CN216978795U

CN216978795U - Base mechanism for optical microscope and optical microscope

Info

Publication number: CN216978795U
Application number: CN202123299960.7U
Authority: CN
Inventors: 杨杰; 任宏志
Original assignee: Beihai Huike Semiconductor Technology Co Ltd
Current assignee: Beihai Huike Semiconductor Technology Co Ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-07-15
Anticipated expiration: 2031-12-24

Abstract

The application relates to the technical field of chip processing, concretely relates to base mechanism and optical microscope for optical microscope, this base mechanism specifically includes: the device comprises a support frame, a grating detection assembly and a signal processing module, wherein one wall surface of the support frame is provided with a variable range grating detection assembly; the base body is arranged on one side of the supporting frame in a lifting manner, and a reading head matched with the grating detection assembly is convexly arranged at one end of the base body; the first position detection assembly is arranged on one side of the base body through a supporting rod, and a gap is formed between the first position detection assembly and the base body; in conclusion, the design of the application can ensure that the wafer which is detected can be accurately placed in the initial installation position, and meanwhile, the design of the grating detection assembly with the variable range can effectively avoid the phenomenon of chip skipping and ensure the detection efficiency.

Description

Base mechanism for optical microscope and optical microscope

Technical Field

The application relates to the technical field of chip processing, in particular to a base mechanism for an optical microscope and the optical microscope.

Background

At present, the detection of internal defects of a semiconductor material is one of important standards for measuring and evaluating the quality of a semiconductor, and the internal defects mainly refer to internal impurities, inclusions and the like; the currently used inspection apparatus is an optical microscope, which uses reflection or scattering of light to inspect defects on the surface of a semiconductor, and the defects may cause the surface of the semiconductor to be uneven, thereby exhibiting different reflection and scattering effects on light. Based on processing the received optical signals from the semiconductor surface, the optical microscope can locate the position of the defect.

In the prior art, a wafer to be detected is placed in a wafer rack, the wafer rack is installed on one side of a microscope body, the wafer to be detected is sucked by a manipulator and moved to the lower side of the microscope body, after detection is completed, the manipulator is used again to place the wafer which is detected in the wafer rack in an initial installation position, however, the wafer skipping phenomenon often occurs in the detection process, namely the wafer which is supposed to be placed back to the first installation position and is detected is placed in a second installation position, and therefore detection efficiency is affected.

SUMMERY OF THE UTILITY MODEL

The present application provides a base mechanism for an optical microscope and an optical microscope, so as to solve the technical problem in the prior art that a wafer which is detected is often jumped when the wafer is placed back into a wafer rack.

To achieve the above object, a first aspect of the present application provides a mount mechanism for an optical microscope, comprising:

the device comprises a support frame, a grating detection assembly and a control module, wherein one wall surface of the support frame is provided with a variable-range grating detection assembly;

the base body is arranged on one side of the supporting frame in a lifting mode, and a reading head matched with the grating detection assembly is convexly arranged at one end of the base body;

and the first position detection assembly is arranged on one side of the base body through a support rod, and a gap exists between the first position detection assembly and the base body.

As one of the alternatives of the present technical solution, the grating detection assembly includes: the grating scale comprises a driving part and a grating scale, wherein the driving part is installed on the support frame along the vertical direction, and the free end of the driving part is connected with the grating scale and used for driving the grating scale to do reciprocating motion on the support frame along the vertical direction.

As one of the alternatives of the present invention, the driving part is provided as a screw structure including: the grating scale comprises a screw rod body and a moving part which are matched, wherein the screw rod body is rotationally connected to the supporting frame, and the grating scale is movably arranged on the screw rod body through the moving part.

As one of the alternatives of the present technical solution, the grating detection assembly further includes: the sliding rail is vertically arranged on the supporting frame, and the moving part is arranged on the sliding rail in a sliding mode through the sliding block.

As one alternative of the present technical solution, the grating scale and the driving portion are detachably connected by a mounting structure.

As one of the alternatives of the present technical solution, the mounting structure includes: and the first mounting part and the second mounting part are matched, one of the first mounting part and the second mounting part is arranged on the grating scale, and the other one of the first mounting part and the second mounting part is arranged on the driving part.

As one of the alternatives of the present solution, one of the first mounting member and the second mounting member is provided as a protrusion, and the other is provided as a groove cooperating with the protrusion.

As one of the alternatives of the technical scheme, a limiting seat is arranged on the wall surface of the support frame far away from the grating detection assembly, a second position detection assembly is arranged in the limiting seat, and a limiting part is convexly arranged on the position of the base body matched with the limiting seat.

