CN216917690U - Supplementary top PIN device of getting blowing - Google Patents
Supplementary top PIN device of getting blowing Download PDFInfo
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- CN216917690U CN216917690U CN202122745842.8U CN202122745842U CN216917690U CN 216917690 U CN216917690 U CN 216917690U CN 202122745842 U CN202122745842 U CN 202122745842U CN 216917690 U CN216917690 U CN 216917690U
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- pin
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Abstract
The utility model discloses a top PIN device for assisting in taking and placing materials, which comprises a servo motor fixing plate and a top PIN module fixing plate, wherein a ball screw is connected between the servo motor fixing plate and the top PIN module fixing plate in a transmission manner, a servo motor below the servo motor fixing plate is connected with the ball screw in a transmission manner, a top PIN module guide shaft is arranged between the servo motor fixing plate and the top PIN module fixing plate, the ball screw is connected with a top PIN moving plate which is guided and slides with the top PIN module guide shaft through a screw nut in a transmission manner, a top PIN I guide column communicated with a top PIN I vacuum suction nozzle is arranged at the top of the top PIN moving plate, a top PIN I is arranged on the top PIN I guide column, a top PIN II lifting cylinder on the top PIN moving plate is fixedly connected with the top PIN II guide column, a top PIN II is arranged above the top PIN II guide column, and an adsorption substrate can be selected to move upwards by the matching of the servo motor and the cylinder or a positioning substrate in a mode of combining the top PIN I with the top PIN II, simple and convenient, high efficiency.
Description
Technical Field
The utility model belongs to the technical field of nano-imprinting machines, and particularly relates to a PIN ejection device for assisting in taking and placing materials.
Background
At present, in some technical fields of nano-imprint presses, structures are distributed on the upper surface of a substrate, the structures are very fine and cannot be touched at all, the substrate is thin, the probability of damaging the substrate by a clamping method is high, and products can be taken and placed only by using a vacuum suction pen or an arm to contact the lower surface; the base plate is placed above the platform and is fixed in a vacuum suction mode, and certain residual suction force can suck the base plate at the beginning of separation of the base plate and the platform, so that the base plate and the platform can be conveniently separated by using a PIN jacking device, and the working hours are saved; the 4-6 inch base plate uses a group of top PIN, when the 8-12 inch base plate needs to use two groups of top PIN, when the base plate is switched to the 4-6 inch base plate, only the second group of top PIN needs to be retracted, and the auxiliary material taking and placing top PIN device can be compatible with base plates with different sizes.
Therefore, the PIN device for assisting in taking and placing materials is provided for people to take and place materials, is compatible with a small-diameter substrate and a large-diameter substrate, and is simple, convenient, efficient and low in cost.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a PIN jacking device for assisting in taking and placing materials, so as to solve the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: a PIN ejection device assisting in material taking and placing comprises a servo motor fixing plate and a PIN ejection module fixing plate, wherein a ball screw is connected between the servo motor fixing plate and the PIN ejection module fixing plate in a transmission mode, the output end of a servo motor fixedly arranged below the servo motor fixing plate is connected with the input end of the ball screw in a transmission mode, a PIN ejection module guide shaft is arranged between the servo motor fixing plate and the PIN ejection module fixing plate, and a PIN ejection moving plate which slides in a guide mode with the PIN ejection module guide shaft is connected with the ball screw in a transmission mode through a screw nut;
the top of the top PIN moving plate is provided with a top PIN I guide column, a top PIN I is arranged above the top PIN I guide column, and the bottom of the top PIN moving plate is fixedly provided with a top PIN I vacuum suction nozzle which penetrates through the top PIN moving plate and is communicated with the top PIN I guide column;
the bottom of top PIN movable plate is fixed and is equipped with the top PIN II lift cylinder that cooperatees the activity and alternates with the servo motor fixed plate, the piston rod of top PIN II lift cylinder runs through behind the top PIN movable plate with top PIN movable plate top and be located the top PIN II guide post fixed connection in the top PIN I guide post outside, the top of top PIN II guide post is equipped with top PIN II.
As a further optimization of the technical scheme, the top PIN moving plate is sleeved on the outer side surface of the top PIN module guide shaft, the top PIN module guide shaft and the top PIN moving plate are matched and slide, and the operation is stable.
As a further optimization of the technical scheme, the top of the top PIN module fixing plate is fixedly connected with the platform through an annular ring.
