CN213538168U - Diffusion furnace heat preservation device - Google Patents
Diffusion furnace heat preservation device Download PDFInfo
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- CN213538168U CN213538168U CN202022276311.4U CN202022276311U CN213538168U CN 213538168 U CN213538168 U CN 213538168U CN 202022276311 U CN202022276311 U CN 202022276311U CN 213538168 U CN213538168 U CN 213538168U
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Abstract
The utility model provides a heat preservation device of a diffusion furnace, which comprises a furnace body, a quartz tube, a quartz furnace door, a metal furnace door and a heat preservation mechanism; the quartz tube is arranged in the furnace body, the quartz furnace door and the metal furnace door are arranged at the furnace door end of the quartz tube, the quartz furnace door is positioned at the inner side of the metal furnace door, and the metal furnace door is fixedly connected with the quartz furnace door; the heat preservation mechanism comprises a first heat preservation sleeve, a second heat preservation sleeve, a third heat preservation sleeve and a fourth heat preservation sleeve, the furnace door end of the furnace body is located by the first heat preservation sleeve, the furnace door end of the quartz tube is located by the second heat preservation sleeve, the first heat preservation sleeve is connected with the second heat preservation sleeve in an embedded mode, the furnace tail end of the furnace body is located by the third heat preservation sleeve, the furnace tail end of the quartz tube is located by the fourth heat preservation sleeve, and the third heat preservation sleeve is connected with the fourth heat preservation sleeve in an embedded mode. The utility model arranges the heat preservation sleeves at the furnace mouth and the furnace tail of the diffusion furnace, can ensure the constant temperature of the constant temperature area of the diffusion furnace, and ensures the uniform temperature distribution of the furnace door, thereby meeting the requirements of the diffusion process; the problem of furnace door adhesion can also be avoided.
Description
Technical Field
The utility model relates to a semiconductor process equipment field especially relates to a diffusion furnace heat preservation device.
Background
The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like. In a semiconductor diffusion process, the temperature distribution uniformity of a constant temperature area is a basic requirement of a diffusion furnace. The temperature distribution in the existing diffusion furnace is not uniform, especially the temperature difference between the furnace door and the furnace tail and the temperature in the furnace is large, the stability of products is not facilitated, and the problem of furnace door adhesion is also brought.
Disclosure of Invention
The utility model aims at solving the defects existing in the prior art, and providing a diffusion furnace heat preservation device, arranging a heat preservation structure at the furnace door and the furnace tail, and enhancing the temperature distribution uniformity of the constant temperature area of the diffusion furnace.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a heat preservation device of a diffusion furnace comprises a furnace body, a quartz tube, a quartz furnace door, a metal furnace door and a heat preservation mechanism; the quartz tube is arranged in the furnace body, the quartz furnace door and the metal furnace door are arranged at the furnace door end of the quartz tube, the quartz furnace door is positioned at the inner side of the metal furnace door, and the metal furnace door is fixedly connected with the quartz furnace door; the heat preservation mechanism includes first insulation cover, second insulation cover, third insulation cover and fourth insulation cover, first insulation cover is located the furnace gate end of furnace body, the second insulation cover is located the furnace gate end of quartz capsule, first insulation cover with the gomphosis of second insulation cover is connected, the third insulation cover is located the stove tail end of furnace body, the fourth insulation cover is located the stove tail end of quartz capsule, the third insulation cover with the gomphosis of fourth insulation cover is connected.
Preferably, the first heat-insulating sleeve is provided with a first groove, the inner end structure of the second heat-insulating sleeve is matched with the structure of the first groove, and the inner end of the second heat-insulating sleeve is embedded into the first groove.
Preferably, a second groove is formed in the third heat-insulating sleeve, the inner end structure of the fourth heat-insulating sleeve is matched with the structure of the second groove, and the inner end of the fourth heat-insulating sleeve is embedded into the second groove.
Preferably, the quartz furnace door is of a hollow structure, and the quartz furnace door is filled with a thermal insulation material.
Preferably, a sealing sleeve is arranged on the circumferential outer side of the quartz furnace door, the sealing sleeve is respectively connected with the side wall of the quartz furnace door and the inner side face of the metal furnace door, and the structure of the sealing sleeve is matched with the structure of the inner wall of the second heat-insulating sleeve.
Preferably, the tail part of the quartz tube is provided with an air inlet tube and an exhaust tube, and the fourth heat-insulating sleeve wraps the air inlet tube and the exhaust tube.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model arranges the heat preservation sleeves at the furnace mouth and the furnace tail of the diffusion furnace, can ensure the constant temperature of the constant temperature area of the diffusion furnace, and ensures the uniform temperature distribution of the furnace door, thereby meeting the requirements of the diffusion process; the problem of furnace door adhesion can also be avoided.
