CN216696833U - Ultraviolet imaging objective lens system with long working distance - Google Patents

Ultraviolet imaging objective lens system with long working distance Download PDF

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Publication number
CN216696833U
CN216696833U CN202123030027.XU CN202123030027U CN216696833U CN 216696833 U CN216696833 U CN 216696833U CN 202123030027 U CN202123030027 U CN 202123030027U CN 216696833 U CN216696833 U CN 216696833U
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lens
plano
convex
concave
convex lens
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周朋朋
管桦
陈邵龙
孙伟
周志强
黄垚
高克林
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Institute of Precision Measurement Science and Technology Innovation of CAS
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Institute of Precision Measurement Science and Technology Innovation of CAS
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Abstract

The utility model discloses an ultraviolet imaging objective lens system with long working distance, which comprises a lens sleeve, and further comprises a positive meniscus lens, a first plano-convex lens, a double convex lens, a plano-concave lens and a second plano-convex lens which are sequentially arranged in the lens sleeve. Antireflection films are evaporated on the two surfaces of the positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens and the second plano-convex lens. The element of the utility model is easy to obtain, process and manufacture, easy to process with high precision, long working distance and small stray light.

Description

Ultraviolet imaging objective lens system with long working distance
Technical Field
The utility model relates to an imaging objective system based on a spherical mirror, mainly used for Be+And (4) collecting and imaging the spontaneous ion radiation ultraviolet fluorescence. The working distance of the experimental novel objective system is 67.6mm, and 313.1nm antireflection film is evaporated on two surfaces of all lenses, so that the experimental novel objective system is particularly practical and Be+Remote fluorescence collection and imaging in an ionic research system.
Background
The trapping of ions is realized by combining alternating current and direct current voltages, and background gas and laser cooling can be isolated. Today, different trapping ion systems, e.g. Be+,Mg+,Ca+,Yb+And the method is widely applied to laser spectrum, quantum computation and quantum information, and promotes the development of fundamental physics, quantum physics, particle physics and the like. In the research based on these systems, information of ion position, motion state and quantum state needs to be detected through fluorescence collection of ion excited radiation. The objective system for fluorescence collection and imaging is therefore a very critical component in such studies.
The simplest collection and imaging system is to use a simple spherical convex lens to focus the ionizing radiation fluorescence. However, the spherical mirror has large aberration and small numerical value space, and the fluorescence passes through the vacuum window sheet and the spherical mirror in the vacuum system, so that the imaging quality is poor and the resolution is low. One of the solutions is to use an aspherical mirror with a corresponding focal length, which can obtain high resolution imaging and a large numerical aperture by high order aberration correction. Aspherical mirrors have the disadvantage that their focal length is generally short, requiring close proximity to the object being imaged, and are not suitable for splitting fluorescent light. In addition to simple lenticular imaging methods, microscope objectives are also one of the items commonly used in the field. The microscope objective has the characteristics of short focal length, large field of view, small volume, infinite conjugate imaging and the like. However, the working distance is generally less than 20mm, and the imaging lens cannot be placed in a vacuum chamber during use, so that an imaging lens with equal proportion is generally required to be used for pre-stage imaging and then is amplified through a microscope objective lens. The two-stage structure reduces the performance of the microscope objective and increases the system replication system.
SUMMERY OF THE UTILITY MODEL
Aiming at the problems of large imaging aberration, small numerical aperture, complex microscope objective system, short working distance and high cost of the traditional spherical mirror, the utility model provides the ultraviolet imaging objective with long working distance by optimizing the focal length and the distance of the lens based on the aberration correction theory of the spherical mirror, and can Be suitable for being used for the ultraviolet imaging objective based on Be+Quantum physics experiment of ion 313nm wavelength fluorescence imaging.
In order to test the above objects, the present invention is realized by the following technical solutions:
the ultraviolet imaging objective lens system with long working distance comprises a lens sleeve, and further comprises a positive meniscus lens, a first plano-convex lens, a double convex lens, a plano-concave lens and a second plano-convex lens which are sequentially arranged in the lens sleeve.
Antireflection films are evaporated on the two surfaces of the positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens and the second plano-convex lens.
The antireflection wavelength of the antireflection film described above was 313 nm.
The refractive index of the positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens, and the second plano-convex lens described above for 313nm fluorescence was 1.458.
The positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens, and the second plano-convex lens as described above are coaxially disposed.
The two surfaces of the positive meniscus lens are respectively a convex surface and a concave surface;
the two surfaces of the first plano-convex lens are respectively a plane and a convex surface;
the two surfaces of the biconvex lens are convex surfaces respectively;
the two surfaces of the plano-concave lens are respectively a plane and a concave surface;
the two surfaces of the second plano-convex lens are respectively a plane and a convex surface.
