CN216818285U - Heating device - Google Patents

Abstract

The application provides a heating device, belongs to the equipment for heat treatment field. The heating device comprises a heating table main body and a cover plate component. The heating table main body comprises a mounting seat and a heat conducting block. A heating table cavity is arranged in the mounting seat, a ventilation channel communicated with the heating table cavity is arranged at the top of the mounting seat, and a first heating table joint and a second heating table joint are arranged outside the mounting seat. The heat conduction block is installed on the installation seat, and the top of the heat conduction block is located at the top of the installation seat. A first channel penetrating through the top of the heat conducting block is arranged in the heat conducting block, and a connecting pipeline is arranged between the other end of the first channel and the joint of the first heating table. When the cover plate assembly is covered on the top of the mounting seat, a first cover plate cavity is formed between the cover plate assembly and the top of the mounting seat, and the ventilation channel and the first channel are communicated with the first cover plate cavity; a first cover plate joint communicated with the first cover plate cavity is arranged outside the cover plate component. The heating device is adopted for heating and annealing treatment of material heat treatment, so that the risk of damage caused by air contact after the sample is transferred and before the annealing treatment can be reduced.

Description

Heating device

Technical Field

The application relates to the field of heat treatment equipment, in particular to a heating device.

Background

In the current material transfer apparatus, for example, in the two-dimensional material transfer apparatus, a heating device such as a sample heating stage is an indispensable component, and functions to heat a sample such as a two-dimensional material to melt a glue.

In the current process, after the heating transfer process of the sample is completed, annealing treatment is often needed to be carried out on the sample to remove defects such as bubbles and wrinkles generated in the transfer process.

With regard to the annealing treatment, it is a conventional practice to place the transferred sample in a vacuum annealing furnace to perform annealing under a certain atmosphere. When materials such as heterojunction and the like composed of water and oxygen sensitive materials are prepared, the whole transfer process needs to be carried out in a glove box; however, the transferred sample may be exposed to air during the process of being taken out of the glove box and being placed in the vacuum annealing furnace, thereby causing the sample to be damaged.

SUMMERY OF THE UTILITY MODEL

The application aims at providing a heating device, which can effectively reduce the risk that a sample is damaged by contacting with air after the transfer is completed and before the annealing treatment.

The embodiment of the application is realized as follows:

the embodiment of the application provides a heating device, which comprises a heating table main body and a cover plate assembly.

The heating table main body comprises a mounting seat and a heat conducting block; a heating table cavity is formed in the mounting seat, and a ventilation channel communicated with the heating table cavity is formed in the top of the mounting seat; a first heating table joint and a second heating table joint which are communicated with the heating table cavity are arranged on the outer side of the mounting seat; the heat conducting block is arranged on the mounting seat, and the top of the heat conducting block is positioned at the top of the mounting seat; a first channel is formed in the heat conducting block, one end of the first channel penetrates through the top end face of the heat conducting block, and a connecting pipeline is connected between the other end of the first channel and the first heating table joint;

the cover plate assembly is arranged on the top of the mounting seat in a covering mode, and a first cover plate cavity is formed between the cover plate assembly and the top of the mounting seat; the vent channel and the first channel are both communicated with the first cover plate cavity; the first cover plate joint communicated with the first cover plate cavity is arranged on the outer side of the cover plate component.

Among the above-mentioned technical scheme, the heat conduction piece of warm table main part can adsorb the material to be processed at the heat conduction piece top through first warm table joint switch-on negative pressure, makes things convenient for the heat conduction piece to heat the back and carries out heat treatment to the material to be processed. The heating table main body is matched with the cover plate assembly, the negative pressure and/or the air source can be connected through the second heating table connector, the annealing atmosphere can be connected through the first cover plate cavity, and annealing treatment can be conveniently carried out under the specific atmosphere and/or vacuum degree environment.

The heating device has the functions of heating treatment and annealing treatment, after the material is heated and transferred, a sample does not need to be taken out of a treatment environment and then placed in a vacuum annealing furnace for annealing, the material to be treated can be kept in a preset environment atmosphere condition, and the risk that the sample is damaged due to the fact that the sample is contacted with air after the transfer and before the annealing treatment can be effectively reduced.

In some optional embodiments, the first cover plate cavity is opened in the cover plate assembly and penetrates through the bottom of the cover plate assembly, the first cover plate cavity penetrates through the bottom of the cover plate assembly to form an observation hole, and the top of the cover plate assembly is provided with an observation window corresponding to the observation hole; when the cover plate assembly covers the top of the mounting seat, the observation hole corresponds to the heat conducting block, and the ventilation channel and the first channel are communicated with the first cover plate cavity through the observation hole.

Among the above-mentioned technical scheme, the observation window corresponds with the observation hole, can observe the annealing process of the sample at the heat conduction piece top that corresponds with the observation hole. On one hand, the annealing progress of the sample can be conveniently and visually observed, so that the research time is saved; on the other hand, the visualized annealing process can also provide more experimental information for research.

In some optional embodiments, the top of the cover plate assembly is provided with a mounting through hole communicated with the first cover plate cavity, and the periphery of the mounting through hole is annularly provided with a mounting step; the mounting step comprises an annular step side wall and an annular step bottom wall, and the annular step bottom wall is connected to the inner side of the bottom of the annular step side wall; the observation window is arranged on the mounting step to seal the mounting through hole, and an annular sealing ring is connected between at least one of the side wall of the annular step and the bottom wall of the annular step and the observation window.

