CN216778333U - Exhaust gas filtering device - Google Patents
Exhaust gas filtering device Download PDFInfo
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- CN216778333U CN216778333U CN202122327721.1U CN202122327721U CN216778333U CN 216778333 U CN216778333 U CN 216778333U CN 202122327721 U CN202122327721 U CN 202122327721U CN 216778333 U CN216778333 U CN 216778333U
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- exhaust gas
- filtering device
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- filter
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Abstract
The utility model discloses an exhaust gas filtering device which comprises an inlet flow passage, a filtering chamber, an outlet flow passage and a plurality of exhaust gas filtering plates. The filter chamber includes a transverse gas flow passage connected to the inlet flow passage. The outlet flow passage is communicated with the transverse gas flow passage. The plurality of exhaust gas filter plates are arranged in the transverse gas flow channel, and each exhaust gas filter plate comprises a gas inflow surface and a gas outflow surface. In any two adjacent filter plates, the gas inlet face of one filter plate faces the gas outlet face of the other filter plate.
Description
Technical Field
The present invention relates to an exhaust gas filtering device, and more particularly, to an exhaust gas filtering device capable of improving gas filtering efficiency and space utilization efficiency.
Background
In a semiconductor manufacturing process, a large amount of exhaust gas is generated, and the exhaust gas is collected and filtered to prevent impurities from being emitted to the outside to cause pollution. As shown in fig. 1, when the exhaust gas filtering device 900 of the prior art collects the exhaust gas, the exhaust gas flows into the exhaust gas filtering device 900 from the inlet flow passage 910 and flows along the bent gas flow passage 921 formed by the plurality of partition plates 920. The filter plates 930 provided on the bent gas flow passage 921 filter the exhaust gas. The shower head 960 sprays liquid to the exhaust gas to keep the exhaust gas and the filter plate 930 wet, thereby improving the efficiency of filtration. The processing liquid tank 940, 940a collects the liquid ejected from the ejection head 960. The demister 950 will suitably absorb moisture to avoid too high humidity of the exhaust gas. The fan 970 provided in the outlet flow path 980 draws the exhaust gas so that the exhaust gas meanders in the bent gas flow path 921 along the gas flow direction X to flow to the outlet flow path 980. Thus, the exhaust gas can pass through the filter 930 to be filtered smoothly.
However, in the prior art exhaust gas filtering device 900, when the flow directions of the liquid sprayed by the nozzle 960 and the exhaust gas are opposite, the flow velocity of the exhaust gas can be most effectively reduced to improve the filtering effect, so the gas flow path 921 is designed to be bent to allow the exhaust gas to flow back and forth up and down to change the flow direction; however, the bent gas flow passage 921 reduces the efficiency of using space, and the exhaust gas may have a pressure loss when changing the flow direction. Therefore, there is a need for a new exhaust gas filtering device that can improve the above problems.
SUMMERY OF THE UTILITY MODEL
The main object of the present invention is to provide an exhaust gas filtering apparatus which improves gas filtering efficiency and improves space utilization efficiency.
To achieve the above object, an exhaust gas filtering device of the present invention includes an inlet flow passage, a filtering chamber, an outlet flow passage, and a plurality of exhaust gas filtering plates. The filter chamber includes a transverse gas flow passage connected to the inlet flow passage. The outlet flow passage is communicated with the transverse gas flow passage. The plurality of exhaust gas filter plates are arranged in the transverse gas flow channel, and each exhaust gas filter plate comprises a gas inflow surface and a gas outflow surface. In any two adjacent filter plates, the gas inlet face of one filter plate faces the gas outlet face of the other filter plate.
According to an embodiment of the present invention, the exhaust gas filtering apparatus further includes: a plurality of flexible adsorption plates made of flexible and adsorptive materials; and the plurality of wave plates are connected with the plurality of flexible adsorption plates by an adhesive, the plurality of flexible adsorption plates and the plurality of wave plates are staggered and connected with each other, each wave plate comprises a plurality of bending sheets, the plurality of bending sheets are connected in pairs to form a wave shape, and a plurality of triangular structures are formed between the plurality of bending sheets and the plurality of flexible adsorption plates.
