CN216937442U - Gas blow pipe and equipment thereof - Google Patents
Gas blow pipe and equipment thereof Download PDFInfo
- Publication number
- CN216937442U CN216937442U CN202220663369.0U CN202220663369U CN216937442U CN 216937442 U CN216937442 U CN 216937442U CN 202220663369 U CN202220663369 U CN 202220663369U CN 216937442 U CN216937442 U CN 216937442U
- Authority
- CN
- China
- Prior art keywords
- pipe
- air blowing
- air
- blowing
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007664 blowing Methods 0.000 claims abstract description 100
- 238000004806 packaging method and process Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000009434 installation Methods 0.000 description 17
- 230000000694 effects Effects 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000011900 installation process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000011012 sanitization Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
Images
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model relates to the technical field of semiconductor packaging, in particular to an air blowing pipe and equipment thereof, wherein the air blowing pipe comprises a pipe body, and an air blowing opening of the pipe body is of a necking structure; compared with a round air blowing opening, the air blowing opening of the necking structure increases the air blowing pressure and can be used for blowing off foreign matters adhered to the suction nozzle; in addition, the input of the air flow can be reduced under the condition of not changing the output of the air flow, and the time for compressing the air can be saved.
Description
Technical Field
The utility model relates to the technical field of semiconductor packaging, in particular to an air blowing pipe and equipment thereof.
Background
If not the sanitization can leave foreign matter such as silicon slag on the surface after the chip on the wafer cuts, the chip surface remain foreign matter itself and chip be not the bonding or be fixed together, and because the suction nozzle be the bakelite material, softer, pick up, under the effort of welding in-process, these foreign matters can adhere to the suction nozzle when the suction nozzle adsorbs the chip on, then pick the chip at the suction nozzle once more and produce the bonding impression in the chip surface easily, or cause chip surface damage, lead to the inefficacy of product. Therefore, it is necessary to remove foreign matters on the surface of the chip or adhered matters on the suction nozzle before the suction nozzle sucks the chip for soldering.
The existing equipment can blow away foreign matters on the surface of a chip by using the air blowing pipe, so that the adhered matters on the suction nozzle are reduced, and an adhesion mark on the surface of the chip in the welding process is avoided, such as a chip surface residue air blowing device provided by application number 201420012311.5. However, the bending angles of the existing air blowing pipes are all larger than 90 degrees, and no reference object is provided for standard adjustment in the installation process, so that the adjustment positions of the air blowing pipes are different from person to person, and the final air blowing effects of all the equipment are different; moreover, the blowing openings of the blowing pipes are the same as the pipe body in size, and are all circular openings, so that the blowing air pressure is small, and the blowing air pressure is greatly influenced by the input air flow, therefore, the blowing air pressure is generally used for blowing off foreign matters on the surface of a chip and is difficult to remove adhered matters on a suction nozzle.
SUMMERY OF THE UTILITY MODEL
The utility model aims to: aiming at the problem of small blowing air pressure of a circular opening air blowing pipe in the prior art, the air blowing pipe and equipment thereof are provided.
In order to achieve the purpose, the utility model adopts the technical scheme that:
an air blowing pipe comprises a pipe body, and an air blowing opening of the pipe body is of a necking structure.
The circular air blowing opening of the air blowing pipe is designed into a necking structure and is used for compressing air, the circular air blowing opening is similar to the mode that the water outlet of a water pipe which is discharging water is pinched flat/part of the water outlet is blocked, the flow velocity of fluid can be increased under the condition of certain flow input, and the impact force on foreign matters is improved. Compared with a circular air blowing opening, the air blowing opening of the necking structure increases the air blowing pressure, can be used for blowing off foreign matters adhered to the suction nozzle, and can blow air to the surface of the chip, so that the effect of removing the foreign matters in a two-way mode is achieved; in addition, the input of the air flow can be reduced under the condition of not changing the output of the air flow, and the time for compressing the air can be saved.
Preferably, the air blowing port is of a flat structure, so that the air blowing range is larger, and the implementation is convenient.
Preferably, the pipe body includes first pipe portion and second pipe portion, and the contained angle of first pipe portion and second pipe portion is the right angle setting, allows the machining error in the certain extent. Wherein, first pipe portion is used for blowing, and the second pipe portion is used for fixing and input gas, is 90 degrees contained angles settings with first pipe portion and second pipe portion, can compare the relative position of first pipe portion and suction nozzle when the installation like this, conveniently carries out suitable adjustment to gas blow pipe position and gesture: when the device is installed, the first pipe part and the suction nozzle are aligned in parallel on the Y axis, the relative position of the pipe body on the X axis is determined, and then the first pipe part is rotated by taking the second pipe part (X axis) as a rotating shaft, and the posture of the first pipe part is adjusted to enable the air blowing port to face the suction nozzle port. The installation location has the reference, adjusts more convenient and fast, and the installation effectiveness is high, and the effect of blowing is more unified.
