CN216898401U

CN216898401U - Tubular furnace system

Info

Publication number: CN216898401U
Application number: CN202123348920.7U
Authority: CN
Inventors: 戴虹; 王鹏; 林罡; 崔慧敏; 施艇; 朱加宽
Original assignee: Ideal Semiconductor Equipment Shanghai Co ltd
Current assignee: Ideal Semiconductor Equipment Shanghai Co ltd
Priority date: 2021-12-28
Filing date: 2021-12-28
Publication date: 2022-07-05
Anticipated expiration: 2031-12-28

Abstract

The present invention provides a tube furnace system comprising: a tubular furnace body; heating furnace wires; a thermal insulator; the cooling medium pipe comprises an input end and an output end, and the input end and the output end penetrate through the heat insulator and are inserted into the heating furnace wire so as to introduce cooling medium into the heating furnace wire; the input end is arranged in the central area of the heating furnace wire in the axial direction, the output end is arranged in the two end areas of the heating furnace wire in the axial direction, and a cooling medium is introduced from the central area of the heating furnace wire and flows out from the two end areas, so that the rapid cooling is realized, the cooling time is reduced, the time of the whole process flow is further reduced, and the efficiency is improved; according to the characteristics of the tube furnace, under the condition that the heat dissipation of the furnace door positions at two ends is fast, the uniformity of the cooling of the tube furnace system in the length direction is improved, and the damage caused by uneven heat dissipation of the carrier is avoided.

Description

Tubular furnace system

Technical Field

The utility model relates to the field of production process equipment, in particular to a tubular furnace system.

Background

The tube furnace is mainly applied to the fields of semiconductor processing, photovoltaic, metallurgy, heat treatment, new energy and the like. The heat preservation layer of traditional tube furnace equipment uses materials such as gypsum generally, is close totally inclosed, plays fine heat preservation effect, has reduced the calorific loss of intensification section and constant temperature section. But the existence of the heat-insulating layer also leads to the fact that the heat cannot be dissipated in time when the equipment is cooled, and a large amount of time is needed for completing the cooling. There are a number of high temperature processes in semiconductors and photovoltaics that require tubular equipment including diffusion furnaces, oxidation furnaces, annealing furnaces, PECVD, LPCVD, etc.

In recent years, with the development of equipment, the pipe diameter of the pipe furnace is increased and the length of the pipe furnace is lengthened. The thermal mass of the whole tube furnace system is continuously increased, so that the time required for cooling is longer and longer in the whole process flow, and the cooling time accounts for a larger proportion.

On the other hand, due to the design characteristics of the tubular equipment, the furnace doors are positioned at two ends of the tubular furnace, and the cooling effect at the position close to the furnace doors is obviously better than that of the middle part, so that the cooling rate of the carrier of the tubular furnace in the length direction is not uniform, and the carrier is easily damaged.

Therefore, there is a need to develop a new tube furnace system to avoid the above problems of the prior art.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a tubular furnace system which can realize rapid cooling, reduce the cooling time, further reduce the time of the whole process flow and improve the efficiency.

To achieve the above object, the present invention provides a tube furnace system comprising: a tubular furnace body; the heating furnace wire is wound on the outer wall of the tubular furnace body; the heat insulator covers the heating furnace wire; the cooling medium pipe comprises an input end and an output end, and the input end and the output end penetrate through the heat insulator and are inserted into the heating furnace wire so as to introduce a cooling medium into the heating furnace wire; the input end is arranged in the central area of the heating furnace wire in the axial direction, and the output end is arranged in two end areas of the heating furnace wire in the axial direction.

The tube furnace system provided by the utility model has the beneficial effects that: cooling media are introduced from the central area of the heating furnace wire and flow out from the two end areas through the input end arranged in the central area of the heating furnace wire in the axial direction and the output ends arranged in the two end areas of the heating furnace wire in the axial direction, so that the rapid cooling is realized, the cooling time is reduced, the time of the whole process flow is further reduced, and the efficiency is improved; and under the condition that the heat dissipation of the furnace door positions at the two ends is faster, the uniformity of the cooling of the tubular furnace system in the length direction is improved, and the damage caused by uneven heat dissipation of the carrier is avoided.

Optionally, the input end is arranged from the central region to the two end regions, the output end is arranged from the two end regions to the central region, and the axial distance of the output end covering the heating furnace wire is greater than the axial distance of the input end covering the heating furnace wire. The beneficial effects are that: the uniformity of the temperature reduction of the tube furnace system in the length direction.

Optionally, the plurality of input ends are circumferentially distributed at intervals on the heating furnace wire, and the plurality of output ends are circumferentially distributed at intervals on the heating furnace wire. The beneficial effects are that: the uniformity of the temperature reduction of the tube furnace system in the circumferential direction.