According to an embodiment of the present invention, the exhaust gas filtering apparatus further includes: a plurality of flexible adsorption plates made of flexible and adsorptive materials; and the plurality of wave plates are connected with the plurality of flexible adsorption plates, the plurality of wave plates are connected in pairs, the plurality of flexible adsorption plates are arranged between any two connected wave plates, each wave plate comprises a plurality of bending pieces, the plurality of bending pieces are connected in pairs and form a wave shape, and a plurality of triangular structures are formed between the plurality of bending pieces and the plurality of flexible adsorption plates.
According to an embodiment of the present invention, the exhaust gas filtering apparatus further includes: a plurality of flexible adsorption plates made of flexible and adsorptive materials; and the plurality of waved plates are connected with the plurality of flexible adsorption plates, the plurality of flexible adsorption plates are connected in pairs, the plurality of waved plates are arranged between any two flexible adsorption plates which are connected, each waved plate comprises a plurality of bending pieces, the plurality of bending pieces are connected in pairs and form a wave shape, and a plurality of triangular structures are formed between the plurality of bending pieces and the plurality of flexible adsorption plates.
According to an embodiment of the utility model, wherein the filter chamber further comprises a top housing and a plurality of bottom housings, the lateral gas flow passages are located between the top housing and the plurality of bottom housings.
According to an embodiment of the utility model, the plurality of exhaust gas filter panels connects the top housing and the plurality of bottom housings.
According to an embodiment of the present invention, the exhaust gas filtering device further includes at least one treating liquid tank, and the treating liquid tank is located below the transverse gas flow channel.
According to an embodiment of the utility model, the exhaust gas filtering device further comprises at least one demister, which connects the top housing and one of the bottom housings and is arranged in the transverse gas flow channel.
According to an embodiment of the utility model, the demister is directed towards the gas outflow side of the one of the filter panels.
According to an embodiment of the present invention, the exhaust gas filtering device further includes a plurality of nozzles, and the plurality of nozzles are disposed in the transverse gas flow passage.
According to an embodiment of the utility model, a plurality of spray heads is used for spraying liquid to the plurality of exhaust gas filter plates.
According to an embodiment of the present invention, the exhaust gas filtering device further includes a blower disposed in the outlet flow channel.
According to an embodiment of the present invention, the number of the processing liquid tanks is plural, and a bottom housing separates any two adjacent processing liquid tanks.
Drawings
Fig. 1 is a schematic view of a prior art exhaust gas filtering device.
FIG. 2 is a schematic view of an exhaust gas filtering device according to an embodiment of the present invention.
FIG. 3A is a schematic view of an exhaust gas filter panel according to an embodiment of the utility model.
FIG. 3B is a schematic view of an exhaust gas filter panel according to an embodiment of the utility model.
FIG. 3C is a schematic view of an exhaust gas filter panel according to an embodiment of the present invention.
FIG. 4 is an enlarged view of a portion of an exhaust gas filter plate according to an embodiment of the present invention.
Fig. 5 is an exploded perspective view of a flexible suction plate and a wave plate according to an embodiment of the present invention.
Reference numerals
The prior art is as follows:
exhaust gas filtering device 900
Treatment liquid tank 940, 940a
Draught fan 970
Direction of gas flow X
The utility model comprises the following steps:
exhaust gas filter device 1
Transverse gas flow channel 21
Top shell 22
Exhaust gas filter plate 30
Bending sheet 341
Spray head 60
Direction of gas flow A, B
Detailed Description
In order to make the aforementioned and other objects, features and advantages of the utility model more comprehensible, preferred embodiments accompanied with figures are described below.
