CN113985950B - High vacuum environment test piece temperature control device - Google Patents
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- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 3
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- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
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Abstract
一种高真空环境试件温度控制装置,其包括真空罐体、用于密封所述真空罐体端部的密封法兰、所述真空罐体内部用于测试工件温度调节控制的热沉、以及与所述热沉和外部控温机组连接的管路。所述真空罐体为卧式圆筒形结构。所述热沉包括底部热沉和环形热沉;所述底部热沉与环形热沉形成放置测试工件的测试腔体。所述测试腔体内侧在热沉表面安装有用于与测试工件接触导热的多组热翼。所述热翼包括两端重叠固定于所述热沉表面的内层热翼片和外层热翼片;所述内层热翼片和外层热翼片均采用两端固定中间悬空凸起的弓形弹性结构。本发明具有适应性好和热传导效率高的有益技术效果。
A high-vacuum environment test piece temperature control device, which includes a vacuum tank, a sealing flange for sealing the end of the vacuum tank, a heat sink inside the vacuum tank for adjusting and controlling the temperature of the test workpiece, and The pipeline connected with the heat sink and the external temperature control unit. The vacuum tank body is a horizontal cylindrical structure. The heat sink includes a bottom heat sink and an annular heat sink; the bottom heat sink and the annular heat sink form a test cavity for placing a test workpiece. A plurality of sets of heat fins for contacting and conducting heat with the test workpiece are installed on the surface of the heat sink inside the test cavity. The heat fins include an inner heat fin and an outer heat fin whose two ends are overlapped and fixed on the surface of the heat sink; arcuate elastic structure. The invention has the beneficial technical effects of good adaptability and high heat conduction efficiency.
Description
技术领域technical field
本发明属于高真空环境测试设备领域,特别涉及一种高真空环境试件温度控制装置。The invention belongs to the field of high-vacuum environment testing equipment, in particular to a high-vacuum environment test piece temperature control device.
背景技术Background technique
近年以来,我国空间站、卫星等空间飞行活动日益复杂,航天器的工作寿命越来越长,空间装备对可靠性提出的要求也越来越高。在压力低于10-7Pa时,在真空环境下工作的活动部件如开关、继电器、连接器等关键电工和电子组件和元器件,在温度和高真空应力作用下,会发生冷焊效应,从而导致航天器机电故障。In recent years, space flight activities such as space stations and satellites in my country have become increasingly complex, the working life of spacecraft has become longer and longer, and the requirements for reliability of space equipment have become higher and higher. When the pressure is lower than 10-7Pa, the moving parts such as switches, relays, connectors and other key electrical and electronic components and components working in a vacuum environment will have a cold welding effect under the action of temperature and high vacuum stress, thus Leading to mechanical and electrical failure of the spacecraft.
当金属固体处于超高真空条件下时,其表面所吸附的气体逸出,在各种有机污染膜解析消失,金属氧化层破裂的条件下,金属表面直接相互接触,此时金属间的摩擦力相较大气条件下的摩擦力会增大数十倍以上。此时,分子便会相互扩散发生不同程度的粘合现象。如果表面达到原子级的清洁程度,在一定的压力负荷下就会产生进一步整体粘着,即引起冷焊。When the metal solid is under ultra-high vacuum conditions, the gas adsorbed on its surface escapes. Under the condition that various organic pollution films disappear and the metal oxide layer is broken, the metal surfaces directly contact each other. At this time, the friction between the metals The friction force under relatively atmospheric conditions will increase by more than ten times. At this time, the molecules will diffuse with each other and bond to different degrees. If the surface is clean at the atomic level, further overall adhesion will occur under a certain pressure load, that is, cold welding will occur.
通过国内外多年的研究,普遍认为影响附着、冷焊的主要因素有:表面清洁度、压力负荷、接触时间、材料性能和温度。Through years of research at home and abroad, it is generally believed that the main factors affecting adhesion and cold welding are: surface cleanliness, pressure load, contact time, material properties and temperature.
