, and the second driving mechanism 120 is used for driving the moving platform 310 to move on the carrier 320; wherein, the motion direction of the second driving mechanism 120 driving the motion platform 310 is perpendicular to the motion direction of the first driving mechanism 110 driving the motion platform 310. The second drive mechanism 120 can also add one degree of freedom to the motion stage 310.

As shown in fig. 7, the large-stroke five-degree-of-freedom compliant precision positioning stage in the present application further includes a second displacement amplification mechanism, and the second displacement amplification mechanism is connected to the motion stage 310 and the second driving mechanism 120 respectively; the second displacement amplification mechanism is used for amplifying the movement displacement of the second driving mechanism 120 driving the movement platform 310 on the carrier 320. Illustratively, the second displacement amplifying mechanism comprises a first-stage amplifying assembly iv and a second-stage amplifying assembly iv, wherein the first-stage amplifying assembly iv is used for amplifying the motion displacement output by the second driving mechanism 120; and the second-stage amplifying assembly iv is used for amplifying the motion displacement output by the second driving mechanism 120 amplified by the first-stage amplifying assembly iv.

Illustratively, as shown in fig. 7, the first-stage amplifying assembly iv includes a third lever amplifying component 240 and a fourth lever amplifying component 250, and the second-stage amplifying assembly iv includes a second half-bridge amplifying component 260. Wherein the input terminals of the third lever amplifying member 240 and the fourth lever amplifying member 250 are connected to the output terminal of the second driving mechanism 120, respectively, and the input terminal of the second half-bridge amplifying member 260 is connected to the output terminals of the third lever amplifying member 240 and the fourth lever amplifying member 250, respectively. The two-stage amplification mode that two lever amplification components are connected in parallel and then connected with a half-bridge amplification component in series is realized.

Illustratively, as shown in fig. 7, a third lever amplifying member 240 and a fourth lever amplifying member 250 are provided at opposite sides of the second half-bridge amplifying member 260, respectively. The third and fourth lever amplifying members 240 and 250 are disposed in the direction of the X-axis, and the third and fourth lever amplifying members 240 and 250 are symmetrical about the X-axis; the second half-bridge amplifying member 260 is disposed in the Y-axis direction. A first end of the third lever amplifying member 240 is connected to the carrier 320 by a flexible hinge, a second end of the third lever amplifying member 240 is connected to a first end of the second half-bridge amplifying member 260 by a flexible hinge, and a second end of the third lever amplifying member 240 is an output end of the third lever amplifying member 240. The first end and the second end of the third lever amplifying component 240 are respectively opposite ends of the third lever amplifying component 240, and the first end of the second half-bridge amplifying component 260 is a first input end of the second half-bridge amplifying component 260. A first end of the fourth lever amplifying member 250 is connected to the carrier 320 by a flexible hinge, a second end of the fourth lever amplifying member 250 is connected to a second end of the second half-bridge amplifying member 260 by a flexible hinge, and a second end of the fourth lever amplifying member 250 is an output end of the fourth lever amplifying member 250. The first end and the second end of the fourth lever amplifying member 250 are respectively the opposite ends of the fourth lever amplifying member 250; the first end and the second end of the second half-bridge amplifying component 260 are respectively opposite ends of the second half-bridge amplifying component 260, the second end of the second half-bridge amplifying component 260 is also a second input end of the second half-bridge amplifying component 260, and the output end of the second half-bridge amplifying component 260 is located in the middle of the second half-bridge amplifying component 260.

As shown in fig. 7, the second driving mechanism 120 is disposed between the third lever amplifying member 240 and the fourth lever amplifying member 250, and the second driving mechanism 120 is disposed in the Y-axis direction. The first end of the second driving mechanism 120 is connected to the third lever amplifying member 240 by a flexible hinge, wherein the connection point of the third lever amplifying member 240 and the second driving mechanism 120 is the input end of the second driving mechanism 120. The second end of the second driving mechanism 120 is connected to the fourth lever amplification member 250 through a flexible hinge, wherein the connection between the fourth lever amplification member 250 and the second driving mechanism 120 is the input end of the second driving mechanism 120; the first end and the second end of the second driving mechanism 120 are respectively opposite ends of the second driving mechanism 120. In the present application, the second driving mechanism 120 may be a piezoelectric ceramic driver, but the second driving mechanism 120 may also adopt other driving manners, which is not limited herein.

