CN216926616U - Mask plate detection system and ultraviolet irradiation equipment - Google Patents
Mask plate detection system and ultraviolet irradiation equipment Download PDFInfo
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- CN216926616U CN216926616U CN202220276142.0U CN202220276142U CN216926616U CN 216926616 U CN216926616 U CN 216926616U CN 202220276142 U CN202220276142 U CN 202220276142U CN 216926616 U CN216926616 U CN 216926616U
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Abstract
The utility model provides a mask plate detection system and ultraviolet irradiation equipment. The mask plate detection system comprises a bearing device, an image collecting device, an analysis processing device and a control device. The image collecting device is used for collecting the instant image information of the mask plate. The analysis processing device is connected with the graph collecting device and used for analyzing and judging whether the mask plate is qualified or not and sending out a control signal. The control device is connected with the analysis processing device and controls the operation of equipment according to the control signal sent by the analysis processing device.
Description
Technical Field
The utility model relates to the technical field of photoetching, in particular to a mask plate detection system and ultraviolet irradiation equipment.
Background
In the fabrication of an OLED (Organic Light Emitting Diode) display, a coater is used to coat Dam glue on a Cover Glass (Glass Cover plate) or a Color Filter (CF) in a rigid packaging process, and the Dam glue is bonded to a TFT (Thin Film Transistor) substrate and then subjected to Ultraviolet (UV) curing and baking to achieve a packaging effect.
When the Dam adhesive is subjected to a UV irradiation curing process in UV equipment, a display area needs to be shielded by using a mask plate (the UV light is prevented from influencing a panel in the display area), and only the Dam adhesive coating position is irradiated to complete the UV curing of the Dam adhesive. The mask plate is easy to wear in use, and the wear can cause light leakage in the AA area, so that UV light irradiates the AA area of the panel, and the product yield is greatly reduced.
The existing monitoring management is that personnel visual inspection is carried out after a mask plate is arranged on a machine, and a mode of stopping the machine in the production process to inspect points is added. If the mask plate is damaged abnormally in the continuous production process, workers cannot find the damage in time, and the subsequent panel production is not good.
Disclosure of Invention
The utility model aims to provide a mask plate detection system and ultraviolet irradiation equipment, which are used for solving the problems that in the prior art, workers cannot find out that a mask plate is damaged in time, so that the production yield of a panel is reduced, and the like.
In order to achieve the above object, the present invention provides a mask inspection system, which includes a carrying device, an image collecting device, an analyzing and processing device, and a control device. The bearing device is used for bearing the mask plate. The image collecting device is arranged around the bearing device and used for collecting the instant image information of the mask plate. The analysis processing device is connected with the graph collecting device and used for analyzing and judging whether the mask plate is qualified or not and sending out a control signal. The control device is connected with the analysis processing device and controls the operation of equipment according to the control signal sent by the analysis processing device.
Furthermore, the analysis processing device comprises an image processing module, a storage module and a judgment module. The image processing module is used for processing the instant image information collected by the image collecting device. The storage module is used for storing the standard image information of the mask plate. The judging module is used for comparing the instant image information processed by the analysis processing device with the standard image information and sending the control signal according to the comparison result.
Further, the mask plate detection system also comprises a display device. The display device is connected with the analysis processing device and is used for displaying the result analyzed and judged by the analysis processing device.
Further, the mask plate detection system also comprises an alarm device. The alarm device is connected with the analysis processing device and gives an alarm according to the control signal sent by the analysis processing device.
Further, the image collecting device comprises at least two industrial cameras which are respectively positioned at two sides of the bearing device.
Further, the industrial camera is a CCD camera.
Further, the vertical distance between the industrial camera and the carrying device is 20-80 cm.
The utility model also provides ultraviolet irradiation equipment, which comprises a mask plate and the mask plate detection system. The mask plate is arranged on a bearing device of the mask plate detection system.
Further, the ultraviolet irradiation apparatus further includes an ultraviolet light source. The ultraviolet light source is arranged above the mask plate. The image collecting device of the mask plate is arranged on one side of the mask plate, which is far away from the ultraviolet light source.
Further, the ultraviolet irradiation equipment also comprises a panel transmission device, the panel transmission device and the ultraviolet light source are both connected with a control device of the mask plate detection system, and the control device controls the operation of the panel transmission device and the operation of the ultraviolet light source according to control signals.
The utility model has the advantages that: the mask plate detection system and the ultraviolet irradiation equipment can detect the abrasion condition of the mask plate in time. When the mask plate is damaged, the mask plate can be timely detected out and workers can be reminded to replace, meanwhile, the shutdown waiting for production can be timely controlled, the damaged mask plate is prevented from influencing the production of the panel, the production yield of the panel is improved, and the material loss and the production cost are reduced.
Drawings
In order to more clearly illustrate the technical solution in the present embodiment, the drawings needed to be used in the description of the embodiment will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic view showing the constitution of an ultraviolet irradiation apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a mask inspection system according to an embodiment of the present disclosure;
fig. 3 is a schematic distribution diagram of an image collecting apparatus according to an embodiment of the present invention.