Optionally, the mouth of blowing of pipe body is the throat structure, also can be the contained angle setting that is greater than 90 degrees with first pipe portion and second pipe portion, welds the stopper on the pipe body like prior art, realizes the location of the concrete position of pipe body and gesture through the location assembly of stopper and trachea support to avoid not having the problem that the reference object is adjusted the location and is influenced the effect of blowing nonuniform, the atmospheric pressure of blowing is big, can be used for getting rid of the adhesion thing on the suction nozzle equally.
Further, on the basis that the included angle of first pipe portion and second pipe portion is the right angle setting, will be the mouth of blowing of throat structure and replace for blowing mouthful and pipe body pipe shaft equidimension, can solve current blowing pipe bend angle all to be greater than 90 equally, do not have the problem of reference object in the installation for standard adjustment.
Preferably, the pipe body is a rigid member, and has high structural strength and is not easy to deform.
Based on the blowing pipe structure, the utility model provides blowing equipment comprising the blowing pipe.
Preferably, the air blowing device further comprises a support plate, and a limiting piece used for fixing the air blowing pipe is arranged on the support plate. The support plate is used for assembling with the bearing platform and arranging the air blowing pipe at a proper height position.
Preferably, the limiting part is of a hoop structure detachably connected with the support plate, and the air blowing pipe is fixed to limit axial displacement and circumferential rotation.
Preferably, the support plate is provided with a slotted hole for displacement adjustment.
Preferably, the support plate is an L-shaped sheet metal part.
Preferably, the air blowing pipe is connected with a flow meter, and the flow meter is used for controlling the size of the air flow.
Optionally, the blowing equipment can also replace the assembly scheme of the blowing pipe in the chip surface residue blowing device in the prior art; or at least two clamping plates are arranged on the blow pipe, the clamping plates are used for being installed on the bearing platform, and the installation mode of the blow pipe is not limited to the above example.
In summary, due to the adoption of the technical scheme, the utility model has the beneficial effects that:
1. compared with a circular air blowing opening, the air blowing opening of the necking structure increases the air blowing pressure, can be used for blowing off foreign matters adhered to the suction nozzle, and can blow air to the surface of the chip, so that the effect of removing the foreign matters in a two-way mode is achieved, and the frequency of the bonding marks on the chip is reduced; in addition, the input of the air flow can be reduced under the condition of not changing the output of the air flow, and the time for compressing the air can be saved.
2. According to the air blowing pipe structure provided by the utility model, the first pipe part and the second pipe part of the pipe body are arranged at an included angle of 90 degrees, so that the position and the posture of the air blowing pipe can be conveniently and properly adjusted by comparing the relative positions of the first pipe part and the suction nozzle during installation, reference is provided for installation and positioning, the adjustment is more convenient and quicker, the installation efficiency is high, and the air blowing effect can be favorably normalized.
Drawings
FIG. 1 is a front view of an insufflation tube.
Figure 2 is a top view of an insufflation tube.
FIG. 3 is a top view of an alternative insufflation tube.
FIG. 4 is a front view of an air blowing apparatus.
Fig. 5 is a top view of fig. 4.
FIG. 6 is a schematic plan view of the installation state of the air blowing apparatus (the suction nozzle is omitted).
Fig. 7 is an elevation view of fig. 6.
Icon: 1-a tube body; 2-an air blowing port; 3-a first tube part; 4-a second tube portion; 5-a support plate; 6-a limiting part; 7-a long slot; 8-a flow meter; 9-suction nozzle.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
Example 1
The embodiment provides an air blowing pipe, as shown in fig. 1-7, which comprises a pipe body 1, wherein an air blowing opening 2 of the pipe body 1 is in a necking structure.
The round air blowing port 2 of the air blowing pipe is designed into a necking structure and used for compressing air, the round air blowing port is similar to a water outlet of a water pipe which is discharging water, a part of the water outlet is pinched and blocked, the flow velocity of fluid can be increased under the condition of certain flow input, and the impact force on foreign matters is improved. Compared with the circular air blowing opening 2, the air blowing opening 2 of the necking structure increases the air blowing pressure, can be used for blowing off foreign matters adhered to the suction nozzle 9, and can blow air to the surface of a chip to achieve the effect of removing the foreign matters in two directions; in addition, the input of the air flow can be reduced under the condition of not changing the output of the air flow, and the time for compressing the air can be saved.