As one of the alternatives of the technical solution, one end of the limiting seat has an opening, and when the base body is lifted to a preset position along the supporting frame, the limiting member is inserted into the limiting seat.

To achieve the above object, a second aspect of the present application provides an optical microscope comprising:

a microscope body;

the base mechanism of any one of the preceding claims, which is arranged on one side of the microscope body in a lifting way;

the wafer rack is arranged on the base mechanism, a plurality of mounting positions are arranged in the wafer rack at intervals along the vertical direction, and each mounting position is provided with a wafer to be detected;

the manipulator is rotatably arranged on one side of the wafer frame and used for taking the wafer to be detected;

and the moving frame is rotatably arranged between the mechanical arm and the microscope body and is provided with two placing positions.

The application provides a base mechanism for an optical microscope and the optical microscope, and particularly adopts a matching mode of a grating detection assembly with a variable measuring range and a first position detection assembly, so that the phenomenon of film skipping is effectively avoided; during detection, the first position detection assembly can be used for detecting whether the wafer is taken out or not, the base mechanism is driven to move, meanwhile, the required range is increased and decreased by matching with the grating detection assembly with the variable range, the phenomenon of chip skipping can be effectively avoided, and the detection efficiency is guaranteed.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for a person skilled in the art to obtain other drawings without inventive exercise based on the drawings, wherein:

FIG. 1 is a schematic view of a seat mechanism of the present application;

FIG. 2 is a schematic diagram of the structure of a grating detection assembly according to the present application;

FIG. 3 is a schematic view of a structure of the present application in which a position-limiting base and a position-limiting member are engaged;

FIG. 4 is a schematic view of the configuration of the engagement of the cassette and base mechanism of the present application;

fig. 5 is a schematic view of the structure of the wafer to be inspected, the robot and the movable frame.

In the figure: 1. a support frame; 2. a base body; 3. a first position detection assembly; 4. a support bar; 5. a grating scale; 6. a screw rod body; 7. a moving part; 8. a slider; 9. a slide rail; 10. a limiting seat; 11. a limiting member; 12. a sheet rack; 13. an installation position; 14. detecting a wafer to be detected; 15. a reading head; 16. a manipulator; 17. a movable frame; 18. and placing bits.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The present application is described in further detail below with reference to the following figures and detailed description:

as shown in fig. 4, the present application provides an optical microscope including:

a microscope body;

the base mechanism is arranged on one side of the microscope body in a lifting way;

the wafer rack 12 is arranged on the base mechanism, a plurality of mounting positions 13 are arranged in the wafer rack 12 at intervals along the vertical direction, and each mounting position 13 is provided with a wafer 14 to be detected;

and the mechanical arm 16 is rotatably arranged on one side of the wafer frame 12 through the support frame 1 and is used for taking the wafer 14 to be detected.

Specifically, the robot 16 includes: the crystal sucking plate is connected with the mechanical arm, one end of the mechanical arm is rotatably connected with the support frame 1, and the mechanical arm can be driven to rotate by adopting a rotating motor; the other end is connected with the crystal absorbing plate.

And a moving frame 17 rotatably installed between the robot arm 16 and the microscope body, and the moving frame 17 has two placing positions 18.

This base mechanism specifically includes:

the device comprises a support frame 1, wherein one wall surface is provided with a grating detection assembly with a variable measuring range;

the base body 2 is arranged on one side of the support frame 1 in a lifting way, and a reading head 15 matched with the grating detection component is convexly arranged at one end of the base body 2;

specifically, the base body 2 is arranged on the support frame 1 in a lifting manner through a driving air cylinder; illustratively, the fixed end of the driving cylinder is mounted on the supporting frame 1, the piston end of the driving cylinder is connected with the base body 2, and when the piston end extends out of the cylinder, the base body 2 is lifted; similarly, when the piston end makes retraction cylinder movement, the base body 2 is lowered; in another embodiment, the driving cylinder is installed at one side of the base body 2, and the piston end of the cylinder is connected with the side wall surface of the base body 2 through a connecting arm, at this time, only the piston end of the driving cylinder needs to do reciprocating motion of extending out or retracting into the cylinder body, so that the base body 2 can ascend or descend; the specific structure that can realize the lifting of the base body 2 is not limited in this embodiment, and the above embodiment is only provided for more clearly understanding the lifting process of the base body 2.

The first position detection assembly 3 is arranged on one side of the base body 2 through a support rod 4, and a gap is formed between the first position detection assembly and the base body 2; wherein the first position detection assembly 3 is adapted to detect the position of different mounting locations 13, the first position detection assembly 3 is illustratively provided as an infrared sensor.