高真空冷焊地面模拟试验的真空度选用量级通常在10-7Pa~10-9Pa之间,热沉温度-55℃~90℃。业内认为压力在1×10-7Pa以下的真空被称为超高真空,此时单位体积内的分子数,只有正常大气压的1/1,000,000,000,000。The vacuum degree selected for the high vacuum cold welding ground simulation test is usually between 10-7Pa and 10-9Pa, and the heat sink temperature is -55°C to 90°C. The industry believes that a vacuum with a pressure below 1×10-7Pa is called an ultra-high vacuum. At this time, the number of molecules per unit volume is only 1/1,000,000,000,000 of normal atmospheric pressure.
目前国内可参照的高真空冷焊试验方法最新版标准是“QJ 20422.5-2016航天组件环境试验方法第5部分:真空冷焊试验”,是中华人民共和国航天行业标准。其中附录A(参考件)中对温度控制描述为“条款A5.1.3c)d)真空室内应安装组件加热装置和降温装置(有时用热沉替代)。条款5.1.5试验温度控制系统具有对试验组件温度控制的功能,并有对应的状态显示。具有报警提示、查询和储存功能。”At present, the latest version of the high vacuum cold welding test method that can be referred to in China is "QJ 20422.5-2016 Aerospace Component Environmental Test Method Part 5: Vacuum Cold Welding Test", which is the aerospace industry standard of the People's Republic of China. Among them, the description of temperature control in Appendix A (reference part) is "Article A5.1.3c) d) The vacuum chamber shall install component heating devices and cooling devices (sometimes replaced by heat sinks). Article 5.1.5 The test temperature control system has The function of temperature control of test components, and corresponding status display. It has alarm prompt, query and storage functions."
真空冷焊试验过程概述如下:The vacuum cold welding test process is summarized as follows:
试验前试件应清洗干净,进行无油处理。将样品安装在真空舱内,采用金属密封圈对真空室进行密封,根据试件的外形选择不同的安装方式,可以安装在固定基板上或通过安装法兰固定在相应的装置上,连接好电源线及相关测试信号线,经初步确认密封可靠后开始抽气。抽真空至少达到1×10-7Pa,控温装置热沉达到规定的温度。按规定保持相应的时间,检查试件的性能。Before the test, the specimen should be cleaned and treated without oil. Install the sample in the vacuum chamber, seal the vacuum chamber with a metal sealing ring, choose different installation methods according to the shape of the test piece, it can be installed on the fixed base plate or fixed on the corresponding device through the installation flange, and connect the power supply Lines and related test signal lines, after preliminary confirmation that the seal is reliable, start pumping. The vacuum should be at least 1×10-7Pa, and the heat sink of the temperature control device should reach the specified temperature. Keep the corresponding time according to the regulations, and check the performance of the test piece.
由于在真空环境下热量不能通过对流方式传递,现有试验方法中对真空环境下温度控制主要方式是通过热沉传导或辐射,但大部分试件均为不规律几何外形,不能通过固定装置采用热沉传导,且在真空度小于1×10-7Pa时,试验舱内环境的分子密度极低,辐射效应不但传递热量慢而且难以控制测试工件的温度。试件在试验中不能达到规定的温度条件或是均匀性较差,从而无法实现试验的考核目的。Since heat cannot be transferred by convection in a vacuum environment, the main way to control the temperature in a vacuum environment in the existing test methods is through heat sink conduction or radiation, but most of the test pieces have irregular geometric shapes and cannot be adopted by fixtures. The heat sink is conductive, and when the vacuum degree is less than 1×10-7Pa, the molecular density of the environment in the test chamber is extremely low, and the radiation effect not only transfers heat slowly but also makes it difficult to control the temperature of the test workpiece. The test piece cannot reach the specified temperature conditions or the uniformity is poor during the test, so that the assessment purpose of the test cannot be achieved.
发明内容Contents of the invention
本发明的目的是解决真空冷焊试验过程中试件热传导效率低的问题。The purpose of the invention is to solve the problem of low heat conduction efficiency of a test piece during a vacuum cold welding test.
