CN216947169U - Magnetron sputtering vacuum coating device with adjustable sputtering distance - Google Patents
Magnetron sputtering vacuum coating device with adjustable sputtering distance Download PDFInfo
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- CN216947169U CN216947169U CN202123212724.7U CN202123212724U CN216947169U CN 216947169 U CN216947169 U CN 216947169U CN 202123212724 U CN202123212724 U CN 202123212724U CN 216947169 U CN216947169 U CN 216947169U
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- coating device
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- adjustable
- sputtering
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 43
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 32
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 32
- 239000011248 coating agent Substances 0.000 claims abstract description 49
- 238000000576 coating method Methods 0.000 claims abstract description 49
- 238000013016 damping Methods 0.000 claims abstract description 18
- 239000007921 spray Substances 0.000 claims description 22
- 230000017525 heat dissipation Effects 0.000 claims description 5
- 239000007888 film coating Substances 0.000 claims description 3
- 238000009501 film coating Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 6
- 230000006978 adaptation Effects 0.000 abstract description 5
- 230000007246 mechanism Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000035939 shock Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model discloses a magnetron sputtering vacuum coating device with adjustable sputtering distance, which comprises a coating device main body, a control console and a vacuum machine, wherein the outer side of the coating device main body is movably connected with a vacuum bin door, one side of the coating device main body is electrically connected with the control console, the lower end of the control console is fixedly connected with a numerical control cabinet, one side of the control console is fixedly connected with a display screen, one side of the display screen is fixedly connected with a control panel, and the outer side of the control console is provided with a plug wire interface. According to the magnetron sputtering vacuum coating device with the adjustable sputtering distance, the distance adjusting assembly is additionally arranged, the nozzle mechanism can be flexibly adjusted to perform adaptation movement, corresponding coating is performed according to the processing requirement of a workpiece to be coated, the damping limiting base is additionally arranged, the whole vacuum coating device is conveniently subjected to damping treatment, and damage caused by resonance of devices in the device is effectively avoided.
Description
Technical Field
The utility model relates to the field of coating devices, in particular to a magnetron sputtering vacuum coating device with adjustable sputtering distance.
Background
The magnetron sputtering vacuum coating device with the adjustable sputtering distance is a device for carrying out magnetron sputtering vacuum coating with the adjustable sputtering distance, a workpiece to be processed is coated by magnetron sputtering vacuum spraying, the workpiece is comprehensively sprayed, and along with the continuous development of science and technology, the manufacturing process requirements of people on the magnetron sputtering vacuum coating device with the adjustable sputtering distance are higher and higher.
In the prior art, the patent with the publication number of CN202010664393.1 discloses a vacuum coating device of an automatic vacuum coating production line, which is uniformly heated and has strong adhesion, so that the object can be coated in a full area without falling off, and in addition, the structure of an electron gun in the vacuum coating device of the automatic vacuum coating production line is increased, the controllability is strong, the volume of the vacuum coating device is reduced, the internal equipment of the vacuum coating device is optimized, the cleaning and maintenance in the vacuum coating device are convenient, the service life of the vacuum coating device is prolonged, the maintenance is convenient, the practicability is high, firstly, the sputtering distance of a coating substrate can not be adjusted when the existing coating device is used, the use of people is not facilitated, and in addition, the existing coating device vibrates violently in the use process, tight devices in the device are easily damaged, and certain adverse effects are brought to the use process of people, therefore, the magnetron sputtering vacuum coating device with the adjustable sputtering distance is provided.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Aiming at the defects of the prior art, the utility model provides a magnetron sputtering vacuum coating device with an adjustable sputtering distance, which can flexibly adjust a spray head mechanism to carry out adaptation activity by adding a distance adjusting assembly, carry out corresponding coating according to the processing requirements of a workpiece to be coated, facilitate the whole damping treatment of the vacuum coating device by adding a damping limiting base, effectively avoid the damage caused by the resonance of devices in the device and effectively solve the problems in the background technology.
