CN216731734U - Telescopic ultra-precise air-flotation moving and rotating platform - Google Patents
Telescopic ultra-precise air-flotation moving and rotating platform Download PDFInfo
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- CN216731734U CN216731734U CN202122288956.4U CN202122288956U CN216731734U CN 216731734 U CN216731734 U CN 216731734U CN 202122288956 U CN202122288956 U CN 202122288956U CN 216731734 U CN216731734 U CN 216731734U
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Abstract
The utility model discloses a telescopic ultra-precise air floating moving and rotating platform, which comprises a granite base, wherein through holes are formed in four corners of the granite base, anti-collision gaskets are arranged at the upper ends of the through holes, telescopic rods penetrate through each through hole, the lower end of each telescopic rod is embedded in a movable groove of a bottom column, each telescopic rod is connected with a driving general control device through a signal wire, a mounting plate is arranged between two corresponding telescopic rods on each side, a first air floating moving mechanism is arranged on each mounting plate on each side, a second air floating moving mechanism is arranged between the first air floating moving mechanisms on the two sides, a workbench is arranged on the second air floating moving mechanism, the telescopic rods can drive the first air floating mechanism and the second air floating mechanism, the workbench can move up and down, the first air floating mechanism can move back and forth, and the second air floating mechanism can move left and right, thereby realizing precise positioning and precise movement of the object carrying.
Description
Technical Field
The utility model relates to the technical field of air-floating motion platforms, in particular to a telescopic ultra-precise air-floating moving rotary platform.
Background
The air-float motion platform is one of the key parts in the precision machinery, and provides an object carrying platform capable of realizing precision positioning and precision motion for the fields of microlithography, numerical control processing, biotechnology, IC packaging equipment, nanometer surface topography measurement and the like; the application of more important parts in advanced electronic manufacturing equipment, such as a chip mounter of a photoetching machine and the like, a high-performance motion platform is a main working mechanism of the equipment; in the prior art, air bearings used for movement are all clamped in sliding blocks, but the structural connection is not stable enough in the movement process; the worktable for fixing the workpiece can only move front and back, left and right, and cannot drive the workpiece to carry out lifting adjustment.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a telescopic ultra-precise air floating moving rotary platform to solve the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a retractable's ultra-precise air supporting removes rotary platform, includes the granite base, four corners of granite base all are equipped with the through-hole, the upper end of through-hole is equipped with the crashproof liner, the lower extreme of through-hole is equipped with the foundation, every all run through the telescopic link in the through-hole, every the lower extreme of telescopic link all inlays in the movable slot of foundation, every the telescopic link is all through the signal line connection drive total controlling device, the drive total controlling device is fixed in granite base below, every side be equipped with the mounting panel between two corresponding telescopic links, every side all be equipped with first air supporting moving mechanism, both sides on the mounting panel be equipped with second air supporting moving mechanism between the first air supporting moving mechanism, be equipped with the workstation on the second air supporting moving mechanism.
Preferably, each side of the first air-bearing moving mechanism comprises two first supporting blocks, the two first supporting blocks are respectively fixed on two sides of the mounting plate, a first sliding block is fixed between the two first supporting blocks, and a first air-bearing is sleeved on the first sliding block;
every side all be equipped with first tow chain on the mounting panel of first cunning of piece side, first linear electric motor is being connected to first tow chain, first connecting plate is connected to first linear electric motor, one side at first air bearing is fixed to first connecting plate, first air bearing's opposite side is equipped with first fixed plate, both sides first fixed plate sets up relatively, both sides be fixed with the backup pad between the first fixed plate.
Preferably, the second air-floating moving mechanism comprises two second sliding blocks, two ends of each second sliding block are respectively arranged on the supporting plate, a second air-floating bearing is sleeved on each second sliding block, and a workbench is fixed between the two second air-floating bearings;
and a second drag chain is further arranged on the supporting plate and connected with a second linear motor, the second linear motor is connected with a second connecting plate, and the other end of the second connecting plate is connected with one end of a second air bearing on one side.