为了解决上述问题,本发明提出一种高真空环境试件温度控制装置,用于在高真空环境下(真空度小于1×10-7Pa)控制试件温度和改善温度传导均匀性,以解决现有技术中控温不准、均匀性差、效率低的问题。In order to solve the above problems, the present invention proposes a high-vacuum environment test piece temperature control device, which is used to control the temperature of the test piece and improve the uniformity of temperature conduction in a high-vacuum environment (vacuum degree is less than 1×10-7Pa), so as to solve the current problem. There are problems of inaccurate temperature control, poor uniformity and low efficiency in the technology.
所述高真空环境试件温度控制装置,其包括真空罐体、用于密封所述真空罐体端部的密封法兰、所述真空罐体内部用于测试工件温度调节控制的热沉、以及与所述热沉和外部控温机组连接的管路。The high vacuum environment test piece temperature control device includes a vacuum tank body, a sealing flange for sealing the end of the vacuum tank body, a heat sink inside the vacuum tank body for adjusting and controlling the temperature of the test workpiece, and The pipeline connected with the heat sink and the external temperature control unit.
所述外部温控机组为导热油机组,可以实现对测试工件进行-85℃到200℃的温度调控,控制精度能够达到正负0.1摄氏度。The external temperature control unit is a heat transfer oil unit, which can control the temperature of the test workpiece from -85°C to 200°C, and the control accuracy can reach plus or minus 0.1°C.
所述真空罐体为卧式圆筒形结构。The vacuum tank body is a horizontal cylindrical structure.
所述热沉包括底部热沉和环形热沉;所述底部热沉与环形热沉形成放置测试工件的测试腔体。The heat sink includes a bottom heat sink and an annular heat sink; the bottom heat sink and the annular heat sink form a test cavity for placing a test workpiece.
所述测试工件还配套有工件安装盘,所述工件安装盘用于测试与所述测试工件在各种温度和真空条件下发生冷焊的情况,同时所述工件安装盘还具有定位、支撑和导热作用。当需要测试的零件是成组配套且尺寸形状适合所述真空管体的内部空间,就不需要使用工件安装盘;从测试冷焊的实际需求来看,所述工件安装盘的材料是需要与测试工件工作状态时配合零件相同的材料,因此,也可以把工件安装盘视为测试工件的一个组件或附件。The test workpiece is also equipped with a workpiece mounting plate, which is used for testing the conditions of cold welding with the test workpiece under various temperature and vacuum conditions. At the same time, the workpiece mounting plate also has positioning, support and thermal conductivity. When the parts to be tested are matched in groups and the size and shape are suitable for the inner space of the vacuum tube body, there is no need to use the workpiece mounting plate; from the actual needs of testing cold welding, the material of the workpiece mounting plate is required and tested The workpiece is in working condition to match the same material as the part, therefore, the workpiece mounting plate can also be regarded as a component or accessory of the test workpiece.
所述测试腔体内侧在热沉表面安装有用于与测试工件接触导热的多组热翼。A plurality of sets of heat fins for contacting and conducting heat with the test workpiece are installed on the surface of the heat sink inside the test chamber.
所述热翼包括两端重叠固定于所述热沉表面的内层热翼片和外层热翼片;所述内层热翼片和外层热翼片均采用两端固定中间悬空凸起的弓形弹性结构。The heat fins include an inner heat fin and an outer heat fin whose two ends are overlapped and fixed on the surface of the heat sink; arcuate elastic structure.
所述热翼采用铍青铜带制作。The hot fins are fabricated from beryllium bronze strips.
所述内层热翼片和外层热翼片的弓形顶端间隔2~3mm。The arcuate top ends of the inner heat fins and the outer heat fins are separated by 2-3mm.
所述铍青铜带的裁切尺寸为100mm×10mm×0.2m。The cutting size of the beryllium copper strip is 100mm×10mm×0.2m.
所述内层热翼片两端留出6mm长的固定区域以用于与热沉的压紧固定。A 6 mm long fixing area is reserved at both ends of the inner heat fin for compression and fixing with the heat sink.