Drawings
Fig. 1 is a schematic structural view of a diffusion furnace heat preservation device according to embodiment 1 of the present invention;
fig. 2 is a schematic structural view of a furnace door end of a diffusion furnace heat preservation device in embodiment 1 of the present invention;
fig. 3 is a schematic structural view of a furnace tail end of a diffusion furnace heat preservation device according to embodiment 1 of the present invention.
In the figure, 10-furnace body, 20-quartz tube, 21-air inlet tube, 22-exhaust tube, 30-quartz furnace door, 31-heat insulation material, 32-sealing sleeve, 40-metal furnace door, 51-first heat insulation sleeve, 511-first groove, 52-second heat insulation sleeve, 53-third heat insulation sleeve, 531-second groove and 54-fourth heat insulation sleeve.
Detailed Description
In order to further understand the objects, structures, features and functions of the present invention, the following embodiments are described in detail.
Referring to fig. 1 to 3, fig. 1 is a schematic structural diagram of a diffusion furnace heat preservation device according to embodiment 1 of the present invention; fig. 2 is a schematic structural view of a furnace door end of a diffusion furnace heat preservation device in embodiment 1 of the present invention; fig. 3 is a schematic structural view of a furnace tail end of a diffusion furnace heat preservation device according to embodiment 1 of the present invention. The utility model provides a diffusion furnace heat preservation device of embodiment 1, including furnace body 10, quartz capsule 20, quartz furnace gate 30, metal furnace gate 40 and heat preservation mechanism; the quartz tube 20 is arranged in the furnace body 10, the quartz furnace door 30 and the metal furnace door 40 are arranged at the furnace door end of the quartz tube 20, the quartz furnace door 30 is positioned at the inner side of the metal furnace door 40, and the metal furnace door 40 and the quartz furnace door 30 are fixedly connected through parts such as bolts.
Referring to fig. 1, the heat-insulating mechanism comprises a first heat-insulating sleeve 51, a second heat-insulating sleeve 52, a third heat-insulating sleeve 53 and a fourth heat-insulating sleeve 54, and is used for insulating the furnace mouth and the furnace tail of the diffusion furnace; referring to fig. 2, the first thermal insulation sleeve 51 is disposed at the door end of the furnace body 10, the second thermal insulation sleeve 52 is disposed at the door end of the quartz tube 20, and the first thermal insulation sleeve 51 is embedded and connected with the second thermal insulation sleeve 52; specifically, be equipped with first recess 511 on the first insulation cover 51, the cross-section of first insulation cover 51 is the L type, the structure phase-match of the inner structure of second insulation cover 52 and first recess 511, in the inner embedding first recess 511 of second insulation cover 52, first insulation cover 51, second insulation cover 52 are used for keeping warm in diffusion furnace gate department, guarantee that the temperature is even in the diffusion furnace, still avoid the problem of furnace gate adhesion.
Referring to fig. 3, the third thermal insulation sleeve 53 is arranged at the furnace tail end of the furnace body 10, the fourth thermal insulation sleeve 54 is arranged at the furnace tail end of the quartz tube 20, and the third thermal insulation sleeve 53 is connected with the fourth thermal insulation sleeve 54 in an embedded manner; specifically, the third heat preservation sleeve 53 is provided with a second groove 531, the cross section of the third heat preservation sleeve 53 is in an L shape, the inner end structure of the fourth heat preservation sleeve 54 is matched with the structure of the second groove 531, the inner end of the fourth heat preservation sleeve 54 is embedded into the second groove 531, and the third heat preservation sleeve 53 and the fourth heat preservation sleeve 51 are used for preserving heat at the tail of the diffusion furnace, so that the temperature in the diffusion furnace is ensured to be uniform, and the problems of pipeline blockage and the like caused by uneven temperature are solved.
Preferably, referring to fig. 1 or fig. 2, the quartz furnace door 30 has a hollow structure, and is filled with a thermal insulation material 31, and the thermal insulation material 31 is thermal insulation cotton, thermal insulation fiber, or the like, so that the furnace door can be effectively insulated, the temperature of the furnace door is ensured to be uniform, and the problem of adhesion of the furnace door is avoided.