Preferably, the workstation includes workstation base and table surface, be equipped with the rotating electrical machines in the workstation base, the rotating electrical machines is connecting table surface, the rotating electrical machines both sides are equipped with auxiliary bearing, one side the auxiliary bearing lower extreme of rotating electrical machines is equipped with walks the gas pocket, it communicates with each other with workstation base outer wall to walk the gas pocket, table surface and rotating electrical machines handing-over department are equipped with the grating, the table surface upper end is equipped with a plurality of mounting holes.
Preferably, the first air bearing and the second air bearing are consistent in structure and comprise through holes, two air grooves are formed in the inner wall of each side of each through hole, and air holes are formed in the two sides of each air groove.
Compared with the prior art, the utility model has the beneficial effects that:
the telescopic type moving device is simple in structure and novel in design, the special four telescopic rods can drive the first air floatation mechanism and the second air floatation mechanism and the workbench to move up and down, corresponding heights can be adjusted according to workpieces of different specifications and models through telescopic movement, meanwhile, the special first air floatation mechanism can move back and forth, and the second air floatation mechanism can move left and right, so that precise positioning and precise moving loading are realized;
the anti-collision liner can effectively prevent the bottom of the first air floating mechanism from colliding with the granite base when the telescopic rod is stretched;
according to the utility model, a closed sleeve structure is adopted between the air bearing and the sliding block, the through hole is formed in the middle of the air bearing, and the sliding block penetrates through the through hole, so that the air bearing is sleeved on the sliding block, and the stability during sliding can be improved by adopting the structure; in addition, the inner wall of the through hole of the air bearing is also provided with an air groove and an air hole, so that the friction between the air bearing and the sliding block can be reduced, and the smoothness during movement is increased; the workbench can rotate by 360 degrees, and can be adjusted in multiple angles and multiple directions while the workpiece is ensured to move forwards, backwards, leftwards and rightwards.
Drawings
FIG. 1 is a schematic front view of the overall structure of the present invention;
FIG. 2 is a schematic cross-sectional view of a granite base according to the present invention;
FIG. 3 is a schematic top view of the overall structure of the present invention;
FIG. 4 is a schematic cross-sectional view of a worktable according to the present invention;
FIG. 5 is a schematic view of an air bearing structure according to the present invention;
FIG. 6 is a schematic cross-sectional view of an air bearing according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, a retractable ultra-precise air-floating moving and rotating platform comprises a granite base, wherein through holes are formed in four corners of the granite base 1, and an anti-collision gasket 11 is arranged at the upper ends of the through holes and used for preventing the bottom of a first air-floating mechanism from colliding with the granite base when a retractable rod is retracted; the lower ends of the through holes are provided with bottom posts 12, each through hole is internally penetrated by a telescopic rod 13, the lower end of each telescopic rod 13 is embedded in a movable groove 121 of the bottom post 12, so that the telescopic rods can be automatically stretched in the movable grooves, each telescopic rod 13 is connected with a driving master control device 131 through a signal wire, the driving master control device 131 is fixed below a granite base 1, after the driving master control device is started, four telescopic rods can automatically and reciprocally stretch and retract together, a mounting plate 132 is arranged between two corresponding telescopic rods 13 on each side, a first air floating moving mechanism 3 is arranged on the mounting plate 132 on each side, a second air floating moving mechanism 4 is arranged between the first air floating moving mechanisms 3 on two sides, a working platform 5 is arranged on the second air floating moving mechanism 4, so that the first air floating mechanism and the second air floating mechanism can be driven by the four telescopic rods when moving, and the table moves up and down together.
In this embodiment, each first air-bearing moving mechanism 3 includes two first supporting blocks 32, the two first supporting blocks 32 are respectively fixed to two sides of the mounting plate 132, a first sliding block 33 is fixed between the two first supporting blocks 32, a first air-bearing 331 is sleeved on the first sliding block 33, and a closed sleeving structure is adopted between the air-bearing and the sliding block, so that the first air-bearing can slide on the first sliding block back and forth;
the mounting plate 31 on the side of each first sliding block 33 is provided with a first drag chain 34, the first drag chain 34 is connected with a first linear motor 341, the first drag chain can be operated by starting the first linear motor, the first drag chain drives the first linear motor to move together in the transmission process of the first drag chain, the first linear motor 341 is connected with a first connecting plate 342, the first connecting plate 342 is fixed on one side of the first air bearing 331, so that the first air bearing can automatically slide on the first sliding block, the other side of the first air bearing 331 is provided with a first fixing plate 332, the first fixing plates 332 on the two sides are oppositely arranged, and a support plate 333 is fixed between the first fixing plates 332 on the two sides; when the first air bearing moves, the first fixing plate on the other side of the first air bearing and the supporting plate between the first fixing plates can move together to move forwards or backwards.