所述外层热翼片两端留出15mm长的固定区域以用于与热沉的压紧固定。A 15 mm long fixing area is reserved at both ends of the outer heat fin for compression and fixing with the heat sink.
所示内层热翼片和所示外层热翼片端部固定区域的差值S不小于3mm。The difference S between the fixed area at the end of the inner thermal fins and the outer thermal fins is not less than 3 mm.
所述外层热翼片高度A和中间弓形结构的宽度B比值为0.3-0.8。The ratio of the height A of the outer thermal fins to the width B of the middle arched structure is 0.3-0.8.
所述真空罐体上还包括用于真空抽气的连接管道。The vacuum tank body also includes a connecting pipe for vacuum pumping.
与所述真空罐体相连的真空泵抽气系统,其由预抽系统和主抽系统两部分组成,所述预抽系统由一套进口的分子泵和涡旋干泵组成,所述主抽气系统由离子泵和钛升华泵组成。真空保障系统帮助设备获得试验所需要的真空度,主要包括真空泵抽气系统、真空阀门、配套管路及真空测量装置等。The vacuum pump suction system connected to the vacuum tank consists of two parts: a pre-pump system and a main pump system. The pre-pump system consists of a set of imported molecular pumps and a scroll dry pump. The main pump The system consists of an ion pump and a titanium sublimation pump. The vacuum protection system helps the equipment obtain the vacuum degree required for the test, mainly including vacuum pump exhaust system, vacuum valve, supporting pipeline and vacuum measuring device, etc.
所述真空泵抽气系统的温度保障由控温机组配合真空腔内的热沉实现。腔体内部由两组热沉组成,分别是底部热沉和环形热沉。其中底部热沉主要用于大件试验样品,可作为辅助热源。热沉与试件间的热交换通过所述热翼这种弹性导热结构实现,该结构是为解决超高真空环境下温度传导而专门设计的一种特殊结构,能够保证试件导温和均匀性良好。The temperature guarantee of the vacuum pump exhaust system is realized by the temperature control unit in cooperation with the heat sink in the vacuum chamber. The interior of the cavity is composed of two sets of heat sinks, namely the bottom heat sink and the ring heat sink. The bottom heat sink is mainly used for large test samples and can be used as an auxiliary heat source. The heat exchange between the heat sink and the test piece is realized through the elastic heat conduction structure of the heat wing, which is a special structure specially designed to solve the temperature conduction in the ultra-high vacuum environment, and can ensure the uniformity of the heat conduction temperature of the test piece good.
所述热翼具有高强弹性、耐磨性及理想的导温性,同时具有良好的真空性能,在保证导温的同时还不释放气体而影响真空度下降。The hot wings have high elasticity, wear resistance and ideal temperature conduction, and have good vacuum performance at the same time. While ensuring temperature conduction, they do not release gas and affect the decrease of vacuum degree.
所述测试工件与多个热翼弹性接触,导热面积大,效率高,导热热均匀好。最大程度的保证了热沉和试件之间的热量传递,同时不影响舱内的真空度。可以根据真空舱自身尺寸、样件尺寸调整“热翼”的大小,最终实现试验舱内软连接热传导方式。The test workpiece is in elastic contact with a plurality of heat wings, the heat conduction area is large, the efficiency is high, and the heat conduction heat is uniform. The heat transfer between the heat sink and the test piece is guaranteed to the greatest extent without affecting the vacuum degree in the chamber. The size of the "hot wing" can be adjusted according to the size of the vacuum chamber itself and the size of the sample, and finally realize the soft connection heat conduction mode in the test chamber.
所述热翼安装压紧在热沉内壁上,保证其与热沉平整、紧密贴合,从而有效提高热传导效率。将其整体放在真空试验腔内的冷、热试验平台上,通过热沉、试验样品安装盘和试件的温度来验证热传导装置的导温性能。The heat fins are installed and pressed tightly on the inner wall of the heat sink to ensure that they are flat and tightly attached to the heat sink, thereby effectively improving the heat conduction efficiency. Put it as a whole on the cold and hot test platform in the vacuum test chamber, and verify the temperature conduction performance of the heat conduction device through the temperature of the heat sink, test sample mounting plate and test piece.