When the wafer 14 to be detected needs to be detected, as shown in fig. 5, the manipulator 16 is driven to move in the direction close to the first mounting position 13 of the wafer holder 12 until the crystal sucking plate moves to correspond to the wafer 14 to be detected placed in the first mounting position 13, then the first wafer 14 to be detected is taken out of the first mounting position 13 by vacuum and placed in the first placing position 18 of the moving frame 17, and then the moving frame 17 is driven to rotate, so that the first wafer 14 to be detected is conveyed to the lower part of the microscope body; meanwhile, when the first position detection assembly 3 detects that the wafer 14 to be detected in the first installation position 13 is taken out, the base mechanism is driven to do descending motion until the first position detection assembly 3 corresponds to the second installation position 13; then, the manipulator 16 is driven to move towards the direction close to the second mounting position of the wafer frame 12 again until the crystal sucking plate moves to correspond to the wafer 14 to be detected placed in the second wafer to be detected, and then the second wafer to be detected is taken out from the second mounting position 13 by vacuum and placed in a second placing position 18 of the moving frame 17 for waiting for the next detection; at this time, if it is detected that the wafer which has been detected is placed in the first placing position 18, the base mechanism is driven to perform precise ascending motion according to the data detected by the grating detection assembly until the first position detection assembly 3 corresponds to the first mounting position 13 again; meanwhile, the movable frame 17 is driven to rotate again, so that the wafer which is detected is corresponding to the position of the mechanical arm 16, and then the mechanical arm 16 is only needed to be used for accurately placing the wafer which is detected in the first installation position 13.

According to one embodiment of the present application, a grating detection assembly includes: matched with drive division and grating scale 5, the drive division is installed on support frame 1 along vertical direction, the free end of drive division is connected with grating scale 5, be used for drive grating scale 5 along vertical direction reciprocating motion on support frame 1, when needs increase grating detection subassembly's range, only need through drive division drive grating scale 5 to the direction motion of keeping away from the drive division can, the same is said, when needs reduce grating detection subassembly's range, only need through drive division drive grating scale 5 to the direction motion that is close to the drive division can.

In a specific embodiment, as shown in fig. 2, the driving part is provided as a screw structure including: the lead screw comprises a lead screw body 6 and a moving part 7 which are matched, wherein the lead screw body 6 is rotationally connected to the support frame 1, specifically, the lead screw body 6 is rotated through a driving motor, preferably, the driving motor is set to be a servo motor, so that the number of turns of the lead screw body 6 is controlled through the servo motor, and further, the moving distance of the grating scale 5 is accurately controlled; the grating scale 5 is movably arranged on the screw rod body 6 through a moving part 7; illustratively, when the range of the grating detection assembly needs to be increased, only the lead screw body 6 needs to be driven to rotate clockwise, and at the moment, the moving part 7 drives the grating scale 5 to move in a direction away from the driving motor; in the same way, when the measuring range of the grating detection assembly needs to be reduced, only the screw rod body 6 needs to be driven to rotate anticlockwise, and at the moment, the moving part 7 drives the grating scale 5 to move towards the direction close to the driving motor.

According to an embodiment of the present application, in order to avoid the position shift when the grating scale 5 moves, it is preferable that the grating detection assembly further includes: in conclusion, by adopting the design of the embodiment, the grating scale 5 can be ensured to reciprocate along the length direction of the slide rail 9, so that the position deviation of the grating scale 5 during movement is effectively avoided; certainly, in order to play the guide effect for grating scale 5 removal in-process, not only be limited to the cooperation mode between slider 8 and the slide rail 9, can also adopt the design of guide bar, be provided with the guide bar in the parallel direction of lead screw body 6 promptly, grating scale 5 one time with guide bar sliding connection, when lead screw body 6 drive grating scale 5 moved, can guarantee not squinting of grating scale 5 motion under the effect of guide bar.

In another preferred embodiment, the driving portion is configured as a telescopic structure, a free end of the telescopic structure is mounted on the support frame 1, and the free end is connected with the grating scale 5, for example, the telescopic structure may be configured as an air cylinder or an electric push rod, as long as the structure capable of realizing telescopic motion is suitable for this embodiment, which all belong to the protection range of this embodiment, for convenience of understanding, taking the air cylinder as an example, when the range of the grating detection assembly needs to be increased, only the piston rod needs to be driven to move in the direction of extending out of the cylinder body, and at this time, the piston rod pushes the grating scale 5 to move in the direction away from the cylinder body; in the same way, when the range of the grating detection assembly needs to be reduced, only the piston rod needs to be driven to retract the cylinder body to move, and at the moment, the piston rod pulls the grating scale 5 to move towards the direction close to the cylinder body.