The components in the figures are represented as follows:
an ultraviolet irradiation apparatus 1; a panel transfer device 10;
an ultraviolet light source 20; a mask plate 30;
a mask plate detection system 40;
the carrier device 41; an image collection device 42;
an industrial camera 421; an analysis processing device 43;
an image processing module 431; a storage module 432;
a judging module 433; a control device 44;
a display device 45; and an alarm device 46.
Detailed Description
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, which are included to demonstrate that the utility model can be practiced, and to provide those skilled in the art with a complete description of the utility model so that the technical content thereof will be more clear and readily understood. The present invention may be embodied in many different forms of embodiments and the scope of the utility model is not limited to the embodiments set forth herein.
In the drawings, structurally identical elements are represented by like reference numerals, and structurally or functionally similar elements are represented by like reference numerals throughout the several views. The size and thickness of each component shown in the drawings are arbitrarily illustrated, and the present invention is not limited to the size and thickness of each component. The thickness of the components may be exaggerated where appropriate in the figures to improve clarity.
Furthermore, the following description of the various embodiments refers to the accompanying drawings, which illustrate specific embodiments in which the utility model may be practiced. Directional phrases used in this disclosure, such as, for example, "upper," "lower," "front," "rear," "left," "right," "inner," "outer," "side," and the like, refer only to the orientation of the appended drawings and are, therefore, used herein for better and clearer illustration and understanding of the utility model, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the utility model. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
When certain components are described as being "on" another component, the components can be directly on the other component; there may also be an intermediate member disposed on the intermediate member and the intermediate member disposed on the other member. When an element is referred to as being "mounted to" or "connected to" another element, they may be directly "mounted to" or "connected to" the other element or indirectly "mounted to" or "connected to" the other element through an intermediate element.
The present embodiment provides an ultraviolet irradiation apparatus 1, and as shown in fig. 1, the ultraviolet irradiation apparatus 1 includes a panel transport device 10, an ultraviolet light source 20, a mask plate 30, and a mask plate 30 inspection system.
The panel transfer device 10 has a work surface on which the panel is placed and transported by the transfer of the panel transfer device 10 into the irradiation range of the uv light source 20.
The ultraviolet light source 20 is disposed above the working platform and is used for providing ultraviolet light. The ultraviolet light source 20 has a light emitting side facing the working surface of the panel transmission device 10.
The reticle 30 is supported between the work table and the uv light source 20 by a carrier 41 in the reticle 30 inspection system. The mask plate 30 is provided with hollow patterns, ultraviolet rays irradiated by the ultraviolet rays are shielded by the mask plate 30, and part of the ultraviolet rays can be irradiated on the panel through the hollow patterns, so that specific patterns are presented on the panel.
The mask plate 30 detection system can automatically detect the damage condition of the mask plate 30, and can shut down the machine in time and alarm to remind workers to replace the mask plate 30 when the damage condition is found. As shown in fig. 1 and 2, the reticle 30 inspection system includes a carrying device 41, an image collecting device 42, an analysis processing device 43, and a control device 44.
The carrying device 41 is used for carrying and transporting the mask plate 30, and is arranged between the panel transport device 10 and the ultraviolet light source 20.
The image collecting device 42 is disposed between the carrying device 41 and the panel conveying device 10, i.e. on the side of the mask plate 30 away from the ultraviolet light source 20. The image collecting device 42 is used for shooting an image of the mask plate 30 and collecting instant image information of the mask plate 30.
As shown in fig. 3, the image phone apparatus includes 4 industrial cameras 421, and the industrial cameras 421 may be CCD (Charge Coupled Device) cameras. The industrial cameras 421 are paired two by two, and are respectively disposed on two sides of the mask plate 30, and the camera of each industrial camera 421 faces the mask plate 30.
Specifically, the vertical distance between the industrial camera 421 and the carrying device 41 is 20-80 cm, that is, the vertical distance between the industrial camera 421 and the mask plate 30 is 20-80 cm. Preferably, the vertical distance is 40 cm.
The analysis processing device 43 is connected to the image collecting device 42, and the analysis processing device 43 obtains and processes the real-time image information collected by the image collecting device 42, and compares and analyzes the real-time image information with the standard image information, determines whether the mask plate 30 is damaged, and sends a corresponding control signal.
As shown in fig. 2, the analysis processing device 43 may be an image processing computer, and includes an image processing module 431, a storage module 432, and a judgment module 433.
The image processing module 431 obtains the real-time image information collected by the image collecting device 42, and performs image analysis, image enhancement, image blurring and other processing on the real-time image information, so as to enhance the existence sense of the damaged position of the mask plate 30 in the real-time image information, which is beneficial to improving the judgment accuracy of the analysis processing device 43.
The storage module 432 stores standard image information when the mask plate 30 is not damaged.
The judging module 433 is connected to the image processing module 431 and the storage module 432, and simultaneously obtains the instant image information processed by the image processing module and the standard image information stored in the storage module 432, compares the instant image information with the standard image information, judges whether the instant image information and the standard image information have a difference, and if so, sends a corresponding control signal.