Among the above-mentioned technical scheme, carry out the installation of observation window through setting up the installation step for the observation window can be better the gomphosis in the apron subassembly. The observation window is connected with the installation step through the annular sealing ring, and the observation window and the installation step can be connected and sealed well.

In some alternative embodiments, the bottom of the cover plate assembly is provided with an annular protrusion; the annular bulge is positioned in the cavity of the first cover plate and surrounds the observation hole; the top of the annular bulge is flush with the bottom wall of the annular step; the annular bulge is provided with a connecting channel for communicating the inner side and the outer side of the annular bulge.

Among the above-mentioned technical scheme, the annular bulge that flushes with the annular step diapire of installation step is used for cooperating with annular step diapire to support the observation window better, be favorable to reducing the thickness of observation window, thereby make the light transmissivity of observation window better, can realize better observation.

In some optional embodiments, the cover plate assembly is also provided with a second cover plate cavity inside, and the outer side is also provided with a second cover plate joint communicated with the second cover plate cavity; the second cover plate cavity is positioned outside the first cover plate cavity, and the bottom of the cover plate assembly is provided with a second channel communicated with the second cover plate cavity; when the cover plate assembly covers the top of the mounting seat, the second channel corresponds to the top of the mounting seat, and the top of the mounting seat separates the first cover plate cavity from the second cover plate cavity.

Among the above-mentioned technical scheme, the top of mount pad separates first apron cavity and second apron cavity to make first apron cavity and the inside cavity intercommunication of mount pad, second apron cavity and mount pad external environment intercommunication. The second channel corresponds with the top of mount pad, sweeps the top of mount pad after making things convenient for the second channel to blow out in the gas in the second apron cavity, can cool down the top of mount pad, is favorable to carrying out annealing better.

In some alternative embodiments, the second channel extends along a circular arc path in a cross-section of the cover plate assembly, and a central angle of the circular arc path is greater than 300 °.

Among the above-mentioned technical scheme, the second passageway is the arc of big radian, can correspond with the top of mount pad in the axial better for the gas that sweeps the top of mount pad can exert more abundant even cooling effect.

In some alternative embodiments, the vent channel is a vent gap between a top of the heat conducting block and a top of the mount; the top of the mounting seat is provided with a plurality of communicating holes communicated with the heating platform cavity in a penetrating way; when the cover plate assembly covers the top of the mounting seat, the communication hole is communicated with the first cover plate cavity.

Among the above-mentioned technical scheme, the setting of intercommunicating pore can reduce the sectional area at the top of mount pad to can reduce the heat's of heat conduction piece radiation transmission, be favorable to reducing the heat conduction piece low heat and scatter and disappear.

In some alternative embodiments, the top of the mounting base is recessed with an annular mounting groove for removably mounting the annular seal such that when the cover assembly is seated on the top of the mounting base, the top of the annular seal sealingly engages the bottom of the cover assembly and separates the first cover cavity from the second cover cavity.

Among the above-mentioned technical scheme, the setting of annular mounting groove is used for detachably installing annular seal spare, can realize the top of mount pad and the sealed cooperation of apron subassembly better. Meanwhile, the annular mounting groove can also reduce the sectional area of the top of the mounting seat, so that the heat transfer to the radiation of the heat conducting block can be reduced.

In some optional embodiments, the heating table main body further comprises a heating plate and a screw type temperature probe, the heating plate is attached to the bottom end face of the heat conducting block, and the screw type temperature probe is arranged through the heating plate and connected with the bottom of the heat conducting block.

Among the above-mentioned technical scheme, the form of heating plate has great heat radiating area, is favorable to reducing by heating components and parts heat dissipation untimely and self energy storage great and temperature overshoot that causes. The screw type temperature probe is convenient to fix on the heat conducting block for temperature detection, and can also realize the fixation of the heating plate.

In some alternative embodiments, the heating apparatus further comprises an insulating stage comprising an insulating base, a side reflective structure, and a bottom reflective structure; the heat insulation seat is used for being connected with the mounting seat, and a heat insulation cavity communicated with the heating table cavity is concavely arranged at the top of the heat insulation seat; the side reflecting structure is arranged on the side wall of the heat insulation cavity in a surrounding mode, and the bottom reflecting structure is arranged at the bottom of the heat insulation cavity.

In the technical scheme, the heat insulation table is used for separating the heating table main body from the operation table top; the side reflecting structure and the bottom reflecting structure in the heat insulation seat can reflect the heat radiation of the heating table main body, and are favorable for reducing the heat loss of the heating table main body and the heat transferred to the outside.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

Fig. 1 is an exploded view of a heating device provided in an embodiment of the present application;

FIG. 2 is a cross-sectional view of a heating device provided in an embodiment of the present application;

FIG. 3 is a cross-sectional view of a heating station body provided by an embodiment of the present application;

FIG. 4 is a schematic structural diagram of a heating stage body according to an embodiment of the present disclosure;

FIG. 5 is an exploded view of a cover plate assembly provided by an embodiment of the present application;

FIG. 6 is a cross-sectional view of a cover plate assembly provided by an embodiment of the present application;

fig. 7 is an exploded view of an insulation station provided in an embodiment of the present application.

