CN216779728U

CN216779728U - Cleaning equipment for tubular PECVD (plasma enhanced chemical vapor deposition) furnace tube

Info

Publication number: CN216779728U
Application number: CN202123022783.8U
Authority: CN
Inventors: 杨洋; 薛伟; 黄辉巍
Original assignee: Changzhou Shunfeng Solar Energy Technology Co ltd
Current assignee: Changzhou Shunfeng Solar Energy Technology Co ltd
Priority date: 2021-12-03
Filing date: 2021-12-03
Publication date: 2022-06-21
Anticipated expiration: 2031-12-03

Abstract

The utility model discloses cleaning equipment for a tubular PECVD furnace tube, which has the technical scheme that: comprises two fixed plates, a heating pipe is fixedly sleeved between the two fixed plates, a quartz tube is fixedly arranged inside the heating pipe, the quartz boat is movably arranged in the quartz tube, an air outlet hole is arranged at one side of the heating tube, an air outlet pipe is fixedly arranged in the air outlet hole, a control valve is fixedly arranged on the excircle wall surface of the air outlet pipe, one side of the heating pipe is provided with an installation block, one side of the installation block is provided with a purging component, is used for treating large and small fragments and dust in the furnace pipe by arranging an N2 valve, opening a heating pipe, when the gas source is connected with the N2 valve, the large and small fragment impurities in the furnace tube can be rapidly decomposed by high-temperature heating, the vacuum machine is connected with the vacuum valve, the impurities blown in the furnace tube are extracted, the impurities in small gaps in the furnace tube can be blown easily by gas, and the cleaning effect on the furnace tube is improved.

Description

Cleaning equipment for tubular PECVD (plasma enhanced chemical vapor deposition) furnace tube

Technical Field

The utility model relates to the technical field of solar cell preparation equipment, in particular to cleaning equipment for a tubular PECVD furnace tube.

Background

According to the application number: CN201822197769.3, a chinese patent discloses a fragment cleaning device for a tubular PECVD furnace tube, comprising a longitudinal support member, a scraper, a brush and a first driving member, wherein the scraper is connected to an end of the support member; the hairbrush is rotatably connected with the end part, close to the scraper, of the supporting piece, and the first driving piece is in transmission connection with the hairbrush. The scraper can be used for cleaning larger fragments in the PECVD furnace tube, and the brush capable of rotating automatically can be used for cleaning out fine and broken fragments in the PECVD furnace tube, so that the aim of quickly, efficiently and thoroughly removing silicon wafer fragments in the PECVD furnace tube is fulfilled.

The cleaning equipment for the tubular PECVD furnace tube at present has some defects, such as: the brush is used for cleaning, so that the cleaning effect is poor due to the fact that impurities in small gaps can not be cleaned completely.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects of the prior art, the utility model provides cleaning equipment for a tubular PECVD furnace tube, which solves the problem that impurities in small gaps cannot be cleaned.

The technical purpose of the utility model is realized by the following technical scheme:

a cleaning apparatus for a tubular PECVD furnace tube, comprising: two fixed plates, two fixed cover has connect the heating pipe between the fixed plate, the inside fixed mounting of heating pipe has the quartz capsule, the inside movable mounting of quartz capsule has the quartz boat, one side of heating pipe begins to have the venthole, the inside fixed mounting of venthole has the outlet duct, the excircle wall fixed mounting of outlet duct has the control valve, one side of heating pipe is provided with the installation piece, one side setting of installation piece sweeps the subassembly for big or small piece and dust to in the stove pipe.

Through adopting above-mentioned technical scheme, sweep the subassembly through the setting, when there are impurity and dust in the boiler tube, probably processing the messenger and cause the pollution to article, but the inside clearance of boiler tube is taken trouble and is laboursome, still can not effectual clean up, through sweeping the subassembly, has swiftly cleared up the boiler tube greatly.

Preferably, the purge assembly comprises: the air inlet is formed in one side of the mounting block, an N2 valve is fixedly mounted inside the air inlet, an air suction hole is formed in one side of the mounting block, and a vacuum valve is fixedly mounted inside the air suction hole.

Through adopting above-mentioned technical scheme, through setting up the N2 valve, blow through dust and big or small piece in N2 valve to quartz capsule and the heating tube, blow the back and extract out dust and big or small piece through the vacuum machine, open the heating pipe when sweeping, thereby high temperature long-time sweeping has the dust and big or small piece impurity that utilize in heating pipe and the special trachea to carry out fast decomposition and can be separated totally by effectual taking out.

Preferably, the outer circle wall surface of the vacuum valve is fixedly sleeved with a filter cartridge, a filter screen is fixedly arranged inside the filter cartridge, and a dust collecting box is movably arranged inside the filter cartridge.