Referring to fig. 2, an exhaust gas filtering device according to an embodiment of the present invention is described. FIG. 2 is a schematic view of an exhaust gas filtering device according to an embodiment of the present invention. Fig. 3A, 3B and 3C are schematic views of the exhaust gas filter plate according to different embodiments of the present invention, respectively. FIG. 4 is an enlarged view of a portion of an exhaust gas filter plate according to an embodiment of the present invention. Fig. 5 is an exploded perspective view of a flexible suction plate and a wave plate according to an embodiment of the present invention.
As shown in fig. 2, in an embodiment of the present invention, the exhaust gas filtering device 1 can improve gas filtering performance and improve space utilization efficiency. The exhaust gas filtering apparatus 1 includes an inlet flow passage 10, a filtering chamber 20, four exhaust gas filtering plates 30, two treating liquid tanks 40, 40a, two demister plates 50, a plurality of spray heads 60, a fan 70, and an outlet flow passage 80.
In an embodiment of the present invention, the inlet flow channel 10 is a long flow channel having three air inlets for the waste gas to enter, and the bottom of the inlet flow channel 10 is communicated with the filtering chamber 20. However, the number of the air inlets is not limited to three, and can be increased or decreased according to design requirements.
In one embodiment of the present invention, the filter chamber 20 is configured to receive the exhaust gas flowing from the inlet flow passage 10 and filter the exhaust gas in the filter chamber 20. The filter chamber 20 comprises a transverse gas flow passage 21, a top housing 22 and a plurality of bottom housings 23, 23 a. The top housing 22 is located at the top of the filter chamber 20. A plurality of bottom housings 23, 23a are located at the bottom of the filter chamber 20. The transverse gas flow channel 21 is a transverse flow channel between the top housing 22 and the plurality of bottom housings 23, 23a, and the exhaust gas can flow transversely in the gas flow direction B in the transverse gas flow channel 21. Because the transverse gas flow channel 21 has no bent return channel structure, the space utilization efficiency can be improved, and the space for omitting the return channel structure can be planned to be provided with an additional waste gas filter plate 30 so as to further increase the filtering efficiency; further, the exhaust gas in the lateral gas flow passage 21 flows only laterally in the gas flow direction B and does not flow while turning, so that the pressure loss can be reduced.
In one embodiment of the present invention, four exhaust gas filtering plates 30 are provided to filter impurities in the exhaust gas flowing in the lateral direction, and the four exhaust gas filtering plates 30 are disposed in parallel in the lateral gas flow passage 21 and connect the top case 22 and the plurality of bottom cases 23, 23 a. Each exhaust gas filter plate 30 comprises a gas inlet face 31 and a gas outlet face 32. In any two adjacent exhaust gas filter plates 30, the gas inflow surface 31 of one exhaust gas filter plate 30 faces the gas outflow surface 32 of the other exhaust gas filter plate 30, so that when the exhaust gas flows out from the gas outflow surface 32 along the gas flow direction B, the exhaust gas can directly flow to the gas inflow surface 31 of the adjacent exhaust gas filter plate 30 for re-filtration, thereby improving the filtration efficiency; in addition, the four parallel exhaust gas filter plates 30 can be arranged in a manner of increasing the contact area with the exhaust gas and reducing the air flow velocity, so that the filtering efficiency can be further improved. However, the number of the exhaust gas filter plates 30 is not limited to four, and may be increased or decreased according to design requirements.
In one embodiment of the present invention, the exhaust filter panel 30 is conveniently custom sized and shaped. Therefore, the exhaust gas filtering plate 30 further includes a plurality of flexible absorbing plates 33a, a plurality of corrugated plates 34a, and an adhesive 36 a.