Icon: 10-a heating device;

100-heating table body; 101-a mounting seat; 110-a thermal insulation ring; 111-heating table cavity; 112-a first heating stage junction; 113-a second heating stage joint; 114-vacuum aircraft plugs; 120-a mounting plate; 121-a vent channel; 122-a communication hole; 123-an annular mounting groove; 130-a heat conducting block; 131-a first channel; 132-connecting a pipe; 133-a heating plate; 134-screw temperature probe; 135-spring washer;

200-a cover plate assembly; 201-cover plate seat; 210-a seat annular side plate; 211-a first cover plate cavity; 212-a first cover plate joint; 213-a second cover plate cavity; 214-a second deck connection; 220-base plate; 221-viewing hole; 222-an annular projection; 223-connecting channel; 224-a second channel; 230-a viewing window; 231-mounting steps; 232-annular step sidewall; 233-a first annular seal ring; 234-annular step bottom wall; 235-a second annular sealing ring; 240-sealing cover plate;

300-an annular seal;

400-an insulation table; 410-a heat insulation seat; 411-an insulating chamber; 420-side light reflecting structure; 430-bottom surface light reflecting structure.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present application, it is to be noted that the terms "center", "upper", "lower", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally laid out when products of the application are used, and are only used for convenience in describing the application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the application.

The terms "perpendicular", "parallel" and the like do not require absolute perpendicularity or parallelism between the components, but may be slightly inclined.

Furthermore, the terms "first," "second," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should also be noted that, unless expressly stated or limited otherwise, the terms "disposed," "mounted," and "connected" are to be construed broadly and can include, for example, fixed connections, detachable connections, or integral connections; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

Examples

Referring to fig. 1 and 2, a heating apparatus 10 according to an embodiment of the present disclosure includes a heating stage body 100 and a cover plate assembly 200.

Referring to fig. 3 and 4, the heating stage main body 100 includes a mounting seat 101 and a heat conduction block 130. The mounting base 101 has a heating stage cavity 111 inside, and the top of the mounting base 101 has a vent passage 121 communicating with the heating stage cavity 111. A first heating table connector 112 and a second heating table connector 113 which are communicated with the heating table cavity 111 are arranged on the outer side of the mounting seat 101. The heat conduction block 130 is mounted on the mounting seat 101; the top of the thermal block 130 is located on top of the mount 101. A first channel 131 is arranged in the heat-conducting block 130; one end of the first channel 131 penetrates through the top end surface of the heat-conducting block 130; the other end of the first channel 131 penetrates through the side wall of the heat-conducting block 130 or the bottom end face of the heat-conducting block 130, and a connecting pipe 132 is connected between the other end of the first channel 131 and the first heating stage joint 112.

As an example, the top of the thermal block 130 protrudes out of the top of the mount 101, which facilitates placement of the material to be processed on top of the thermal block 130. As another example, the vent channel 121 is a vent gap between the top of the heat conduction block 130 and the top of the mounting seat 101, which can reduce the heat transferred from the heat conduction block 130 to the mounting seat 101 and reduce the heat loss while achieving the communicating function. Of course, in other embodiments, the ventilation channel 121 may also extend through the top of the heat-conducting block 130, for example, in the area of the top of the heat-conducting block 130 close to the heat-conducting block 130, which may be any regular or irregular shape.

In some alternative embodiments, the connecting pipe 132 is a thin-walled TC4 pipe, and the TC4 has low thermal conductivity and high strength, so that the wall thickness can be reduced, the heat conduction cross-sectional area can be reduced, and the temperature of the end of the connecting pipe 132 far away from the heat conduction block 130 can be greatly reduced.

As an example, the connection pipe 132 is connected to the heat conduction block 130 by an interference fit at one end thereof and connected to the first heating stage joint 112 by a fluororubber O-ring at the other end thereof, and the other end thereof is fixed at one end thereof and has a certain expansion space at the other end thereof, so that the mounting seat 101 is not easily broken due to thermal expansion when the temperature rises.

Optionally, the O-shaped sealing ring is made of 246 fluororubber, and the 246 fluororubber can work for a long time at the temperature of 300 ℃, and can still maintain good elasticity after being aged for 16 hours at the temperature of 350 ℃. The outer diameter of the O-ring is slightly larger than the inner diameter of the first heating table joint 112, and the inner diameter of the O-ring is slightly smaller than the outer diameter of the connecting pipeline 132, so that the O-ring can keep a certain elastic deformation after being installed, and a good sealing effect is achieved.

The cover plate assembly 200 is configured to be detachably placed on the top of the mounting seat 101, so that the cover plate assembly 200 has a first state covering the top of the mounting seat 101 and a second state being separated from the top of the mounting seat 101.

Referring to fig. 5 and 6, when the cover plate assembly 200 is in the first state of covering the top of the mounting seat 101, a first cover plate cavity 211 is formed between the cover plate assembly 200 and the top of the mounting seat 101; in this state, the vent channel 121 and the first channel 131 are both in communication with the first cover cavity 211. The cover plate assembly 200 is provided at an outer side thereof with a first cover plate joint 212 communicating with the first cover plate cavity 211.