所述热翼的一端贴近舱内热沉,其另一端是柔性结构,可以随试件的外形结构任意变换,最大程度的与受试件品表面接触,从而将热量更好的传递至受试件品,达到试验条件规定的温度。对于不同体积的样品,可以适当增加或减少“热翼”的数量。对于体积较大的试件,除舱内环形区域的“热翼”可紧贴样品,底部同样可采用安装“热翼”的方式进行控温。采用弹性导热接触可以适应不同尺寸和形状的测试工件,采用接触导热比空间热辐射更加快速高效且容易控制所述测试工件的温度。能够实现对所述测试工件的快速升温或降温,更高精度和更有效率地满足实验对测试工件的温度需求。One end of the heat wing is close to the heat sink in the cabin, and the other end is a flexible structure, which can be changed arbitrarily according to the shape and structure of the test piece, so as to maximize the contact with the surface of the test piece, so as to better transfer heat to the test piece The product reaches the temperature specified in the test conditions. For samples of different volumes, the number of "hot fins" can be appropriately increased or decreased. For larger specimens, except for the "hot wings" in the annular area of the cabin, which can be attached to the sample, the bottom can also be used to control the temperature by installing "hot wings". The use of elastic heat conduction contacts can adapt to test workpieces of different sizes and shapes, and the use of contact heat conduction is faster and more efficient than space heat radiation and can easily control the temperature of the test workpiece. The rapid heating or cooling of the test workpiece can be realized, and the temperature requirements of the experiment on the test workpiece can be met with higher precision and efficiency.
综上所述,本发明具有适应性好和热传导效率高的有益技术效果。In summary, the present invention has beneficial technical effects of good adaptability and high heat conduction efficiency.
附图说明Description of drawings
图1为本发明原理示意图;Fig. 1 is a schematic diagram of the principle of the present invention;
图2为本发明热沉结构剖视图;Fig. 2 is a sectional view of the heat sink structure of the present invention;
图3为本发明热翼结构侧视图;Fig. 3 is a side view of the heat wing structure of the present invention;
图中:1.真空罐体:2.密封法兰;3.测试工件;4.热沉;5.导热机油组;6.管路;7.真空泵抽气系统;8.热翼;9.热翼压条;31.工件安装盘;41.底部热沉;42.环形热沉;71.分子泵;72.涡旋干泵;73.离子泵;74.钛升华泵;75.自增压液氮罐;76.真空阀门;81.内层热翼片;82.外层热翼片;311.支撑法兰。In the figure: 1. Vacuum tank: 2. Sealing flange; 3. Test workpiece; 4. Heat sink; 5. Heat conduction oil unit; 6. Pipeline; 7. Vacuum pump exhaust system; Hot wing layer; 31. Workpiece mounting plate; 41. Bottom heat sink; 42. Ring heat sink; 71. Molecular pump; 72. Vortex dry pump; 73. Ion pump; 74. Titanium sublimation pump; 75. Self-pressurization Liquid nitrogen tank; 76. Vacuum valve; 81. Inner heat fin; 82. Outer heat fin; 311. Support flange.
具体实施方式Detailed ways
下面结合附图1-2和具体实施例对技术方案做进一步说明,以助于理解本发明的内容。The technical solution will be further described below in conjunction with accompanying drawings 1-2 and specific embodiments, so as to help understand the content of the present invention.
