CN216958082U - Passive multifunctional temperature and pressure measuring device - Google Patents
Passive multifunctional temperature and pressure measuring device Download PDFInfo
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- CN216958082U CN216958082U CN202123024558.8U CN202123024558U CN216958082U CN 216958082 U CN216958082 U CN 216958082U CN 202123024558 U CN202123024558 U CN 202123024558U CN 216958082 U CN216958082 U CN 216958082U
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Abstract
The utility model discloses a passive multifunctional temperature and pressure measuring device which comprises a substrate, a lower electrode, a flexible functional material layer and an upper electrode, wherein the upper surface of the substrate is a rough surface, and the upper electrode is two superposed different metal material layers. The device is based on a metal-flexible functional material-metal layered structure, and realizes simultaneous measurement of parameters such as temperature and pressure through voltage between metal electrodes. The voltage signal output by the utility model during working is obtained by converting the pressure and the temperature in the environment, no additional energy is needed, and the long-time stable working can be realized. The basic working units of the device can be freely arrayed, and multiple detection functions are realized.
Description
Technical Field
The utility model relates to the field of semiconductor devices, in particular to a passive multifunctional temperature and pressure measuring device.
Background
In modern society, the development, intake and transmission of information resources occupy its major position in people's lives. The sensor can detect and sense external signals, physical conditions (such as light, heat and humidity) or chemical compositions (such as smoke) and transmit the detected information to other equipment, thereby showing extremely wide development prospect in the fields of military affairs and civil use.
In recent years, with the development of electronic technology and micromachining technology, high-precision detection devices for signals of pressure, temperature, light, chemical substances and the like are sequentially prepared, and the detection devices have important applications in environmental monitoring, biological recognition, bionics and the like. However, most of the existing sensors are based on an active detection principle, and need to provide energy externally in the working process, which is not favorable for long-term working requirements. The passive detection device has a single function at present, and the preparation of the passive detection device for simultaneously measuring multiple signals faces certain challenges.
SUMMERY OF THE UTILITY MODEL
The utility model provides a passive multifunctional temperature and pressure measuring device aiming at the requirement of simultaneously measuring various signals, integrates various measuring functions including pressure, temperature and the like, and can realize simultaneous measurement. The voltage signal that the device output derives from pressure and temperature conversion in the environment, need not extra function, can satisfy long-time work demand.
The utility model is realized by the following technical scheme:
a passive multifunctional temperature and pressure measuring device adopts a layered structure and comprises a substrate, a lower electrode, a flexible functional material layer and an upper electrode. The substrate is a rough surface obtained after treatment, and the upper electrode is two superposed different metal material layers. The external pressure signal measurement is obtained based on the potential difference of the flexible functional material layer between the upper electrode and the lower electrode, and the temperature signal measurement is obtained by the temperature difference electromotive force between the two metal layers of the upper electrode.
The improved scheme of the utility model can enrich the design of the device structure under the structure or realize more complex device functions. The flexible functional material layer is used as the middle layer, flexible or composite nano-structure materials with a triboelectric effect and a piezoelectric effect, such as Polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF) and the like, can be selected for use, and dynamic and static pressure measurement is respectively realized. The substrate can be a hard carrier (such as glass, silicon chip and the like) or a flexible film (such as a polymer film) to realize a flexible device. The rough surface of the substrate can be obtained by a reactive ion etching method or a chemical method such as acid solution etching and the like according to the selected substrate material. The rough surface of the substrate can be a regular pattern surface with special functions obtained by utilizing selective etching methods such as a template and the like. The upper electrode is made of two metals with different thermoelectromotive forces, and can be patterned through a mask or a photoetching process, so that a multifunctional device of a tiny unit is realized. The lower electrode is a metal or other organic conductive film, a single-layer film or a multi-layer film. The film as the lower electrode has the same structure with the rough surface of the substrate, and can be prepared by methods such as electron beam evaporation or magnetron sputtering and the like.