The lens sleeve is internally provided with the first lens clamping ring, the second lens clamping ring, the third lens clamping ring, the fourth lens clamping ring, the fifth lens clamping ring and the sixth lens clamping ring in sequence, the positive meniscus lens, the first plano-convex lens and the double convex lens are clamped between the first lens clamping ring and the second lens clamping ring, the plane of the first plano-convex lens is tangent with the convex surface of the positive meniscus lens, the convex surface of the double convex lens is tangent with the convex surface of the first plano-convex lens,
the plano-concave lens is clamped between the third lens clamping ring and the fourth lens clamping ring,
the second plano-convex lens is clamped between the fifth lens clamping ring and the sixth lens clamping ring.
The positive meniscus lens and the first plano-convex lens as described above have a central thickness of 7.84mm,
the central thickness of the lenticular lens is 6.54mm,
the central thickness of the plano-concave lens is 2.5mm,
the center distance between the concave surface of the plano-concave lens and the convex surface of the biconvex lens was 14.77mm,
the central thickness of the second plano-convex lens is 3.7mm,
the distance between the plane of the second plano-convex lens and the plane of the plano-concave lens was 51mm,
the concave and convex radii of curvature of the positive meniscus lens are-46.53 mm and-135.25 mm respectively,
the curvature radius of the convex surface of the first plano-convex lens is-69.01 mm;
the curvature radiuses of two convex surfaces of the biconvex lens are 182.99mm and-182.99 mm respectively;
the curvature radius of the concave surface of the plano-concave lens is-68.85 mm;
the curvature radius of the convex surface of the second plano-convex lens is-460.1 mm;
the positive meniscus lens, the first plano-convex lens, the biconvex lens, the plano-concave lens and the second plano-convex lens are made of fused quartz.
As described above, the first lens snap ring, the second lens snap ring, the third lens snap ring, the fourth lens snap ring, the fifth lens snap ring and the sixth lens snap ring are circumferentially provided with external threads adapted to the internal threads in the lens sleeve.
Compared with the prior art, the utility model has the following beneficial effects:
1. the spherical mirror adopted by the utility model is a standard positive meniscus lens with 150mm focal length, a biconvex lens with 200mm focal length, a first plano-convex lens with 150mm focal length and a plano-concave lens with-200 mm focal length. The material of the material is easy to obtain and process and manufacture,
2. the spherical mirror adopted by the utility model has simple curved surface function and is easy to process with high precision.
3. The utility model has long working distance, namely the distance between the surface of the lens sleeve and the imaging object is 67.6 mm.
4. The utility model adopts aberration correction principle, has high imaging resolution, and the corresponding spatial frequency of the OTF module value is 110lp/mm when the OTF module value is 0.2.
5. The utility model adopts aberration correction principle, the imaging of paraxial object is close to diffraction limit, and the Airy spot is 8.8 microns.
6. The positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens and the second plano-convex lens are 2-inch spherical mirrors, the potential field is large, and the NA of an object space reaches 0.27.
7. The positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens and the second plano-convex lens are coated with 313nm antireflection film and lens sleeves by evaporation, black oxidation treatment is carried out, and stray light is small.
8. The second plano-convex lens of the utility model adopts a plano-convex lens with a focal length of 1000mm, so that the paraxial magnification of the imaging system is 14.7 times, and the angular magnification of the imaging system is 0.31 time.
9. The utility model can realize different magnifications by selecting lenses with different focal lengths as the second plano-convex lens.
10. In practical application of the utility model, the fluorescent light radiated by the point light source passes through the positive meniscus lens, the first plano-convex lens, the double convex lens and the plano-concave lens to become parallel light, so that the distance between the plano-concave lens and the second plano-convex lens can be freely adjusted.
11. The utility model adds the plane beam splitter between the plano-concave lens and the second plano-convex lens, and can realize the purpose of fluorescent beam splitting for different experiments under the condition of not changing a propagation light path.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a cross-sectional view taken along line a-a of fig. 1.
Fig. 3 is a schematic diagram of an embodiment of the present invention.
Fig. 4 is a charge coupled device imaging in an embodiment of the utility model.
Figure 5 is an MTF curve for an imaging system with the detector of the present invention on-axis.
Fig. 6 is an optimized axial aberration curve according to the present invention.
FIG. 7 is a Seidel aberration diagram of the optimized optical system of the present invention.
