CN217069513U

CN217069513U - Ultrasonic transducer suitable for large-area bonding

Info

Publication number: CN217069513U
Application number: CN202220060842.6U
Authority: CN
Inventors: 李相超
Original assignee: Shanghai Supersemi Ultrasonic Technology Co ltd
Current assignee: Shanghai Supersemi Ultrasonic Technology Co ltd
Priority date: 2022-01-11
Filing date: 2022-01-11
Publication date: 2022-07-29
Anticipated expiration: 2032-01-11

Abstract

The utility model relates to an ultrasonic transducer who is fit for large tracts of land bonding, including long transducer, long transducer include the transduction motor, the transduction motor output connect amplitude transformer (1), amplitude transformer (1) end-to-end connection bonding tool (2), the transduction motor be square motor, the upper and lower surface of transduction motor is the plane, the upper surface height of transduction motor is unanimous or is close with the upper surface height of amplitude transformer (1), the lower surface height of transduction motor is unanimous or is close with the lower surface height of amplitude transformer (1). Compared with the prior art, the utility model discloses the transducer no longer receives the restriction of bonding area, can guarantee the output of transducer simultaneously.

Description

Ultrasonic transducer suitable for large-area bonding

Technical Field

The present invention relates to an ultrasonic transducer, and more particularly to an ultrasonic transducer suitable for large-area bonding.

Background

In modern wire bonding machines, ultrasonic transducers play a crucial role in the quality of the bond. In the process of wire bonding, the wire and the metal of the bonding pad generate interatomic diffusion under the combined action of heat, pressure and ultrasonic energy to achieve the purpose of bonding. Depending on the lead, the bonding process can be divided into gold wire, copper wire, silver wire, alloy wire, aluminum wire bonding, etc. The ultrasonic system, which is the core of the bonding apparatus, consists of a generator, a transducer, and a bonding tool. The generator is responsible for generating an electric signal with ultrasonic frequency, the transducer is responsible for converting electric energy into mechanical energy, and the bonding tool is responsible for fixing a lead, transmitting pressure and ultrasonic energy, drawing an arc and the like. The transducer is most important in the overall system, and the vibration trajectory, amplitude and system resonant frequency of the bonding tool can be varied by adjusting the transducer. The vibration amplitude of the bonding tool increases mainly with the increase of the ultrasonic power, and is little affected by the bonding force. And the greater the ultrasonic power, the shorter the time to reach maximum bonding strength, reflecting the faster bonding speed. However, excessive ultrasonic power can cause cracking or hardening of the bond pad, reducing bond strength. Good automatic bonders need to monitor parameters such as ultrasonic amplitude and bonding time in real time.

With the development of front-end processes, wire bonding is developing towards ultra-fine bonding and a trend of large bonding area, and the requirement for long transducers is higher and higher. The traditional long transducers are all round motors, the diameters of the round motors are large, so that when large-area travel is carried out, the round motors block a workbench below the transducers, the running distance of the transducers is limited, and large-area bonding cannot be realized. If a small diameter circular motor is used, the piezoelectric ceramic is selected to have a very small diameter, so that the transducer cannot provide sufficient power to the wire bonds and is not practical. The usual protruding portion under the transducer mount will also block a large area of travel to the transducer. The long transducer is used for large-area bonding, the transducer and the mounting seat are ensured not to be blocked, the ultrasonic output power is not influenced, and the design of the motor and the mounting seat structure of the long transducer is difficult and very critical.

SUMMERY OF THE UTILITY MODEL

It is an object of the present invention to overcome the above problems in the prior art and to provide an ultrasonic transducer suitable for large area bonding.

The purpose of the utility model can be realized through the following technical scheme:

the ultrasonic transducer suitable for large-area bonding comprises a long transducer, wherein the long transducer comprises a transducer motor, the output end of the transducer motor is connected with an amplitude transformer, the tail end of the amplitude transformer is connected with a bonding tool, the transducer motor is a square motor, the upper surface and the lower surface of the transducer motor are both planes, the height of the upper surface of the transducer motor is consistent with or close to that of the upper surface of the amplitude transformer, and the height of the lower surface of the transducer motor is consistent with or close to that of the lower surface of the amplitude transformer.