In this embodiment, the second air-floating moving mechanism 4 includes two second sliding blocks 41, two ends of each second sliding block 41 are respectively disposed on the support plate 333, each second sliding block 41 is sleeved with a second air-floating bearing 411, and the second air-floating bearing can slide left and right on the second sliding block; a workbench 5 is fixed between the two second air bearings 411, and when the second air bearings move, the workbench is driven to move together;
a second drag chain 42 is further arranged on the support plate 333, the second drag chain 42 is connected with a second linear motor 421, the second linear motor 421 is connected with a second connecting plate 422, and the other end of the second connecting plate 422 is connected with one end of a second air bearing 411 on one side;
in the above embodiment, the second linear motor is started to drive the second tow chain to transmit, when the second tow chain runs, the second linear motor moves along with the second tow chain, so as to drive the second connecting plate to move leftwards or rightwards together, thereby realizing the movement of the second air bearing, and when the second air bearing slides leftwards and rightwards under the drive of the second linear motor, the second air bearing also drives the workbench between the second air bearings to move leftwards and rightwards.
In this embodiment, the working table 5 includes a working table base 51 and a working table 52, a rotating motor 511 is disposed in the working table base 51, the rotating motor 511 is connected to the working table 52, the working table can be driven to rotate by the rotating motor, auxiliary bearings 512 are disposed on two sides of the rotating motor 511, and the auxiliary bearings are used for assisting the rotation of the rotating motor, so as to improve the stability during rotation; one side the auxiliary bearing 512 lower extreme of rotating electrical machines 511 is equipped with walks gas pocket 513, walk that gas pocket 513 communicates with each other with workstation base 51 outer wall, should walk the gas pocket through the design, and gas gets into the back, can effectively reduce the friction between auxiliary bearing and the rotating electrical machines, increases the smooth degree when rotatory, table surface 52 and rotating electrical machines 511 handing-over department are equipped with grating 53, and the grating is used for the location of work piece, table surface 52 upper end is equipped with a plurality of mounting holes 521, and the mounting hole is used for fixed work piece.
In this embodiment, the first air bearing and the second air bearing have the same structure and include through holes, two air grooves are formed in the inner wall of each side of each through hole, and air holes are formed in the two sides of each air groove; the through hole is formed in the middle of the air bearing, and the sliding block penetrates through the through hole, so that the air bearing is sleeved on the sliding block; and the inner wall of the through hole of the air bearing is also provided with an air groove and an air hole, so that the friction between the air bearing and the sliding block can be reduced, and the smoothness during movement is increased.
The working principle is as follows: firstly, the platform is installed on a processing device, then a workpiece to be processed is installed on a working table surface, then a first linear motor and a second linear motor are started, the first air floating mechanism and the second air floating mechanism are driven to move front and back and left and right, so that the accurate position of the working table is adjusted, a rotating motor is started again, the working table surface can be driven to rotate through the rotating motor, the angle position required by the workpiece is adjusted, a driving master control device is started again, the whole body is driven to move upwards, the workpiece can be moved upwards, the processing height is adjusted, and the workpiece is made to be close to the processing device for processing.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a retractable's ultra-precise air supporting removes rotary platform, includes granite base (1), its characterized in that: four corners of the granite base (1) are provided with through holes, the upper ends of the through holes are provided with anti-collision gaskets (11), the lower ends of the through holes are provided with bottom posts (12), a telescopic rod (13) penetrates through each through hole, the lower end of each telescopic rod (13) is embedded in a movable groove (121) of each bottom post (12), each telescopic rod (13) is connected with a driving master control device (131) through a signal wire, the drive master control device (131) is fixed below a granite base (1), each side is provided with a mounting plate (132) between two corresponding telescopic rods (13), each side is provided with a first air floatation moving mechanism (3) on the mounting plate (132), two sides are provided with a second air floatation moving mechanism (4) between the first air floatation moving mechanisms (3), and the second air floatation moving mechanism (4) is provided with a workbench (5).