Optionally, the plurality of input ends are axially distributed at intervals in the same radial direction of the heating furnace wire, and the plurality of output ends are axially distributed at intervals in the same radial direction of the heating furnace wire. The beneficial effects are that: the uniformity of the temperature reduction of the tube furnace system in the length direction.

Optionally, the side wall of the input end is provided with an air transmission port which is axially communicated with the heating furnace wire. The beneficial effects are that: the uniformity of the temperature reduction of the tube furnace system in the length direction.

Optionally, the sidewall of the input end is provided with a gas transmission port which is tangentially communicated with the outer wall of the heating furnace wire. The beneficial effects are that: the uniformity of the temperature reduction of the tube furnace system in the circumferential direction.

Optionally, the tube furnace system further includes a circulation pipeline, and the circulation pipeline is connected to the input end and the output end, so that the cooling medium flows into the input end through the circulation pipeline after flowing out from the output end. The beneficial effects are that: is favorable for the recycling of the cooling medium.

Optionally, the cooling medium comprises one or more of helium, neon, argon, krypton or xenon

Drawings

FIG. 1 is a schematic view of a tube furnace system according to an embodiment of the present invention in a radial cross-sectional configuration;

FIG. 2 is a schematic diagram of a first embodiment of the distribution of input and output ends of the present invention;

FIG. 3 is a schematic diagram of a second embodiment of the distribution of input and output ends of the present invention;

FIG. 4 is a schematic illustration of the position of the input end shown in FIG. 3;

FIG. 5 is a schematic view of the location of the output end shown in FIG. 3;

FIG. 6 is a schematic diagram of a third embodiment of the distribution of input and output ends of the present invention;

FIG. 7 is a schematic diagram of a fourth embodiment of the distribution of input and output ends of the present invention;

FIG. 8 is a schematic illustration of the position of the input end shown in FIG. 7;

FIG. 9 is a schematic view of the location of the output end shown in FIG. 7;

FIG. 10 is a schematic diagram of the input and output terminals shown in FIG. 2;

FIG. 11 is a schematic view of the gas flow of FIG. 10 with the gas transfer ports arranged axially through the heater wire;

fig. 12 is a schematic view of the gas flow of fig. 10 with the gas transmission ports arranged tangentially through the heating furnace wire.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.

In order to solve the problems in the prior art, the embodiment of the utility model provides a tubular furnace system.

FIG. 1 is a schematic radial cross-sectional view of an embodiment of a tube furnace system of the present invention; fig. 2 is a schematic diagram of a first embodiment of the distribution of input and output ends of the present invention.

In some embodiments of the present invention, referring to fig. 1 and 2, the tube furnace system comprises: a tubular furnace body 1; the heating furnace wire 2 is wound on the outer wall of the tubular furnace body 1, and a gap is formed in the heating furnace wire 2; the heat insulator 3, the said heat insulator 3 covers the said heating furnace wire 2; the tubular furnace body 1, the heating furnace wire 2 and the heat insulator 3 form a multilayer structure from inside to outside; a cooling medium pipe, which comprises an input end 41 and an output end 42, wherein the gas transmission ports 43 of the input end 41 and the output end 42 penetrate through the heat insulator 3 and are inserted into the heating furnace wire 2, and the cooling medium flows into the heating furnace wire 2 from the input end 41, flows in the gap inside the heating furnace wire 2 and finally flows out from the output end 42; the input end 41 is arranged in the central area of the heating furnace wire 2 in the axial direction, and the output end 42 is arranged in the two end areas of the heating furnace wire 2 in the axial direction, so that the cooling medium flows to the two end areas after taking away heat from the central area.

In some embodiments of the present invention, referring to fig. 2, one of the input ends 41 is disposed at a central region of the heating wire in the axial direction, and two of the output ends 42 are disposed at two end regions of the heating wire 2 in the axial direction, respectively, and the cooling medium flows in the heating wire 2 in the radial direction and flows out the heating wire 2 in the radial direction.

FIG. 3 is a schematic diagram of a second embodiment of the distribution of input and output ends of the present invention; FIG. 4 is a schematic illustration of the position of the input end shown in FIG. 3; FIG. 5 is a schematic view of the location of the output end shown in FIG. 3;

in some embodiments of the present invention, referring to fig. 3, 4 and 5, a plurality of the input ends 41 are disposed in an axial region of the heating furnace wire 2, a plurality of the output ends 42 are disposed in two axial regions of the heating furnace wire 2, respectively, and the cooling medium flows in a radial direction of the heating furnace wire 2 and flows out in an axial direction of the heating furnace wire 2.