In the figure: 1. the lens comprises a lens sleeve, 2, a first lens clamping ring, 3, a positive meniscus lens, 4, a first plano-convex lens, 5, a double convex lens, 6, a second lens clamping ring, 7, a third lens clamping ring, 8, a plano-concave lens, 9, a fourth lens clamping ring, 10, a fifth lens clamping ring, 11, a first plano-convex lens, 12 and a sixth lens clamping ring.
13、Be+Ion 14, vacuum chamber 15, objective system 16, charge coupled device.
Detailed Description
To facilitate the understanding and practice of the present invention by those of ordinary skill in the art, the following discussion is directed to Be+The present invention will be described in further detail with reference to examples of ion fluorescence imaging experiments, it being understood that the examples described herein are for the purpose of illustration and explanation and are not intended to limit the scope of the present invention.
As shown in fig. 1-2, the long-working-distance ultraviolet imaging objective lens system includes a lens sleeve 1, and further includes a positive meniscus lens 3, a first plano-convex lens 4, a double-convex lens 5, a plano-concave lens 8, and a second plano-convex lens 11, which are sequentially disposed in the lens sleeve 1. The two surfaces of the positive meniscus lens 3 are respectively a convex surface and a concave surface; the two surfaces of the first plano-convex lens 4 are respectively a plane and a convex surface; the two surfaces of the biconvex lens 5 are convex surfaces respectively; the two surfaces of the plano-concave lens 8 are respectively a plane and a concave surface; the two surfaces of the second plano-convex lens 11 are respectively a plane surface and a convex surface. Antireflection films are evaporated on the two surfaces of the positive meniscus lens 3, the first plano-convex lens 4, the double convex lens 5, the plano-concave lens 8 and the second plano-convex lens 11.
First lens snap ring 2 has set gradually in lens sleeve 1, second lens snap ring 6, third lens snap ring 7, fourth lens snap ring 9, fifth lens snap ring 10 and sixth lens snap ring 12, positive meniscus lens 3, first plano-convex lens 4 and biconvex lens 5 card are established at first lens snap ring 2, between second lens snap ring 6, first plano-convex lens 4 plane is tangent with positive meniscus lens 3's convex surface, biconvex lens 5's convex surface is tangent with first plano-convex lens 4's convex surface, plano-concave lens 8 card is established between third lens snap ring 7 and fourth lens snap ring 9, second plano-convex lens 11 card is established between fifth lens snap ring 10 and sixth lens snap ring 12. First lens snap ring 2, second lens snap ring 6, third lens snap ring 7, fourth lens snap ring 9, fifth lens snap ring 10 and sixth lens snap ring 12 all are provided with the external screw thread with the internal thread adaptation in the lens sleeve 1 circumference.
In this embodiment, the lens sleeve 1 has an outer diameter of 56mm, an inside SM 2 thread, and a thickness of 100 mm. The inner diameter of the first lens clamping ring to the sixth lens clamping ring is 48mm, the circumferential direction of the first lens clamping ring to the sixth lens clamping ring is SM 2 threads, and the thickness of the first lens clamping ring to the sixth lens clamping ring is 2 mm.
The center thickness of the positive meniscus lens 3 and the first plano-convex lens 4 was 7.84mm, the center thickness of the double convex lens 5 was 6.54mm, the center thickness of the plano-concave lens 8 was 2.5mm, the center distance between the concave surface of the plano-concave lens 8 and the convex surface of the double convex lens 5 was 14.77mm, the center thickness of the second plano-convex lens 11 was 3.7mm,
the distance between the plane of the second plano-convex lens 11 and the plane of the plano-concave lens 8 is 51mm, the curvature radii of the concave surface and the convex surface of the positive meniscus lens 3 are-46.53 mm and-135.25 mm, respectively, the curvature radius of the convex surface of the first plano-convex lens 4 is-69.01 mm, the curvature radii of the two convex surfaces of the double convex lens 5 are 182.99mm and-182.99 mm, respectively, the curvature radius of the concave surface of the plano-concave lens 8 is-68.85 mm, and the curvature radius of the convex surface of the second plano-convex lens 11 is-460.1 mm.
The sign of the curvature radius is that the positive meniscus lens points to the direction of the second plano-convex lens, namely the fluorescent imaging direction is the positive direction. The center of the spherical surface of the lens is positioned in the positive direction of the lens, and the curvature radius takes a positive sign. The center of the circle is positioned in the negative direction of the lens, and the curvature radius takes a negative sign.
The positive meniscus lens 3, the first plano-convex lens 4, the double convex lens 5, the plano-concave lens 8 and the second plano-convex lens 11 are made of fused quartz.