As shown in fig. 2, the control device 44 is connected to the analysis processing device 43, and is also connected to devices in the ultraviolet irradiation apparatus 1, such as the panel transfer device 10 and the ultraviolet light source 20. The control device 44 receives the control signal sent by the determination module 433 in the analysis processing device 43, and performs shutdown processing on the ultraviolet irradiation apparatus 1 according to the control signal, and turns off the panel transmission device 10 and the ultraviolet light source 20.
As shown in fig. 2, the system for inspecting a mask plate 30 further includes a display device 45 and an alarm device 46, and both the display device 45 and the alarm device 46 are connected to the analysis processing device 43. The display device 45 is used for displaying the judgment result. The alarm device 46 issues an alarm when the analysis processing device 43 determines that the mask plate 30 is damaged, and prompts a worker to replace the mask plate 30 in time.
When the ultraviolet irradiation apparatus 1 is in operation, the image collecting device 42 in the mask 30 detection system first photographs the mask 30, collects the instant image information of the mask 30, and transmits the instant image information to the analysis processing device 43. An image processing module 431 in the analysis processing device 43 processes the live image information so that the damage on the photographed mask plate 30 can be highlighted. The judging module 433 acquires the processed real-time image information and the standard image information stored in the storage module 432, compares the two image information, judges whether the mask plate 30 is damaged, and sends out a corresponding control signal. The control device 44 acquires the control signal and controls the operation state of the ultraviolet irradiation apparatus 1 according to the control signal. The display device 45 obtains and displays the judgment result of the judgment module 433. The alarm device 46 also gives an alarm according to the control signal, and reminds the staff to replace the damaged mask plate 30.
The embodiment provides a mask plate detection system and an ultraviolet irradiation device, which can detect the abrasion condition of a mask plate in time. When the mask plate is damaged, the mask plate can be timely detected out and a worker can be reminded to replace, meanwhile, the shutdown waiting for production can be timely controlled, the damaged mask plate is prevented from influencing the production of the panel, the production yield of the panel is improved, and the material loss and the production cost are reduced.
In other embodiments of the present invention, a reticle inspection system and a uv irradiation apparatus including 2 and more than 2 industrial cameras are further provided, and the structures thereof are similar to those of the reticle inspection system and the uv irradiation apparatus provided in this embodiment, and therefore, redundant description thereof is omitted. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Although the utility model herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.
Claims (10)
1. A reticle inspection system, comprising:
the bearing device is used for bearing the mask plate;
the image collecting device is arranged around the bearing device and is used for collecting the instant image information of the mask plate;
the analysis processing device is connected with the image collecting device and is used for analyzing and judging whether the mask plate is qualified or not and sending out a control signal;
and the control device is connected with the analysis processing device and controls the operation of equipment according to the control signal sent by the analysis processing device.
2. The mask blank inspection system according to claim 1, wherein the analysis processing device includes:
the image processing module is used for processing the instant image information collected by the image collecting device;
the storage module is used for storing the standard image information of the mask plate;
and the judging module is used for comparing the instant image information processed by the analysis processing device with the standard image information and sending the control signal according to a comparison result.
3. The reticle inspection system of claim 1, further comprising:
and the display device is connected with the analysis processing device and is used for displaying the result analyzed and judged by the analysis processing device.
4. The reticle inspection system of claim 1, further comprising:
and the alarm device is connected with the analysis processing device and gives an alarm according to the control signal sent by the analysis processing device.
5. The reticle inspection system of claim 1, wherein the image collection device comprises at least two industrial cameras, one on each side of the carrier.
6. The reticle inspection system of claim 5, wherein the industrial camera is a CCD camera.
7. The reticle inspection system of claim 5 wherein the industrial camera is at a vertical distance of 20-80 centimeters from the carrier.
8. An ultraviolet irradiation apparatus, characterized by comprising:
the reticle inspection system of any one of claims 1-7;
and the mask plate is arranged on the bearing device of the mask plate detection system.
9. The ultraviolet irradiation apparatus as set forth in claim 8, further comprising:
the ultraviolet light source is arranged above the mask plate;
the image collecting device of the mask plate is arranged on one side of the mask plate, which is far away from the ultraviolet light source.
10. The ultraviolet irradiation apparatus as set forth in claim 9, further comprising a panel transfer device, wherein said panel transfer device and said ultraviolet light source are connected to a control device of said reticle inspection system, and wherein said control device controls the operation of said panel transfer device and said ultraviolet light source in accordance with a control signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220276142.0U CN216926616U (en) | 2022-02-10 | 2022-02-10 | Mask plate detection system and ultraviolet irradiation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220276142.0U CN216926616U (en) | 2022-02-10 | 2022-02-10 | Mask plate detection system and ultraviolet irradiation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216926616U true CN216926616U (en) | 2022-07-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220276142.0U Active CN216926616U (en) | 2022-02-10 | 2022-02-10 | Mask plate detection system and ultraviolet irradiation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216926616U (en) |
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2022
- 2022-02-10 CN CN202220276142.0U patent/CN216926616U/en active Active
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