In one embodiment of the present invention, the flexible absorption plate 33a is used for absorbing, absorbing or decomposing impurities in the exhaust gas for filtration, and the flexible absorption plate 33a is made of a flexible and absorptive material, such as polypropylene (PP) fiber cloth, polyphenylene sulfide (PPs, such as produced by Chevron Phillips Chemical company
) A fiber cloth, or an activated carbon fiber cloth, including but not limited to woven fabric (weaves) and non-woven fabric (nonwovens) made of fibers containing the materials (i.e., PP, PPs, activated carbon, etc.).
In an embodiment of the utility model, referring to fig. 4, 5 and 3A, the adhesive 36 is coated on both sides of the flexible absorption plate 33A by a roller. The corrugated plates 34a are connected to the flexible absorbing plates 33a in a stacked manner by means of an adhesive 36. The plurality of flexible adsorption plates 33a and the plurality of waved plates 34a are alternately arranged and connected to each other. The wavy plate 34a includes a plurality of bending pieces 341, and the plurality of bending pieces 341 are connected two by two to form a wavy shape. A plurality of air passages of the triangular structure 35 are formed between the plurality of bent pieces 341 and the connected flexible adsorption plate 33 a. The exhaust gas can flow through the air passages of the triangular structures 35, and when the exhaust gas touches the flexible adsorption plate 33a, the impurities in the exhaust gas are absorbed, adsorbed or decomposed by the flexible adsorption plate 33 a.
In an embodiment of the present invention, referring to fig. 5 and 3B, a plurality of waved plates 34B are connected two by two. The plurality of flexible absorption plates 33b are disposed between any two wave plates 34b connected to each other. When the plurality of flexible absorbing plates 33b are disposed between any two of the connected corrugated plates 34b, the user can apply pressure to the connected corrugated plates 34b to laminate the connected corrugated plates 34b and clamp the flexible absorbing plates 33, so that the exhaust filter plate 30 has a cubic structure similar to the exhaust filter plate 30 shown in fig. 2 and 4.
In an embodiment of the utility model, referring to fig. 5 and 3C, a plurality of flexible absorption plates 33C are connected two by two. The plurality of corrugated plates 34c are disposed between any two flexible absorption plates 33c connected to each other. When the plurality of corrugated plates 34c are disposed between any two connected flexible absorption plates 33c, the user can apply pressure to the connected flexible absorption plates 33c to laminate the connected flexible absorption plates 33c and clamp the corrugated plates 34c, so that the exhaust filter plate 30 also has a cubic structure similar to the exhaust filter plate 30 shown in fig. 2 and 4.
In an embodiment of the present invention, a user may stack and connect any number of flexible absorption plates 33 and wave plates 34 in a staggered manner according to his or her needs to form the off-gas filter plates 30 with different thicknesses, for example, only one flexible absorption plate 33 and one wave plate 34 may be stacked and connected to each other to form the off-gas filter plate 30. The user can also cut the stacked flexible absorbing plates 33 and wave plates 34 to form the shape of the wastegate filter plate 30.
In one embodiment of the present invention, the two processing liquid tanks 40, 40a are used for containing the processing liquid ejected from the plurality of nozzles 60. Two tanks 40, 40a are located below the transverse gas channel 21, wherein a bottom housing 23a separates two adjacent tanks 40, 40 a. However, the number of the processing baths 40, 40a is not limited to two, and can be increased or decreased according to design requirements.
In one embodiment of the present invention, the two defogging plates 50 are made of water-absorbing material (such as sponge) for removing excess moisture from the exhaust gas to control the humidity of the exhaust gas. The respective demister plates 50 connect the top casing 22 and the bottom casings 23, 23a and are provided in the transverse gas flow path 21. The demister 50 faces the gas outlet face 32 of one of the filter plates 30 to remove moisture from the filtered exhaust gas. However, the number of the defogging plates 50 is not limited to two, and may be increased or decreased according to design requirements.