As an example, the first cover cavity 211 is opened in the cover assembly 200 and penetrates through the bottom of the cover assembly 200, which facilitates the opening of the first cover cavity 211 and facilitates the communication of the first cover joint 212 with the first cover cavity 211. Of course, in other embodiments, the first cover plate cavity 211 is not limited to be opened in the cover plate assembly 200, and for example, an annular sidewall may be protruded on the top of the mounting base 101, and the closed first cover plate cavity 211 is enclosed by the cover plate assembly 200 abutting against the top of the annular sidewall in the first state.

In the present application, the heating stage main body 100 can be used for performing heat treatment of a sample to be treated; the cover plate assembly 200 can be used to perform annealing of a sample to be processed when it is fitted to the heating stage main body 100 by covering the top of the mount 101.

At the heat treatment stage, place the pending material at heat conduction piece 130 top and cover the opening on first passageway 131 top, can adsorb the pending material at heat conduction piece 130 top through connect the first warm table joint 112 switch-on negative pressure, make things convenient for heat conduction piece 130 to heat up to accomplish the heat treatment of pending material after predetermineeing the temperature. In the annealing treatment stage, the material to be treated after the heating treatment is placed on the top of the heat conducting block 130, the second heating table joint 113 is connected with a negative pressure to provide an environment with a certain vacuum degree for the first cover plate cavity 211 where the material to be treated is located, and the first cover plate joint 212 is connected with an annealing gas source to provide a specific annealing atmosphere for the first cover plate cavity 211 where the material to be treated is located, so that the annealing treatment can be conveniently performed under the specific atmosphere and vacuum degree environment.

The heating device 10 provided by the application has both heating treatment and annealing treatment, and the heating device 10 is convenient to be placed under a specific preset environmental atmosphere condition, such as a glove box environment, to be sequentially heated and transferred and annealed.

After the material is heated and transferred, the sample does not need to be taken out of the processing environment and then placed in a vacuum annealing furnace for additional annealing, the material to be processed can be kept in a preset environmental atmosphere condition, and the risk that the sample is damaged by contacting with air after the transfer and before the annealing treatment can be effectively reduced.

In the heating stage main body 100 of the present invention, the heat conducting block 130 is used for conducting heat, and a heating element corresponding to the heat conducting block 130 needs to be disposed to heat the heat conducting block 130. Further, in order to better monitor the heating condition, a temperature sensing device corresponding to the heat conduction block 130 is optionally further provided.

Continuing to refer to fig. 3, as an example, the heating station body 100 further includes a heating plate 133 and a screw type temperature probe 134; optionally, the heating sheet 133 is a ceramic heating sheet 133. The heating plate 133 is attached to the bottom end face of the heat conducting block 130, and the screw type temperature probe 134 is inserted into the heating plate 133 and connected to the bottom of the heat conducting block 130.

The heating element is in the form of a heating sheet 133, has a larger heat dissipation area, and is beneficial to reducing temperature overshoot caused by untimely heat dissipation of the heating element and larger self energy storage; the heating plate 133 is attached to the bottom end face of the heat conducting block 130, so that the heat conducting block is convenient to set, and the heat conducting effect on the top of the heat conducting block 130 is uniform. Of course, in other embodiments, the heating element is not limited to being provided in a sheet shape, and may be provided as a heating rod, for example; the heating element is not limited to be attached to the bottom of the heat conduction block 130, and may be disposed on a side wall of the heat conduction block 130.

The screw type temperature probe 134 is conveniently fixed on the heat conducting block 130 for temperature detection, and can also realize the fixation of the heating plate 133. Of course, in other embodiments, the temperature sensing device may be provided in other conventional contact or non-contact forms.

Correspondingly, the heating station body 100 is also provided with a vacuum aircraft plug 114, which is mounted on the side wall of the heating station body 100, illustratively by means of a high-temperature-resistant epoxy seal.

Further, the heating table main body 100 further includes a spring washer 135, the spring washer 135 is attached to the bottom of the heating plate 133, and the screw type temperature probe 134 is sequentially inserted into the spring washer 135 and the heating plate 133, and then connected to the bottom of the heat conducting block 130.

The inventors have found that the thermal conductive block 130 undergoes repeated expansion and contraction in the course of repeated heating and cooling. In the case where the spring washer 135 is not provided, the screw type temperature probe 134 and the heat conduction block 130 are easily untight in connection with each other as the use time is prolonged, and thus inaccurate temperature detection is easily caused as the use time is prolonged. The spring washer 135 is provided to keep the screw type temperature probe 134 tightly connected to the heat conducting block 130, thereby ensuring the accuracy of temperature detection.

Optionally, the material of the spring washer 135 is TC4 titanium alloy. In the embodiment with the spring spacer 135, the spring spacer 135 is abutted between the heating plate 133 and the screw type temperature probe 134, and since the contact area between the spring spacer 135 itself and the heating plate 133 and the screw type temperature probe 134 is small, and a material with low thermal conductivity is adopted, the interference of the heating plate 133 to the screw type temperature probe 134 can be reduced, so that the temperature measured by the temperature probe is closer to the actual temperature of the heat conducting block 130.

It is understood that, in the embodiment of the present application, the heating station main body 100 and the cover plate assembly 200 are not limited to be disposed in any way as long as the mentioned functional parts are provided; the structure can be integrated or assembled by a plurality of components; it may be of regular or irregular shape.