如图1所示,所述高真空环境试件温度控制装置,其包括真空罐体1、用于密封所述真空罐体1端部的密封法兰2、所述真空罐体1内部用于测试工件3温度调节控制的热沉4、以及与所述热沉4和导热油机组5连接的管路6。As shown in Figure 1, the temperature control device for the high vacuum environment test piece includes a vacuum tank body 1, a sealing
所述热沉4通过管路与导热油机组5连接,通过导热油机组5将热量传递到热沉4,从而实现对测试工件3的加热或者降温。The
所述真空罐体1与真空泵抽气系统7相连接,真空泵抽气系统7包括预抽系统和主抽系统;所述预抽系统由分子泵71、涡旋干泵72和真空阀门76组成;所述主抽气系统由离子泵73、钛升华泵74和自增压液氮罐75组成。真空泵抽气系统7为设备获得试验所需要的真空度。The vacuum tank body 1 is connected with the vacuum
所述真空罐体1为卧式圆筒形结构。The vacuum tank body 1 is a horizontal cylindrical structure.
如图2所示,所述热沉4包括底部热沉41和环形热沉42;所述底部热沉41与环形热沉42形成放置测试工件的测试腔体。其中底部热沉41主要用于大件试验样品,可作为辅助热源。As shown in FIG. 2 , the
所述测试工件3安装在工件安装盘31内,以测试所述测试工件3与工件安装盘31在多种温度和真空条件下发生冷焊的情况;所述工件安装盘31为圆筒型构件,其内部具有用于测试工件3定位和热传导的支撑法兰311;所述支撑法兰311与测试工件3之间紧密接触并使得测试工件3底部悬空。The
所述测试腔体内侧在热沉4表面安装有用于与工件安装盘31外侧面接触导热的多组热翼8。A plurality of sets of
所述热翼8包括两端重叠固定于所述热沉表面的内层热翼片81和外层热翼片82;所述内层热翼片和外层热翼片均采用两端固定中间悬空凸起的弓形弹性结构。The
如图3所示,所述热翼8用热翼压条9将热翼片8安装压紧在热沉内壁上,保证其与热沉4平整、紧密贴合,从而有效提高热传导效率。As shown in FIG. 3 , the
所述热翼8采用铍青铜带制作。The
所述内层热翼片81和外层热翼片82的弓形顶端间隔2~3mm。The arcuate top ends of the inner
所述铍青铜带的裁切尺寸为100mm×10mm×0.2m。The cutting size of the beryllium copper strip is 100mm×10mm×0.2m.
所述内层热翼片81两端固定区域的长度为6mm长以用于与热沉4的压紧固定。The length of the fixing area at both ends of the
所述外层热翼片两端留出15mm长的固定区域以用于与热沉的压紧固定。A 15 mm long fixing area is reserved at both ends of the outer heat fin for compression and fixing with the heat sink.
所示内层热翼片81和所示外层热翼片82端部固定区域的差值S为9mm。The difference S between the end fixing areas of the
所述外层热翼片高度A和中间弓形结构的宽度B比值为0.45;The ratio of the height A of the outer heat fins to the width B of the middle arched structure is 0.45;
所述真空罐体1上还包括用于真空抽气的连接管道。The vacuum tank body 1 also includes a connecting pipe for vacuum pumping.
所述热沉4与测试工件3间的热交换通过所述热翼8这种弹性导热结构实现,该结构是为解决超高真空环境下温度传导而专门设计的一种特殊结构,能够保证测试工件3的导温和均匀性良好。The heat exchange between the
所述热翼8具有高强弹性、耐磨性及理想的导温性,同时具有良好的真空性能,在保证导温的同时还不释放气体而影响真空度下降。The
所述工件安装盘31与多个热翼8弹性接触,导热面积大,效率高,导热热均匀好。最大程度的保证了热沉4和测试工件3之间的热量传递,同时不影响舱内的真空度。The
以上所述,只公开了本发明的较优应用实例,不能以此限定本发明的范围,凡依此发明专利申请范围及说明内容所做的简单的等效变化与修饰,皆属于本发明专利涵盖的范围。The above only discloses the preferred application examples of the present invention, and cannot limit the scope of the present invention. All simple equivalent changes and modifications made according to the scope of the patent application and the content of the description of this invention belong to the patent of the present invention. range covered.
Claims (7)
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CN201541414U (en) * | 2009-07-28 | 2010-08-04 | 中国科学院西安光学精密机械研究所 | heat sink |
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