Preferably, referring to fig. 2, a sealing sleeve 32 is disposed on the circumferential outer side of the quartz oven door 30, the sealing sleeve 32 is respectively connected to the side wall of the quartz oven door 30 and the inner side surface of the metal oven door 40, and the structure of the sealing sleeve 32 is matched with the inner wall structure of the second insulating sleeve 52. When the furnace door is closed, the sealing sleeve 32 is tightly attached to the second heat-insulating sleeve 52, so that the sealing performance of the furnace door of the diffusion furnace can be enhanced.
Preferably, the tail of quartz capsule 20 sets up intake pipe 21 and blast pipe 22, and fourth insulation cover 54 parcel intake pipe 21 and blast pipe 22 can keep warm intake pipe 21 and blast pipe 22 department, guarantees that the temperature is even, avoids the pipeline to block up the scheduling problem.
In summary, the utility model provides a diffusion furnace heat preservation device, wherein heat preservation sleeves are arranged at the furnace mouth and the furnace tail, so as to ensure constant temperature in the constant temperature area of the diffusion furnace, ensure uniform temperature distribution of the furnace door and meet the requirements of the diffusion process; the problem of furnace door adhesion can also be avoided.
The present invention has been described in relation to the above embodiments, which are only examples for implementing the present invention. It should be noted that the disclosed embodiments do not limit the scope of the invention. On the contrary, all changes and modifications which do not depart from the spirit and scope of the present invention are deemed to fall within the scope of the present invention.
Claims (6)
1. The utility model provides a diffusion furnace heat preservation device which characterized in that: comprises a furnace body, a quartz tube, a quartz furnace door, a metal furnace door and a heat preservation mechanism; the quartz tube is arranged in the furnace body, the quartz furnace door and the metal furnace door are arranged at the furnace door end of the quartz tube, the quartz furnace door is positioned at the inner side of the metal furnace door, and the metal furnace door is fixedly connected with the quartz furnace door; the heat preservation mechanism includes first insulation cover, second insulation cover, third insulation cover and fourth insulation cover, first insulation cover is located the furnace gate end of furnace body, the second insulation cover is located the furnace gate end of quartz capsule, first insulation cover with the gomphosis of second insulation cover is connected, the third insulation cover is located the stove tail end of furnace body, the fourth insulation cover is located the stove tail end of quartz capsule, the third insulation cover with the gomphosis of fourth insulation cover is connected.
2. The diffusion furnace holding apparatus of claim 1, wherein: the first heat-insulating sleeve is provided with a first groove, the inner end structure of the second heat-insulating sleeve is matched with the structure of the first groove, and the inner end of the second heat-insulating sleeve is embedded into the first groove.
3. The diffusion furnace holding apparatus of claim 2, wherein: and a second groove is formed in the third heat-insulating sleeve, the inner end structure of the fourth heat-insulating sleeve is matched with the structure of the second groove, and the inner end of the fourth heat-insulating sleeve is embedded into the second groove.
4. The diffusion furnace holding apparatus of claim 1, wherein: the quartz furnace door is of a hollow structure, and the quartz furnace door is filled with a heat insulation material.
5. The diffusion furnace holding apparatus of claim 1, wherein: the quartz furnace door is characterized in that a sealing sleeve is arranged on the circumferential outer side of the quartz furnace door, the sealing sleeve is respectively connected with the side wall of the quartz furnace door and the inner side face of the metal furnace door, and the structure of the sealing sleeve is matched with that of the inner wall of the second heat-insulating sleeve.
6. The diffusion furnace holding apparatus of claim 1, wherein: the tail part of the quartz tube is provided with an air inlet tube and an exhaust tube, and the fourth heat-insulating sleeve wraps the air inlet tube and the exhaust tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022276311.4U CN213538168U (en) | 2020-10-14 | 2020-10-14 | Diffusion furnace heat preservation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022276311.4U CN213538168U (en) | 2020-10-14 | 2020-10-14 | Diffusion furnace heat preservation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213538168U true CN213538168U (en) | 2021-06-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022276311.4U Active CN213538168U (en) | 2020-10-14 | 2020-10-14 | Diffusion furnace heat preservation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213538168U (en) |
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2020
- 2020-10-14 CN CN202022276311.4U patent/CN213538168U/en active Active
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Effective date of registration: 20230619 Address after: Building 2, No. 208 Benniuyun South West Road, Xinbei District, Changzhou City, Jiangsu Province, 213000 Patentee after: Touneng (Jiangsu) Quartz Technology Co.,Ltd. Address before: 214000 Qinxiang village, Luoshe Town, Huishan District, Wuxi City, Jiangsu Province Patentee before: Jiangsu wohong Equipment Co.,Ltd. |