(II) technical scheme
In order to achieve the purpose, the utility model adopts the technical scheme that: the utility model provides a sputtering is apart from adjustable magnetron sputtering vacuum coating device, includes coating device main part and control cabinet, vacuum machine, the outside swing joint of coating device main part has the vacuum door, one side electric connection of coating device main part has the control cabinet, the lower extreme fixedly connected with numerical control machine case of control cabinet, one side fixedly connected with display screen of control cabinet, one side fixedly connected with control panel of display screen.
Preferably, the plug wire interface is arranged on the outer side of the console, the communicating pipe is fixedly connected to the outer side of the coating device main body, the air pump is fixedly connected to one end of the communicating pipe, the interface is arranged at one end of the air pump, and the vacuum machine is fixedly connected to one side of the air pump.
Preferably, a heat dissipation plate is fixedly connected to one side of the vacuum machine, a fixing seat is fixedly connected to the lower end of the air pump, a vacuum cavity is formed in the coating device body, and a workpiece placing groove is fixedly connected to one side of the vacuum cavity.
Preferably, the inside of the vacuum cavity is movably connected with a longitudinal movable shaft, the outer side of the longitudinal movable shaft is movably connected with a spray head assembly, and the inner side of the spray head assembly is movably connected with a transverse movable shaft.
Preferably, the bottom of the coating device main body is detachably connected with a positioning plate, the inner side of the positioning plate is provided with a clamping groove, and two sides of the positioning plate are movably connected with base side plates.
Preferably, the inner side of the base side plate is provided with a sliding groove, the bottom end of the base side plate is fixedly connected with a base bottom plate, and the bottom end of the positioning plate is movably connected with a plurality of groups of damping springs.
Preferably, mounting grooves are formed between the control console and the display screen and between the control console and the control panel, and the outer side of the control console is fixedly connected with the outer side of the display screen and the outer side of the control panel through the mounting grooves.
Preferably, one side of the coating device main body is communicated with the inside of the air pump through a communicating pipe and a connector, and the lower end of the air pump is fixedly connected with the upper end of the fixing seat in a welding mode.
Preferably, movable grooves are formed among the spray head assembly, the longitudinal movable shaft and the transverse movable shaft, the interior of the spray head assembly is movably connected with the outer sides of the longitudinal movable shaft and the transverse movable shaft through the movable grooves, and the interior of the coating device main body is movably connected with the inner side of the spray head assembly through a vacuum cavity, the longitudinal movable shaft and the transverse movable shaft.
Preferably, the two sides of the positioning plate are slidably connected with the inner part of the base side plate through sliding grooves, and the inner side of the base bottom plate is movably connected with the lower end of the positioning plate through a damping spring.
(III) advantageous effects
Compared with the prior art, the utility model provides a magnetron sputtering vacuum coating device with adjustable sputtering distance, which has the following beneficial effects:
1. this sputtering is apart from adjustable magnetron sputtering vacuum coating device, through increasing apart from the adjusting part, can adjust shower nozzle mechanism in a flexible way and carry out the adaptation activity, the processing requirement according to treating the coating film work piece carries out corresponding coating film, will be apart from the inside that the adjusting part adaptation was installed the coating film device main part, install one side of work piece standing groove with vertical loose axle, carry out swing joint through inboard two sets of horizontal loose axle centre gripping in the outside of vertical loose axle with the shower nozzle subassembly, through vertical loose axle, the activity of horizontal loose axle is nimble to be adjusted the shower nozzle subassembly and is being sputtered the distance at the inboard activity of coating film device main part.
2. This sputtering is apart from adjustable magnetron sputtering vacuum coating device, through increasing the spacing base of shock attenuation, be convenient for carry out shock attenuation processing to vacuum coating device is whole, effectively avoid the inside device of device to produce resonance and cause the damage, install the bottom of coating device main part with the spacing base of shock attenuation, it fixes in the inboard draw-in groove of locating plate to correspond the joint, the device is in the spacing slip of the effect of spout in the use, alleviate the resonance reaction that the device operation in-process produced via multiunit damping spring.
Drawings
FIG. 1 is a schematic view of the overall structure of a magnetron sputtering vacuum coating device with adjustable sputtering distance.