As the further optimization of this technical scheme, top PIN I and the I guide post activity of top PIN alternate and run through in top PIN module fixed plate and platform.
As the further optimization of the technical scheme, the number of the top PIN I is three, the top PIN II guide posts are arranged in an annular and equidistant mode, the number of the top PIN II guide posts is the same as that of the top PIN I, and the top PIN II guide posts are arranged on the outer side face of the top PIN I in an annular and equidistant mode.
The utility model has the technical effects and advantages that: according to the PIN jacking device for assisting in taking and placing materials, a vacuum suction pen or an arm is placed in front of a 4-inch or 6-inch base plate, a cylinder for jacking a PIN II is in a withdrawing state, a servo motor drives a precision ball screw to rotate, the precision ball screw drives a jacking PIN moving plate to ascend along a guiding shaft of a PIN module, a jacking PIN guiding column is installed above the jacking PIN moving plate, the jacking PIN I ascends along the jacking PIN guiding column, the lower part of the upper surface of the jacking PIN I is in a suspended state, the inch or inch base plate is placed, a vacuum suction pipeline for jacking the PIN I is opened after the base plate is positioned, the base plate can be stably placed on the jacking PIN I, the servo motor acts to drive the jacking PIN moving plate to move downwards, the base plate is placed on a platform, and vacuum is released at the same time; when 8-12 cun base plates are placed, two groups of top PINs need to be used, the air cylinders for pushing the PIN II are in an extending state and drive the top PIN II to move upwards, and when the base plates are switched to be 4-6 cun, the air cylinders for pushing the PIN II are in a withdrawing state, so that people can conveniently take and place materials.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a top view of the top PIN module retaining plate of the present invention.
In the figure: 1. carrying out top PIN I; 2. ejecting a PIN I guide post; 3. carrying out PIN II ejection; 4. ejecting a PIN II guide post; 5. pushing the PIN moving plate; 6. a ball screw; 7. a platform; 8. a PIN module fixing plate is pushed; 9. a servo motor fixing plate; 10. lifting the cylinder by jacking the PIN II; 11. ejecting a PIN module guide shaft; 12. a vacuum suction nozzle with a PIN I top; 13. a servo motor; 14. an annular ring.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, a PIN ejection device for assisting material taking and placing comprises a servo motor fixing plate 9 and a PIN ejection module fixing plate 8, wherein a ball screw 6 is connected between the servo motor fixing plate 9 and the PIN ejection module fixing plate 8 in a transmission manner, an output end of a servo motor 13 fixedly arranged below the servo motor fixing plate 9 is connected with an input end of the ball screw 6 in a transmission manner, a PIN ejection module guide shaft 11 is arranged between the servo motor fixing plate 9 and the PIN ejection module fixing plate 8, and the ball screw 6 is connected with a PIN ejection moving plate 5 which slides in a guide manner with the PIN ejection module guide shaft 11 through a screw nut in a transmission manner;
the top of the top PIN moving plate 5 is provided with a top PIN I guide post 2, a top PIN I1 is arranged above the top PIN I guide post 2, and the bottom of the top PIN moving plate 5 is fixedly provided with a top PIN I vacuum suction nozzle 12 which penetrates through the top PIN moving plate 5 and is communicated with the top PIN I guide post 2;
the bottom of top PIN movable plate 5 is fixed and is equipped with the top PIN II lift cylinder 10 that interlude with the activity of servo motor fixed plate 9 cooperation, the piston rod of top PIN II lift cylinder 10 runs through behind top PIN movable plate 5 with top PIN movable plate 5 top and be located the top PIN II guide post 4 fixed connection in the PIN I guide post 2 outside of top, the top of top PIN II guide post 4 is equipped with a PIN II 3.
The top PIN moving plate 5 is sleeved on the outer side face of the top PIN module guide shaft 11, and the top PIN module guide shaft 11 is used for sliding guide of the top PIN moving plate 5, so that the top PIN moving plate 5 can move up and down more stably.
Top PIN module fixed plate 8's top is passed through annular ring 14 and platform 7 fixed connection, top PIN I1 and the I guide post of top PIN 2 activity interlude run through in top PIN module fixed plate 8 and platform 7, and platform 7 is used for placing the base plate.
It sets up threely to top PIN I1 annular equidistance range, and top PIN II guide post 4 is the same with top PIN I1 quantity, and top PIN II guide post 4 annular equidistance range locate top PIN I1 lateral surface.