Mounting seat 101 of heating table main body 100:

with continued reference to fig. 3, in some exemplary embodiments, mount 101 includes an isolation ring 110 and a mounting plate 120.

The heat shield ring 110 is illustratively arranged in a circular ring shape, with its annular side walls enclosing a heating stage cavity 111. A first heated block fitting 112, a second heated block fitting 113, and a vacuum aircraft plug 114 are all disposed outside of the insulating ring 110.

As an example, the material of the heat insulation ring 110 is TC4 titanium alloy. Since the thermal conductivity of TC4 is 7.955W/m K, it is only about 50% of that of stainless steel; and the density of TC4 is less than that of stainless steel, the amount of heat transferred by the thermal block 130 to the isolation ring 110 is reduced. Further, the inner surface of the heat insulation ring 110 is polished by silver plating, which can reflect the heat radiated to the periphery by the heating plate 133 and the heat conduction block 130, thereby further reducing the energy transfer to the heat insulation ring 110. On the basis, the load of the ceramic heating plate 133 can be greatly reduced, so that smaller heating power can be used, which is beneficial to reducing temperature overshoot, thereby reducing the risk of sample damage.

The mounting plate 120 is attached to the thermal isolation ring 110 and closes off the top of the heating stage cavity 111. The middle part of mounting panel 120 runs through and has seted up the mounting hole, and mounting panel 120 has still seted up a plurality of counter sink around the mounting hole. Correspondingly, the top of the heat conduction block 130 penetrates the mounting hole with a gap, and the gap between the mounting plate 120 and the top of the heat conduction block 130 is the ventilation channel 121. The side wall of the heat conduction block 130 extends outwards to form two mounting arms, for example, three mounting arms are evenly distributed along the circumferential direction, and the mounting arms are locked in the countersunk holes through fasteners, so that the heat conduction block 130 is mounted on the mounting plate 120.

As an example, the mounting plate 120 is made of quartz. Compared with a metal material, quartz has lower thermal conductivity, and the heat loss of the heat conducting block 130 can be reduced; compared with polytetrafluoroethylene, pvc, acrylic and other materials, quartz has good high temperature resistance, and allows the heat-conducting block 130 to be heated to a higher temperature, for example, up to 400 ℃.

Referring to fig. 4, alternatively, a plurality of communication holes 122 are formed through the top of the mounting base 101 to communicate with the heating stage cavity 111, that is, the mounting plate 120 is formed through the plurality of communication holes 122 to communicate with the heating stage cavity 111. When the cover plate assembly 200 is disposed on the top of the mounting seat 101, the communication hole 122 communicates with the first cover plate cavity 211. The arrangement of the communication hole 122 can reduce the sectional area of the top of the mounting seat 101, thereby reducing the transfer of heat radiated to the heat-conducting block 130, and being beneficial to reducing the low heat loss of the heat-conducting block 130.

Further, the heating device 10 further includes an annular sealing member 300, and the annular sealing member 300 is, for example, an annular sealing ring. The top of the mounting seat 101 is concavely provided with an annular mounting groove 123, i.e. the top of the mounting plate 120 is concavely provided with an annular mounting groove 123 for detachably mounting the annular sealing member 300.

When the cover plate assembly 200 covers the top of the mounting seat 101, the bottom opening of the first cover plate cavity 211 is located inside the annular sealing member 300, and the ventilation channel 121 and the communication hole 122 are located inside the annular sealing member 300, so that the ventilation channel 121 and the communication hole 122 are both communicated with the first cover plate cavity 211.

In the above arrangement, the annular mounting groove 123 is configured to detachably mount the annular sealing member 300, and the top of the annular sealing member 300 is in sealing contact with the bottom of the cover plate assembly 200, so that the top of the mounting seat 101 can be better in sealing fit with the cover plate assembly 200, and the bottom opening of the first cover plate cavity 211, the vent channel 121 and the communication hole 122 can be better isolated from the environment outside the annular sealing member 300. Meanwhile, the provision of the annular mounting groove 123 also enables a reduction in the sectional area of the mounting plate 120 at the top of the mounting seat 101, thereby enabling a reduction in the transfer of heat radiated to the heat conduction block 130.

Regarding the heat conduction block 130 of the heating stage main body 100:

in some exemplary embodiments, the first channel 131 is L-shaped, including a first segment of channel extending in a vertical direction and a second segment of channel extending in a horizontal direction. The first section of channel is arranged close to the top of the heat-conducting block 130, and the top end of the first section of channel penetrates through the top end face of the heat-conducting block 130; the second channel section is disposed near the bottom of the heat conducting block 130, and has one end connected to the bottom end of the first channel section and the other end connected to the first heating stage joint 112 through the connecting pipe 132.

As an example, the material of the heat conduction block 130 is aluminum. Compared with copper, the product of the specific heat capacity and the density of aluminum is smaller than that of copper, namely, the aluminum and the copper in the same volume are heated to a certain temperature, and the heat consumed by the aluminum is smaller. In particular, the inventors have found that copper is easily oxidized at high temperature to form a brittle scale, the scale is easily peeled off, and the peeled scale is easily sucked by the vacuum pump when the first heating stage joint 112 is connected to a negative pressure structure such as a vacuum pump, thereby affecting the life of the vacuum pump; moreover, the oxide scale can pollute the environment of the sample. Aluminum generates a dense oxide film at high temperature, and the oxide film does not fall off, so that the above problems can be effectively avoided.