Specifically, as shown in fig. 2 and 3, the air blowing port 2 in the present embodiment is preferably a flat structure, so that the air blowing range is wider, the air flow is more concentrated, and the implementation is convenient; the necking structure can be similar to a gradually-changed pen point structure, the big circle is gradually changed into a small circle or an ellipse, the big ellipse is gradually changed into a small ellipse, the like, or the necking structure is similar to a bolt hole, and the air outlet section is in a reduced shape.
Further, in the present embodiment, as shown in fig. 1, the pipe body 1 includes a first pipe portion 3 and a second pipe portion 4, and the included angle between the first pipe portion 3 and the second pipe portion 4 is 90 degrees, which allows a processing error within a certain range, such as an included angle of 90 ° ± 2 °. Wherein the first pipe part 3 is used for blowing air, and the second pipe part 4 is used for positioning and inputting air; the first pipe section 3 and the second pipe section 4 are integrally connected rigid members, preferably made of steel, and have a pipe body with a circular cross section. With first pipe portion 3 and second pipe portion 4 and be 90 degrees contained angles settings, can compare the relative position of first pipe portion 3 and suction nozzle 9 when the installation like this, conveniently carry out appropriate adjustment to 1 position of geminate transistors body and gesture: when mounting, the first pipe part 3 and the suction nozzle 9 are aligned in parallel on the Y axis so that the central axes are on the same plane, the relative position of the pipe body 1 on the X axis is determined, and the first pipe part 3 is rotated with the second pipe part 4 (placed along the X axis) as the rotation axis, and the posture of the first pipe part 3 is adjusted so that the gas blowing port 2 faces the suction nozzle 9. The installation location has the reference, adjusts more convenient and fast, and the installation effectiveness is high, and the effect of blowing is more unified.
Example 2
In order to solve the problem that the bending angles of the existing air blowing pipes are all larger than 90 degrees, and no reference object is provided for standard adjustment in the installation process, the embodiment provides an air blowing pipe, as shown in fig. 1 and 4-7, and adopts the following technical scheme: the gas blow pipe comprises a first pipe part 3 and a second pipe part 4, and the included angle between the first pipe part 3 and the second pipe part 4 is arranged in a right angle mode, so that machining errors in a certain range are allowed, such as the included angle of 90 degrees +/-2 degrees.
Wherein the first pipe part 3 is used for blowing air, and the second pipe part 4 is used for fixing and inputting air; the first pipe section 3 and the second pipe section 4 are integrally connected rigid members, preferably made of steel, and have a pipe body with a circular cross section. When the device is mounted, the first pipe part 3 and the suction nozzle 9 are aligned in parallel on the Y-axis so that the central axes thereof are on the same plane, the relative position of the air blowing pipe on the X-axis is determined, and the first pipe part 3 is rotated with the second pipe part 4 (as the X-axis) as the rotation axis to adjust the posture of the first pipe part 3 so that the air blowing port 2 faces the suction nozzle 9. This gas blow pipe is 90 degrees contained angles settings with first pipe portion 3 and second pipe portion 4, can be through the relative position according to first pipe portion 3 and suction nozzle 9 when the installation like this, conveniently carry out appropriate adjustment to gas blow pipe position and gesture, and the installation location has the reference, adjusts more convenient and fast, and the installation effectiveness is high, does benefit to the effect normalization that will blow.
The outlet 2 of the blow pipe is not limited to the reduced structure in example 1, and may be circular or elliptical in size equal to the pipe body.
Example 3
Based on embodiment 1 and embodiment 2, the utility model provides an air blowing device, which comprises the air blowing pipe structure.
Further, as shown in fig. 4-7, the blowing device further includes a support plate 5, and a stopper 6 for fixing the blowing pipe is disposed on the support plate 5. The support plate 5 is used for assembling with the bearing platform and arranging the blow pipe at a proper height position. The structure of the support plate 5 is determined according to a processing platform and actual needs, and the support plate 5 in the embodiment adopts an L-shaped sheet metal part structure. Specifically, the limiting part 6 is a hoop structure detachably connected with the support plate 5, fixes the blowing pipe, and limits axial displacement and circumferential rotation of the blowing pipe. Correspondingly, the corresponding position on the support plate 5 is provided with a threaded hole matched with the hoop structure, and the hoop structure is at least provided with two hoops, so that the fixation is firmer. The support plate 5 is also provided with a long slotted hole 7 for displacement adjustment, thereby being convenient for adjusting the distance or height of the blowing pipe.
The air inlet end of the air blowing pipe is connected with a flowmeter 8 through a hose, and the flowmeter 8 controls the size of the air flow.
This embodiment is through the cooperation of support plate 5 with locating part 6, fixes and installs the gas blow pipe, has avoided welding the stopper separately on support plate 5 and just can realize the problem of gas blow pipe gesture location, and the installation is simple, easy realization, and adjusts the convenience, has reduced the introduction of stopper machining error.