The antireflection wavelength of the antireflection film was 313 nm. The refractive index of the positive meniscus lens 3, the first plano-convex lens 4, the double convex lens 5, the plano-concave lens 8, and the second plano-convex lens 11 for 313nm fluorescence is 1.458.
The objective lens system is assembled by screwing the first lens retainer 2 to the bottom of the lens sleeve 1, the first lens retainer 2 being parallel to the cross section of the lens sleeve 1. The positive meniscus lens 3, the first plano-convex lens 4 and the double convex lens 5 are sequentially placed, and the second lens snap ring 6 is placed in the lens sleeve 1 and screwed to the surface of the double convex lens 5. The positions of the first plano-convex lens 4 and the double convex lens 5 are fixed by the second lens retainer ring 6. A third lens retaining ring 7 is placed into the lens sleeve 1 with a distance of 10.77mm between the third lens retaining ring 7 and the second lens retaining ring 6. Thereafter, the plano-concave lens 8 is placed into the lens sleeve 1, and the plano-concave lens 8 is in contact with the third lens snap ring 7. And then the position of the plano-concave lens 8 is fixed by a fourth lens retainer ring 9. The distance between the fifth lens holding ring 10 and the fourth lens holding ring 9 is 47 mm. The second plano-convex lens 11 is in contact with the fifth lens retaining ring 10. The sixth lens retainer ring 12 fixes the second plano-convex lens 11. The positive meniscus lens 3, the first plano-convex lens 4, the double convex lens 5, the plano-concave lens 8, and the second plano-convex lens 11 are coaxially disposed.
The objective lens system of the utility model has an object numerical aperture NA of 0.27, an effective focal length of 84.3mm and a working distance of 67.6 mm. The lens sleeve and each lens snap ring are made of aluminum alloy, and black oxidation treatment is carried out on the surfaces of the lens sleeve and each lens snap ring.
The total length of the objective system of the present invention is 100 mm. The focal length of the positive meniscus lens is 150mm, the focal length of the double convex lens is 200mm, the focal length of the first plano-convex lens is 150mm, the focal length of the plano-concave lens is-200 mm, the focal length of the second plano-convex lens is 1000mm, and the positive meniscus lens, the first plano-convex lens, the double convex lens, the plano-concave lens and the second plano-convex lens are 2-inch spherical lenses.
Preferably, a plane beam splitter is added between the plano-concave lens and the second plano-convex lens.
As shown in fig. 3. Be+Example of ion fluorescence imaging. Adjusting Be+The relative positions of the ions 13 and the objective system 15, the objective system 15 and the charge coupling element 16 are such that a sharp and clear real image appears on the charge coupling element 16, as shown in fig. 4.
In this embodiment, Be+The ions 13, the objective lens system 15, and the charge-coupled device 16 are coaxially arranged.
In this embodiment, the ionizing radiation is in2S-2Transition between P levels, fluorescence wavelength 313.1 nm.
In this embodiment, Be+The ion radiation fluorescence, the fluorescence forms parallel light after passing through the vacuum cavity 14, the positive meniscus lens 3, the first plano-convex lens 4, the double convex lens 5 and the plano-concave lens 8 in the utility model in sequence, and is converged to the charge coupling element 16 through the second plano-convex lens 11. The charge coupled device 16 is a photosensitive device that is photosensitive to image incident light.
As shown in FIG. 4, in this embodiment, the trapped ions are 4 Be+When ions are generated, the radiation fluorescence is collected through the objective lens system, and a high-resolution image can be formed on the charge coupled device. Wherein the pixel size of the horizontal axis spacing between two adjacent ions is 60 pixels, the distance between the amplified ions is about 780 microns.
As shown in FIG. 5, the axial modem function of the objective system of the present invention is close to the diffraction limit, and the spatial frequency corresponding to the 0.2 mode value is about 93 cycles/mm.
As shown in FIG. 6, the objective system of the present invention has an optical path length difference from the object plane to the image plane on the axis under a 313nm light source. The width of the axis of the ordinate is 0.2 wavelengths. The results show that the optical path difference is less than 0.065 wavelengths.
As shown in fig. 7, the different lens surfaces of the objective lens system of the present invention have different values for different aberration types and have a positive or negative value. Particularly remarkable is the aberration, the concave surface of the plano-concave lens 8 has larger negative aberration, so that the positive aberration introduced by the positive meniscus lens, the first plano-convex lens and the biconvex lens and the vacuum glass window in practical use can be counteracted.
The above-mentioned embodiments are only for illustrating the specific implementation of the technology of the present invention, and the purpose is to enable those skilled in the art understanding the content of the present invention and to implement the same, and thus the protection scope of the present invention is not limited by this.