Compared with the prior art, the utility model has the beneficial effects that:
the utility model is based on the metal-flexible functional material-metal layered structure, and realizes the simultaneous measurement of parameters such as temperature, pressure and the like through the voltage between metal electrodes. The voltage signal output by the utility model during working is obtained by converting the pressure and the temperature in the environment, no additional energy is needed, and the long-time stable working can be realized. The basic working units of the device can be freely arrayed, and multiple detection functions are realized.
Drawings
Fig. 1 is a schematic cross-sectional structure of the present invention.
Illustration of the drawings: 1. a substrate; 2. a lower electrode; 3. a flexible functional material layer; 4. a metal layer I; 5. and a metal layer II.
Detailed Description
The utility model will be further described with reference to the accompanying drawings.
Examples
Referring to fig. 1, the device structure of the present invention comprises a substrate 1, a lower electrode 2, a flexible functional material layer 3, and an upper electrode (composed of two parts, I4 and II 5). The substrate 1 has a function of supporting a device, and the surface thereof is a rough surface obtained by etching by a reactive ion etching method or a chemical method. The lower electrode 2 is arranged on the rough surface of the substrate 1, and can be prepared on the substrate 1 by methods such as electron beam evaporation or magnetron sputtering. The flexible functional material layer 3 is used as a functional material for voltage measurement, and a material with triboelectric characteristics can be selected to measure dynamic pressure or a piezoelectric material can be selected to measure static pressure. The upper electrode is composed of a metal layer I4 and a metal layer II5, and the metal layer I4 and the metal layer II5 are made of two metals with different thermoelectromotive forces, such as copper and constantan, iron and constantan, and the like. The voltage measurement of the device is obtained by the potential difference between the lower electrode 2 and the metal layer I4, and the temperature measurement is obtained by the potential difference between the metal layer I4 and the metal layer II 5. The voltage signal and the temperature signal are not interfered with each other in the measurement, so that the simultaneous measurement can be realized.
The foregoing merely represents preferred embodiments of the utility model, which are described in some detail and detail, and therefore should not be construed as limiting the scope of the utility model. It should be noted that, for those skilled in the art, various changes, modifications and substitutions can be made without departing from the spirit of the present invention, and these are all within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (6)
1. The utility model provides a multi-functional temperature pressure measuring device of passive form which characterized in that: the flexible high-power LED display panel comprises a substrate, a lower electrode, a flexible functional material layer and an upper electrode, wherein the upper surface of the substrate is a rough surface, and the upper electrode is two superposed different metal material layers.
2. A passive multifunctional temperature and pressure measuring device according to claim 1, characterized in that: the substrate is a rigid carrier sheet or a flexible membrane.
3. A passive multifunctional temperature and pressure measuring device according to claim 1, characterized in that: the lower electrode is a metal or organic conductive film, a single-layer or multi-layer film.
4. A passive multifunctional temperature and pressure measuring device according to claim 3, wherein: the thin film as the lower electrode has the same structure as the substrate rough surface.
5. A passive multifunctional temperature and pressure measuring device according to claim 1, characterized in that: the flexible functional material layer is used as an intermediate layer, and a flexible or composite nano-structure material with triboelectric or piezoelectric characteristics is selected.
6. A passive multifunctional temperature and pressure measuring device according to claim 1, characterized in that: the upper electrode is made of two metals with different thermoelectromotive forces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123024558.8U CN216958082U (en) | 2021-12-02 | 2021-12-02 | Passive multifunctional temperature and pressure measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123024558.8U CN216958082U (en) | 2021-12-02 | 2021-12-02 | Passive multifunctional temperature and pressure measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216958082U true CN216958082U (en) | 2022-07-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123024558.8U Active CN216958082U (en) | 2021-12-02 | 2021-12-02 | Passive multifunctional temperature and pressure measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216958082U (en) |
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2021
- 2021-12-02 CN CN202123024558.8U patent/CN216958082U/en active Active
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