CN216937332U - Cleaning device of chip cleaning machine - Google Patents

Cleaning device of chip cleaning machine Download PDF

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Publication number
CN216937332U
CN216937332U CN202220496259.XU CN202220496259U CN216937332U CN 216937332 U CN216937332 U CN 216937332U CN 202220496259 U CN202220496259 U CN 202220496259U CN 216937332 U CN216937332 U CN 216937332U
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China
Prior art keywords
fixedly connected
cleaning
chip
installation box
threaded sleeve
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CN202220496259.XU
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Chinese (zh)
Inventor
王青松
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Wuhan Zhenxin Semiconductor Equipment Co ltd
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Wuhan Zhenxin Semiconductor Equipment Co ltd
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Abstract

The utility model discloses a cleaning device of a chip cleaning machine, which comprises a cleaning table, wherein the top of the cleaning table is fixedly connected with a cleaning frame, the top of the cleaning table is provided with a driving mechanism below the cleaning table, the driving mechanism comprises a driving motor and an installation box, the installation box is in sliding connection with the cleaning table, the driving motor is fixedly connected with the top of the cleaning table, an output shaft of the driving motor is fixedly connected with a threaded rod, and the surface of the threaded rod and the inner part of the installation box are in threaded connection with a threaded sleeve. This belt cleaning device of chip cleaning machine, the chip is at abluent in-process, and the cooperation through install bin and mounting panel realizes the removal of chip, realizes the chip upset through the cooperation of thread bush, first bevel gear, transfer line, second bevel gear, worm wheel, worm etc. makes the chip remove the upset while abluent in-process, greatly reduced abluent work load, effectively improved the cleaning efficiency of chip.