The motion displacement amount output by the second driving mechanism 120 is applied to the input end of the third lever amplifying member 240 and the fourth lever amplifying member 250, respectively, so that the third lever amplifying member 240 and the fourth lever amplifying member 250 rotate around the hinge joint of the lever amplifying member and the bearing 320, and therefore the motion displacement amount output by the second driving mechanism 120 is amplified by the third lever amplifying member 240 and the fourth lever amplifying member 250 in one stage. The output ends of the third and fourth lever amplifying members 240 and 250 are hinged to the input end of the second half-bridge amplifying member 260, respectively, and the motion displacement amounts output by the output ends of the third and fourth lever amplifying members 240 and 250 are applied to the input end of the second half-bridge amplifying member 260, so that the output end of the second half-bridge amplifying member 260 rotates around the flexible hinge inside the second half-bridge amplifying member 260, and the second half-bridge amplifying member 260 performs two-stage amplification on the motion displacement amount output by the second driving mechanism 120. Wherein the motion displacement amount output by the output end of the second half-bridge amplifying member 260 is the motion displacement amount along the X-axis direction, the motion direction of the second driving mechanism 120 driving the motion platform 310 is along the X-axis direction, i.e. the motion direction of the second driving mechanism 120 driving the motion platform 310 is perpendicular to the motion direction of the first driving mechanism 110 driving the motion platform 310.

Illustratively, the large-stroke five-degree-of-freedom compliant precision positioning stage further includes a third guide mechanism 430 and a fourth guide mechanism 440, the third guide mechanism 430 is disposed at the first end of the second driving mechanism 120, and the first end of the second driving mechanism 120 is connected to the third lever amplifying member 240 through a flexible hinge via the third guide mechanism 430. The fourth guide mechanism 440 is disposed at the second end of the second driving mechanism 120, and the second end of the second driving mechanism 120 is connected to the fourth lever amplifying member 250 through a flexible hinge via the fourth guide mechanism 440. When the second driving mechanism 120 drives the third lever amplification member 240 and the fourth lever amplification member 250 to rotate, a shearing force is generated on the second driving mechanism 120; the third guide mechanism 430 and the fourth guide mechanism 440 are respectively disposed at two ends of the second driving mechanism 120, and the third guide mechanism 430 and the fourth guide mechanism 440 can reduce the shearing force applied to the second driving mechanism 120, thereby protecting the second driving mechanism 120. In the present application, the third guide mechanism 430 and the fourth guide mechanism 440 may be parallel plate guide mechanisms, or may be guide mechanisms of other types, which is not limited herein.

As shown in fig. 7, the large-stroke five-degree-of-freedom compliant precision positioning stage in the present application further includes a third driving mechanism 130, the third driving mechanism 130 is connected to the carrier 320, and the third driving mechanism 130 is used for driving the motion stage 310 to move on the carrier 320. The movement direction of the third driving mechanism 130 driving the movement platform 310 is perpendicular to the movement direction of the first driving mechanism 110 driving the movement platform 310; meanwhile, the third driving mechanism 130 drives the motion platform 310 to move in a direction perpendicular to the motion direction of the second driving mechanism 120 driving the motion platform 310. The third drive mechanism 130 can also add one degree of freedom to the motion stage 310.

As shown in fig. 7, the large-stroke five-degree-of-freedom compliant precision positioning platform in the present application further includes a third displacement amplification mechanism, and the third displacement amplification mechanism is connected to the motion platform 310 and the third driving mechanism 130 respectively; the third displacement amplification mechanism is used for amplifying the movement displacement of the third driving mechanism 130 driving the movement platform 310 on the bearing 320. Illustratively, the third displacement amplification mechanism includes a first-stage amplification assembly v and a second-stage amplification assembly v, wherein the first-stage amplification assembly v is used for amplifying the motion displacement output by the third driving mechanism 130; and the second-stage amplifying assembly v is used for amplifying the motion displacement output by the third driving mechanism 130 amplified by the first-stage amplifying assembly v.

As shown in fig. 7, the first-stage amplifying assembly v includes a fifth lever amplifying component 270 and a sixth lever amplifying component 280, and the second-stage amplifying assembly v includes a third half-bridge amplifying component 290. Wherein the input terminals of the fifth lever amplifying member 270 and the sixth lever amplifying member 280 are connected to the output terminal of the third driving mechanism 130, respectively, and the input terminal of the third half-bridge amplifying member 290 is connected to the output terminals of the fifth lever amplifying member 270 and the sixth lever amplifying member 280, respectively. The two-stage amplification mode that two lever amplification components are connected in parallel and then connected with a half-bridge amplification component in series is realized.