2. The retractable ultra-precise air-float mobile rotary platform as claimed in claim 1, wherein: the first air-floating moving mechanism (3) on each side comprises two first supporting blocks (32), the two first supporting blocks (32) are respectively fixed on two sides of the mounting plate (132), a first sliding block (33) is fixed between the two first supporting blocks (32), and a first air-floating bearing (331) is sleeved on the first sliding block (33);
the mounting plate (132) on the side edge of the first sliding block (33) on each side is provided with a first drag chain (34), the first drag chain (34) is connected with a first linear motor (341), the first linear motor (341) is connected with a first connecting plate (342), the first connecting plate (342) is fixed on one side of a first air bearing (331), the other side of the first air bearing (331) is provided with a first fixing plate (332), the first fixing plates (332) on two sides are oppositely arranged, and a support plate (333) is fixed between the first fixing plates (332) on two sides.
3. The retractable ultra-precise air-float mobile rotary platform as claimed in claim 1, wherein: the second air-floating moving mechanism (4) comprises two second sliding blocks (41), two ends of each second sliding block (41) are respectively arranged on a support plate (333), each second sliding block (41) is sleeved with a second air-floating bearing (411), and a workbench (5) is fixed between the two second air-floating bearings (411);
the supporting plate (333) is further provided with a second drag chain (42), the second drag chain (42) is connected with a second linear motor (421), the second linear motor (421) is connected with a second connecting plate (422), and the other end of the second connecting plate (422) is connected with one end of a second air bearing (411) on one side of the second connecting plate.
4. The retractable ultra-precise air-float mobile rotary platform as claimed in claim 1, wherein: workstation (5) are including workstation base (51) and table surface (52), be equipped with rotating electrical machines (511) in workstation base (51), rotating electrical machines (511) are connecting table surface (52), rotating electrical machines (511) both sides are equipped with auxiliary bearing (512), one side auxiliary bearing (512) lower extreme of rotating electrical machines (511) is equipped with walks gas pocket (513), walk that gas pocket (513) communicate with each other with workstation base (51) outer wall, table surface (52) and rotating electrical machines (511) handing-over department are equipped with grating (53), table surface (52) upper end is equipped with a plurality of mounting holes (521).
5. The retractable ultra-precise air-float mobile rotary platform as claimed in claim 2, wherein: the first air bearing (331) and the second air bearing (411) are consistent in structure and comprise through holes (2), two air grooves (21) are formed in the inner wall of each side of each through hole (2), and air holes (22) are formed in the two sides of each air groove (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122288956.4U CN216731734U (en) | 2021-09-22 | 2021-09-22 | Telescopic ultra-precise air-flotation moving and rotating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122288956.4U CN216731734U (en) | 2021-09-22 | 2021-09-22 | Telescopic ultra-precise air-flotation moving and rotating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216731734U true CN216731734U (en) | 2022-06-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122288956.4U Active CN216731734U (en) | 2021-09-22 | 2021-09-22 | Telescopic ultra-precise air-flotation moving and rotating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216731734U (en) |
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2021
- 2021-09-22 CN CN202122288956.4U patent/CN216731734U/en active Active
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| TR01 | Transfer of patent right |
Effective date of registration: 20221111 Address after: 1168 Jinqiao Road, Nantong Hi tech Industrial Development Zone, Jiangsu Province, 226000 Patentee after: Jiangsu Zhunxin Precision Technology Co.,Ltd. Address before: 226000 No. 270, Jinqiao West Road, high tech Zone, Nantong City, Jiangsu Province Patentee before: JIANGSU ZUNSION AUTOMATION TECHNOLOGY Co.,Ltd. |