The cross section of the tube body 1 in each of the above embodiments is not limited to a circular shape, and may be in the shape of an ellipse, a triangle, a rectangle, or the like. The gas blow pipe is not limited to the installation of equipment through the scheme of support plate 5 and locating part 6 combined assembly, the gas blow pipe can be fastened on a bearing platform through at least two clamping plates, or a limiting block is welded on the pipe body 1 of the gas blow pipe like the prior art (application No. 201420012311.5), the specific position and posture of the pipe body 1 are positioned through the positioning assembly of the limiting block and the gas pipe support, the problem that the non-uniform gas blowing effect is influenced due to the fact that no reference object is used for adjusting and positioning is avoided, and the structure of the gas blow equipment is not limited to the examples.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. The air blowing pipe comprises a pipe body (1) and is characterized in that an air blowing opening (2) of the pipe body (1) is of a necking structure.
2. An insufflation tube in accordance with claim 1 wherein the insufflation port (2) is of flattened configuration.
3. A blow tube according to claim 1 characterised in that the tube body (1) comprises a first tube part (3) and a second tube part (4), the angle between the first tube part (3) and the second tube part (4) being arranged at right angles.
4. An air blowing pipe according to claim 3, characterized in that the air blowing opening (2) is in a necking structure instead of the air blowing opening (2) and the pipe body of the pipe body (1) being equal in size.
5. An insufflation tube in accordance with any one of claims 1 to 4 wherein the tube body (1) is a rigid member.
6. An insufflation apparatus comprising an insufflation tube according to any one of claims 1 to 5.
7. Air blowing equipment as claimed in claim 6, further comprising a support plate (5), wherein a stopper (6) for fixing the blowing pipe is provided on the support plate (5).
8. Air blowing device according to claim 7, characterised in that the stop (6) is a hoop structure which is detachably connected to the support plate (5).
9. Air blowing device according to claim 7, characterised in that the support plate (5) is provided with slotted holes (7).
10. An insufflation apparatus in accordance with any one of claims 6 to 9 in which a flow meter (8) is connected to the insufflation tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202220663369.0U CN216937442U (en) | 2022-03-25 | 2022-03-25 | Gas blow pipe and equipment thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202220663369.0U CN216937442U (en) | 2022-03-25 | 2022-03-25 | Gas blow pipe and equipment thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
CN216937442U true CN216937442U (en) | 2022-07-12 |
Family
ID=82299836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202220663369.0U Expired - Fee Related CN216937442U (en) | 2022-03-25 | 2022-03-25 | Gas blow pipe and equipment thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN216937442U (en) |
-
2022
- 2022-03-25 CN CN202220663369.0U patent/CN216937442U/en not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN216937442U (en) | Gas blow pipe and equipment thereof | |
WO2015134258A1 (en) | Wafer-handling end effectors | |
WO2010139242A1 (en) | Weld positioning device | |
CN206484138U (en) | A kind of device for being used to install elbow blast pipe | |
RU2020111474A (en) | SUCTION TUBE AND LIQUID PAINT SUCTION ASSEMBLY, AS WELL AS A METHOD FOR MANUFACTURING SUCH SUCTION TUBE | |
CN111370354A (en) | Etching device for wafer and annular glass carrier plate | |
CN112904053A (en) | Probe clamp and probe inserting and holding equipment | |
US6102384A (en) | Nozzle setting jig | |
CN207480093U (en) | A kind of airplane parts processing closes angular milling with cambered surface and cuts processing tool | |
US20040178315A1 (en) | Probe holder | |
CN212943771U (en) | Glue dispensing device | |
KR20090102568A (en) | Ceramic ball panel type air vacuum tight | |
CN209717521U (en) | A kind of flange assembly tool with flange bending | |
CN211907405U (en) | A kind of tool | |
CN214477375U (en) | Sucker for solar cell production equipment | |
CN208336178U (en) | The contactless draw frame machine of large-sized silicon wafers | |
CN106625738B (en) | A kind of intelligent assembly sucker for domestic sewage processing system | |
CN207480625U (en) | It is a kind of for knife, fork, spoon production equipment vacuum chuck device | |
CN211879346U (en) | Etching device for wafer and annular glass carrier plate | |
CN219602620U (en) | Sucking disc finger assembly for silicon wafer detection | |
CN219448487U (en) | Top-exhaust Bernoulli sucker and carrying hand | |
CN215146257U (en) | Clamp for splicing circular tube and flat plate with circular through hole | |
CN203644737U (en) | Chip surface residue air blowing device | |
JP5422680B2 (en) | Substrate holding device | |
CN217725884U (en) | Cyclone nozzle with improved structure and dust remover |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220712 |
|
CF01 | Termination of patent right due to non-payment of annual fee |