FIG. 2 is a schematic structural diagram of a console in the magnetron sputtering vacuum coating device with adjustable sputtering distance.
FIG. 3 is a schematic structural diagram of a vacuum machine in the magnetron sputtering vacuum coating device with adjustable sputtering distance.
FIG. 4 is a schematic structural diagram of a distance adjusting assembly in a magnetron sputtering vacuum coating device with adjustable sputtering distance according to the present invention.
FIG. 5 is a schematic structural diagram of a damping limiting base in the magnetron sputtering vacuum coating device with adjustable sputtering distance.
FIG. 6 is a schematic structural diagram of a section of a damping limiting base in the magnetron sputtering vacuum coating device with adjustable sputtering distance.
Reference numerals are as follows: 1. a coating device body; 2. a vacuum door; 3. an air pump; 4. a console; 5. a communicating pipe; 6. a base side plate; 7. a numerical control case; 8. a display screen; 9. a control panel; 10. a plug wire interface; 11. a heat dissipation plate; 12. a vacuum machine; 13. an interface; 14. a fixed seat; 15. a workpiece placing groove; 16. a longitudinal movable shaft; 17. a transverse movable shaft; 18. a showerhead assembly; 19. a vacuum chamber; 20. a base bottom plate; 21. a chute; 22. a card slot; 23. positioning a plate; 24. a shock absorbing spring.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the accompanying drawings in combination with the embodiments. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
The first embodiment is as follows:
as shown in fig. 1-4, a magnetron sputtering vacuum coating device with adjustable sputtering distance comprises a coating device main body 1, a control console 4 and a vacuum machine 12, wherein the outer side of the coating device main body 1 is movably connected with a vacuum bin gate 2, one side of the coating device main body 1 is electrically connected with the control console 4, the lower end of the control console 4 is fixedly connected with a numerical control cabinet 7, one side of the control console 4 is fixedly connected with a display screen 8, and one side of the display screen 8 is fixedly connected with a control panel 9.
The plug wire interface 10 has been seted up in the outside of control cabinet 4, and the outside fixedly connected with communicating pipe 5 of coating device main part 1, the one end fixedly connected with air pump 3 of communicating pipe 5, interface 13 has been seted up to the one end of air pump 3, one side fixedly connected with vacuum machine 12 of air pump 3.
A heat dissipation plate 11 is fixedly connected to one side of the vacuum machine 12, a fixing seat 14 is fixedly connected to the lower end of the air pump 3, a vacuum cavity 19 is formed in the coating device body 1, and a workpiece placing groove 15 is fixedly connected to one side of the vacuum cavity 19.
The interior of the vacuum cavity 19 is movably connected with a longitudinal movable shaft 16, the outer side of the longitudinal movable shaft 16 is movably connected with a spray head assembly 18, and the inner side of the spray head assembly 18 is movably connected with a transverse movable shaft 17.
The bottom of the film coating device main body 1 is detachably connected with a positioning plate 23, the inner side of the positioning plate 23 is provided with a clamping groove 22, and two sides of the positioning plate 23 are movably connected with base side plates 6.
The inboard of base curb plate 6 has seted up spout 21, and the bottom fixedly connected with base bottom plate 20 of base curb plate 6, the bottom swing joint of locating plate 23 has multiunit damping spring 24.
All be provided with the mounting groove between control cabinet 4 and display screen 8, the control panel 9, the outside of control cabinet 4 passes through the outside fixed connection of mounting groove and display screen 8, control panel 9.
A movable groove is arranged between the spray head assembly 18 and the longitudinal movable shaft 16 and between the spray head assembly 18 and the transverse movable shaft 17, the interior of the spray head assembly 18 is movably connected with the outer sides of the longitudinal movable shaft 16 and the transverse movable shaft 17 through the movable groove, and the interior of the coating device main body 1 is movably connected with the inner side of the spray head assembly 18 through a vacuum cavity 19, the longitudinal movable shaft 16 and the transverse movable shaft 17.