Fig. 6 is a schematic diagram of a third embodiment of the distribution of input and output ends of the present invention.

In some embodiments of the present invention, referring to fig. 6, the input ends 41 are arranged from the central region to the two end regions, the output ends 42 are arranged from the two end regions to the central region, the input ends 41 include a first side input end 411 and a second side input end 412, the output ends 42 include a first side output end 421 and a second side output end 422, an axial distance of the output ends 42 covering the heating furnace wires 2 is greater than an axial distance of the input ends 41 covering the heating furnace wires 2, that is, a distance between the first side input end 411 and the second side input end 412 is smaller than a distance between the first side output end 421 and the second side output end 422; the distance between the input end 41 and the output end 42 in the axial direction and the circumferential direction is not limited in the embodiment of the present invention.

FIG. 7 is a schematic diagram of a fourth embodiment of the distribution of input and output ends of the present invention; FIG. 8 is a schematic illustration of the position of the input end shown in FIG. 7; FIG. 9 is a schematic view of the location of the output end shown in FIG. 7;

in some embodiments of the present invention, referring to fig. 7, 8 and 9, a plurality of the input ends 41 are circumferentially spaced on the heater wire 2, and a plurality of the output ends 42 are circumferentially spaced on the heater wire 2.

In some embodiments of the present invention, referring to fig. 6, a plurality of the input ends 41 are axially spaced along the same radial direction of the heating furnace wire 2, and a plurality of the output ends 42 are axially spaced along the same radial direction of the heating furnace wire 2.

FIG. 10 is a schematic diagram of the input and output terminals shown in FIG. 2; FIG. 11 is a schematic view of the gas flow of FIG. 10 with the gas transfer ports arranged axially through the heater wire; fig. 12 is a schematic view of the gas flow of fig. 10 with the gas transmission ports arranged tangentially through the heating furnace wire.

In some embodiments of the present invention, referring to fig. 10 and 11, a gas transmission port 43 is disposed on a sidewall of the input end 41 and axially penetrates along the heating furnace wire 2, so that gas flows axially along the heating furnace wire 2.

In some embodiments of the present invention, referring to fig. 10 and 12, the sidewall of the input end 41 is provided with a gas transmission port 43 that penetrates tangentially along the outer wall of the heating furnace wire 2, so that gas flows along the circumferential direction of the heating furnace wire 2.

In some embodiments of the present invention, the tube furnace system further includes a circulating pipeline, the circulating pipeline connects the input end 41 and the output end 42, and a cooling device is disposed on the circulating pipeline, so that the cooling medium flowing out of the output end 42 flows into the input end 41 again after being cooled.

In some embodiments of the utility model, the cooling medium comprises one or more of helium, neon, argon, krypton or xenon.

Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to the embodiments. However, it is to be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the following claims. Moreover, the utility model as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.

Claims

1. A tube furnace system, comprising:

the tube furnace body is of a hollow cylinder structure;

the heating furnace wire is wound on the outer wall of the tubular furnace body;

the heat insulator covers the heating furnace wire;

the cooling medium pipe comprises an input end and an output end, and the input end and the output end penetrate through the heat insulator and are inserted into the heating furnace wire so as to introduce cooling medium into the heating furnace wire;

the input end is arranged in the central area of the heating furnace wire in the axial direction, and the output end is arranged in two end areas of the heating furnace wire in the axial direction.

2. The tube furnace system of claim 1, wherein the input end is aligned from the central region to the two end regions, and the output end is aligned from the two end regions to the central region, the output end covering the heater wire an axial distance greater than the input end covering the heater wire.

3. The tube furnace system of claim 2, wherein a plurality of the input ends are circumferentially spaced on the heater wire and a plurality of the output ends are circumferentially spaced on the heater wire.

4. The tube furnace system of claim 2, wherein a plurality of the input ends are axially spaced along a same radial direction of the heater wire, and a plurality of the output ends are axially spaced along a same radial direction of the heater wire.

5. The tube furnace system according to claim 1, wherein a gas transmission port is provided on a side wall of the input end and axially penetrates along the heating wire.

6. The tube furnace system according to claim 1, wherein a gas transmission port is provided on a sidewall of the input end, the gas transmission port being tangentially penetrated along an outer wall of the heating furnace wire.

7. The tube furnace system of claim 1, further comprising a circulation conduit connecting the input end and the output end, such that the cooling medium flows from the output end and through the circulation conduit into the input end.

8. The tube furnace system of claim 1, wherein the cooling medium comprises one or more of helium, neon, argon, krypton, or xenon.