CN216738627U

CN216738627U - Heat insulation device

Info

Publication number: CN216738627U
Application number: CN202122518545.XU
Authority: CN
Inventors: 王培业
Original assignee: Yuze Semiconductor Yunnan Co ltd
Current assignee: Yunnan Yuze Semiconductor Co ltd
Priority date: 2021-10-19
Filing date: 2021-10-19
Publication date: 2022-06-14
Anticipated expiration: 2031-10-19

Abstract

The utility model provides a heat insulation device which comprises a heat insulation plate, a connecting rod and a connector, wherein the heat insulation plate and the connector are respectively arranged at two ends of the connecting rod, the connector is used for being connected with a lifting mechanism of a material melting device, so that the heat insulation plate is positioned between a water-cooling screen of the material melting device and a crucible, and the heat insulation plate is used for blocking heat convection between the crucible and the water-cooling screen. The heat insulation device can improve the material melting speed of the material melting device.

Description

Heat insulation device

Technical Field

The utility model relates to a heating furnace, in particular to a heat insulation device.

Background

In the conventional RCZ monocrystalline silicon drawing process, the service life of a single crucible can reach more than 300h, even more, and the number of drawn silicon rods is about 5-7. After the single crystal furnace is shut down and is disassembled clearly, feeding can be carried out, a certain amount of silicon material can be filled into the quartz crucible at the moment, the quartz crucible is heated after evacuation and pressurization, the silicon material in the crucible is melted, after the silicon material which is filled in the crucible for the first time is melted, the quartz crucible is continuously fed into the quartz crucible through the quartz feeding cylinder for multiple times, and finally, the feeding process is completed when the silicon material is fed to the feeding limit of the crucible.

Taking the 32-inch thermal field as the most common thermal field at present, after the silicon material in the crucible is completely melted, the total charging amount of the crucible is about 650kg, and the initial charging amount of the crucible is about 350 kg. In the crucible initial charging and material melting process, the single crystal furnace has a temperature rise process, and the whole process lasts for about 1-2 hours, so the initial charging and material melting efficiency is lower than the secondary charging and material melting efficiency. At present, the initial charging and material melting efficiency is about 50kg/h, and the secondary charging and material melting efficiency is about 70 kg/h. The method is especially important for shortening the whole material melting time, improving the material melting efficiency and improving the initial material melting efficiency.

In the current thermal field, in order to improve the pulling speed of the single crystal, a water-cooling screen is designed and installed in a single crystal furnace. The water-cooling screen is continuously communicated with cooling water, the whole water-cooling screen and the peripheral temperature of the water-cooling screen are integrally lower, and the water-cooling screen can quickly absorb the temperature in the single crystal furnace in the material melting process, so that the temperature in the single crystal furnace is lower under the same power condition, and the initial material charging efficiency is greatly influenced.

Disclosure of Invention

The embodiment of the utility model provides a heat insulation device, which at least solves the problem that excessive heat is taken away by a water cooling screen in the related technology.

According to an embodiment of the utility model, the heat insulation device comprises a heat insulation plate, a connecting rod and a connector, wherein the heat insulation plate and the connector are respectively arranged at two ends of the connecting rod, the connector is used for being connected to a lifting mechanism of a material melting device, so that the heat insulation plate is positioned between a water screen of the material melting device and a crucible, and the heat insulation plate is used for blocking heat convection between the crucible and the water screen.

Further, the connector is connected to the chuck of the lifting mechanism, the connector is provided with an internal thread, and the internal thread is matched with the external thread of the chuck.

Further, the heat insulation device further comprises a screw plug, the screw plug is fixed at one end of the connecting rod, and the heat insulation plate is detachably connected to the screw plug.

Furthermore, the heat insulating plate is circular, the water-cooling screen comprises a lower opening which is close to one end of the crucible, the lower opening is in a circular ring shape, and the diameter of the heat insulating plate is 20-30 mm smaller than the inner diameter of the lower opening.

Has the advantages that:

when the material melting device is used for primarily charging materials, the heat insulation plate is arranged between the crucible and the water-cooling screen, so that the heat insulation plate can prevent the convection of low temperature in the water-cooling screen and high temperature near the crucible, the heat in the crucible taken away by the water-cooling screen is greatly reduced, and the primarily charging efficiency of the material melting device is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not limit the utility model. In the drawings:

FIG. 1 is a schematic cross-sectional view of a heat insulation device disposed in a material melting device according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of the thermal shield apparatus shown in FIG. 1.

The names of the parts represented by numbers or letters in the drawings are as follows:

100. a material melting device; 10. a crucible; 30. a water-cooled screen; 50. a thermal insulation device; 52. a heat insulation plate; 54. a connecting rod; 56. a connector; 58. a plug screw; 70. a lifting mechanism; 71. and (4) a clamping head.