The working principle is as follows: when the vacuum suction pen or the arm is used for placing a 4-inch or 6-inch substrate, the air cylinder of the top PIN II 3 is in a withdrawing state, the servo motor 13 drives the precision ball screw 6 to rotate, the precision ball screw 6 drives the top PIN moving plate 5 to ascend along the guide shaft 11 of the top PIN module, the guide post 2 of the top PIN I is installed above the top PIN moving plate 5, the top PIN I1 ascends along the guide post 2 of the top PIN I, the lower part of the upper surface of the top PIN I1 is in a suspended state, the 4-inch or 6-inch substrate is placed, after positioning is completed, the vacuum suction pipeline of the top PIN I1 is opened, the substrate can be stably placed on the top PIN I1, then the servo motor 13 drives the top PIN moving plate 5 to move downwards, the substrate is placed on the platform 7, and vacuum is released simultaneously; when 8-12 inches of base plate is placed, two groups of top PINs are needed, so that the cylinder for pushing the PIN II 3 is in an extending state and drives the top PIN II 3 to move upwards, when the base plate is switched to 4-6 inches, the cylinder for pushing the PIN II 3 is in a withdrawing state, and the auxiliary PIN pushing device for taking and placing materials can be compatible with base plates with different sizes.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.
Claims (5)
1. The utility model provides an supplementary top PIN device of getting blowing, includes servo motor fixed plate (9) and top PIN module fixed plate (8), its characterized in that: a ball screw (6) is in transmission connection between the servo motor fixing plate (9) and the top PIN module fixing plate (8), an output end of a servo motor (13) fixedly arranged below the servo motor fixing plate (9) is in transmission connection with an input end of the ball screw (6), a top PIN module guide shaft (11) is arranged between the servo motor fixing plate (9) and the top PIN module fixing plate (8), and the ball screw (6) is in transmission connection with a top PIN moving plate (5) which slides in a guide manner with the top PIN module guide shaft (11) through a screw nut;
the top of the top PIN moving plate (5) is provided with a top PIN I guide column (2), a top PIN I (1) is arranged above the top PIN I guide column (2), and the bottom of the top PIN moving plate (5) is fixedly provided with a top PIN I vacuum suction nozzle (12) which penetrates through the top PIN moving plate (5) and is communicated with the top PIN I guide column (2);
the bottom of top PIN movable plate (5) is fixed to be equipped with and cooperates II lift cylinder (10) of top PIN that the activity was interlude with servo motor fixed plate (9), the piston rod of top PIN II lift cylinder (10) runs through behind top PIN movable plate (5) and top PIN movable plate (5) top and be located top PIN II guide post (4) fixed connection in the I guide post (2) outside of top PIN, the top of top PIN II guide post (4) is equipped with top PIN II (3).
2. The top PIN device for assisting in taking and placing materials as claimed in claim 1, wherein: and the top PIN moving plate (5) is sleeved on the outer side surface of the top PIN module guide shaft (11).
3. The top PIN device for assisting in taking and placing materials as claimed in claim 1, wherein: the top of the top PIN module fixing plate (8) is fixedly connected with the platform (7) through an annular ring (14).
4. The top PIN device for assisting in taking and placing materials as claimed in claim 3, wherein: top PIN I (1) and I guide post (2) activity interlude on top PIN module fixed plate (8) and platform (7).
5. The top PIN device for assisting in taking and placing materials as claimed in claim 1, wherein: the top PIN I (1) annular equidistance is arranged and is set up a plurality ofly, and top PIN II guide post (4) is the same with top PIN I (1) quantity, and top PIN II guide post (4) annular equidistance is arranged and is located top PIN I (1) lateral surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122745842.8U CN216917690U (en) | 2021-11-10 | 2021-11-10 | Supplementary top PIN device of getting blowing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122745842.8U CN216917690U (en) | 2021-11-10 | 2021-11-10 | Supplementary top PIN device of getting blowing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216917690U true CN216917690U (en) | 2022-07-08 |
Family
ID=82248031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122745842.8U Active CN216917690U (en) | 2021-11-10 | 2021-11-10 | Supplementary top PIN device of getting blowing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216917690U (en) |
-
2021
- 2021-11-10 CN CN202122745842.8U patent/CN216917690U/en active Active
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