Illustratively, as shown in fig. 7, the fifth lever amplifying component 270 and the sixth lever amplifying component 280 are respectively disposed at opposite sides of the third half-bridge amplifying component 290. The fifth and sixth lever amplifying members 270 and 280 are disposed in the direction of the Y axis, and the fifth and sixth lever amplifying members 270 and 280 are symmetrical about the Y axis; the third half-bridge amplifying member 290 is disposed in the X-axis direction. A first end of the fifth lever amplifying member 270 is connected to the carrier 320 by a flexible hinge, a second end of the fifth lever amplifying member 270 is connected to a first end of the third half-bridge amplifying member 290 by a flexible hinge, and a second end of the fifth lever amplifying member 270 is an output end of the fifth lever amplifying member 270. The first end and the second end of the fifth lever amplifying component 270 are respectively opposite ends of the fifth lever amplifying component 270, and the first end of the third half-bridge amplifying component 290 is a first input end of the third half-bridge amplifying component 290. A first end of the sixth lever amplifying member 280 is connected to the carrier 320 by a flexible hinge, a second end of the sixth lever amplifying member 280 is connected to a second end of the third half-bridge amplifying member 290 by a flexible hinge, and the second end of the sixth lever amplifying member 280 is an output end of the sixth lever amplifying member 280. The first end and the second end of the sixth lever amplification member 280 are respectively the opposite ends of the sixth lever amplification member 280; the first end and the second end of the third half-bridge amplification component 290 are respectively opposite ends of the third half-bridge amplification component 290, the second end of the third half-bridge amplification component 290 is also a second input end of the third half-bridge amplification component 290, and the output end of the third half-bridge amplification component 290 is located in the middle of the third half-bridge amplification component 290.

As shown in fig. 7, the third driving mechanism 130 is disposed between the fifth lever amplifying member 270 and the sixth lever amplifying member 280, and the third driving mechanism 130 is disposed in the X-axis direction. The first end of the third driving mechanism 130 is connected to the fifth lever amplification member 270 through a flexible hinge, wherein the connection between the fifth lever amplification member 270 and the third driving mechanism 130 is the input end of the third driving mechanism 130. The second end of the third driving mechanism 130 is connected to the sixth lever amplifying member 280 through a flexible hinge, wherein the connection between the sixth lever amplifying member 280 and the third driving mechanism 130 is the input end of the third driving mechanism 130; the first end and the second end of the third driving mechanism 130 are respectively opposite ends of the third driving mechanism 130. In the present application, the third driving mechanism 130 may be a piezoelectric ceramic driver, but the third driving mechanism 130 may also adopt other driving manners, which is not limited herein.

The movement displacement output by the third driving mechanism 130 is applied to the input ends of the fifth lever amplifying member 270 and the sixth lever amplifying member 280, respectively, so that the fifth lever amplifying member 270 and the sixth lever amplifying member 280 rotate around the hinge joint of the lever amplifying member and the bearing 320, and therefore the movement displacement output by the third driving mechanism 130 is amplified by the fifth lever amplifying member 270 and the sixth lever amplifying member 280 in one stage. The output ends of the fifth lever amplifying component 270 and the sixth lever amplifying component 280 are hinged to the input end of the third half-bridge amplifying component 290, respectively, and the motion displacement amounts output by the output ends of the fifth lever amplifying component 270 and the sixth lever amplifying component 280 are applied to the input end of the third half-bridge amplifying component 290, so that the output end of the third half-bridge amplifying component 290 rotates around the flexible hinge inside the third half-bridge amplifying component 290, and thus the third half-bridge amplifying component 290 performs two-stage amplification on the motion displacement amount output by the third driving mechanism 130. Wherein the motion displacement amount output by the output end of the third half-bridge amplifying member 290 is the motion displacement amount along the Y-axis direction, the motion direction of the third driving mechanism 130 driving the motion platform 310 is along the Y-axis direction, i.e. the motion direction of the third driving mechanism 130 driving the motion platform 310 is perpendicular to the motion direction of the first driving mechanism 110 driving the motion platform 310, and the motion direction of the third driving mechanism 130 driving the motion platform 310 is perpendicular to the motion direction of the second driving mechanism 120 driving the motion platform 310.