With respect to the cover plate assembly 200:

continuing to refer to fig. 5 and 6, as an example, the cover plate assembly 200 includes a cover plate seat 201 and a viewing window 230, the viewing window 230 being illustratively a quartz plate.

The cover plate base 201 includes a base bottom plate 220 and a base annular side plate 210. The base annular side plate 210 encloses a first cover cavity 211, and the base bottom plate 220 is connected to the base annular side plate 210. The first cover plate cavity 211 penetrates through the base bottom plate 220 at the bottom of the cover plate assembly 200 to form an observation hole 221, the top of the cover plate assembly 200 is provided with a mounting through hole communicated with the first cover plate cavity 211, and an observation window 230 corresponding to the observation hole 221 is mounted in the mounting through hole.

When the cover plate assembly 200 is covered on the top of the mounting base 101, the observation hole 221 corresponds to the heat conduction block 130, and the ventilation channel 121 and the first channel 131 are both communicated with the first cover plate cavity 211 through the observation hole 221.

In the above technical solution, the observation window 230 corresponds to the observation hole 221, and the annealing process of the sample on the top of the heat conduction block 130 corresponding to the observation hole 221 can be observed. On one hand, the annealing progress of the sample can be conveniently and visually observed, so that the research time is saved; on the other hand, the visualized annealing process can also provide more experimental information for research.

In some exemplary embodiments, the mounting through-hole is circumferentially annularly provided with a mounting step 231. The mounting step 231 includes an annular step side wall 232 and an annular step bottom wall 234, the annular step bottom wall 234 is connected to the inner side of the bottom of the annular step side wall 232; the observation window 230 is provided at the mounting step 231 to close the mounting through-hole. In the above arrangement, the observation window 230 is mounted by providing the mounting step 231, so that the observation window 230 can be better fitted into the cover assembly 200.

Further, an annular sealing ring is connected between at least one of the annular stepped side wall 232 and the annular stepped bottom wall 234 and the observation window 230. The annular seal ring is received in an annular groove formed in the annular step sidewall 232 and the annular step bottom wall 234, for example.

As an example, the annular step side wall 232 is recessed with a side wall groove in which a first annular seal ring 233 is installed. The first annular sealing ring 233 is arranged to play a role in sealing; secondly, the fixing function is provided, and the observation window 230 can be tightly clamped; thirdly, the buffering function is provided, when the temperature rises, due to the fact that the materials of the observation window 230 and the cover plate seat 201 are different, the expansion coefficients are different, when rigid epoxy resin glue is adopted for adhesion, cracks are prone to occurring on the observation window 230 when the observation window 230 is thin, and cracks can be effectively avoided from occurring on the observation window 230 due to the buffering function of the first annular sealing ring 233. The annular step bottom wall 234 is recessed with a bottom wall groove in which a second annular sealing ring 235 is mounted for tight connection with the bottom wall of the observation window 230.

Further, the bottom of the cover plate assembly 200 is provided with an annular protrusion 222, that is, the upper surface of the base plate 220 is protruded with the annular protrusion 222. An annular protrusion 222 is located within the first cover plate cavity 211 and surrounds the viewing aperture 221. The top of the annular protrusion 222 is flush with the annular step bottom wall 234 and is used for matching with the annular step bottom wall 234 to better support the observation window 230, which is beneficial for reducing the thickness of the observation window 230, and the thickness of the observation window 230 can be reduced to about 1.5mm, so that the light transmission of the observation window 230 is better; the minimum working distance required for the objective lens can also be reduced, enabling better viewing.

The annular protrusion 222 is provided with a connecting channel 223 for communicating the inner side and the outer side of the annular protrusion 222, and after the annealing atmosphere gas is introduced through the first cover plate joint 212, the annealing atmosphere gas can be introduced into the inner side cavity of the annular protrusion 222 from the outer side cavity of the annular protrusion 222, so that the annealing atmosphere is provided for the material to be processed at the top of the heat conducting block 130 corresponding to the observation hole 221.

With continued reference to fig. 5 and 6, in some alternative embodiments, the cover assembly 200 further has a second cover cavity 213 therein, and the second cover cavity 213 is opened in the annular side plate 210 of the housing and penetrates the top of the annular side plate 210 of the housing. The lid base 201 further includes a sealing lid 240 for closing the opening of the second lid cavity 213 at the top of the base annular side plate 210.

The outside of the cover plate assembly 200 is further provided with a second cover plate joint 214 communicated with the second cover plate cavity 213, and the second cover plate joint 214 is arranged on the outer wall of the annular side plate. The second cover plate cavity 213 is located outside the first cover plate cavity 211, and the bottom of the cover plate assembly 200 is opened with a second channel 224 communicating with the second cover plate cavity 213.

When the cover plate assembly 200 is disposed on top of the mounting base 101, the second channel 224 corresponds to the top of the mounting base 101, and the top of the mounting base 101 separates the first cover plate cavity 211 from the second cover plate cavity 213. In embodiments where an annular seal 300 is provided between the cover plate assembly 200 and the top of the mount 101, the second channel 224 is located outside of the annular seal 300, separating the first cover plate cavity 211 and the second cover plate cavity 213 by the annular seal 300.