Description

Cleaning device of chip cleaning machine
Technical Field
The utility model relates to the technical field of chip cleaning, in particular to a cleaning device of a chip cleaning machine.
Background
Semiconductor chips are semiconductor devices that are manufactured by etching, wiring and performing a certain function on semiconductor wafers, and include not only silicon chips but also semiconductor materials such as gallium arsenide and germanium, which are common, and semiconductors such as automobiles have a trend.
After the utility model of the transistor is produced in large quantities, various solid semiconductor components such as diodes, transistors and the like are used in large quantities, and the functions and roles of the vacuum tube in the circuit are replaced. By the middle and late 20 th century, semiconductor manufacturing technology advances, making integrated circuits possible. It is a great advance that integrated circuits can integrate a very large number of micro-transistors into a single small chip, as opposed to manually assembling the circuits using individual discrete electronic components. The scale production capacity and reliability of the integrated circuit and the modular method of circuit design ensure that the standardized integrated circuit is adopted to replace the discrete transistor design, and the surface of the chip needs to be cleaned during the production of the chip. When the existing chip cleaning device is used for cleaning a chip, one surface of the chip can be cleaned at one time, the chip is required to be manually turned over and then continuously cleaned after being fixed again, the cleaning efficiency is low, and the production progress of the chip is influenced.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects of the prior art, the utility model provides a cleaning device of a chip cleaning machine, which solves the problems that when the conventional chip cleaning device is used for cleaning a chip, only one surface of the chip can be cleaned at one time, the chip needs to be manually turned over and fixed again and then is continuously cleaned, the cleaning efficiency is low, and the production progress of the chip is influenced.
In order to achieve the purpose, the utility model is realized by the following technical scheme: a cleaning device of a chip cleaning machine comprises a cleaning table, wherein a cleaning frame is fixedly connected to the top of the cleaning table, a driving mechanism is arranged at the top of the cleaning table and below the cleaning table, the driving mechanism comprises a driving motor and an installation box, the installation box is in sliding connection with the cleaning table, the driving motor is fixedly connected with the top of the cleaning table, an output shaft of the driving motor is fixedly connected with a threaded rod, the surface of the threaded rod and the inner side of the installation box are in threaded connection with a threaded sleeve, one end of the threaded sleeve is fixedly connected with the inner wall of the installation box, the surface of the threaded rod and the right side of the threaded sleeve are in threaded connection with a threaded sleeve, the threaded sleeve is in rotating connection with the threaded sleeve, the surface of the threaded sleeve is fixedly connected with a first bevel gear, and the inner wall of the installation box is in rotating connection with a transmission rod through a rotating shaft, the bottom end of the transmission rod is fixedly connected with a second bevel gear meshed with the first bevel gear, an installation shaft is rotatably connected between the front surface and the back surface of the inner wall of the installation box, a worm wheel is fixedly connected to the surface of the installation shaft, a worm matched with the worm wheel is fixedly connected to the surface of the transmission rod, one end of the installation shaft penetrates through the installation box and extends to the outside of the installation box, and a fixing assembly is fixedly connected to one end, located outside the installation box, of the installation shaft.
Preferably, the threaded rod penetrates through the mounting box and is in sliding connection with the mounting box.
Preferably, the fixed subassembly includes the mounting panel, the surface of mounting panel runs through and has seted up spacing hole, the inner wall fixedly connected with telescopic link in spacing hole.
Preferably, one end of the telescopic rod, which is far away from the inner wall of the limiting hole, is fixedly connected with a limiting plate, and the limiting plate is connected with the inner wall of the limiting hole in a sliding manner.
Preferably, the top of wash platform fixedly connected with slide rail, the install bin passes through slide rail and wash platform sliding connection.
Preferably, four corners of the bottom of the cleaning table are fixedly connected with supporting legs.
Advantageous effects
The utility model provides a cleaning device of a chip cleaning machine. Compared with the prior art, the method has the following beneficial effects:
(1) the cleaning device of the chip cleaning machine comprises a driving mechanism, a driving mechanism and a driving mechanism, wherein the driving mechanism is arranged at the top of a cleaning table and below the cleaning table and comprises a driving motor and an installation box, the installation box is in sliding connection with the cleaning table, the driving motor is fixedly connected with the top of the cleaning table, an output shaft of the driving motor is fixedly connected with a threaded rod, a threaded sleeve is in threaded connection with the surface of the threaded rod and inside the installation box, one end of the threaded sleeve is fixedly connected with the inner wall of the installation box, a threaded sleeve is in threaded connection with the surface of the threaded rod and right side of the threaded sleeve, the threaded sleeve is in rotary connection with the threaded sleeve, a first bevel gear is fixedly connected with the surface of the threaded sleeve, a transmission rod is in rotary connection with the inner wall of the installation box through a rotating shaft, a second bevel gear meshed with the first bevel gear is fixedly connected with the bottom end of the transmission rod, and an installation shaft is rotatably connected between the front surface and the back surface of the inner wall of the installation box, the surperficial fixedly connected with worm wheel of installation axle, the fixed surface of transfer line is connected with the worm with worm wheel looks adaptation, the one end of installation axle runs through the install bin and extends to the outside of install bin, the installation axle is located the outside fixed subassembly of one end fixedly connected with of install bin, the chip is at abluent in-process, the removal of chip is realized in the cooperation through install bin and mounting panel, through the thread bush, first bevel gear, the transfer line, second bevel gear, the installation axle, the chip upset is realized in the cooperation between worm wheel and the worm, make the chip remove the limit upset while abluent in-process, greatly reduced abluent work load, effectively improve the cleaning efficiency of chip.
(2) This cleaning device of chip cleaning machine includes the mounting panel through fixed subassembly, and the surface of mounting panel runs through and has seted up spacing hole, and the inner wall fixedly connected with telescopic link in spacing hole, the one end fixedly connected with limiting plate of spacing downthehole wall are kept away from to the telescopic link, and the inner wall sliding connection in limiting plate and spacing hole, fixed subassembly treat the chip of wasing and fix, and can fix a plurality of chips simultaneously, improve the cleaning efficiency.
Drawings
FIG. 1 is a perspective view of the structure of the present invention;
FIG. 2 is a perspective view of the drive mechanism of the present invention;
FIG. 3 is a perspective view of the fixing assembly of the present invention;
FIG. 4 is an enlarged view of a portion of the present invention at B of FIG. 3;
fig. 5 is a partial enlarged view of the utility model at a in fig. 2.
In the figure: the cleaning device comprises a cleaning table 1, a cleaning frame 2, a driving mechanism 3, a driving motor 31, a mounting box 32, a threaded rod 33, a threaded sleeve 34, a threaded sleeve 35, a first bevel gear 36, a transmission rod 37, a second bevel gear 38, a mounting shaft 39, a worm gear 310, a worm 311, a fixing component 4, a mounting plate 41, a limiting hole 42, a telescopic rod 43, a limiting plate 44, a sliding rail 5 and a supporting leg 6.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: a cleaning device of a chip cleaning machine comprises a cleaning table 1, the top of the cleaning table 1 is designed to be hollow, a reservoir is arranged at the bottom, supporting legs 6 are fixedly connected to four corners of the bottom of the cleaning table 1, a cleaning frame 2 is fixedly connected to the top of the cleaning table 1, a cleaning nozzle is arranged at the top of the inner wall of the cleaning frame 2, a driving mechanism 3 is arranged at the top of the cleaning table 1 and below the cleaning table 1, the driving mechanism 3 comprises a driving motor 31 and an installation box 32, the driving motor 31 has a forward and reverse rotation function and is connected with a control system and a power supply through wires, a sliding rail 5 is fixedly connected to the top of the cleaning table 1, the installation box 32 is slidably connected with the cleaning table 1 through the sliding rail 5, the installation box 32 is slidably connected with the cleaning table 1, the driving motor 31 is fixedly connected with the top of the cleaning table 1, a threaded rod 33 is fixedly connected to an output shaft of the driving motor 31, a threaded rod 34 is connected to the surface of the threaded rod 33 and is connected with a threaded sleeve 34 through threads arranged inside the installation box 32, the threaded rod 33 penetrates through the mounting box 32 and is connected with the mounting box 32 in a sliding manner, one end of the threaded sleeve 34 is fixedly connected with the inner wall of the mounting box 32, a threaded sleeve 35 is connected with the surface of the threaded rod 33 and positioned on the right side of the threaded sleeve 34 in a threaded manner, the threaded sleeve 35 is rotatably connected with the threaded sleeve, a first bevel gear 36 is fixedly connected with the surface of the threaded sleeve 35, a transmission rod 37 is rotatably connected with the inner wall of the mounting box 32 through a rotating shaft, a second bevel gear 38 meshed with the first bevel gear 36 is fixedly connected with the bottom end of the transmission rod 37, a mounting shaft 39 is rotatably connected between the front surface and the back surface of the inner wall of the mounting box 32, a worm wheel 310 is fixedly connected with the surface of the mounting shaft 39, a worm 311 matched with the worm wheel 310 is fixedly connected with the surface of the transmission rod 37, one end of the mounting shaft 39 penetrates through the mounting box 32 and extends to the outside the mounting box 32, and one end of the mounting shaft 39 positioned outside the mounting box 32 is fixedly connected with the fixing component 4, fixed subassembly 4 includes mounting panel 41, and mounting panel 41's surface runs through and has seted up spacing hole 42, and spacing hole 42's inner wall fixedly connected with telescopic link 43, telescopic link 43 are elastic telescopic link, and telescopic link 43 keeps away from the one end fixedly connected with limiting plate 44 of spacing hole 42 inner wall, limiting plate 44 and spacing hole 42's inner wall sliding connection.