Example two:
as shown in fig. 1-3, 5 and 6, a magnetron sputtering vacuum coating device with adjustable sputtering distance comprises a coating device main body 1, a control console 4 and a vacuum machine 12, wherein the outer side of the coating device main body 1 is movably connected with a vacuum bin gate 2, one side of the coating device main body 1 is electrically connected with the control console 4, the lower end of the control console 4 is fixedly connected with a numerical control cabinet 7, one side of the control console 4 is fixedly connected with a display screen 8, and one side of the display screen 8 is fixedly connected with a control panel 9.
The plug wire interface 10 has been seted up in the outside of control cabinet 4, and the outside fixedly connected with communicating pipe 5 of coating device main part 1, the one end fixedly connected with air pump 3 of communicating pipe 5, interface 13 has been seted up to the one end of air pump 3, one side fixedly connected with vacuum machine 12 of air pump 3.
A heat dissipation plate 11 is fixedly connected to one side of the vacuum machine 12, a fixing seat 14 is fixedly connected to the lower end of the air pump 3, a vacuum cavity 19 is formed in the coating device body 1, and a workpiece placing groove 15 is fixedly connected to one side of the vacuum cavity 19.
The interior of the vacuum cavity 19 is movably connected with a longitudinal movable shaft 16, the outer side of the longitudinal movable shaft 16 is movably connected with a spray head assembly 18, and the inner side of the spray head assembly 18 is movably connected with a transverse movable shaft 17.
The bottom of the film coating device main body 1 is detachably connected with a positioning plate 23, the inner side of the positioning plate 23 is provided with a clamping groove 22, and two sides of the positioning plate 23 are movably connected with base side plates 6.
The inboard of base curb plate 6 has seted up spout 21, and the bottom fixedly connected with base bottom plate 20 of base curb plate 6, the bottom swing joint of locating plate 23 has multiunit damping spring 24.
One side of the main body 1 of the coating device is communicated with the inside of the air pump 3 through the communicating pipe 5 and the connector 13, and the lower end of the air pump 3 is fixedly connected with the upper end of the fixed seat 14 in a welding mode.
The two sides of the positioning plate 23 are slidably connected with the inner part of the base side plate 6 through the sliding grooves 21, and the inner side of the base bottom plate 20 is movably connected with the lower end of the positioning plate 23 through a damping spring 24.
The utility model is a magnetron sputtering vacuum coating device with adjustable sputtering distance, which comprises a coating device main body 1, a control console 4, a vacuum machine 12, a vacuum bin door 2, an air pump 3, a control console 4, a communicating pipe 5, a base side plate 6, a numerical control cabinet 7, a display screen 8, a control panel 9, a plug wire interface 10, a heat radiation plate 11, a vacuum machine 12, an interface 13, a fixed seat 14, a workpiece placing groove 15, a longitudinal movable shaft 16, a transverse movable shaft 17, a spray head assembly 18, a vacuum cavity 19, a base bottom plate 20, a sliding groove 21, a clamping groove 22, a positioning plate 23 and a damping spring 24, wherein before use, the distance adjusting assembly can be adaptively mounted in the coating device main body 1, the longitudinal movable shaft 16 is mounted on one side of the workpiece placing groove 15, the spray head assembly 18 is clamped on the outer side of the longitudinal movable shaft 16 through two groups of transverse movable shafts 17 on the inner side to be movably connected, through vertical loose axle 16, the nimble activity of horizontal loose axle 17 is adjusted shower nozzle subassembly 18 and is being sputtered the distance at the inboard activity of coating device main part 1, install the bottom of damping limit base to coating device main part 1, it fixes to correspond in the inboard draw-in groove 22 of joint locating plate 23, the device is in the spacing slip of the effect of spout 21 in the use, alleviate the resonance reaction that produces in the device operation process via multiunit damping spring 24, through increasing apart from adjusting part, can adjust shower nozzle mechanism in a flexible way and carry out the adaptation activity, processing requirement according to treating the coating film work piece corresponds the coating film, through increasing damping limit base, be convenient for carry out shock attenuation processing to vacuum coating device is whole, effectively avoid the device inside device to produce resonance and cause the damage, whole easy operation is swift, and is comparatively practical.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the utility model and are not to be construed as limiting the utility model. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed.