In an embodiment of the present invention, a plurality of spray heads 60 are disposed in the transverse gas flow passage 21, and the plurality of spray heads 60 are used for horizontally spraying the mist-state liquid to the plurality of exhaust gas filter plates 30, so that the exhaust gas filter plates 30 are effectively kept wet, thereby improving the efficiency of filtering the exhaust gas. The excess liquid sprayed from the plurality of spray heads 60 flows into the processing liquid tanks 40, 40 a. In addition, since the two treating liquid tanks 40, 40a are separated by the bottom housing 23a, the plurality of spray nozzles 60 can be designed to spray different liquids, for example, the spray nozzle 60 in the left half is designed to spray acid liquid, the spray nozzle 60 in the right half sprays alkali liquid, the acid liquid will flow into one treating liquid tank 40, and the alkali liquid will flow into the other treating liquid tank 40a, so as to avoid the different liquids from contaminating each other, thereby increasing the utilization efficiency of the liquids, and the liquids can be recycled for subsequent recycling, further reducing the maintenance cost.
In an embodiment of the present invention, the outlet channel 80 is connected to the transverse gas channel 21, and the outlet channel 80 is used for allowing the filtered exhaust gas to flow out to the outside. A fan 70 is disposed in the outlet flow passage 80, and the fan 70 is configured to generate a suction force to drive the exhaust gas from the transverse gas flow passage 21 to the outlet flow passage 80.
Before the exhaust filtering device 1 filters the exhaust, firstly, the plurality of spraying nozzles 60 spray the liquid to the plurality of exhaust filter panels 30, so that the exhaust filter panels 30 are kept wet to improve the efficiency of filtering the exhaust, and the excess liquid flows into the treating liquid tanks 40, 40 a. Then, when the exhaust gas filtering device 1 starts filtering the exhaust gas, the exhaust gas flows in from the air inlet of the inlet flow passage 10 and flows into the filtering chamber 20 from the bottom of the inlet flow passage 10 along the gas flow direction a. After entering the filter chamber 20, the exhaust gas will flow transversely in the transverse gas flow channel 21 along the gas flow direction B and pass through the two exhaust gas filter plates 30, and the two exhaust gas filter plates 30 will filter the impurities in the exhaust gas; the exhaust gas then continues to flow transversely in the gas flow direction B and through the demister plates 50 to remove moisture; the exhaust gas then continues to flow transversely in the gas flow direction B and through the two further exhaust gas filter plates 30 and the further demister plate 50 to re-filter the impurities in the exhaust gas and remove moisture; finally, the suction force of the fan 70 drives the exhaust gas after being filtered for a plurality of times to flow from the transverse gas flow passage 21 to the outlet flow passage 80 and then to be discharged to the outside.
By means of the design of the waste gas filtering device 1, the space of a return channel structure can be saved, the use efficiency of the space is improved, and the space of the return channel structure is saved and is designed to be provided with an additional waste gas filtering plate, so that the filtering efficiency is further increased; the waste gas in the transverse gas flow channel only flows transversely and does not flow in a turning way, so that the pressure loss can be reduced; the parallel exhaust gas filter plates can increase the contact area with exhaust gas and slow down the air flow speed, so that the filtering efficiency can be further improved. The shower nozzle can make the waste gas filter effectively keep moist to promote the efficiency of filtering waste gas, and the unnecessary liquid that the shower nozzle sprayed can flow into different processing cistern respectively, can avoid different liquid to pollute each other, with the availability factor that increases liquid, and liquid still can supply follow-up recovery cycle to use, further reduces the maintenance cost.
The present invention shows features different from the prior art in terms of the purpose, means and effect. It should be noted that the above-mentioned embodiments are merely for illustrative purposes, and the scope of the present invention is not limited to the above-mentioned embodiments but only by the appended claims.