Preferably, the transduction motor comprises a piezoelectric patch, a front cover plate and a rear cover plate, the piezoelectric patch is located in an area formed by the front cover plate and the rear cover plate, the upper surface and the lower surface of the piezoelectric patch are both planes, and the upper surface and the lower surface of the front cover plate and the lower surface of the rear cover plate are also planes matched with the piezoelectric patch.

Preferably, the left and right surfaces of the piezoelectric sheet are planar.

Preferably, the left and right surfaces of the piezoelectric sheet are curved surfaces.

Preferably, the height between the upper surface and the lower surface of the transduction motor is 5-8 mm.

Preferably, the height between the upper surface and the lower surface of the horn is between 5 and 8 millimeters.

Preferably, the ultrasonic transducer further comprises a mounting seat adapted to the long transducer, the mounting seat is of a cavity structure with an open front end, four mounting holes are formed in the rear end of the mounting seat and used for connecting a bonding head, four mounting holes are formed in the upper surface of the mounting seat and used for connecting the long transducer, the middle rear part area of a transduction motor and an amplitude transformer in the long transducer are mounted in the cavity of the mounting seat, and the bottom surface of the mounting seat is a plane.

Preferably, the ultrasonic transducer further comprises a heat shield, the heat shield is mounted at the open end of the mounting seat to form a closed form, the heat shield covers the middle front area of the horn, and the bottom surface of the heat shield is a plane.

Preferably, the height of the bottom surface of the heat shield is consistent with or close to that of the bottom surface of the mounting seat.

Preferably, the bonding tool is connected with the amplitude transformer through a porcelain mouth screw.

Compared with the prior art, the utility model has the advantages of as follows:

(1) the upper part and the lower part of the square motor of the long transducer are planes, and the bottom part is not blocked, so that a large bonding area can be realized, the transducer is not limited by the bonding area any more, and the output power of the transducer can be ensured by increasing the areas of the left surface and the right surface (the left surface and the right surface are curved surfaces or planes);

(2) the mounting seat structure of the utility model can not only realize the connection between the long transducer and the bonding head, but also assist the transducer to realize large bonding area due to the characteristic that the bottom of the mounting seat is a plane, and even if the mounting seat is added to the long transducer, the bottom of the long transducer still has no barrier, thus being capable of satisfying the requirement of large-area bonding;

(3) the utility model discloses separate the heat exchanger and can play the thermal protection effect to long transducer, make long transducer can not receive the influence of workstation steam, simultaneously, separate heat exchanger and mount pad and realize the planar structure in bottom together, both guaranteed that the transducer adds the overall structure of mount pad and separate the heat exchanger and realize the demand of big bonding area, guaranteed again that the performance of transducer itself is not influenced.

Drawings

Fig. 1 is a schematic structural view of a long transducer in embodiment 1 of the present invention;

fig. 2 is a schematic structural view of a piezoelectric sheet, (a) is a schematic sectional view of a conventional piezoelectric sheet, (b) is a schematic sectional view of a piezoelectric sheet of the present invention in which upper and lower surfaces are flat and left and right surfaces are curved, and (c) is a schematic sectional view of a piezoelectric sheet of the present invention in which upper, lower, left and right surfaces are flat;

FIG. 3 is a perspective view of the long transducer of the present invention in use with a mounting base and a heat shield;

FIG. 4 is a side view of a long transducer of the present invention in use with a mount and heat shield.

In the figure, 1 is a horn, 2 is a bonding tool, 3 is a porcelain mouth screw, 4 is a piezoelectric plate, 5 is a front cover plate, 6 is a rear cover plate, 7 is a mounting seat, 8 is a heat shield, 9 is a long transducer and mounting seat connecting screw, 10 is a heat shield and mounting seat connecting screw, and 11 is a bonding head mounting hole.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. Note that the following description of the embodiments is merely an example of the nature, and the present invention is not intended to limit the application or the use thereof, and the present invention is not limited to the following embodiments.