Illustratively, the large-stroke five-degree-of-freedom compliant precision positioning stage further includes a fifth guide mechanism 450 and a sixth guide mechanism 460, the fifth guide mechanism 450 is disposed at the first end of the third driving mechanism 130, and the first end of the third driving mechanism 130 is connected to the fifth lever amplifying member 270 through a flexible hinge via the fifth guide mechanism 450. The sixth guide mechanism 460 is disposed at the third end of the third driving mechanism 130, and the third end of the third driving mechanism 130 is connected to the sixth lever amplifying member 280 through a flexible hinge via the sixth guide mechanism 460. When the third driving mechanism 130 drives the fifth lever amplifying component 270 and the sixth lever amplifying component 280 to rotate, a shearing force is generated on the third driving mechanism 130; the fifth guide mechanism 450 and the sixth guide mechanism 460 are respectively disposed at two ends of the third driving mechanism 130, and the fifth guide mechanism 450 and the sixth guide mechanism 460 can reduce the shearing force applied to the third driving mechanism 130, thereby protecting the third driving mechanism 130. In the present application, the fifth guide 450 and the sixth guide 460 may be parallel plate guides, or may be guides of other types, which is not limited herein.

As shown in fig. 7, the output end of the second half-bridge amplifying element 260 is connected to the motion stage 310, and the motion displacement of the second half-bridge amplifying element 260 is the motion displacement along the X-axis direction, so that the motion stage 310 has the freedom of movement along the X-axis. The output end of the third half-bridge amplifying member 290 is connected to the motion stage 310, and the motion displacement of the third half-bridge amplifying member 290 is the motion displacement along the Y-axis direction, so that the motion stage 310 has the freedom of movement along the Y-axis. And since the motion platform 310 can move along with the bearing 320, and the bearing 320 has a rotational degree of freedom around the X-axis, a rotational degree of freedom around the Y-axis, and a translational degree of freedom along the Z-axis, the motion platform 310 has a rotational degree of freedom around the X-axis, a rotational degree of freedom around the Y-axis, a translational degree of freedom along the Z-axis, a translational degree of freedom along the X-axis, and a translational degree of freedom along the Y-axis.

Illustratively, as shown in fig. 7 and 8, the large-stroke five-degree-of-freedom compliant precision positioning stage further includes an eleventh guiding mechanism 610, a twelfth guiding mechanism 620, a first decoupling mechanism 510, and a second decoupling mechanism 520, and the output end of the second half-bridge amplifying component 260 is connected to the moving stage 310 through the eleventh guiding mechanism 610 and the first decoupling mechanism 510. Because of manufacturing and mounting errors of parts in the positioning stage, the motion displacement output by the output end of the second half-bridge amplifying element 260 is not a displacement along the X-axis direction, but the eleventh guiding mechanism 610 is disposed at the output end of the second half-bridge amplifying element 260, and the eleventh guiding mechanism 610 guides the motion displacement output by the second half-bridge amplifying element 260, so as to reduce the displacement in the non-X-axis direction output by the output end of the second half-bridge amplifying element 260. The eleventh guiding mechanism 610 in the present application may be an existing parallel plate guiding mechanism, or may be a guiding mechanism of other types, and is not limited herein.

As shown in fig. 8, when the third driving mechanism 130 drives the moving platform 310 to move along the Y-axis direction, the moving platform 310 may generate a parasitic displacement in the X-axis direction; after the first decoupling mechanism 510 is connected to the moving platform 310, the first decoupling mechanism 510 can reduce parasitic displacement in the X-axis direction, and thus a decoupling function is achieved. In the present application, the first decoupling mechanism 510 may adopt an existing double-parallelogram plate spring, and may also adopt other decoupling mechanisms, which is not limited herein.

As shown in fig. 7, the output end of the third half-bridge amplifying member 290 is connected to the moving platform 310 through the twelfth guiding mechanism 620 and the second decoupling mechanism 520. Due to manufacturing and mounting errors of parts in the positioning platform, the motion displacement output by the output end of the third half-bridge amplification component 290 is not a displacement along the Y-axis direction, but the twelfth guide mechanism 620 is disposed at the output end of the third half-bridge amplification component 290, and the twelfth guide mechanism 620 guides the motion displacement output by the third half-bridge amplification component 290, so as to reduce the displacement output by the output end of the third half-bridge amplification component 290 in the non-Y-axis direction. The twelfth guide mechanism 620 may be an existing parallel plate guide mechanism, or may be a guide mechanism of other types, and is not limited herein.