Detailed Description

The utility model will be described in detail hereinafter with reference to the accompanying drawings in conjunction with embodiments. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.

It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.

Referring to fig. 1 and 2, an embodiment of the utility model provides a heat insulation device 50. For being placed in the melting device 100. The material melting device 100 comprises a crucible 10 and a water screen 30. The water screen 30 is provided above the crucible 10. The insulation 50 includes insulation panels 52. The heat shield 52 is disposed between the crucible 10 and the water screen 30. The thermal shield 52 serves to block thermal convection between the crucible 10 and the water screen 30.

The crucible 10 and the water screen 30 may be of an industry-wide design and will not be described in detail herein.

The melting device 100 further comprises a lifting mechanism 70. The pulling mechanism 70 includes a collet 71. The heat shield 50 includes a heat shield 52, a connecting rod 54, and a connecting head 56. The heat insulation plate 52 and the connector 56 are respectively disposed at two ends of the connecting rod 54. The connector 56 is connected to the collet 70. The lifting mechanism 70 can control the heat insulation device 50 to be lifted up and down so that the heat insulation plate 52 is positioned between the crucible 10 and the water screen 30.

In at least one embodiment, the connector 56 is provided with internal threads that mate with external threads of the collet 70.

In at least one embodiment, the heat shield 52 is circular and the water screen 30 includes a lower opening near one end of the crucible, the lower opening being circular. The diameter of the heat insulation plate 52 is 20 to 30 millimeters smaller than the inner diameter of the lower opening of the water-cooling screen. Too large a heat shield 52 tends to block the passage of gases during pressurization, and too small a heat shield 52 can impair the ability to block thermal convection between the crucible 10 and the water screen 30.

In at least one embodiment, the insulation apparatus 50 further includes a plug screw 58, the plug screw 58 is fixed to one end of the connecting rod 54, and the insulation board 52 is detachably connected to the plug screw 58. It is understood that the heat shield 52 and the plug screw 58 may be connected by a screw or a snap fit.

The heat insulation device 50 is made of a material with a small thermal field conductivity coefficient, such as a carbon-carbon composite material, which can withstand a high temperature of 1450 ℃ or higher during use, and does not deform, drop slag or pollute the silicon material at the high temperature.

As a concrete use scenario illustrates, in a 32-inch thermal field, the initial charging weight is about 350kg, the initial charging efficiency is 50kg/h, and the total time of initial charging (charging when a small amount of solid is needed in a crucible) is about 6.5 h. By using the heat insulation device 50, under the condition of the same power and the same initial charging material weight, the initial charging material efficiency is improved to 55kg/h, the time consumption is shortened to 5.8h, the initial charging material time is shortened to 0.7 h/furnace, and the initial charging material time is reduced by 10.77%.

The service life of a single crucible is calculated according to 300h, and the number of furnaces for initially charging materials per month of a single furnace is as follows: 30 (days) × 24 (h/day)/300 (oven/h) =2.4 ovens/month; with the use of the insulation 50, a single furnace can save time: 2.4 (oven/month) × 0.7 (h/oven) =1.68 (h/month). According to the unit yield of 150 kg/day, the capacity of each furnace can be increased every month: 1.68 (h/month)/30 (days/month) × 150 (kg/day)/24 (h/day) =0.35 kg/day. By using the scheme of the heat insulation device 50, the yield per unit can be improved by 0.35 kg/day. For example, 126 tons of crystal bars can be produced per year according to 1000 furnaces.

are only preferred embodiments of the present invention, it should be noted that, as will be apparent to those skilled in the art, numerous changes and modifications can be made without departing from the principles of the utility model, and such changes and modifications are to be considered within the scope of the utility model.

Claims

1. A thermal insulation device, characterized by: including heat insulating board, connecting rod and connector, the heat insulating board reaches the connector is located respectively the both ends of connecting rod, the connector is used for connecting in the mechanism of carrying of changing the material device, so that the heat insulating board is located between the water-cooling screen and the crucible of changing the material device, the heat insulating board is used for blockking the crucible with heat convection between the water-cooling screen.

2. The thermal insulation apparatus of claim 1, wherein: the connector connect in the chuck of pulling mechanism, the connector is equipped with the internal thread, the internal thread with the external screw thread phase-match of chuck.

3. The thermal insulation apparatus of claim 1, wherein: the heat insulation device further comprises a plug screw, the plug screw is fixed at one end of the connecting rod, and the heat insulation plate is detachably connected to the plug screw.

4. The thermal insulation apparatus of claim 1, wherein: the heat insulating plate is circular, the water-cooling screen is including being located near the end opening of crucible one end, the end opening is the ring dress, the heat insulating plate diameter is than the end opening internal diameter is little 20 to 30 millimeters.