Example 1

As shown in fig. 1, the present embodiment provides an ultrasonic transducer suitable for large-area bonding, including a long transducer, the long transducer includes a transduction motor, the output end of the transduction motor is connected to an amplitude transformer 1, the end of the amplitude transformer 1 is connected to a bonding tool 2, the transduction motor is a square motor, both the upper surface and the lower surface of the transduction motor are flat surfaces, the height of the upper surface of the transduction motor is consistent with or close to the height of the upper surface of the amplitude transformer 1, the height of the lower surface of the transduction motor is consistent with or close to the height of the lower surface of the amplitude transformer 1, the height between the upper surface and the lower surface of the transduction motor is between 5 mm and 8 mm, and meanwhile, the height between the upper surface and the lower surface of the amplitude transformer 1 is also between 5 mm and 8 mm.

The transduction motor mainly comprises a piezoelectric patch 4, a front cover plate 5 and a rear cover plate 6, wherein the piezoelectric patch 4 is positioned in an area formed by the front cover plate 5 and the rear cover plate 6, the upper surface and the lower surface of the piezoelectric patch 4 are both planes, and the upper surface and the lower surface of the front cover plate 5 and the upper surface and the lower surface of the rear cover plate 6 are also planes matched with the piezoelectric patch 4. The front cover plate 5 can be a separate component or can be part of the horn 1.

As shown in fig. 2, a circular motor is common, the piezoelectric sheet 4 constituting the circular motor is circular, and a hole in the middle is used for passing a bolt, as shown in fig. 2 (a). The diameter of the circular motor is usually larger, the piezoelectric plate 4 with too small diameter can not generate the power required by bonding, and the operation of the bonding head with large bonding area is hindered by too large diameter. The novel solution of the present invention is to cut the upper and lower surfaces of the piezoelectric patch 4 of the circular motor flat so that the upper and lower surfaces of the piezoelectric patch 4 are flat surfaces, cut off the portion that hinders the operation, and increase the areas of the left and right surfaces, the left and right surfaces of the piezoelectric patch 4 may be curved surfaces, as shown in fig. 2 (b), and the left and right surfaces of the piezoelectric patch 4 may be flat surfaces, as shown in fig. 2 (c).

The head of the amplitude transformer 1 is provided with a mounting hole, and a bonding tool 2 is fixed in the mounting hole by a porcelain mouth screw 3. The front cover plate 5 and the rear cover plate 6 are adjusted along with the piezoelectric sheet 4 in corresponding sizes, so that the requirement of large bonding area can be realized. And meanwhile, the size of the motor in the left and right directions is increased to ensure the output power of the transducer, so that the rigidity of the transducer cannot be influenced. The amplitude transformer 1 can be made of metal materials such as aluminum alloy, stainless steel, invar alloy, titanium alloy and the like, and the long transducer consists of the amplitude transformer 1, a porcelain mouth screw 3, a bonding tool 2, a front cover plate 5, a rear cover plate 6, a bolt and a piezoelectric plate 4 which jointly form the desired resonant frequency.

Example 2

As shown in fig. 3 and 4, the ultrasonic transducer suitable for large-area bonding provided in this embodiment includes a long transducer, the structure of the long transducer is the same as that of embodiment 1, in this embodiment, a mounting seat 7 adapted to be used with the long transducer is further included, the mounting seat 7 is a cavity structure with an open front end, a transduction motor in the long transducer and a middle rear region of the horn 1 are mounted in the cavity of the mounting seat 7, and a bottom surface of the mounting seat 7 is a plane.

The ultrasonic transducer further comprises a heat shield 8, the heat shield 8 is installed at the open end of the mounting seat 7 to form a closed form, the heat shield 8 covers the middle front area of the horn 1, and the bottom surface of the heat shield 8 is a plane. The height of the bottom surface of the heat shield 8 is consistent with or close to that of the bottom surface of the mounting seat 7.

Installation base 7 that adopts in this embodiment cuts away the material of bottom plane below under the installation space condition of guaranteeing long transducer, increases two nation first mounting holes 11 in the rear end top simultaneously, guarantees that four nation first mounting holes 11 come to install installation base 7 to the nation overhead, and the rigidity of installation base 7 just can not receive the influence like this. The installation of the long transducer and the mounting seat 7 is realized through four transducer installation holes on the mounting seat 7. The utility model discloses mount pad 7 structure is except realizing the connection of long transducer and nation head, because mount pad 7 bottom can also assist the transducer to realize big bonding area for planar characteristic, even long transducer has added mount pad 7, the bottom still does not have blockking, can satisfy the demand of large tracts of land bonding anyhow.