In the above technical solution, the top of the mounting seat 101 separates the first cover plate cavity 211 and the second cover plate cavity 213, so that the first cover plate cavity 211 communicates with the internal cavity of the mounting seat 101, and the second cover plate cavity 213 communicates with the external environment of the mounting seat 101. The second channel 224 corresponds to the top of the mounting seat 101, so that the second channel 224 in the gas in the second cover plate cavity 213 is blown out and then blown to the top of the mounting seat 101 conveniently, the top of the mounting seat 101 can be cooled, and annealing treatment can be better performed.

Optionally, in a cross-section of the cover plate assembly 200, the second channel 224 extends along a circular arc path, and a central angle of the circular arc path is greater than 300 °.

In the above arrangement, the second passage 224 is a circular arc with a large arc, and has a structure similar to a C-shape, and can better correspond to the top of the mounting seat 101 in the axial direction, so that the gas blown to the top of the mounting seat 101 can exert a more sufficient and uniform cooling effect.

Further, in the cross section of the cap assembly 200, the second cap cavity 213 and the sealing cap 240 have a circular arc shape corresponding to the second channel 224; the number of the second cover plate joints 214 is two, and the two second cover plate joints are respectively communicated with two ends of the second cover plate cavity 213 in the extending direction of the circular arc shape, and the arrangement mode can more conveniently provide air sources for the second channels 224.

Correspondingly, the first cover plate joint 212 is disposed between two second cover plate joints 214, which are communicated with the first cover plate cavity 211 through a channel penetrating through the annular side plate 210 of the housing along the radial direction of the annular side plate 210 of the housing.

It is understood that in other embodiments, the second channel 224 is not limited to be disposed, and may be disposed in a plurality of through holes and distributed at intervals along the circumferential direction of the annular side plate 210 of the housing. The second cover cavity 213 is not limited to a specific configuration, and may be a plurality of cavities and may be in a cylindrical shape, for example, and are spaced apart from each other along the circumferential direction of the annular side plate 210 of the housing.

In order to better achieve the installation and thermal insulation of the heating stage body 100, the heating apparatus 10 further includes, as an example, an insulation stage 400.

Referring to fig. 7, the heat insulation platform 400 includes a heat insulation base 410, a side light reflecting structure 420 and a bottom light reflecting structure 430; the heat insulation seat 410 is used for connecting the mounting seat 101, and a heat insulation chamber 411 which is used for communicating with the heating table cavity 111 is concavely arranged at the top of the heat insulation seat 410; the side light reflecting structure 420 is disposed around the sidewall of the insulated chamber 411, and the bottom light reflecting structure 430 is disposed at the bottom of the insulated chamber 411. Optionally, the side light reflecting structure 420 and the bottom light reflecting structure 430 are mirror structures with inner silver-plated layers, and are used for reflecting heat radiation of the heating table main body 100, which is beneficial to reducing heat loss of the heating table main body 100 and heat transferred to the outside.

The present embodiment provides a method for heat-treating a material, which is performed by using the heating apparatus 10 described above, and includes performing the following operations under a preset ambient atmosphere condition, which is provided, for example, by placing the heating apparatus 10 in a glove box.

S1. the material to be treated is placed on top of the heat conducting block 130 and covers the opening of the first channel 131.

S2, the first heating platform joint 112 is connected with a negative pressure, for example, a vacuum pump, so that a negative pressure is generated in the first channel 131 and the material to be processed on the top of the heat conducting block 130 is adsorbed and fixed.

And S3, heating the heat conduction block 130 to a preset temperature to complete the heating treatment of the material to be treated. The material to be processed is, for example, a two-dimensional material, and in the heating process, the heating device is turned on and the heating temperature is set to a specific temperature required for transferring the two-dimensional material, and the preparation of the two-dimensional material heterojunction is started.

After the heat treatment is completed, the heating is stopped and the negative pressure connection of the first heating stage joint 112 is disconnected.

And S4, placing the material to be processed after heating treatment on the top of the heat conducting block 130.

S5, connecting the second heating table joint 113 with negative pressure, connecting the first cover plate joint 212 with an annealing gas source, and connecting the second heating table joint 113 with a vacuum pump for example to realize negative pressure connection; and starting the heating device to set the heating temperature to the specific temperature required by annealing, and starting annealing treatment on the material to be treated.

In this application, adopt heating stage main part 100 to adsorb the material to be treated and carry out heat treatment to adopt heating stage main part 100 and apron subassembly 200 to cooperate and provide specific atmosphere and vacuum degree environment for the material to be treated and carry out annealing treatment, accomplish the heat transfer back to the material, need not to take out the sample from handling the environment and place in vacuum annealing stove annealing separately, the material to be treated can keep being in and predetermine under the environmental atmosphere condition, can effectively reduce the sample and contact the air and the risk of destroying after accomplishing the transfer and before annealing treatment.