Claims (10)

1. The ultraviolet imaging objective system with the long working distance comprises a lens sleeve (1) and is characterized by further comprising a positive meniscus lens (3), a first plano-convex lens (4), a double convex lens (5), a plano-concave lens (8) and a second plano-convex lens (11) which are sequentially arranged in the lens sleeve (1).
2. The long-working-distance ultraviolet imaging objective lens system according to claim 1, wherein antireflection films are evaporated on two surfaces of the positive meniscus lens (3), the first plano-convex lens (4), the double convex lens (5), the plano-concave lens (8) and the second plano-convex lens (11).
3. The long-working-distance ultraviolet imaging objective system as claimed in claim 2, wherein the antireflection wavelength of the antireflection film is 313 nm.
4. The long-working-distance ultraviolet imaging objective system according to claim 3, wherein the positive meniscus lens (3), the first plano-convex lens (4), the double convex lens (5), the plano-concave lens (8) and the second plano-convex lens (11) have a refractive index of 1.458 for 313nm fluorescence.
5. The long-working-distance ultraviolet imaging objective lens system according to claim 1, wherein the positive meniscus lens (3), the first plano-convex lens (4), the double convex lens (5), the plano-concave lens (8) and the second plano-convex lens (11) are coaxially arranged.
6. The long-working-distance ultraviolet imaging objective system according to claim 1, characterized in that the two sides of the positive meniscus lens (3) are respectively convex and concave;
two sides of the first plano-convex lens (4) are respectively a plane and a convex surface;
the two surfaces of the biconvex lens (5) are convex surfaces respectively;
the two surfaces of the plano-concave lens (8) are respectively a plane and a concave surface;
the two surfaces of the second plano-convex lens (11) are respectively a plane and a convex surface.
7. The long-working-distance ultraviolet imaging objective system according to claim 6, wherein a first lens snap ring (2), a second lens snap ring (6), a third lens snap ring (7), a fourth lens snap ring (9), a fifth lens snap ring (10) and a sixth lens snap ring (12) are sequentially arranged in the lens sleeve (1), the positive meniscus lens (3), the first plano-convex lens (4) and the double convex lens (5) are clamped between the first lens snap ring (2) and the second lens snap ring (6), the plane of the first plano-convex lens (4) is tangent to the convex surface of the positive meniscus lens (3), and the convex surface of the double convex lens (5) is tangent to the convex surface of the first plano-convex lens (4),
the plano-concave lens (8) is clamped between the third lens clamping ring (7) and the fourth lens clamping ring (9),
the second plano-convex lens (11) is clamped between the fifth lens clamping ring (10) and the sixth lens clamping ring (12).
8. The long-working-distance ultraviolet imaging objective system according to claim 1, characterized in that the center thickness of the positive meniscus lens (3) and the first plano-convex lens (4) is 7.84mm,
the central thickness of the lenticular lens (5) is 6.54mm,
the center thickness of the plano-concave lens (8) is 2.5mm,
the center distance between the concave surface of the plano-concave lens (8) and the convex surface of the biconvex lens (5) is 14.77mm,
the center thickness of the second plano-convex lens (11) is 3.7mm,
the distance between the plane of the second plano-convex lens (11) and the plane of the plano-concave lens (8) is 51mm,
the radius of curvature of the concave surface and the convex surface of the positive meniscus lens (3) are-46.53 mm and-135.25 mm respectively,
the curvature radius of the convex surface of the first plano-convex lens (4) is-69.01 mm;
the curvature radiuses of two convex surfaces of the biconvex lens (5) are 182.99mm and-182.99 mm respectively;
the curvature radius of the concave surface of the plano-concave lens (8) is-68.85 mm;
the radius of curvature of the convex surface of the second plano-convex lens (11) is-460.1 mm.
9. The long-working-distance ultraviolet imaging objective lens system according to claim 1, wherein the positive meniscus lens (3), the first plano-convex lens (4), the double convex lens (5), the plano-concave lens (8) and the second plano-convex lens (11) are made of fused silica.
10. The long-working-distance ultraviolet imaging objective system according to claim 7, characterized in that the first lens clamping ring (2), the second lens clamping ring (6), the third lens clamping ring (7), the fourth lens clamping ring (9), the fifth lens clamping ring (10) and the sixth lens clamping ring (12) are circumferentially provided with external threads adapted to the internal threads in the lens sleeve (1).
CN202123030027.XU 2021-12-03 2021-12-03 Ultraviolet imaging objective lens system with long working distance Active CN216696833U (en)

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