Claims (10)
1. An exhaust gas filtering device, comprising:
an inlet flow passage;
a filter chamber including a transverse gas flow passage and communicating with the inlet flow passage;
an outlet flow passage communicated with the transverse gas flow passage; and
polylith exhaust gas filter locates this horizontal gas flow way, and each exhaust gas filter includes:
a gas inflow surface; and
a gas outflow surface;
wherein in any two adjacent filter panels, the gas inflow face of one filter panel faces the gas outflow face of the other filter panel;
the exhaust gas filtering device further includes:
a plurality of flexible adsorption plates made of flexible and adsorptive materials; and
the plurality of corrugated plates are connected with the plurality of flexible adsorption plates by an adhesive, the plurality of flexible adsorption plates and the plurality of corrugated plates are arranged in a staggered mode and connected with each other, each corrugated plate comprises a plurality of bending pieces, the plurality of bending pieces are connected in pairs to form a wave shape, and a plurality of triangular structures are formed between the plurality of bending pieces and the plurality of flexible adsorption plates;
or the exhaust gas filtering device further comprises:
a plurality of flexible adsorption plates made of flexible and adsorptive materials; and
the plurality of corrugated plates are connected with the plurality of flexible adsorption plates, the plurality of corrugated plates are connected in pairs, the plurality of flexible adsorption plates are arranged between any two connected corrugated plates, each corrugated plate comprises a plurality of bending sheets, the plurality of bending sheets are connected in pairs to form a wave shape, and a plurality of triangular structures are formed between the plurality of bending sheets and the plurality of flexible adsorption plates;
or the exhaust gas filtering device further comprises:
a plurality of flexible adsorption plates made of flexible and adsorptive materials; and
the polylith wave plate is connected this polylith compliance adsorption plate, and two liang link to each other of this polylith compliance adsorption plate, and this polylith wave plate sets up between two consecutive compliance adsorption plates, and each wave plate includes the polylith piece of buckling, and two liang of connections of this polylith piece of buckling form the wave type, form a plurality of triangle-shaped structures between this polylith piece of buckling and this polylith compliance adsorption plate.
2. The exhaust gas filtering device of claim 1, wherein the filter chamber further comprises a top housing and a plurality of bottom housings, the transverse gas flow passages being located between the top housing and the plurality of bottom housings.
3. The exhaust gas filtering device according to claim 2, wherein the plurality of exhaust gas filter panels connect the top housing and the plurality of bottom housings.
4. The exhaust gas filtering device according to claim 3, wherein the exhaust gas filtering device further comprises at least one treating fluid bath, the at least one treating fluid bath being located below the transverse gas flow path.
5. The exhaust gas filtering device according to claim 4, wherein the exhaust gas filtering device further comprises at least one demister, the at least one demister connecting the top housing and one of the bottom housings and being disposed in the transverse gas flow path.
6. The exhaust gas filtering device according to claim 5, wherein the at least one demister plate faces the gas outflow surface of the one of the filter plates.
7. The exhaust gas filtering device according to claim 6, wherein the exhaust gas filtering device further comprises a plurality of shower heads, the plurality of shower heads being disposed in the transverse gas flow passage.
8. The exhaust gas filtering device according to claim 7, wherein the plurality of spray heads are adapted to spray liquid onto the plurality of filter panels.
9. The exhaust gas filtering device according to claim 8, wherein the exhaust gas filtering device further comprises a fan disposed in the outlet flow passage.
10. The exhaust gas filtering device according to claim 9, wherein the at least one treating liquid tank is plural in number, and wherein a bottom housing separates any two adjacent treating liquid tanks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122327721.1U CN216778333U (en) | 2021-09-24 | 2021-09-24 | Exhaust gas filtering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122327721.1U CN216778333U (en) | 2021-09-24 | 2021-09-24 | Exhaust gas filtering device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216778333U true CN216778333U (en) | 2022-06-21 |
Family
ID=81998848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122327721.1U Active CN216778333U (en) | 2021-09-24 | 2021-09-24 | Exhaust gas filtering device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216778333U (en) |
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2021
- 2021-09-24 CN CN202122327721.1U patent/CN216778333U/en active Active
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