Through adopting above-mentioned technical scheme, through setting up the filter screen, when the vacuum machine passes through vacuum valve and extracts in to the quartz capsule, the dust and the small-size piece of extraction probably cause the vacuum machine inside to receive the damage, through the filter screen, filter the small-size piece and the dust that the vacuum machine went out, through falling in the dust-collecting box, make things convenient for the staff to carry out centralized processing to the dust-collecting box in later stage.

Preferably, the first and second liquid crystal display panels are,

three special air holes are formed in one side of the mounting block, special air valves are fixedly mounted inside the three special air holes, special air pipes are fixedly mounted inside the quartz pipes, and the special air pipes and the special air holes are fixedly mounted.

Through adopting above-mentioned technical scheme, through setting up special gas valve, also open special gas valve and let in corresponding gas when sweeping, accomplish the clearance of ventilating of all pipelines, prevented that other pipelines from receiving the pollution.

Preferably, two auxiliary heating pipes are fixedly installed inside the quartz pipe.

By adopting the technical scheme, the auxiliary heating pipe is arranged, the large-size silicon wafer is used in the existing market, the diameter of the furnace tube is gradually increased, so that uneven heating is easy to occur when the quartz tube is heated, and the heating uniformity is improved through the auxiliary heating pipe.

Preferably, the heating pipe is fixedly sleeved with a heat preservation ring, and the heat preservation ring is fixedly connected with the mounting block.

Through adopting above-mentioned technical scheme, through setting up the heat preservation ring, when improving heating pipe rate of heating, prevent to have the place of leaking out when the vacuum is taken out.

In summary, the utility model mainly has the following beneficial effects:

through setting up the N2 valve, open heating pipe and auxiliary heating pipe earlier, improve the temperature in the boiler tube rapidly, being in the same place air supply and N2 valve link together, under the high temperature heating, dust and big or small piece impurity in the boiler tube can decompose fast, are connected vacuum machine and vacuum valve simultaneously, are extracted the impurity of being blown in the boiler tube to gaseous impurity in the tiny gap in the boiler tube that can relax blows, has improved the clean effect to the boiler tube.

Through setting up the cartridge filter, when the vacuum machine was the impurity extraction, can intercept various dust and impurity, prevent that the vacuum machine from being blocked dead to the life of extension vacuum machine.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of a heating tube according to the present invention in a disassembled configuration;

figure 3 is a schematic diagram of the filter tube structure of the present invention.

Reference numerals: 1. a fixing plate; 2. heating a tube; 3. a quartz tube; 4. a quartz boat; 5. an air outlet; 6. an air outlet pipe; 7. mounting blocks; 8. a control valve; 9. an air inlet; 10. an N2 valve; 11. an air exhaust hole; 12. a vacuum valve; 13. a filter cartridge; 14. a filter screen; 15. a dust collecting box; 16. special air holes; 17. a special gas valve; 18. a special air pipe; 19. an auxiliary heating pipe; 20. and (5) a heat preservation ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 and 2, a cleaning apparatus for a tubular PECVD furnace tube includes: two fixed plates 1, the fixed plates 1 are of a rectangular structure, a heating pipe 2 is fixedly sleeved between the two fixed plates 1, a quartz tube 3 is fixedly installed inside the heating pipe 2, a quartz boat 4 is movably installed inside the quartz tube 3, an air outlet 5 is arranged at one side of the heating pipe 2, the air outlet 5 is a circular through hole, an air outlet pipe 6 is fixedly installed inside the air outlet 5, the air outlet pipe 6 is of a circular pipe-shaped structure, a control valve 8 is fixedly installed on the outer circle wall surface of the air outlet pipe 6, an installation block 7 is arranged at one side of the heating pipe 2, the installation block 7 is of a circular block-shaped structure, a purging component is arranged at one side of the installation block 7 and used for purging large and small fragments and dust in the furnace pipe, and by arranging the purging component, when impurities and dust exist in the furnace pipe, the pollution to articles can be caused by processing, but the cleaning of the inside of the furnace pipe is labor-consuming and can not be effectively cleaned, through sweeping the subassembly, having cleared up the boiler tube greatly swiftly, the fixed cover in inside of heating pipe 2 has connect heat preservation ring 20, heat preservation ring 20 and installation piece 7 fixed connection, through setting up heat preservation ring 20, when improving heating pipe 2 heating rate, prevent to have the department of leaking out when the vacuum play is got, the inside fixed mounting of quartz capsule 3 has two auxiliary heating pipes 19, through setting up auxiliary heating pipe 19, current market uses jumbo size silicon chip, the diameter of boiler tube also progressively increases, when making heating quartz capsule 3, inhomogeneous heating appears easily, through auxiliary heating pipe 19, the homogeneity of heating is improved.