During the use, the chip that will treat the washing is put spacing hole 42 in, telescopic link 43 promotes limiting plate 44 and fixes the chip, open the washing shower nozzle in the washing basket 2, open driving motor 31 through control panel, driving motor 31 works and drives threaded rod 33 and rotate, threaded rod 33 rotates and drives the install bin 32 through threaded sleeve 34 and slides along the surface of clean bench 1, install bin 32 slides and drives fixed subassembly 4 through installation axle 39 and move together, threaded rod 33 rotates and drives threaded sleeve 35 and first bevel gear 36 and rotate together, first bevel gear 36 rotates and drives second bevel gear 38, transfer line 37 and worm 311 rotate together, worm 311 rotates and drives worm wheel 310 and installation axle 38 and rotate together, installation axle 39 rotates and drives the chip upset through mounting panel 41, realize the chip and move the upset simultaneously.
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a belt cleaning device of chip cleaning machine, includes wash platform (1), its characterized in that: the top of the cleaning table (1) is fixedly connected with a cleaning frame (2), and a driving mechanism (3) is arranged at the top of the cleaning table (1) and below the cleaning table (1);
the driving mechanism (3) comprises a driving motor (31) and an installation box (32), the installation box (32) is in sliding connection with the cleaning table (1), the driving motor (31) is fixedly connected with the top of the cleaning table (1), an output shaft of the driving motor (31) is fixedly connected with a threaded rod (33), the surface of the threaded rod (33) and the inner thread of the installation box (32) are connected with a threaded sleeve (34), one end of the threaded sleeve (34) is fixedly connected with the inner wall of the installation box (32), the surface of the threaded rod (33) and the right side of the threaded sleeve (34) are in threaded connection with a threaded sleeve (35), the threaded sleeve (35) is in rotational connection with the threaded sleeve, the surface of the threaded sleeve (35) is fixedly connected with a first bevel gear (36), the inner wall of the installation box (32) is rotationally connected with a transmission rod (37) through a rotating shaft, the bottom end of the transmission rod (37) is fixedly connected with a second bevel gear (38) meshed with the first bevel gear (36), an installation shaft (39) is rotatably connected between the front face and the back face of the inner wall of the installation box (32), a worm wheel (310) is fixedly connected to the surface of the installation shaft (39), a worm (311) matched with the worm wheel (310) is fixedly connected to the surface of the transmission rod (37), one end of the installation shaft (39) penetrates through the installation box (32) and extends to the outside of the installation box (32), and one end, located outside the installation box (32), of the installation shaft (39) is fixedly connected with a fixing component (4).
2. The cleaning device of a chip cleaning machine according to claim 1, wherein: the threaded rod (33) penetrates through the installation box (32) and is connected with the installation box (32) in a sliding mode.
3. The cleaning device of a chip cleaning machine according to claim 1, characterized in that: fixed subassembly (4) include mounting panel (41), spacing hole (42) have been seted up in the surface of mounting panel (41) run through, the inner wall fixedly connected with telescopic link (43) in spacing hole (42).
4. The cleaning device of a chip cleaning machine according to claim 3, characterized in that: one end of the telescopic rod (43) far away from the inner wall of the limiting hole (42) is fixedly connected with a limiting plate (44), and the limiting plate (44) is connected with the inner wall of the limiting hole (42) in a sliding mode.
5. The cleaning device of a chip cleaning machine according to claim 1, characterized in that: the top fixedly connected with slide rail (5) of wash platform (1), install bin (32) pass through slide rail (5) and wash platform (1) sliding connection.
6. The cleaning device of a chip cleaning machine according to claim 1, characterized in that: four corners of the bottom of the cleaning table (1) are fixedly connected with supporting legs (6).
CN202220496259.XU 2022-03-09 2022-03-09 Cleaning device of chip cleaning machine Active CN216937332U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202220496259.XU CN216937332U (en) 2022-03-09 2022-03-09 Cleaning device of chip cleaning machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220496259.XU CN216937332U (en) 2022-03-09 2022-03-09 Cleaning device of chip cleaning machine

Publications (1)

Publication Number Publication Date
CN216937332U true CN216937332U (en) 2022-07-12

Family

ID=82295815

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202220496259.XU Active CN216937332U (en) 2022-03-09 2022-03-09 Cleaning device of chip cleaning machine

Country Status (1)

Country Link
CN (1) CN216937332U (en)

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