In some exemplary embodiments, the heating station body 100 of the heating device 10 is further provided with a three-way structure (not shown), such as a three-way butterfly valve. Two of the connecting ends of the three-way structure are respectively communicated with the first heating table joint 112 and the second heating table joint 113, and the remaining connecting end is used for connecting negative pressure structures such as a vacuum pump, so that a passage communicated with the negative pressure structures can be conveniently switched in the heating treatment and the annealing treatment.

In the embodiment where the cap assembly 200 further has the second cap cavity 213 and the second cap connector 214, in step S5, the method further includes: and connecting the second heating table joint 113 with an ambient air source, so that the ambient air source is blown out from the second channel 224 after being introduced into the second cover plate cavity 213 in the annealing process, and the top of the mounting seat 101 is blown and cooled.

In the embodiment where the cover plate assembly 200 further has the observation window 230, in the step S5, the method further includes: after the annealing process is initiated, the heating apparatus 10 and/or the microscope are adjusted so that the material to be processed is observed from the observation window 230 in the center of the field of view of the microscope, facilitating the observation of the annealing process.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. A heating device, comprising:

the heating table main body comprises a mounting seat and a heat conducting block; a heating table cavity is formed in the mounting seat, and a ventilation channel communicated with the heating table cavity is formed in the top of the mounting seat; a first heating table joint and a second heating table joint which are communicated with the heating table cavity are arranged on the outer side of the mounting seat; the heat conduction block is arranged on the mounting seat, and the top of the heat conduction block is positioned at the top of the mounting seat; a first channel is formed in the heat conducting block, one end of the first channel penetrates through the top end face of the heat conducting block, and a connecting pipeline is connected between the other end of the first channel and the first heating table joint;

the cover plate assembly is arranged on the top of the mounting seat in a covering mode, and a first cover plate cavity is formed between the cover plate assembly and the top of the mounting seat; the vent channel and the first channel are both communicated with the first cover plate cavity; and a first cover plate joint communicated with the first cover plate cavity is arranged on the outer side of the cover plate component.

2. The heating device of claim 1, wherein the first cover plate cavity is opened on the cover plate assembly and penetrates through the bottom of the cover plate assembly, the first cover plate cavity penetrates through the bottom of the cover plate assembly to form a viewing hole, and a viewing window corresponding to the viewing hole is installed on the top of the cover plate assembly;

when the cover plate assembly is covered on the top of the mounting seat, the observation hole corresponds to the heat conduction block, and the ventilation channel and the first channel are communicated with the first cover plate cavity through the observation hole.

3. The heating device of claim 2, wherein the top of the cover plate assembly has a mounting through hole communicating with the first cover plate cavity, and the mounting through hole is circumferentially provided with a mounting step; the mounting step comprises an annular step side wall and an annular step bottom wall, and the annular step bottom wall is connected to the inner side of the bottom of the annular step side wall;

the observation window is arranged on the mounting step to seal the mounting through hole, and an annular sealing ring is connected between at least one of the side wall of the annular step and the bottom wall of the annular step and the observation window.

4. The heating device of claim 3, wherein the bottom of the cover plate assembly is provided with an annular protrusion; the annular bulge is positioned in the first cover plate cavity and surrounds the observation hole; the top of the annular bulge is flush with the bottom wall of the annular step; the annular bulge is provided with a connecting channel for communicating the inner side and the outer side of the annular bulge.

5. The heating device of claim 1, wherein the cover plate assembly further comprises a second cover plate cavity inside, and a second cover plate joint communicated with the second cover plate cavity is arranged on the outer side; the second cover plate cavity is positioned outside the first cover plate cavity, and a second channel communicated with the second cover plate cavity is formed in the bottom of the cover plate assembly;

when the cover plate assembly covers the top of the mounting seat, the second channel corresponds to the top of the mounting seat, and the top of the mounting seat separates the first cover plate cavity from the second cover plate cavity.

6. The heating device of claim 5, wherein, in cross-section of the cover plate assembly, the second channel extends along an arc path having a central angle greater than 300 °.

7. The heating device of claim 5, wherein the vent channel is a vent gap between a top of the heat conducting block and a top of the mounting base; the top of the mounting seat is also provided with a plurality of communicating holes communicated with the heating table cavity in a penetrating way;

when the cover plate assembly is covered on the top of the mounting seat, the communicating hole is communicated with the first cover plate cavity.

8. The heating device of claim 5, wherein the top of the mounting base is recessed with an annular mounting groove for removably mounting an annular sealing member such that when the cover assembly is seated on the top of the mounting base, the top of the annular sealing member sealingly engages the bottom of the cover assembly and separates the first cover cavity from the second cover cavity.

9. The heating device according to any one of claims 1 to 8, wherein the heating table main body further comprises a heating plate and a screw type temperature probe, the heating plate is attached to the bottom end face of the heat conducting block, and the screw type temperature probe is inserted into the heating plate and connected to the bottom of the heat conducting block.

10. The heating device according to any one of claims 1 to 8, further comprising a heat insulation table, wherein the heat insulation table comprises a heat insulation seat, a side surface light reflecting structure and a bottom surface light reflecting structure;

the heat insulation seat is used for being connected with the mounting seat, and a heat insulation cavity communicated with the heating table cavity is concavely arranged at the top of the heat insulation seat; the side reflecting structure is arranged on the side wall of the heat insulation cavity in a surrounding mode, and the bottom reflecting structure is arranged at the bottom of the heat insulation cavity.

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