Referring to fig. 1, 2, the purge assembly includes: the air inlet 9 is a circular through hole, the air inlet 9 is arranged at one side of the mounting block 7, an N2 valve 10 is fixedly arranged inside the air inlet 9, the N2 valve 10 is an existing structure and is not described herein, an air exhaust hole 11 is arranged at one side of the mounting block 7, the air exhaust hole 11 is a circular through hole, a vacuum valve 12 is fixedly arranged inside the air exhaust hole 11, the vacuum valve 12 is an existing structure and is not described herein, through arranging the N2 valve 10, dust and large and small fragments in the quartz tube 3 and the heating tube 2 are blown up through the N2 valve 10, the dust and the large and small fragments are extracted through a vacuum machine after being blown up, the heating tube 2 is opened during blowing, high-temperature long-time blowing is performed by utilizing the dust and large and small fragment impurities in the heating tube 2 and the special air tube 18 to be rapidly decomposed so as to be effectively pumped away, three special air holes 16 are arranged at one side of the mounting block 7, the special gas valves 17 are fixedly arranged in the three special gas holes 16, the special gas pipes 18 are fixedly arranged in the quartz pipes 3, the special gas pipes 18 and the special gas holes 16 are fixedly arranged, and the special gas valves 17 are arranged to open corresponding gas when purging, so that ventilation and cleaning of all pipelines are achieved, and pollution to other pipelines is prevented.

Referring to fig. 1, fig. 3, the fixed cover of excircle wall of vacuum valve 12 is equipped with cartridge filter 13, cartridge filter 13 is the cylindrical structure, the inside fixed mounting of cartridge filter 13 has filter screen 14, the inside movable mounting of cartridge filter 13 has dust collection box 15, through setting up filter screen 14, when the vacuum machine extracts in to quartz capsule 3 through vacuum valve 12, the dust and the small-size piece of extraction, probably cause the vacuum machine inside to receive the damage, through filter screen 14, small-size piece and the dust of going out the vacuum machine filter, through falling in dust collection box 15, make things convenient for the staff to carry out centralized processing to dust collection box 15 in the later stage.

The working principle is as follows: referring to fig. 1-2, after the furnace tube is used for a long time, a worker connects the gas source with the N2 valve 10, opens the heating tube 2 and the auxiliary heating tube 19 to perform rapid decomposition and simultaneously purge the interior of the furnace tube, the purging time is increased from 50min to 4H, pollution to the graphite boat 4 during normal production due to incomplete purging of the furnace tube is avoided, then the vacuum machine is connected with the vacuum valve 12, after the decomposed impurities in the furnace tube are extracted by the vacuum machine, the furnace tube is cleaned circularly for about 15-20 times, the process is thoroughly cleaned, and after the circulation is finished, the furnace tube is cooled to the standby temperature, and the process is finished.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A cleaning apparatus for a tubular PECVD furnace tube, comprising: two fixed plates (1), two fixed cover has connect heating pipe (2) between fixed plate (1), the inside fixed mounting of heating pipe (2) has quartz capsule (3), the inside movable mounting of quartz capsule (3) has quartz boat (4), one side of heating pipe (2) begins to have venthole (5), the inside fixed mounting of venthole (5) has outlet duct (6), the excircle wall fixed mounting of outlet duct (6) has control valve (8), one side of heating pipe (2) is provided with installation piece (7), one side of installation piece (7) sets up sweeps the subassembly for big or small piece and dust to in the furnace pipe.

2. The purging apparatus of claim 1, wherein the purge assembly comprises: the air inlet structure comprises an air inlet hole (9), wherein the air inlet hole (9) is formed in one side of an installation block (7), an N2 valve (10) is fixedly installed inside the air inlet hole (9), an air suction hole (11) is formed in one side of the installation block (7), and a vacuum valve (12) is fixedly installed inside the air suction hole (11).

3. The cleaning equipment for the tubular PECVD furnace tube according to claim 2, wherein the outer circle wall surface of the vacuum valve (12) is fixedly sleeved with a filter cylinder (13), a filter screen (14) is fixedly arranged in the filter cylinder (13), and a dust collection box (15) is movably arranged in the filter cylinder (13).

4. The cleaning equipment for the tubular PECVD furnace tube according to claim 1, wherein one side of the mounting block (7) is provided with three special air holes (16), special air valves (17) are fixedly mounted inside the three special air holes (16), a special air tube (18) is fixedly mounted inside the quartz tube (3), and the special air tube (18) and the special air holes (16) are fixedly mounted.

5. The cleaning apparatus for a tubular PECVD furnace tube as in claim 1, wherein two auxiliary heating tubes (19) are fixedly arranged inside the quartz tube (3).

6. The cleaning equipment for the tubular PECVD furnace tube according to claim 1, wherein a heat-insulating ring (20) is fixedly sleeved inside the heating tube (2), and the heat-insulating ring (20) is fixedly connected with the mounting block (7).