Claims (8)
1. The utility model provides a sputtering is apart from adjustable magnetron sputtering vacuum coating device, includes coating device main part (1) and control cabinet (4), vacuum machine (12), its characterized in that: the outer side swing joint of coating device main part (1) has vacuum door (2), one side electric connection of coating device main part (1) has control cabinet (4), the lower extreme fixedly connected with numerical control machine case (7) of control cabinet (4), one side fixedly connected with display screen (8) of control cabinet (4), one side fixedly connected with control panel (9) of display screen (8).
2. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 1, characterized in that: the plug wire interface (10) has been seted up in the outside of control cabinet (4), the outside fixedly connected with communicating pipe (5) of coating device main part (1), the one end fixedly connected with air pump (3) of communicating pipe (5), interface (13) have been seted up to the one end of air pump (3), one side fixedly connected with vacuum machine (12) of air pump (3).
3. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 2, wherein: a heat dissipation plate (11) is fixedly connected to one side of the vacuum machine (12), a fixed seat (14) is fixedly connected to the lower end of the air pump (3), a vacuum cavity (19) is formed in the coating device body (1), and a workpiece placing groove (15) is fixedly connected to one side of the vacuum cavity (19); the inner part of the vacuum cavity (19) is movably connected with a longitudinal movable shaft (16), the outer side of the longitudinal movable shaft (16) is movably connected with a spray head assembly (18), and the inner side of the spray head assembly (18) is movably connected with a transverse movable shaft (17).
4. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 1, characterized in that: the bottom of the film coating device main body (1) is detachably connected with a positioning plate (23), the inner side of the positioning plate (23) is provided with a clamping groove (22), and two sides of the positioning plate (23) are movably connected with base side plates (6); the inner side of the base side plate (6) is provided with a sliding groove (21), the bottom end of the base side plate (6) is fixedly connected with a base bottom plate (20), and the bottom end of the positioning plate (23) is movably connected with a plurality of groups of damping springs (24).
5. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 1, wherein: all be provided with the mounting groove between control cabinet (4) and display screen (8), control panel (9), the outside of control cabinet (4) is through the outside fixed connection of mounting groove and display screen (8), control panel (9).
6. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 2, wherein: one side of the coating device main body (1) is communicated with the inside of the air pump (3) through a communicating pipe (5) and a connector (13), and the lower end of the air pump (3) is fixedly connected with the upper end of the fixed seat (14) in a welding mode.
7. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 3, wherein: the coating device is characterized in that a movable groove is formed between the spray head assembly (18) and the longitudinal movable shaft (16) and between the spray head assembly (18) and the transverse movable shaft (17), the interior of the spray head assembly (18) is movably connected with the outer sides of the longitudinal movable shaft (16) and the transverse movable shaft (17) through the movable groove, and the interior of the coating device main body (1) is movably connected with the inner side of the spray head assembly (18) through a vacuum cavity (19), the longitudinal movable shaft (16) and the transverse movable shaft (17).
8. The magnetron sputtering vacuum coating device with the adjustable sputtering distance as claimed in claim 4, wherein: the two sides of the positioning plate (23) are in sliding connection with the inner part of the base side plate (6) through sliding grooves (21), and the inner side of the base bottom plate (20) is movably connected with the lower end of the positioning plate (23) through a damping spring (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123212724.7U CN216947169U (en) | 2021-12-19 | 2021-12-19 | Magnetron sputtering vacuum coating device with adjustable sputtering distance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123212724.7U CN216947169U (en) | 2021-12-19 | 2021-12-19 | Magnetron sputtering vacuum coating device with adjustable sputtering distance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216947169U true CN216947169U (en) | 2022-07-12 |
Family
ID=82309673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123212724.7U Expired - Fee Related CN216947169U (en) | 2021-12-19 | 2021-12-19 | Magnetron sputtering vacuum coating device with adjustable sputtering distance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216947169U (en) |
-
2021
- 2021-12-19 CN CN202123212724.7U patent/CN216947169U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220712 |