In addition, the performance of the long transducer can be changed under the influence of hot air of the workbench when the long transducer works, and the front end of the mounting seat 7 is provided with the heat insulation cover 8 to shield the hot air of the workbench, so that the transducer cannot be directly influenced. The heat shield 8 is mainly made of plastic and is fixed with the mounting base 7 by glue and screws. To ensure the large area bonding requirement, the bottom surface of the heat shield 8 is planar and is coincident with the bottom surface of the mounting base 7. Due to the adoption of the novel motor structure of the long transducer, the novel mounting seat 7 and the heat shield 8 structure, the long transducer can meet the requirement of large bonding area, the rigidity of the system can be guaranteed not to be influenced, and the thermal stability of the transducer is guaranteed.

It should be noted that the long transducer of the present invention can be used alone, or the long transducer can be used in combination with the mounting base 7 and the heat shield 8.

The above embodiments are merely examples and do not limit the scope of the present invention. These embodiments may be implemented in other various manners, and various omissions, substitutions, and changes may be made without departing from the technical spirit of the present invention.

Claims

1. The ultrasonic transducer suitable for large-area bonding is characterized by comprising a long transducer, wherein the long transducer comprises a transducer motor, the output end of the transducer motor is connected with an amplitude transformer (1), the tail end of the amplitude transformer (1) is connected with a bonding tool (2), the transducer motor is a square motor, the upper surface and the lower surface of the transducer motor are both planes, the height of the upper surface of the transducer motor is consistent with or close to that of the upper surface of the amplitude transformer (1), and the height of the lower surface of the transducer motor is consistent with or close to that of the lower surface of the amplitude transformer (1).

2. The ultrasonic transducer suitable for large area bonding according to claim 1, wherein the transduction motor comprises a piezoelectric patch (4), a front cover plate (5) and a back cover plate (6), the piezoelectric patch (4) is located in the region formed by the front cover plate (5) and the back cover plate (6), the upper and lower surfaces of the piezoelectric patch (4) are both flat, and the upper and lower surfaces of the front cover plate (5) and the back cover plate (6) are also flat surfaces adapted to the piezoelectric patch (4).

3. The ultrasonic transducer suitable for large area bonding according to claim 2, wherein the left and right surfaces of the piezoelectric sheet (4) are planar.

4. The ultrasonic transducer suitable for large area bonding according to claim 2, wherein the left and right surfaces of the piezoelectric sheet (4) are curved surfaces.

5. An ultrasonic transducer suitable for large area bonding according to claim 1, wherein the height between the upper surface and the lower surface of the transduction motor is 5 to 8 mm.

6. The ultrasonic transducer suitable for large area bonding according to claim 1, wherein the height between the upper surface and the lower surface of the horn (1) is between 5 and 8 mm.

7. The ultrasonic transducer suitable for large-area bonding according to claim 1, further comprising a mounting seat (7) adapted to the long transducer, wherein the mounting seat (7) has a cavity structure with an open front end, four mounting holes are formed at a rear end for connecting a bonding head, four mounting holes are formed at an upper surface for connecting the long transducer, a transduction motor in the long transducer and a middle-rear region of the horn (1) are mounted in the cavity of the mounting seat (7), and a bottom surface of the mounting seat (7) is a plane.

8. The ultrasonic transducer suitable for large area bonding according to claim 7, further comprising a heat shield (8), wherein the heat shield (8) is mounted at the open end of the mounting seat (7) to form a closed form, and the heat shield (8) covers the middle front region of the horn (1), and the bottom surface of the heat shield (8) is a plane.

9. The ultrasonic transducer suitable for large area bonding according to claim 8, wherein the height of the bottom surface of the heat shield (8) is consistent with or close to the height of the bottom surface of the mounting seat (7).

10. An ultrasonic transducer suitable for large area bonding according to claim 1, wherein the bonding tool (2) is connected to the horn (1) by a knob screw (3).