According to an embodiment of the present application, in order to further expand the variable range of the grating detection assembly, it is preferable that the grating scale 5 is detachably connected to the driving portion through a mounting structure; specifically, the mounting structure includes: the grating scale comprises a first mounting piece and a second mounting piece which are matched with each other, wherein one of the first mounting piece and the second mounting piece is mounted on a grating scale 5, and the other mounting piece is mounted on a driving part; preferably, one of the first mounting piece and the second mounting piece is provided with a protrusion, and the other one is provided with a groove matched with the protrusion, illustratively, the first mounting piece is mounted on the grating scale 5 and is provided with a groove, the second mounting piece is mounted on the driving part and is provided with a protrusion matched with the groove, and specifically, the detachable connection of the grating scale 5 and the driving part can be realized through the matching between the protrusion and the groove; when the range of grating detection subassembly is further increased to needs, only need pull down present grating scale 5 to be changed into the grating scale 5 of great range can, on the same hand, when the range of grating detection subassembly is further reduced to needs, only need pull down present grating scale 5 to be changed into the grating scale 5 of less range can, to sum up, the design of adopting this embodiment can enlarge the general scope of this application.

According to an embodiment of the present application, a limiting seat 10 is disposed on a wall surface of the supporting frame 1 away from the grating detection assembly, a second position detection assembly is mounted in the limiting seat 10, and a limiting member 11 is convexly disposed on a position of the base body 2, which is matched with the limiting seat 10; preferably, one end of the limiting seat 10 has an opening, and when the base body 2 is lifted to a predetermined position along the supporting frame 1, the limiting member 11 is inserted into the limiting seat 10.

The embodiments in the present description are all described in a progressive manner, and some of the embodiments are mainly described as different from other embodiments, and the same and similar parts among the embodiments can be referred to each other.

It is noted that in the description and claims of the present application and in the above-mentioned drawings, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein.

Also, the terms "comprises," "comprising," and "having," as well as any variations thereof or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not explicitly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Spatially relative terms, such as "above … …," "above … …," "above … … surface," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The foregoing are merely exemplary embodiments of the present application and are presented to enable those skilled in the art to understand and practice the present application. Various modifications and changes to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A mount mechanism for an optical microscope, comprising:

the device comprises a support frame, a grating detection assembly and a signal processing module, wherein one wall surface of the support frame is provided with a variable range grating detection assembly;

2. The mount mechanism for an optical microscope according to claim 1, wherein the grating detection unit includes: the grating scale comprises a driving portion and a grating scale, wherein the driving portion is installed on the supporting frame in the vertical direction, and the free end of the driving portion is connected with the grating scale and used for driving the grating scale to reciprocate on the supporting frame in the vertical direction.

3. The mount mechanism for an optical microscope according to claim 2, wherein the driving section is provided as a screw structure including: the grating scale comprises a screw rod body and a moving part which are matched, wherein the screw rod body is rotationally connected to the supporting frame, and the grating scale is movably arranged on the screw rod body through the moving part.

4. The mount mechanism for an optical microscope according to claim 3, wherein the grating detection unit further comprises: the sliding rail is vertically installed on the supporting frame, and the moving part is installed on the sliding rail in a sliding mode through the sliding block.

5. The mount mechanism for an optical microscope according to claim 2, wherein the grating scale is detachably connected to the driving section by a mounting structure.

6. The mount mechanism for an optical microscope according to claim 5, wherein the mounting structure comprises: and the first mounting part and the second mounting part are matched, one of the first mounting part and the second mounting part is arranged on the grating scale, and the other one of the first mounting part and the second mounting part is arranged on the driving part.

7. A mount mechanism for an optical microscope according to claim 6, wherein one of the first mount section and the second mount section is provided as a projection, and the other is provided as a recess which is fitted with the projection.

8. The mount mechanism for an optical microscope according to claim 1,

the support frame is kept away from be provided with spacing seat on the wall of grating determine module, install second position determine module in the spacing seat, base body on with spacing seat matched with position protruding is equipped with the locating part.

9. The mount mechanism for an optical microscope according to claim 8, wherein one end of the stopper seat has an opening, and the stopper is inserted into the stopper seat when the mount body is raised to a predetermined position along the support frame.

10. An optical microscope, comprising:

a microscope body;

the mount mechanism of any one of claims 1-9, mounted elevationally to one side of the microscope body;

the wafer rack is arranged on the base mechanism, a plurality of mounting positions are arranged in the wafer rack at intervals along the vertical direction, and a wafer to be detected is mounted at each mounting position;

the mechanical arm is rotatably arranged on one side of the sheet frame;