As shown in fig. 7, when the second driving mechanism 120 drives the moving platform 310 to move along the X-axis direction, the moving platform 310 generates a parasitic displacement in the Y-axis direction; after the second decoupling mechanism 520 is connected to the moving platform 310, the second decoupling mechanism 520 can reduce parasitic displacement in the Y-axis direction, and thus a decoupling function is achieved. In the present application, the second decoupling mechanism 520 may adopt an existing double-parallelogram plate spring, and may also adopt decoupling mechanisms of other manners, which is not limited herein. In summary, in the present application, the first decoupling mechanism 510 and the second decoupling mechanism 520 are disposed in the precision positioning platform, so that the control method of the moving platform 310 is simpler, and therefore, the requirement on the controller is reduced, and the cost is reduced.

The utility model also provides a positioning system, this positioning system includes: the large-stroke five-degree-of-freedom compliant precision positioning platform provided by the embodiment. It should be noted that the embodiment of the present invention provides a positioning system, which may further include other circuits and devices for supporting normal operation of the large-stroke five-degree-of-freedom compliant precision positioning platform, for example, an industrial personal computer for controlling the above-mentioned large-stroke five-degree-of-freedom compliant precision positioning platform.

In summary, in the compliant precision positioning stage with large stroke and five degrees of freedom and the positioning system provided by the present application, the first driving mechanism 110 is used for driving the motion stage 310 to move, and the first displacement amplification mechanism is respectively connected to the motion stage 310 and the first driving mechanism 110, and is used for amplifying the motion displacement of the motion stage 310 driven by the first driving mechanism 110, so that the motion stroke of the motion stage 310 in the compliant precision positioning stage with large stroke and five degrees of freedom can be increased, and therefore, the compliant precision positioning stage with large stroke and five degrees of freedom provided by the embodiments of the present application can meet more application scenarios.

In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.

In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. The positioning platform provided by the embodiment of the present application is introduced in detail, and a specific example is applied to explain the principle and the implementation of the present application, and the description of the embodiment is only used to help understanding the method and the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims

1. A large-stroke five-degree-of-freedom compliant precision positioning platform is characterized by comprising:

a motion platform;

the first driving mechanism is used for driving the motion platform to move;

2. The large-stroke five-degree-of-freedom compliant precision positioning platform of claim 1, wherein the first displacement amplification mechanism comprises a primary amplification component and a secondary amplification component, and the primary amplification component is used for amplifying the motion displacement output by the first driving mechanism;

3. The large-stroke five-degree-of-freedom compliant precision positioning platform of claim 2, wherein the primary amplification assembly comprises a first lever amplification member and a second lever amplification member, and the secondary amplification assembly comprises a first half-bridge amplification member;

the input ends of the first lever amplifying member and the second lever amplifying member are respectively connected with the output end of the first driving mechanism, and the input end of the first half-bridge amplifying member is respectively connected with the output ends of the first lever amplifying member and the second lever amplifying member.

4. The large-stroke five-degree-of-freedom compliant precision positioning platform of claim 3, wherein the first lever amplification member and the second lever amplification member are respectively disposed on opposite sides of the first half-bridge amplification member.

5. The large-stroke five-degree-of-freedom compliant precision positioning stage of any one of claims 1 to 4, further comprising:

a carrier connected with the first displacement amplification mechanism;

6. The large-stroke five-degree-of-freedom compliant precision positioning platform of claim 5, wherein the second driving mechanism drives the motion platform in a direction perpendicular to the motion direction, and the first driving mechanism drives the motion platform in a direction perpendicular to the motion direction.

7. The large-stroke five-degree-of-freedom compliant precision positioning stage of claim 6, further comprising:

8. The large-stroke five-degree-of-freedom compliant precision positioning stage of claim 6, further comprising:

9. The large-stroke five-degree-of-freedom compliant precision positioning platform of claim 8, wherein the carrier is further provided with a first decoupling mechanism; the first decoupling mechanism is used for lowering the moving platform, and parasitic displacement in the moving direction of the moving platform is driven by the second driving mechanism.

10. A positioning system comprising a large-stroke five-degree-of-freedom compliant precision positioning stage according to any of claims 1-9.